CN110375962A - The device and method for demarcating optical system focal plane is illuminated based on preposition boundling - Google Patents
The device and method for demarcating optical system focal plane is illuminated based on preposition boundling Download PDFInfo
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- CN110375962A CN110375962A CN201910751750.5A CN201910751750A CN110375962A CN 110375962 A CN110375962 A CN 110375962A CN 201910751750 A CN201910751750 A CN 201910751750A CN 110375962 A CN110375962 A CN 110375962A
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- 238000005286 illumination Methods 0.000 claims abstract description 8
- 230000001105 regulatory effect Effects 0.000 claims description 3
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- 238000012360 testing method Methods 0.000 abstract description 5
- 238000001514 detection method Methods 0.000 description 9
- 238000013461 design Methods 0.000 description 3
- 230000004304 visual acuity Effects 0.000 description 3
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
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Abstract
The invention discloses a kind of device and methods illuminated based on preposition boundling for demarcating optical system focal plane.The device includes eyepiece group, the double-Gauss objective group of full symmetrical configuration, light forms focal plane caliberating device optical path through double-Gauss objective group and eyepiece group, the optical path is focal plane close to the side of objective lens, the optical path is emergent pupil close to the side of eyepiece group, and the light enters human eye by emergent pupil and carries out visual observation.The present invention can carry out high-precision calibrating to the focal plane of different optical systems, optical lens, the invention patent is compared with prior art, its remarkable advantage are as follows: light source maintaining uniform illumination, it is high that centralized lighting feeds back brightness, it is high to the aperture utilization rate of system under test (SUT), measuring device is at low cost, and practical operation is simple, convenient to use.
Description
Technical field
The invention belongs to optical system tests and adjustment field, and in particular to one kind can illuminate optical system focal plane
And the device and method of focusing plane calibration.
Background technique
The rapid development of optical technology forms powerful optics industry and optical technical field.Wherein for optical system
The correction of system, inspection and research in most cases require accurately measure the position of its focal plane so as to graticle, scale
The plane of the components such as plate, light-sensitive material, optical receiver coincides.Due to the kind of the type of optical system, application range and characteristic
Class is various, so determining that there is different methods and apparatus in its position of focal plane.
For determine the visual device of optical system position of focal plane so far in the manufacture and test of optical instrument, in occupation of
Important position.But since the light passing amount of the raising of optical system quality now and camera lens enhances, require optical system
There are higher calibration and testing accuracy in position of focal plane.The device for being generally usually used in demarcating optical system focal plane has: 1) using dry
Interferometer and plane mirror mark the focus position of interferometer camera lens by interference detection to optical system construction in a systematic way auto-collimation interference detection optical path
It sets, the focal position of this position also optical system.The method disadvantage is to have to carry out interference survey using interferometer
Amount needs precision to build autocollimatic straight light path, and professional knowledge requires height, cumbersome;2) traditional visual device Gauss eyepiece is used
Focusing plane is directly observed.The method disadvantage is that detection accuracy is low, and lighting source first passes through spectroscope and enters back into optical system
System, greatly reduces the illuminance of focusing plane position, and visual clarity is caused to decline, and detection accuracy is not high.
Summary of the invention
The present invention is for existing visual device when determining optical system focal plane, and detection accuracy is low, poor reliability, focusing plane
The disadvantages such as illuminance is low, it is simple to devise a kind of structure, easy to operate, detection accuracy, resolving power, it is of high brightness can be to optics
System focal plane carries out the device of exterior lighting and focusing plane calibration.This invention aims to solve the problem that existing optical system focal plane calibration mesh
The disadvantages such as the detection accuracy of view apparatus is low, resolution ratio is poor, focusing plane illuminance is low.
The specific technical solution of the present invention is as follows:
The present invention provides a kind of device illuminated based on preposition boundling for demarcating optical system focal plane, including eyepiece group,
The double-Gauss objective group of full symmetrical configuration, light form focal plane caliberating device optical path through double-Gauss objective group and eyepiece group,
The optical path is focal plane close to the side of objective lens, and the optical path is emergent pupil close to the side of eyepiece group, and the light is by going out
Pupil enters human eye and carries out visual observation.
Further, the magnifying power of the eyepiece group is 12.5 times.
It further, further include that connection sleeve and diopter adjustment cylinder, the double-Gauss objective group and eyepiece group pass through
Sleeve connection is connected, the diopter adjustment cylinder is reserved with the regulated quantity of several diopters.
It further, further include preposition bundling light source cover mechanism, the preposition bundling light source cover mechanism is arranged in focal plane
Caliberating device is formed by illuminance region and includes close to the side of double-Gauss objective group, the preposition bundling light source cover mechanism
Light source is superimposed concentrated area and source outer region.
Further, the preposition bundling light source cover mechanism includes several LED light sources, is respectively arranged at and presss from both sides with optical axis
Angle is 30 °, on 60 ° of circular cone.
Further, the LED light source is white light, and the angle of divergence is 150 °.
Further, light source superposition concentrated area is the circle close to 260mm.
The present invention also provides a kind of optical system focal plane scaling methods based on the illumination of preposition boundling, include the following steps:
Step 1: cross-graduation plate is placed near the position of focal plane, is opened preposition bundling light source cover, is made uniform light
Directly illuminate cross-graduation plate;By adjusting the front-rear position of cross-graduation plate, in exit pupil position, the clearest cross of visual observation
Picture determines that cross-graduation plate is overlapped with focal plane;
Step 2: the holding plane reflecting mirror before the optical system of focal plane to be calibrated will have determined in the step 1
The cross-graduation plate and focal plane caliberating device of good position are placed near the optical system focal plane of focal plane to be calibrated;
Step 3: rotary plane reflecting mirror orientation angles are visually looked for reflected not through plane mirror in exit pupil position
This reflection image is placed near the field of view center of focal plane caliberating device by the clearly picture of cross-graduation plate, fixed pan reflection
Mirror;
Step 4: in the case where keeping cross-graduation plate and focal plane caliberating device relative position constant, whole front and back is flat
Move cross-graduation plate and focal plane caliberating device, in exit pupil position, visual observation cross-graduation plate as being reflected with through plane mirror
When as being all clearest, the left-right position of cross-graduation plate is finely tuned, two being clearly overlapped as adjusting, at this time optical system focal plane
Calibration is completed.
It further, further include adjusting diopter adjustment cylinder before setting bundling light source cover before opening in the step 1
The step of, for finding optimal use position.
The invention has the following beneficial effects:
The present invention can to the focal plane of different optical systems, optical lens carry out high-precision calibrating, the invention patent with it is existing
Technology is compared, remarkable advantage are as follows: light source maintaining uniform illumination, centralized lighting feeds back brightness height, to the aperture utilization rate of system under test (SUT)
Height, measuring device is at low cost, and practical operation is simple, convenient to use.
Detailed description of the invention
Fig. 1 is focal plane caliberating device illustraton of model.
Fig. 2 is preposition bundling light source Lacquer finish source distribution figure.
Fig. 3 is preposition bundling light source illumination administrative division map.
Fig. 4 is focal plane caliberating device index path.
Fig. 5 is focal plane calibration check schematic diagram
In figure, 1: preposition bundling light source cover mechanism;2: objective lens mechanism;3: connection sleeve;4: diopter adjustment cylinder;5: eyepiece
Group mechanism;Distribution is overlooked in the arrangement of 6:LED light source;7: light source is superimposed concentrated area;8: source outer region;9: focal plane;10: object lens
Group;11: eyepiece group;12: emergent pupil.13: plane mirror;14: optical system to be calibrated;15: cross-graduation plate (focal plane);16:
Focal plane caliberating device.
Specific embodiment
Invention is further described in detail with reference to the accompanying drawings and detailed description.
As shown in Figure 1, a kind of device illuminated based on preposition boundling for demarcating optical system focal plane, including preposition boundling
Light source cover 1, objective lens mechanism 2, connection sleeve 3, diopter adjustment cylinder 4 and eyepiece mechanism 5.The present invention designs double-Gauss objective group
10, using full symmetrical configuration, system cost is saved, then amplify the optical design for the eyepiece group 11 that rate is 12.5 times, finally
Fig. 4 focal plane caliberating device optical path is completed in design.The left side of the optical path is focal plane 9, described to enter human eye progress by emergent pupil 12
Visual observation.The double-Gauss objective group 10, is finally mounted in objective lens mechanism 2;The eyepiece group 11, is mounted on eyepiece
In group mechanism 5;The object lens mechanism 2 is fixedly connected with eyepiece mechanism 5 by connection sleeve 3, and diopter adjustment cylinder 4 is reserved with ± 5
The regulated quantity of diopter can be convenient for diopter adjustment.
As shown in Fig. 2, the preposition bundling light source cover 1 of described device is placed on the focal plane caliberating device leftmost side, light source point
Cloth is 8 LED light sources, paste respectively be 30 ° with optical axis included angle, on 60 ° of circular cone.The LED light source is white light, hair
Dissipating angle is 150 °.The size of the preposition bundling light source cover mechanism 1, the light source overlap-add region 7 that focusing plane 9 is illuminated is close
The circle of 260mm.
As shown in figure 3, the light source of described device is arranged according to described device operating distance, the LED light source angle of divergence, LED light source
Cloth overlooks distribution 6, forms light source and is superimposed concentrated area 7, light source maintaining uniform illumination, centralized lighting, source outer region 8 will not be
System receives when examining.1 focusing plane 9 of preposition bundling light source cover mechanism carries out high brightness, large area lighting, observes by visual observation
Emergent pupil 12 completes the calibration of optical system focal plane.
The optical system based on the illumination of preposition boundling of the present apparatus is utilized below with reference to Fig. 5 focal plane calibration check principles and methods
Focal plane scaling method.
Cross-graduation plate 15: being placed near the position of focal plane 9 by step 1 first, adjusts diopter adjustment cylinder 4, finds one
Optimal use position;Preposition bundling light source cover 1 is opened again, and uniform light is made directly to illuminate cross-graduation plate 15;By adjusting ten
The front-rear position of word graticle 15, in 12 position of emergent pupil, the clearest cross picture of visual observation determines cross-graduation plate 15 and focal plane
9 are overlapped;
Step 2: placing a plane mirror 13 before the optical system 14 of focal plane to be calibrated, by the step 1
The cross-graduation plate 15 and focal plane caliberating device 16 for being determined relevant position, are placed on the optical system focal plane of focal plane to be calibrated
Near;
Step 3: 13 orientation angles of rotary plane reflecting mirror are visually looked for and are reflected through plane mirror in 12 position of emergent pupil
Unsharp cross-graduation plate picture, this reflection image is placed near the field of view center of focal plane caliberating device 16, it is fixed flat
Face reflecting mirror 13;
Step 4: in the case where keeping cross-graduation plate 15 and 16 relative position of focal plane caliberating device constant, before entirety
Translation cross-graduation plate 15 and focal plane caliberating device 16 afterwards, in 12 position of emergent pupil, the picture and warp of visual observation cross-graduation plate are flat
When the picture of face mirror reflection is all clearest, the left-right position of cross-graduation plate 15 is finely tuned, two are clearly overlapped as adjusting, at this time
The calibration of optical system focal plane is completed.
In conclusion the present invention devises a kind of device illuminated based on preposition boundling for demarcating optical system focal plane,
High accurately calibration and observation can be carried out to optical system position of focal plane.Caliberating device mainly includes preposition bundling light source cover machine
Structure, objective lens mechanism, connection sleeve, diopter adjustment cylinder, eyepiece group mechanism.This invention aims to solve the problem that existing to optical system coke
The problems such as detection accuracy is low, resolving power is poor, focusing plane illuminance is low in the device of face calibration, makes the coke illuminated based on preposition boundling
The features such as face caliberating device has structure simple, easy to operate, detection accuracy, resolving power, high brightness has biggish using valence
Value.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention.It is all in essence of the invention
Made any modifications, equivalent replacements, and improvements etc., should all be included in the protection scope of the present invention within mind and principle.
Claims (9)
1. illuminating the device for demarcating optical system focal plane based on preposition boundling, it is characterised in that: including eyepiece group, holohedral symmetry
The double-Gauss objective group of structure, light form focal plane caliberating device optical path, the light through double-Gauss objective group and eyepiece group
Road is focal plane close to the side of objective lens, and the optical path is emergent pupil close to the side of eyepiece group, and the light is entered by emergent pupil
Human eye carries out visual observation.
2. the device according to claim 1 illuminated based on preposition boundling for demarcating optical system focal plane, feature are existed
In: the magnifying power of the eyepiece group is 12.5 times.
3. the device according to claim 1 illuminated based on preposition boundling for demarcating optical system focal plane, feature are existed
In: it further include connection sleeve and diopter adjustment cylinder, the double-Gauss objective group and eyepiece group are described by connection sleeve connection
Diopter adjustment cylinder is reserved with the regulated quantity of several diopters.
4. the device according to claim 1 illuminated based on preposition boundling for demarcating optical system focal plane, feature are existed
In: it further include preposition bundling light source cover mechanism, the preposition bundling light source cover mechanism setting is in focal plane caliberating device close to double high
The side of this type objective lens, it includes light source superposition concentrated area that the preposition bundling light source cover mechanism, which is formed by illuminance region,
With source outer region.
5. the device according to claim 4 illuminated based on preposition boundling for demarcating optical system focal plane, feature are existed
In: the preposition bundling light source cover mechanism includes several LED light sources, and being respectively arranged at optical axis included angle is 30 °, 60 ° of ring
On the shape conical surface.
6. the device according to claim 5 illuminated based on preposition boundling for demarcating optical system focal plane, feature are existed
In: the LED light source is white light, and the angle of divergence is 150 °.
7. the device according to claim 4 illuminated based on preposition boundling for demarcating optical system focal plane, feature are existed
In: light source superposition concentrated area is the circle close to 260mm.
8. being included the following steps: based on the optical system focal plane scaling method of preposition boundling illumination
Step 1: cross-graduation plate is placed near the position of focal plane, is opened preposition bundling light source cover, is kept uniform light direct
Illuminate cross-graduation plate;By adjusting the front-rear position of cross-graduation plate, in exit pupil position, the clearest cross picture of visual observation,
Determine that cross-graduation plate is overlapped with focal plane;
Step 2: the holding plane reflecting mirror before the optical system of focal plane to be calibrated will have determined position in the step 1
The cross-graduation plate and focal plane caliberating device set are placed near the optical system focal plane of focal plane to be calibrated;
Step 3: rotary plane reflecting mirror orientation angles are visually looked for reflected unintelligible through plane mirror in exit pupil position
Cross-graduation plate picture, this reflection image is placed near the field of view center of focal plane caliberating device, fixed pan reflecting mirror;
Step 4: in the case where keeping cross-graduation plate and focal plane caliberating device relative position constant, whole anterior-posterior translation ten
Word graticle and focal plane caliberating device, in exit pupil position, the picture of visual observation cross-graduation plate with the picture that is reflected through plane mirror all
When being clearest, the left-right position of cross-graduation plate is finely tuned, two are clearly overlapped as adjusting, optical system focal plane is demarcated at this time
It completes.
9. a kind of optical system focal plane scaling method based on the illumination of preposition boundling according to claim 8, feature exist
In: in the step 1, before setting bundling light source cover before opening, further include the steps that adjusting diopter adjustment cylinder, for finding
Optimal use position.
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CN201910751750.5A CN110375962B (en) | 2019-08-15 | 2019-08-15 | Device and method for calibrating focal plane of optical system based on front-end cluster illumination |
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Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB617157A (en) * | 1945-05-22 | 1949-02-02 | J P Brandt Aktiebolag | Apparatus for determining the distance between the optical centres of two or more juxtaposed lenses or lens systems |
US2986071A (en) * | 1956-02-10 | 1961-05-30 | Perkin Elmer Corp | Photographic objectives |
CN1044985A (en) * | 1990-03-22 | 1990-08-29 | 中国测试技术研究院 | The far and near mirror-symmetrical conversion method that changes of mapping telescope collimation axis |
CN201740465U (en) * | 2010-08-17 | 2011-02-09 | 福州开发区鸿发光电子技术有限公司 | Sighting telescope for shimmer night-vision gun |
CN105892036A (en) * | 2016-06-07 | 2016-08-24 | 南京理工大学 | Head-mounted monocular wide-angle low-illumination-level CMOS night-vision device |
CN106500967A (en) * | 2016-11-03 | 2017-03-15 | 中国科学院西安光学精密机械研究所 | Solar blind ultraviolet image intensifier spatial resolution testing device and method |
CN106814546A (en) * | 2015-11-30 | 2017-06-09 | 上海微电子装备有限公司 | Focal plane detection device, focal plane scaling method and silicon wafer exposure method |
CN107656371A (en) * | 2017-10-16 | 2018-02-02 | 苏州耐德佳天成光电科技有限公司 | Optical system with diopter adjustment function |
CN107727368A (en) * | 2017-10-13 | 2018-02-23 | 中国科学院上海技术物理研究所 | A kind of device and method for demarcating focal surface of collimator tube position |
CN208421405U (en) * | 2018-06-26 | 2019-01-22 | 吉林鸿锋机械电子设备有限公司 | A kind of heavy caliber parallel light tube focal plane high-precision is split as autocollimatic marking apparatus |
CN208705566U (en) * | 2018-10-17 | 2019-04-05 | 成都赛诺特光学有限公司 | A kind of measurement of graticle is apart from Target observator |
CN210513624U (en) * | 2019-08-15 | 2020-05-12 | 中科院南京天文仪器有限公司 | Device for calibrating focal plane of optical system based on front cluster illumination |
-
2019
- 2019-08-15 CN CN201910751750.5A patent/CN110375962B/en active Active
Patent Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB617157A (en) * | 1945-05-22 | 1949-02-02 | J P Brandt Aktiebolag | Apparatus for determining the distance between the optical centres of two or more juxtaposed lenses or lens systems |
US2986071A (en) * | 1956-02-10 | 1961-05-30 | Perkin Elmer Corp | Photographic objectives |
CN1044985A (en) * | 1990-03-22 | 1990-08-29 | 中国测试技术研究院 | The far and near mirror-symmetrical conversion method that changes of mapping telescope collimation axis |
CN201740465U (en) * | 2010-08-17 | 2011-02-09 | 福州开发区鸿发光电子技术有限公司 | Sighting telescope for shimmer night-vision gun |
CN106814546A (en) * | 2015-11-30 | 2017-06-09 | 上海微电子装备有限公司 | Focal plane detection device, focal plane scaling method and silicon wafer exposure method |
CN105892036A (en) * | 2016-06-07 | 2016-08-24 | 南京理工大学 | Head-mounted monocular wide-angle low-illumination-level CMOS night-vision device |
CN106500967A (en) * | 2016-11-03 | 2017-03-15 | 中国科学院西安光学精密机械研究所 | Solar blind ultraviolet image intensifier spatial resolution testing device and method |
CN107727368A (en) * | 2017-10-13 | 2018-02-23 | 中国科学院上海技术物理研究所 | A kind of device and method for demarcating focal surface of collimator tube position |
CN107656371A (en) * | 2017-10-16 | 2018-02-02 | 苏州耐德佳天成光电科技有限公司 | Optical system with diopter adjustment function |
CN208421405U (en) * | 2018-06-26 | 2019-01-22 | 吉林鸿锋机械电子设备有限公司 | A kind of heavy caliber parallel light tube focal plane high-precision is split as autocollimatic marking apparatus |
CN208705566U (en) * | 2018-10-17 | 2019-04-05 | 成都赛诺特光学有限公司 | A kind of measurement of graticle is apart from Target observator |
CN210513624U (en) * | 2019-08-15 | 2020-05-12 | 中科院南京天文仪器有限公司 | Device for calibrating focal plane of optical system based on front cluster illumination |
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