CN208421405U - A kind of heavy caliber parallel light tube focal plane high-precision is split as autocollimatic marking apparatus - Google Patents
A kind of heavy caliber parallel light tube focal plane high-precision is split as autocollimatic marking apparatus Download PDFInfo
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- CN208421405U CN208421405U CN201820991227.0U CN201820991227U CN208421405U CN 208421405 U CN208421405 U CN 208421405U CN 201820991227 U CN201820991227 U CN 201820991227U CN 208421405 U CN208421405 U CN 208421405U
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- autocollimatic
- parallel light
- light tube
- mirror
- split
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Abstract
The utility model discloses a kind of heavy caliber parallel light tube focal plane high-precisions to split as autocollimatic marking apparatus, including autocollimatic microscope, splits as mirror, cross-graduation plate lighting system coplanar with transmitting parfocalization, splits as mirror is arranged between eyepiece and half-reflecting half mirror；Cross-graduation plate is rotatably arranged in the image planes of heavy caliber parallel light tube to be calibrated, and is placed in the side of eye-observation；The coplanar lighting system of transmitting parfocalization is independently arranged at the microscopical side of autocollimatic, and the light for emitting parfocalization face lighting system injects half-reflecting half mirror via cross-graduation plate.The utility model, when demarcating the focal plane of heavy caliber parallel light tube, rotary cross graticle make the crosshair of parallel light tube with split as mirror is transversely and horizontally overlapped, when vertical line parfocalization and when defocus in microscopical field depth all can at clearly as, positioning accuracy is high, completes the detection of autocollimatic formula, without additionally adjusting microscopical axial hand button, without frequently replacing viewing angle and position, calibration efficiency and positioning accuracy are improved.
Description
Technical field
The utility model relates to microscopes, and in particular to a kind of heavy caliber parallel light tube focal plane high-precision splits picture from fiducial mark
Determine instrument.
Background technique
Heavy caliber parallel light tube is the instrument for simulating infinity target indoors with optical system, focal plane point axial position
Accuracy directly affects the image planes precision for determining tested optical system, is that production optics looks in the distance the important calibration of equipment and detection is set
It is standby.Heavy caliber parallel light tube has bore 200mm~1000mm, and focal length has 2000mm~20000mm, and bore and focal distance ratio are 1:8
~1:12 or so, optical texture is generally common Newtonian and Cassegrain's formula optical imaging system.
The common method for demarcating heavy caliber parallel light tube focal plane at this stage is with autocollimatic microscope, cross-graduation plate, puts down
Face mirror emits the picture of cross-graduation plate by microscope illumination, reflects through plane mirror and focuses on cross-graduation plate, by aobvious
Micro mirror is observed that cross-graduation plate and cross-graduation plate returns to picture, and it is flat that the coplanar precision of the axial direction of two o'clock directly affects heavy caliber
The quality of row light pipe imaging, generally requiring confocal precision is 0.02mm~0.05mm.Observation method is difinition determiningfocal length method
And weaving.Difinition determiningfocal length method are as follows: turned round from adjustment microscope axial direction hand, image planes position is observed in microscope, image is never
Clear-clear-unclear process, focusing hand turn round the method for return half to adjust.Weaving are as follows: swing head,
Until eyes two optics crosses of observation are not separated by picture.
Since monocular microscope itself can not overcome some defects, high to lateral accuracy of observation, axial observation precision is low,
In actual use, it is mobile often to produce micro axial position, it is also difficult to observe Axial changes amount, generally be extremely difficult to technology
Index request often improves tested optical system detection precision by coke ratio.
It can be seen that current microscope has that axial detection accuracy is low.
Utility model content
The technical problems to be solved in the utility model is there is a problem of that axial detection accuracy is low for current microscope.
In order to solve the above-mentioned technical problem, technical solution provided by the utility model are as follows: a kind of heavy caliber parallel light tube is burnt
Plane high-precision is split as autocollimatic marking apparatus, includes the eyepiece being arranged successively including autocollimatic microscope, the autocollimatic microscope, partly anti-
Pellicle mirror and object lens, further includes:
It splits as mirror, is arranged between the eyepiece and the half-reflecting half mirror, by equal, the contrary light of two panels angle
Learn element composition, the inclined surface of the optical element is towards the eyepiece side；
Cross-graduation plate is rotatably arranged in the image planes of heavy caliber parallel light tube to be calibrated, and is placed in eye-observation
Side；
Emit the coplanar lighting system of parfocalization, be independently arranged at the microscopical side of the autocollimatic, the transmitting parfocalization face is shone
The light of bright system injects the half-reflecting half mirror via the cross-graduation plate.
In another preferred embodiment, the angle of the optical element is 10 °~30 °.
In another preferred embodiment, the respectively round wedge of two optical elements and semicircle wedge, and
The semicircle wedge is arranged on the inclined surface of the round wedge, and forms horizontal fringence.
In another preferred embodiment, the graticle is rotated, splits the crosshair of the parallel light tube with described
As the fringence horizontal registration of mirror, then crosshair vertical line direction is overlapped when vertical line parfocalization, and vertical line separates when defocus, and in microscope
Field depth at clearly as.
In another preferred embodiment, the eyepiece, half-reflecting half mirror and object lens are arranged on mechanical part, described
Mechanical part is equipped with elevating mechanism, laterial translation mechanism and longitudinal translation mechanism.
The utility model has the following beneficial effects: when demarcating the focal plane of heavy caliber parallel light tube, it only need to be in parallel light tube
Image planes on plus cross-graduation plate, will split and be used in combination with autocollimatic microscope as mirror, utilize the included coplanar illumination of transmitting parfocalization
System, then rotary cross graticle make the crosshair of parallel light tube with split as mirror is transversely and horizontally overlapped, then when vertical line parfocalization
Crosshair vertical line direction is overlapped, and vertical line separates when defocus, in microscopical field depth all can at clearly as, and have compared with
High positioning accuracy completes the detection of the parallel light tube of autocollimatic formula, and microscopical axial hand button is additionally adjusted without manpower, also without
Viewing angle and position need to be frequently replaced, calibration efficiency and positioning accuracy are substantially increased, in addition, being equally applicable to other zooms
Away from or the case where switchable optics system, it is practical.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model；
Fig. 2 is the front view split as mirror；
Fig. 3 is the side view split as mirror；
Fig. 4 is the focus figure split as mirror；
Fig. 5 is the non-focus figure split as mirror；
Fig. 6 is the structural schematic diagram of existing all purpose microscope.
Specific embodiment
The utility model discloses a kind of heavy caliber parallel light tube focal plane high-precisions to split as autocollimatic marking apparatus, this field skill
Art personnel can use for reference present disclosure, be suitably modified realization of process parameters.It is important to note that all similar replacements and
Change apparent to those skilled in the art, they are considered as being included in the utility model, and relevant people
Member can obviously be modified content described herein on the basis of not departing from the content of the present invention, spirit and scope or suitably
Changes and combinations carry out implementation and application the utility model technology.
In the present invention, unless otherwise stated, Science and Technology noun used herein has this field
The normally understood meaning of technical staff institute.
In order to make those skilled in the art more fully understand the technical solution of the utility model, below with reference to specific implementation
The utility model is described in further detail for example.
As shown in Figure 1, a kind of heavy caliber parallel light tube focal plane high-precision provided by the utility model is split as autocollimatic is demarcated
Instrument, including autocollimatic microscope, autocollimatic microscope include the eyepiece 5, half-reflecting half mirror 3 and object lens 2 being arranged successively, object space 1 and object
The position of mirror 2 is arranged according to the prior art, and the utility model further includes splitting as mirror 4, the photograph coplanar with transmitting parfocalization of cross-graduation plate 7
Bright system 8.
It splits picture mirror 4 to be arranged between eyepiece 5 and half-reflecting half mirror 3, by equal, the contrary optical element of two panels angle
Composition, the inclined surface of optical element is towards 5 side of eyepiece.Cross-graduation plate 7 is rotatably arranged on heavy caliber directional light to be calibrated
In the image planes of pipe, and it is placed in the side of the observation of human eye 6.
The coplanar lighting system 8 of transmitting parfocalization is independently arranged at the microscopical side of autocollimatic, transmitting parfocalization face lighting system 8
Light injects half-reflecting half mirror 3 via cross-graduation plate 7, easy to operate, can adjust lighting position and brightness of illumination as needed.
As shown in Figure 4 and Figure 5, as long as the utility model improves microscopical axial detection accuracy, so that it may improve big mouth
The detection accuracy of diameter parallel light tube, when two-beam line is not when axial confocal, eyepiece 5 is it can be seen that cross-graduation plate about 7 two
Line mutual dislocation, so that it may which axially displacement is converted into radial displacement optical system, just solves monocular microscope Z axis positioning accuracy
Low problem.
The angle of optical element is 10 °~30 °, the angle taken for general wedge.
As shown in Figures 2 and 3, two optical elements are respectively round wedge and semicircle wedge, and semicircle wedge is set
It sets on the inclined surface of round wedge, and forms horizontal fringence.
The application method of the utility model are as follows: rotation cross-graduation plate 7 makes the crosshair of heavy caliber parallel light tube and splits picture
The fringence horizontal registration of mirror 4, then crosshair vertical line direction is overlapped when vertical line parfocalization, and vertical line separates when defocus, and aobvious in autocollimatic
In the field depth of micro mirror at clearly as.
Eyepiece 5, half-reflecting half mirror 3 and object lens 2 are arranged on mechanical part, and mechanical part is equipped with elevating mechanism, transverse direction
Translation mechanism and longitudinal translation mechanism.
The following are the comparisons of the detection accuracy of domestic all purpose microscope and the utility model:
One, common-use size
It is as follows according to domestic microscope common-use size design optics produced and mechanical parts, specific size:
2:4 times of object lens, preceding working distance 48mm, diameter D=16mm,
5:10 times of eyepiece, emergent pupil away from 12mm, exit pupil diameter D=4mm, diameter D=20mm,
The optics decorum: optical tube length 190mm, mechanical tube length 160mm, mechanical parts maximum machine part outer diameter D=24.5mm, always
Enlargement ratio is 40 times.
Two, the precision of all purpose microscope
As shown in fig. 6, component is plane mirror 9, light pipe 10, image planes 11, autocollimatic microscope 12, human eye 13 in figure, it is general aobvious
Micro mirror can only use Resolution method and weaving at axially measured image planes position.But all purpose microscope itself design and human eye 13
Physiological property determine, all purpose microscope altogether there are three types of the depth of field, regardless of microscope front-rear position how to adjust always have it is clear
Picture:
First, physical depth: △ L1=λ/2 (NA)
Second, the geometry depth of field: △ L2=1/7 Γ (NA)
Third adjusts the depth of field: △ L3=62.5p/ Γ2
In formula, λ is wavelength, generally 0.55 μm；NA is numerical aperture；P is that human eye 6 adjusts drive luminosity, and ordinary human 6 is
±5；Γ visual amplification；
The existing common tool microscope object lens 2 of adjustment are 4 times, and 510 times of eyepiece, we are to calculate the total depth of field of 40 power microscopes
Are as follows: △ L=△ L1+△L2+△L3≈0.4mm.Well below the requirement that adjustment File Technology focusing amount is 0.05mm.
It can be seen that error maximum the main reason for being Section 3, being generation error from above three formula, this is because
The distance of distinct vision (250mm) of human eye 6 can be at clearly as being that the physiology of human eye 6 determines, even if increasing object to infinity
The amplification factor of mirror 2 reduces the depth of field, improves axial Z axis positioning accuracy, but also brings target contrast decline in visual field serious, mesh
Mark and background resolution are unclear, and to improving, focusing precision is limited, and the common microscope of adjustment is not able to satisfy the most commonly used is 40 times
Present requirement.
Three, the detection accuracy of the utility model
The utility model is now used, transmission is carried out and splits as precision analysis when focusing double image is overlapped:
εmPass through the resolution ratio ε of eyepiece 5 for human eye 6m=15 ",
LmFor image planes to the distance of object lens 2,
10 times of eyepieces 5 are 25mm,
а is the angle of wedge, generally 11 °~12 °.
Same 40 times split as microscope axis is as Focus accuracy are as follows: m=εm.Lm/ 2 (n-1) а=0.0094mm.
Therefore 40 power microscopes of the utility model split picture, improve tens times with general, it is basic to meet adjustment condition
It is required that.
Compared with prior art, the utility model has the advantage that when demarcating the focal plane of heavy caliber parallel light tube, only
Cross-graduation plate need to be added in the image planes of parallel light tube, picture mirror will be split and be used in combination with autocollimatic microscope, included transmitting is utilized
The coplanar lighting system of parfocalization, then rotary cross graticle make the crosshair of parallel light tube with split as mirror is transversely and horizontally overlapped, that
Crosshair vertical line direction is overlapped when vertical line parfocalization, and vertical line separates when defocus, all can be at clear in microscopical field depth
Picture, and positioning accuracy with higher completes the detection of the parallel light tube of autocollimatic formula, additionally adjusts without manpower microscopical
Axial hand button substantially increases calibration efficiency and positioning accuracy, in addition, can also without frequent replacement viewing angle and position
It is the case where suitable for other varifocals or switchable optics system, practical.
The above is only the preferred embodiment of the utility model, it is noted that for the common skill of the art
For art personnel, without departing from the principle of this utility model, several improvements and modifications can also be made, these improve and
Retouching also should be regarded as the protection scope of the utility model.
Claims (5)
1. a kind of heavy caliber parallel light tube focal plane high-precision is split as autocollimatic marking apparatus, including autocollimatic microscope, the autocollimatic are aobvious
Micro mirror includes the eyepiece, half-reflecting half mirror and object lens being arranged successively, which is characterized in that further include:
It splits as mirror, is arranged between the eyepiece and the half-reflecting half mirror, the optics member equal, contrary by two panels angle
Part composition, the inclined surface of the optical element is towards the eyepiece side；
Cross-graduation plate is rotatably arranged in the image planes of heavy caliber parallel light tube to be calibrated, and is placed in the side of eye-observation；
Emit the coplanar lighting system of parfocalization, is independently arranged at the microscopical side of the autocollimatic, transmitting parfocalization face illumination system
The light of system injects the half-reflecting half mirror via the cross-graduation plate.
2. heavy caliber parallel light tube according to claim 1 focal plane high-precision is split as autocollimatic marking apparatus, which is characterized in that
The angle of the optical element is 10 °~30 °.
3. heavy caliber parallel light tube according to claim 1 focal plane high-precision is split as autocollimatic marking apparatus, which is characterized in that
Two optical elements are respectively round wedge and semicircle wedge, and the semicircle wedge setting is in the round wedge
Inclined surface on, and form horizontal fringence.
4. heavy caliber parallel light tube according to claim 1 focal plane high-precision is split as autocollimatic marking apparatus, which is characterized in that
The graticle is rotated, makes the crosshair and the fringence horizontal registration split as mirror of the parallel light tube, then vertical line parfocalization
When crosshair vertical line direction be overlapped, vertical line separates when defocus, and in microscopical field depth at clearly as.
5. heavy caliber parallel light tube according to claim 1 focal plane high-precision is split as autocollimatic marking apparatus, which is characterized in that
The eyepiece, half-reflecting half mirror and object lens are arranged on mechanical part, and the mechanical part is equipped with elevating mechanism, transverse translation
Mechanism and longitudinal translation mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820991227.0U CN208421405U (en) | 2018-06-26 | 2018-06-26 | A kind of heavy caliber parallel light tube focal plane high-precision is split as autocollimatic marking apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820991227.0U CN208421405U (en) | 2018-06-26 | 2018-06-26 | A kind of heavy caliber parallel light tube focal plane high-precision is split as autocollimatic marking apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208421405U true CN208421405U (en) | 2019-01-22 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820991227.0U Expired - Fee Related CN208421405U (en) | 2018-06-26 | 2018-06-26 | A kind of heavy caliber parallel light tube focal plane high-precision is split as autocollimatic marking apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208421405U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110375962A (en) * | 2019-08-15 | 2019-10-25 | 中科院南京天文仪器有限公司 | The device and method for demarcating optical system focal plane is illuminated based on preposition boundling |
| CN116893502A (en) * | 2023-07-31 | 2023-10-17 | 江苏集萃华科智能装备科技有限公司 | Optical module and method for projecting split image pattern for microscope |
-
2018
- 2018-06-26 CN CN201820991227.0U patent/CN208421405U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110375962A (en) * | 2019-08-15 | 2019-10-25 | 中科院南京天文仪器有限公司 | The device and method for demarcating optical system focal plane is illuminated based on preposition boundling |
| CN110375962B (en) * | 2019-08-15 | 2024-05-31 | 中科院南京天文仪器有限公司 | Device and method for calibrating focal plane of optical system based on front-end cluster illumination |
| CN116893502A (en) * | 2023-07-31 | 2023-10-17 | 江苏集萃华科智能装备科技有限公司 | Optical module and method for projecting split image pattern for microscope |
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| Date | Code | Title | Description |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190122 Termination date: 20200626 |