CN110345498B - Cavity spray pipe of combustion type POU equipment - Google Patents
Cavity spray pipe of combustion type POU equipment Download PDFInfo
- Publication number
- CN110345498B CN110345498B CN201910709518.5A CN201910709518A CN110345498B CN 110345498 B CN110345498 B CN 110345498B CN 201910709518 A CN201910709518 A CN 201910709518A CN 110345498 B CN110345498 B CN 110345498B
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- Prior art keywords
- section
- spray pipe
- nozzle
- throat
- outer layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 239000007921 spray Substances 0.000 title claims abstract description 63
- 238000002485 combustion reaction Methods 0.000 title claims abstract description 15
- 239000011261 inert gas Substances 0.000 claims abstract description 53
- 239000007789 gas Substances 0.000 claims abstract description 47
- 230000007423 decrease Effects 0.000 claims description 4
- 239000002912 waste gas Substances 0.000 abstract description 27
- 239000000428 dust Substances 0.000 abstract description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 230000003111 delayed effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G5/00—Incineration of waste; Incinerator constructions; Details, accessories or control therefor
- F23G5/44—Details; Accessories
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
- F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
Landscapes
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Treating Waste Gases (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
The invention relates to the technical field of waste gas treatment, in particular to a cavity spray pipe of combustion type POU equipment. The cavity spray pipe at least comprises a central spray pipe, an outer layer spray pipe and an inert gas spray nozzle, wherein an outlet of the central spray pipe is positioned in the outer layer spray pipe and faces to an outlet of the outer layer spray pipe, and a nozzle of the inert gas spray nozzle is arranged on a pipe wall of the outer layer spray pipe and faces to the inner part of the outer layer spray pipe. The cavity spray pipe is used for solving the problems of dust and scale on the nozzle of the exhaust gas pipeline and the wall of the combustion cavity in the prior art.
Description
Technical Field
The invention relates to the technical field of waste gas treatment, in particular to a cavity spray pipe of combustion type POU equipment.
Background
Highly corrosive exhaust gases are generally generated in semiconductor processes, and these exhaust gases are harmful to human bodies or the environment, so that the exhaust gases need to be treated before being discharged into the atmosphere. At present, exhaust gas is discharged after being oxidized and pyrolyzed through a combustion type POU device, but dust and scale on the nozzle of an exhaust gas pipeline and the wall surface of a combustion cavity are all core problems of the modern POU device, which leads to frequent maintenance of the device.
In order to solve the problems, the invention provides a cavity spray pipe of a combustion type POU device.
Disclosure of Invention
In view of the above-mentioned drawbacks of the prior art, an object of the present invention is to provide a cavity nozzle of a combustion type POU device, which is used for solving the problems of dust and dirt on the nozzle of an exhaust gas pipe and the wall of a combustion cavity in the prior art.
To achieve the above and other related objects, the present invention provides a cavity nozzle of a combustion type POU device, where the cavity nozzle at least includes a central nozzle, an outer nozzle, and an inert gas nozzle, an outlet of the central nozzle is located inside the outer nozzle and faces to an outlet of the outer nozzle, and a nozzle of the inert gas nozzle is disposed on a pipe wall of the outer nozzle and faces to an inside of the outer nozzle.
The central spray pipe comprises a first flaring section and a first narrow opening section which are connected, and the first flaring section is connected with the first narrow opening section through a first throat. The outer layer spray pipe comprises a second flaring section and a second narrow opening section which are connected, and the second flaring section is connected with the second narrow opening section through a second throat.
The first flaring section is provided with an exhaust gas inlet, and the second narrow opening section is provided with an exhaust gas outlet.
The first flaring segment gradually reduces from the waste gas inlet to the inner diameter of the first throat, and the second flaring segment gradually reduces from the starting end to the inner diameter of the second throat.
The first narrow mouth section has an inner diameter from the first throat to the outlet end which is constant.
The first narrow mouth section can also gradually increase in inner diameter from the first throat to the outlet end.
The first throat section is the position with the minimum inner diameter of the central spray pipe, and the second throat section is the position with the minimum inner diameter of the central spray pipe.
The central nozzle is used for conveying waste gas. The exhaust gas is accelerated in the first narrow mouth section.
The second narrow mouth section has an inner diameter from the second throat to the exhaust outlet end which is constant.
The second narrow mouth section can also gradually increase in inner diameter from the second throat to the exhaust outlet end.
The first narrow mouth section is positioned in the outer layer spray pipe and faces the waste gas outlet of the outer layer spray pipe.
Preferably, the exhaust gas inlet end of the first flaring segment extends to the outside of the second flaring segment of the outer layer spray pipe, and the outlet end of the first narrow opening segment extends to two fifths of the second flaring segment.
The first flaring section and the second flaring section are in sealing connection.
The outer nozzle is used for conveying exhaust gas and inert gas, and the exhaust gas and the inert gas are accelerated during the second narrow opening section.
The nozzle of the inert gas nozzle is arranged on the pipe wall of the outer layer spray pipe.
Preferably, the inert gas nozzle is located on the wall of the second flaring segment.
As described above, the cavity spray pipe of the combustion type POU equipment has the following beneficial effects:
By adopting inert gas as a protective gas medium, the inert gas protective gas still exists in the outer layer spray pipe and leaves the outer layer spray pipe, and the waste gas is in the inner layer, so that the waste gas can be delayed to react, the waste gas reaction is carried out at a position far away from the spray nozzle, and a large amount of particulate matters formed by the waste gas reaction, such as silicon dioxide, are prevented from fouling or blocking the spray nozzle on the wall of the spray nozzle, thereby improving the fouling condition in a cavity and reducing the maintenance and overhaul frequency.
Drawings
FIG. 1 shows a schematic diagram of a chamber nozzle.
Fig. 2 shows a graph of gas pressure at the outlet end of the central nozzle.
FIG. 3 shows a graph of the gas pressure at the exhaust outlet end of the outer nozzle.
FIG. 4 is a diagram of acceleration of fluid within a cavity nozzle.
Fig. 5 shows a diagram of the exhaust flow rate of the central nozzle.
FIG. 6 shows a view of an outer nozzle inert gas blanket.
Description of element reference numerals
1. Exhaust gas inlet
2. Central spray pipe
21. A first flaring segment
22. A first narrow mouth section
23. First laryngeal inlet
3. Outer layer spray pipe
31. A second flaring segment
32. A second narrow mouth section
33. Second laryngeal inlet
4. Inert gas nozzle
5. Exhaust gas outlet
Detailed Description
Further advantages and effects of the present invention will become apparent to those skilled in the art from the disclosure of the present invention, which is described by the following specific examples.
Please refer to fig. 1 to 6. It should be understood that the structures, proportions, sizes, etc. shown in the drawings are for illustration purposes only and should not be construed as limiting the invention to the extent that it can be practiced, since modifications, changes in the proportions, or otherwise, used in the practice of the invention, are not intended to be critical to the essential characteristics of the invention, but are otherwise, required to achieve the objective and effect taught by the invention. Also, the terms such as "upper," "lower," "left," "right," "middle," and "a" and the like recited in the present specification are merely for descriptive purposes and are not intended to limit the scope of the invention, but are intended to provide relative positional changes or modifications without materially altering the technical context in which the invention may be practiced.
As shown in fig. 1, the invention provides a cavity nozzle of a combustion type POU device, the cavity nozzle at least comprises a central nozzle 2, an outer nozzle 3 and an inert gas nozzle 4, the nozzle of the central nozzle 2 is positioned in the outer nozzle 3 and faces to the outlet of the outer nozzle 3, and the nozzle of the inert gas nozzle 4 is arranged on the pipe wall of the outer nozzle 3 and faces to the inner of the outer nozzle.
The central nozzle 2 and the outer nozzle 3 are used for continuously accelerating the fluid in the pipeline.
The central nozzle 2 comprises a first flaring section 21 and a first narrow opening section 22 which are connected, and the first flaring section 21 and the first narrow opening section 22 are connected through a first throat 23. In the application, the flaring section and the narrow opening section are relative concepts, namely, the opening area of the flaring section is larger than the opening area of the narrow opening section relative to the same spray pipe main body.
The first flared section 21 is provided with an exhaust gas inlet 1.
The first flared section 21 gradually decreases in inner diameter from the exhaust gas inlet 1 to the first throat 23.
The first narrow mouth section 22 should at least be kept constant from the first throat 23 to the inner diameter of the outlet end. Preferably, the first narrow mouth section 22 gradually increases in inner diameter from the first throat 23 to the outlet end.
The inner diameter of the waste gas inlet end of the first flaring segment 21 is smaller than the inner diameter of the initial end of the second flaring segment 31.
The exhaust gas inlet end cross-sectional shape includes, but is not limited to, circular, rectangular, trapezoidal, triangular.
In a preferred embodiment, the exhaust gas inlet end is circular in cross-section.
The inner diameter of the outlet end of the first narrow opening section 22 is smaller than that of the waste gas inlet end of the first flaring section 21.
The cross-sectional shape of the outlet end of the first slot section 22 includes, but is not limited to, circular, rectangular, trapezoidal, triangular.
In a preferred embodiment, the outlet end is circular in cross-section.
The first throat 23 is a pipe section connecting the first flaring section 21 and the first narrow opening section 22, and is the position with the smallest pipe inner diameter of the central spray pipe.
The first throat 23 has a length less than the length of the first flared section 21 or the first narrow section 22.
The first flared section 21 and the first narrow section 22 may be equal in length or unequal in length.
As shown in fig. 5, the central nozzle 2 is used for delivering exhaust gas. In said first narrow mouth section 22 the exhaust gases are accelerated, preferably to supersonic velocity.
As shown in fig. 1, the outer layer nozzle 3 includes a second flared section and a second narrow mouth section, and the second flared section 31 and the second narrow mouth section 32 are connected through a second throat 33.
The second flared section 31 tapers from a start end to a second throat 33.
The inner diameter of the second narrow mouth section 32 from the second throat 33 to the outlet end of the outer nozzle 2 should be at least constant. Preferably, the second narrow mouth section 32 gradually increases from the second throat 33 to the outlet end of the outer layer nozzle 2.
The inner diameter of the initial end of the second flaring segment 31 is larger than that of the waste gas inlet end of the first flaring segment 21, and preferably, the inner diameter of the initial end of the second flaring segment 31 is 3-5 times that of the waste gas inlet end of the first flaring segment 21.
The cross-sectional shape of the beginning of the second flared section 31 includes, but is not limited to, circular, rectangular, trapezoidal, triangular.
In a preferred embodiment, the cross-sectional shape of the beginning of the second flared section 31 is circular.
The second flared section 31 has a length greater than the total length of the central nozzle 2.
The inner diameter of the initial end of the second flaring section 31 is larger than that of the waste gas outlet end of the second narrow opening section 32. Preferably, the inner diameter of the initial end of the second flaring section 31 is 3-4 times that of the exhaust gas outlet end of the second narrow opening section 32.
The cross section of the outlet end of the second narrow mouth section 32 can be round, rectangular, trapezoid or triangle.
In a preferred embodiment, the outlet end of the second slot section 32 is circular in cross-section.
The second throat 33 is a pipe section connecting the second flaring section 31 and the second narrow opening section 32, and the second throat 33 is the position with the smallest pipe inner diameter of the central spray pipe.
The second throat length is less than the length of the second flared section 31 or the second narrow section 32.
The second flared section 31 or the second narrow section 32 may or may not be equal in length.
The second narrow mouth section is provided with an exhaust gas outlet 5.
The outlet end of the second narrow port section 32 is communicated with the combustion chamber of the POU equipment.
The first narrow mouth section 22 is located inside the outer layer nozzle 3 and towards the outlet of the outer layer nozzle 3.
Further, the exhaust gas inlet end of the first flared section 21 extends to the outside of the second flared section 31 of the outer layer nozzle 3, the outlet end of the first narrow opening section 22 of the central nozzle extends to a position near the second throat 32 of the second flared section 31, and preferably, the outlet end of the first narrow opening section 22 is located at a position three fifths from the initial end of the second flared section 31.
The first flared section 21 is in sealing connection with the second flared section 31.
As shown in fig. 6, the outer nozzle 3 is used for delivering exhaust gas and inert gas, which are continuously accelerated during the second narrow opening section 32.
As shown in fig. 1, the nozzle of the inert gas nozzle 4 is disposed on the wall of the outer layer nozzle 3.
In a preferred embodiment, the inert gas nozzle 4 is located on the wall of the second flared section 31.
In a preferred embodiment, the nozzle of the inert gas nozzle 4 is located on the pipe wall of the second flared section 31 at the position far from the second throat, and is located directly below the central nozzle 2.
The inert gas nozzle can spray inert gas perpendicular to the axial direction of the first narrow mouth section 22, and can spray inert gas towards any direction inside the second flaring section 31. Preferably, the inert gas nozzle sprays inert gas axially perpendicular to the first narrow mouth section 22 to form an inert gas blanket to encapsulate the exhaust gas in the inner layer.
The inert gas shower head 4 may be provided in one or more, for example, in one, two, three, four or more. When the inert gas shower head 4 is provided in plural, it may be provided on the outer circumferential wall of the tube wall of the second flare section 31.
The inert gas nozzle 4 may or may not be provided with a power source. When the inert gas nozzle 4 is provided with a power source, the exhaust gas and inert gas of the outer nozzle 3 may be accelerated to supersonic velocity.
The inert gas nozzle 4 may be made of one or more of the following materials: electroplating stainless steel and polytetrafluoroethylene.
The inert gas nozzle 4 is used for spraying inert gas, and the inert gas can be nitrogen, helium, neon, argon, krypton and xenon. Preferably, the inert gas is nitrogen.
The injected inert gas isolates the waste gas and does not react with the waste gas, the waste gas and the inert gas are accelerated in the outer layer spray pipe, the inert gas forms an inert gas protection gas layer in the whole flaring section of the second flaring section 31, and the waste gas forms a stable laminar flow in the inert gas protection gas inner layer.
When the spray pipe is used, waste gas enters the first flaring section 21 through the waste gas inlet 1, the waste gas is accelerated through the first throat 23 and the first narrow opening section 22, and when the pressure of the waste gas inlet 1 is high enough, the air flow at the outlet of the first narrow opening section 22 can reach supersonic speed. The exhaust gas is ejected out of the central nozzle and then enters the rear end of the second flaring section 31 of the outer nozzle. As shown in fig. 2 and 3, the discontinuous pressure increase is generated by the sudden compression of the gas outside the central nozzle due to the back pressure Pt' (the pressure at the inert gas nozzle), because Pe (the outlet pressure of the central nozzle) is greater than Pa (the pressure at the outer nozzle), the exhaust gas is in an underinflated state, the exhaust gas is continuously inflated and reduced in pressure after exiting the central nozzle, the pressure gradually decreases to Pa, while the inert gas nozzle 4 sprays the inert gas to form an inert gas blanket in the second flared section 31, the exhaust gas sprayed into the second flared section 31 is wrapped in the inert gas blanket, the low pressure at the core of the outer nozzle 3 concentrates the exhaust gas and is not easily diffused, and a stable laminar flow is formed (Pt represents the pressure at the inlet end of the exhaust gas in fig. 2, and the direction of the inert gas nozzle is the same as that of the central nozzle in fig. 3). The exhaust gas and inert gas are accelerated again as they pass through the second throat and the second narrow section and then are ejected from the outer nozzle outlets (see fig. 4-6 for the flow of exhaust gas and inert gas in each nozzle). As shown in fig. 3, pe '(the outlet pressure of the outer nozzle) is less than Pa' (the ambient pressure), and shock waves are formed at the outer nozzle outlet. When the waste gas leaves the outer layer spray pipe 3, inert gas shielding gas still exists in the outer layer, the waste gas is in the inner layer, so that the waste gas can be delayed to react, the waste gas reaction is carried out at a position far away from the spray nozzle, and a large amount of particulate matters formed by the waste gas reaction, such as silicon dioxide, are prevented from fouling or blocking the spray nozzle on the wall of the spray pipe, thereby improving the condition of fouling in a cavity and reducing maintenance and overhaul frequency.
In summary, the present invention effectively overcomes the disadvantages of the prior art and has high industrial utility value.
The above embodiments are merely illustrative of the principles of the present invention and its effectiveness, and are not intended to limit the invention. Modifications and variations may be made to the above-described embodiments by those skilled in the art without departing from the spirit and scope of the invention. Accordingly, it is intended that all equivalent modifications and variations of the invention be covered by the claims, which are within the ordinary skill of the art, be within the spirit and scope of the present disclosure.
Claims (7)
1. The cavity spray pipe of the combustion type POU equipment is characterized by at least comprising a central spray pipe (2), an outer layer spray pipe (3) and an inert gas spray head (4), wherein an outlet of the central spray pipe (2) is positioned in the outer layer spray pipe (3) and faces to an outlet of the outer layer spray pipe (3), and a spray nozzle of the inert gas spray head (4) is arranged on a pipe wall of the outer layer spray pipe (3) and faces to the inner part of the outer layer spray pipe (3); the central spray pipe (2) comprises a first flaring section (21) and a first narrow opening section (22) which are connected, and the first flaring section (21) is connected with the first narrow opening section (22) through a first throat (23); the first throat (23) is the position with the smallest tube inner diameter of the central spray tube (2); the outer layer spray pipe (3) comprises a second flaring section (31) and a second narrow opening section (32) which are connected, and the second flaring section (31) is connected with the second narrow opening section (32) through a second throat (33); the second throat opening (33) is the position with the smallest pipe inner diameter of the outer layer spray pipe (3); the outlet end of the central spray pipe is arranged at the position, close to the second throat (33), of the second flaring section (31); the first flaring section (21) is provided with an exhaust gas inlet (1), and the second narrow opening section (32) is provided with an exhaust gas outlet (5); the inert gas nozzle (4) is positioned on the pipe wall of the second flaring section (31).
2. The cavity nozzle of claim 1, further comprising one or more of the following features:
a) The inner diameter of the first flaring section (21) gradually decreases from the initial end to the first throat (23);
b) The inner diameter of the first narrow opening section (22) from the first throat opening (23) to the outlet end of the central spray pipe is kept unchanged;
c) The inner diameter of the second flaring section (31) gradually decreases from the starting end to the second throat (33);
d) The inner diameter of the second narrow mouth section (32) from the second throat (33) to the outlet end of the outer layer spray pipe is kept unchanged.
3. The cavity nozzle according to claim 1, wherein the first narrow mouth section (22) increases gradually in inner diameter from the first throat (23) to the central nozzle outlet end and/or the second narrow mouth section (32) increases gradually in inner diameter from the second throat (33) to the outer nozzle outlet end.
4. The cavity nozzle according to claim 1, wherein the first slot section (22) is adapted to accelerate the exhaust gases.
5. The cavity nozzle according to claim 1, characterized in that the first flared section (21) is sealingly connected to the second flared section (31).
6. A cavity nozzle according to claim 1, characterized in that the outer layer nozzle (3) is adapted to deliver exhaust gases and inert gases which are accelerated in the second narrow mouth section (32).
7. A cavity nozzle according to claim 1, wherein the inert gas nozzle is directed in either direction inside the second flared section (31).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910709518.5A CN110345498B (en) | 2019-08-02 | 2019-08-02 | Cavity spray pipe of combustion type POU equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910709518.5A CN110345498B (en) | 2019-08-02 | 2019-08-02 | Cavity spray pipe of combustion type POU equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110345498A CN110345498A (en) | 2019-10-18 |
| CN110345498B true CN110345498B (en) | 2024-05-24 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910709518.5A Active CN110345498B (en) | 2019-08-02 | 2019-08-02 | Cavity spray pipe of combustion type POU equipment |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2023267A (en) * | 1978-06-15 | 1979-12-28 | Kernforschungsanlage Juelich | Apparatus and method for burning substances entrained as suspended particles in a gas |
| JPH02103311A (en) * | 1988-10-11 | 1990-04-16 | Chiyoda Corp | Method of treatment of poisonous flue gas by combustion |
| CN1047379A (en) * | 1989-05-08 | 1990-11-28 | 联合碳化工业气体技术公司 | Multiple oxidant jet combustion method and device |
| DE19744477A1 (en) * | 1997-10-09 | 1999-04-15 | Centrotherm Elektrische Anlage | Burner for waste gas cleaning installations |
| CN103775253A (en) * | 2014-02-12 | 2014-05-07 | 中国船舶重工集团公司第七一一研究所 | Exhaust gas pretreatment system for diesel engine |
| CN211119393U (en) * | 2019-08-02 | 2020-07-28 | 上海盛剑环境***科技股份有限公司 | Cavity spray pipe of combustion type POU equipment |
-
2019
- 2019-08-02 CN CN201910709518.5A patent/CN110345498B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2023267A (en) * | 1978-06-15 | 1979-12-28 | Kernforschungsanlage Juelich | Apparatus and method for burning substances entrained as suspended particles in a gas |
| JPH02103311A (en) * | 1988-10-11 | 1990-04-16 | Chiyoda Corp | Method of treatment of poisonous flue gas by combustion |
| CN1047379A (en) * | 1989-05-08 | 1990-11-28 | 联合碳化工业气体技术公司 | Multiple oxidant jet combustion method and device |
| DE19744477A1 (en) * | 1997-10-09 | 1999-04-15 | Centrotherm Elektrische Anlage | Burner for waste gas cleaning installations |
| CN103775253A (en) * | 2014-02-12 | 2014-05-07 | 中国船舶重工集团公司第七一一研究所 | Exhaust gas pretreatment system for diesel engine |
| CN211119393U (en) * | 2019-08-02 | 2020-07-28 | 上海盛剑环境***科技股份有限公司 | Cavity spray pipe of combustion type POU equipment |
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|---|---|
| CN110345498A (en) | 2019-10-18 |
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