CN211119393U - Cavity spray pipe of combustion type POU equipment - Google Patents
Cavity spray pipe of combustion type POU equipment Download PDFInfo
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- CN211119393U CN211119393U CN201921237934.1U CN201921237934U CN211119393U CN 211119393 U CN211119393 U CN 211119393U CN 201921237934 U CN201921237934 U CN 201921237934U CN 211119393 U CN211119393 U CN 211119393U
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Abstract
The utility model relates to a waste gas treatment technical field especially relates to a cavity spray tube of burning formula POU equipment. The cavity spray tube at least comprises a central spray tube, an outer spray tube and an inert gas spray head, wherein the outlet of the central spray tube is located inside the outer spray tube and faces the outlet of the outer spray tube, and the spray opening of the inert gas spray head is arranged on the tube wall of the outer spray tube and faces the inside of the outer spray tube. The utility model discloses a cavity spray tube is arranged in solving among the prior art problem of exhaust gas line's spout and combustion chamber wall dust scale deposit.
Description
Technical Field
The utility model relates to a waste gas treatment technical field especially relates to a cavity spray tube of burning formula POU equipment.
Background
Semiconductor processes typically produce highly corrosive exhaust gases that are hazardous to humans or the environment, and therefore require treatment before they can be released into the atmosphere. At present, waste gas is oxidized and pyrolyzed by combustion type POU equipment and then is discharged, but dust and scale on a nozzle of a waste gas pipeline and the wall surface of a combustion chamber are always the core problems of the modern POU equipment, which causes frequent maintenance of the equipment.
In order to solve the problem, the utility model provides a cavity spray tube of burning formula POU equipment.
SUMMERY OF THE UTILITY MODEL
In view of the above-mentioned shortcomings of the prior art, an object of the present invention is to provide a cavity nozzle of a combustion type POU device, which is used for solving the problems of dust and scale deposition on the nozzle and the wall surface of a combustion chamber of a waste gas pipeline in the prior art.
In order to achieve the above and other related objects, the present invention provides a cavity nozzle of a combustion POU device, the cavity nozzle includes at least a central nozzle, an outer nozzle, and an inert gas nozzle, wherein an outlet of the central nozzle is located inside the outer nozzle and toward an outlet of the outer nozzle, and a nozzle of the inert gas nozzle is disposed on a wall of the outer nozzle and toward the inside of the outer nozzle.
The central nozzle comprises a first flaring section and a first narrow section which are connected, and the first flaring section is connected with the first narrow section through a first throat. The outer layer spray pipe comprises a second flaring section and a second narrow opening section which are connected, and the second flaring section is connected with the second narrow opening section through a second throat opening.
The first flaring section is provided with a waste gas inlet, and the second narrow mouth section is provided with a waste gas outlet.
The inner diameter of the first flaring section is gradually reduced from the waste gas inlet to the first throat, and the inner diameter of the second flaring section is gradually reduced from the starting end to the second throat.
The inner diameter of the first narrow opening section is kept constant from the first throat to the outlet end.
The first narrow mouth section can also gradually increase in inner diameter from the first throat to the outlet end.
The first throat opening section is the position with the minimum pipe inner diameter of the central spray pipe, and the second throat opening section is the position with the minimum pipe inner diameter of the central spray pipe.
The central nozzle is used for conveying exhaust gas. The exhaust gas is accelerated in the first narrow mouth section.
The inner diameter of the second narrow opening section is kept constant from the second throat opening to the exhaust gas outlet end.
The inner diameter of the second narrow opening section from the second throat to the exhaust gas outlet end can also be gradually increased.
The first narrow opening section is located inside the outer layer spray pipe and faces an exhaust gas outlet of the outer layer spray pipe.
Preferably, the first flaring section waste gas inlet end extends to the outside of the second flaring section of the outer layer spray pipe, and the first narrow section outlet end extends to two fifths of the second flaring section.
The first flaring section is connected with the second flaring section in a sealing mode.
The outer layer nozzle is used for conveying waste gas and inert gas, and the waste gas and the inert gas are accelerated in the second narrow opening section.
And the nozzle of the inert gas nozzle is arranged on the pipe wall of the outer layer spray pipe.
Preferably, the inert gas nozzle is positioned on the pipe wall of the second flaring section.
As above, the utility model discloses a cavity spray tube of burning formula POU equipment has following beneficial effect:
through adopting inert gas as the protective gas medium, inert gas protective gas still exists in the skin when in outer spray tube and leave outer spray tube, and waste gas can make waste gas delay the reaction at the inlayer, makes waste gas reaction go on in the position of keeping away from the spout, prevents that a large amount of particulate matters that waste gas reaction formed from appearing scaling or blockking up the shower nozzle like silica at the spout pipe wall to improve the condition of intracavity scaling, reduce and maintain and overhaul the frequency.
Drawings
FIG. 1 shows a schematic diagram of a cavity nozzle.
Fig. 2 shows a graph of gas pressure at the outlet end of the central nozzle.
FIG. 3 shows a graph of the gas pressure at the exhaust outlet end of the outer layer nozzle.
FIG. 4 is a graph of fluid acceleration within a cavity nozzle.
FIG. 5 shows a central nozzle exhaust flow velocity diagram.
FIG. 6 is a diagram of an inert gas blanket for an outer layer nozzle.
Description of the element reference numerals
1 waste gas inlet
2 center nozzle
21 first flared section
22 first narrow mouth section
23 first throat
3 outer layer spray pipe
31 second flared section
32 second narrow section
33 second throat
4 inert gas shower nozzle
5 exhaust gas outlet
Detailed Description
The following description is provided for illustrative purposes, and other advantages and features of the present invention will become apparent to those skilled in the art from the following detailed description.
Please refer to fig. 1 to 6. It should be understood that the structure, ratio, size and the like shown in the drawings attached to the present specification are only used for matching with the content disclosed in the specification, so as to be known and read by those skilled in the art, and are not used for limiting the limit conditions that the present invention can be implemented, so that the present invention has no technical essential meaning, and any structure modification, ratio relationship change or size adjustment should still fall within the scope that the technical content disclosed in the present invention can cover without affecting the function that the present invention can produce and the purpose that the present invention can achieve. Meanwhile, the terms such as "upper", "lower", "left", "right", "middle" and "one" used in the present specification are for convenience of description, and are not intended to limit the scope of the present invention, and changes or adjustments of the relative relationship thereof may be made without substantial technical changes, and the present invention is also regarded as the scope of the present invention.
As shown in fig. 1, the utility model provides a cavity spray tube of burning formula POU equipment, the cavity spray tube includes central spray tube 2, outer spray tube 3, inert gas shower nozzle 4 at least, the spout of central spray tube 2 is located the inside of outer spray tube 3 and towards the export of outer spray tube 3, the spout of inert gas shower nozzle 4 set up in on the pipe wall of outer spray tube 3 and towards outside spray tube inside.
The central nozzle 2 and the outer nozzles 3 are used for continuously accelerating the fluid in the pipeline.
The central nozzle 2 comprises a first flaring segment 21 and a first narrow segment 22 which are connected, and the first flaring segment 21 and the first narrow segment 22 are connected through a first throat 23. In the present application, the flaring segment and the narrow segment are relative concepts, meaning that the opening area of the flaring segment is larger than the opening area of the narrow segment relative to the same nozzle body.
The first flared section 21 is provided with an exhaust gas inlet 1.
The first flared section 21 has a decreasing inner diameter from the exhaust gas inlet 1 to the first throat 23.
The first narrow mouth section 22 should at least maintain a constant inner diameter from the first throat 23 to the outlet end. Preferably, the first narrow mouth section 22 has an inner diameter which gradually increases from the first throat 23 to the outlet end.
The inner diameter of the waste gas inlet end of the first flaring segment 21 is smaller than the inner diameter of the starting end of the second flaring segment 31.
The cross-sectional shape of the exhaust gas inlet end includes, but is not limited to, circular, rectangular, trapezoidal, triangular.
In a preferred embodiment, the exhaust gas inlet end is circular in cross-section.
The inner diameter of the outlet end of the first narrow opening section 22 is smaller than the inner diameter of the exhaust inlet end of the first flared section 21.
The cross-sectional shape of the outlet end of the first narrow-mouth section 22 includes, but is not limited to, circular, rectangular, trapezoidal, triangular.
In a preferred embodiment, the outlet end is circular in cross-section.
The first throat 23 is a pipe section connecting the first flared section 21 and the first narrow section 22, and the first throat is the minimum pipe inner diameter of the central nozzle.
The first throat 23 is shorter than the length of the first flared section 21 or the first narrow section 22.
The first flared section 21 and the first narrow section 22 may or may not be equal in length.
As shown in fig. 5, the central nozzle 2 is used for conveying exhaust gases. In said first narrow mouth section 22 the exhaust gases are accelerated, preferably to supersonic velocities.
As shown in fig. 1, the outer layer nozzle 3 comprises a second flared section and a second narrow section which are connected, and the second flared section 31 and the second narrow section 32 are connected through a second throat 33.
The inner diameter of the second flared section 31 gradually decreases from the starting end to the second throat 33.
The inner diameter of the second narrow mouth section 32 from the second throat 33 to the outlet end of the outer nozzle 2 is at least constant. Preferably, the second narrow mouth section 32 has a gradually increasing inner diameter from the second throat 33 to the outlet end of the outer layer nozzle 2.
The inner diameter of the starting end of the second flaring segment 31 is larger than the inner diameter of the waste gas inlet end of the first flaring segment 21, and preferably, the inner diameter of the starting end of the second flaring segment 31 is 3-5 times of the inner diameter of the waste gas inlet end of the first flaring segment 21.
The cross-sectional shape of the starting end of the second flared section 31 includes, but is not limited to, circular, rectangular, trapezoidal and triangular.
In a preferred embodiment, the cross-sectional shape of the beginning of the second flared section 31 is circular.
The second flared section 31 has a length greater than the total length of the central nozzle 2.
The inner diameter of the starting end of the second flaring section 31 is larger than the inner diameter of the waste gas outlet end of the second narrow opening section 32. Preferably, the inner diameter of the starting end of the second flared section 31 is 3 to 4 times the inner diameter of the exhaust gas outlet end of the second narrow section 32.
The cross section of the outlet end of the second narrow-mouth section 32 can be circular, rectangular, trapezoidal or triangular.
In a preferred embodiment, the outlet end of the second narrow mouth section 32 is circular in cross-section.
The second throat 33 is a pipe section connecting the second flared section 31 and the second narrow section 32, and the second throat 33 is the minimum part of the pipe inner diameter of the central nozzle.
The second throat length is less than the length of the second flared section 31 or the second narrow section 32.
The lengths of the second flared section 31 or the second narrow section 32 may or may not be equal.
The second narrow mouth section is provided with an exhaust gas outlet 5.
The outlet end of the second narrow opening section 32 is communicated with a combustion chamber of the POU equipment.
The first narrow mouth section 22 is located inside the outer spout 3 and faces the outlet of the outer spout 3.
Further, the exhaust gas inlet end of the first flaring segment 21 extends to the outside of the second flaring segment 31 of the outer layer nozzle 3, the outlet end of the first flaring segment 22 of the central nozzle extends to a position near the second throat 32 of the second flaring segment 31, and preferably, the outlet end of the first flaring segment 22 is positioned three fifths away from the starting end of the second flaring segment 31.
The first flared section 21 and the second flared section 31 are in sealed connection.
As shown in fig. 6, the outer layer lance 3 serves to convey exhaust gas and inert gas, which are continuously accelerated in the second narrow mouth section 32.
As shown in fig. 1, the nozzle of the inert gas nozzle 4 is arranged on the pipe wall of the outer layer nozzle 3.
In a preferred embodiment, the inert gas nozzle 4 is located on the wall of the second flared section 31.
In a preferred embodiment, the nozzle of the inert gas nozzle 4 is located on the pipe wall of the second flared section 31 far from the second throat, and is located right below the central nozzle 2.
The inert gas injector may inject the inert gas perpendicular to the axial direction of the first narrow mouth section 22, or may inject the inert gas in any direction toward the inside of the second flared section 31. Preferably, the inert gas nozzle axially injects inert gas perpendicular to the first narrow opening section 22 to form an inert gas shielding gas layer to wrap the exhaust gas in the inner layer.
The inert gas shower head 4 may be provided in one or more number, for example, one, two, three, four or more. When a plurality of inert gas nozzles 4 are provided, they may be provided on the outer circumferential wall of the pipe wall of the second flared section 31.
The inert gas nozzle 4 may be provided with or without a power source. When the inert gas nozzle 4 is provided with a power source, the exhaust gas and the inert gas of the outer layer nozzle 3 can be accelerated to supersonic velocities.
The inert gas nozzle 4 can be made of one or more of the following materials: electroplating stainless steel and polytetrafluoroethylene.
The inert gas showerhead 4 is used for injecting inert gas, which may be nitrogen, helium, neon, argon, krypton, xenon. Preferably, the inert gas is nitrogen.
The injected inert gas isolates the waste gas and does not react with the waste gas, the inert gas and the waste gas are accelerated in the outer layer spray pipe, the inert gas forms an inert gas protective gas layer in the whole flaring section of the second flaring section 31, and the waste gas forms stable laminar flow in the inert gas protective gas inner layer.
The application's spray tube is when using, the utility model discloses well waste gas gets into first flaring section 21 through waste gas import 1, and waste gas is being accelerated through first larynx mouth 23 and first narrow mouthful section 22, and when 1 pressure of waste gas import was enough big, the air current in first narrow mouthful section 22 exit can reach supersonic velocity. The exhaust gas is sprayed out of the central nozzle and enters the rear end of the second flared section 31 of the outer nozzle. As shown in fig. 2 and fig. 3, the gas outside the central nozzle generates discontinuous pressure increase due to the sudden compression of the back pressure Pt' (the pressure at the inert gas nozzle), because Pe (the outlet pressure of the central nozzle) is greater than Pa (the pressure at the outer nozzle), the exhaust gas is in an under-expanded state, the exhaust gas continues to expand and reduce the pressure after exiting the central nozzle, the pressure gradually reduces to Pa, while the exhaust gas inside the second flared section 31 forms an inert gas protective gas layer due to the injection of the inert gas nozzle 4, the exhaust gas injected into the second flared section 31 is wrapped in the inert gas protective gas layer, and the low pressure at the core of the outer nozzle 3 causes the exhaust gas to be concentrated and not easily diffuse, so as to form a stable laminar flow (Pt in fig. 2 represents the pressure at the inlet end of the exhaust gas, and the direction of the inert gas nozzle in fig. 3 is the same. The exhaust gas and the inert gas are accelerated again when passing through the second throat and the second narrow mouth section, and then are sprayed out from the outlet of the outer layer spray pipe (see fig. 4 to 6 for the flow condition of the exhaust gas and the inert gas in each spray pipe). As shown in fig. 3, where Pe '(outlet pressure of the outer layer nozzle) is smaller than Pa' (ambient pressure), a shock wave is formed at the outlet of the outer layer nozzle. Inert gas protective gas still exists in the skin when waste gas leaves outer spray tube 3, and waste gas can make waste gas delay the reaction at the inlayer, makes waste gas reaction go on in the position of keeping away from the spout, prevents that a large amount of particulate matters of waste gas reaction formation from appearing scaling or blockking up the shower nozzle like silica at the spray tube pipe wall to improve the condition of intracavity scaling, reduce and maintain and overhaul the frequency.
To sum up, the utility model discloses various shortcomings in the prior art have effectively been overcome and high industry value has.
The above embodiments are merely illustrative of the principles and effects of the present invention, and are not to be construed as limiting the invention. Modifications and variations can be made to the above-described embodiments by those skilled in the art without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which may be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.
Claims (10)
1. The utility model provides a cavity spray tube of burning formula POU equipment, characterized in that, the cavity spray tube includes central spray tube (2), outer spray tube (3), inert gas shower nozzle (4) at least, the export of central spray tube (2) is located the inside of outer spray tube (3) and towards the export of outer spray tube (3), the spout of inert gas shower nozzle (4) set up in on the pipe wall of outer spray tube (3) and towards outer spray tube (3) inside.
2. The cavity nozzle of claim 1, wherein the central nozzle (2) comprises a first flared section (21) and a first narrow section (22) connected, the first flared section (21) and the first narrow section (22) being connected by a first throat (23); the outer layer nozzle (3) comprises a second flaring section (31) and a second narrow section (32) which are connected, and the second flaring section (31) and the second narrow section (32) are connected through a second throat (33).
3. The cavity nozzle of claim 2, further comprising one or more of the following features:
a) the first flaring segment (21) is provided with an exhaust gas inlet (1), and the second narrow-mouth segment (32) is provided with an exhaust gas outlet (5);
b) the inner diameter of the first flaring section (21) is gradually reduced from the starting end to the first throat (23);
c) the inner diameter of the first narrow opening section (22) from the first throat (23) to the outlet end of the central spray pipe is kept constant;
d) the first throat (23) is the minimum part of the inner diameter of the pipe of the central spray pipe (2);
e) the inner diameter of the second flaring section (31) is gradually reduced from the starting end to the second throat (33);
f) the inner diameter of the second narrow opening section (32) from the second throat (33) to the outlet end of the outer layer spray pipe is kept constant;
g) the second throat (33) is the minimum part of the inner diameter of the outer layer spray pipe (3).
4. The cavity nozzle of claim 2, wherein the first throat section (22) has an inner diameter that gradually increases from the first throat (23) to the outlet end of the central nozzle, and/or wherein the second throat section (32) has an inner diameter that gradually increases from the second throat (33) to the outlet end of the outer nozzle.
5. The cavity nozzle of claim 2, wherein said first narrow mouth section (22) is adapted to accelerate exhaust gases.
6. The cavity nozzle of claim 2, wherein said central nozzle exit end is disposed in said second flared section (31) proximate to said second throat (33).
7. The cavity nozzle of claim 2, wherein said first flared section (21) is sealingly connected to said second flared section (31).
8. The cavity nozzle of claim 2, wherein said outer nozzle (3) is adapted to deliver exhaust gas and inert gas, which are accelerated at said second narrow mouth section (32).
9. The chamber nozzle of claim 2, wherein said inert gas nozzle (4) is located on the wall of said second flared section (31).
10. The cavity nozzle of claim 9, wherein said inert gas jets are directed in either direction inside the second flared section (31).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921237934.1U CN211119393U (en) | 2019-08-02 | 2019-08-02 | Cavity spray pipe of combustion type POU equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921237934.1U CN211119393U (en) | 2019-08-02 | 2019-08-02 | Cavity spray pipe of combustion type POU equipment |
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| Publication Number | Publication Date |
|---|---|
| CN211119393U true CN211119393U (en) | 2020-07-28 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921237934.1U Active CN211119393U (en) | 2019-08-02 | 2019-08-02 | Cavity spray pipe of combustion type POU equipment |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110345498A (en) * | 2019-08-02 | 2019-10-18 | 上海盛剑环境***科技股份有限公司 | A kind of cavity jet pipe of combustion-type POU equipment |
| CN110345498B (en) * | 2019-08-02 | 2024-05-24 | 上海盛剑环境***科技股份有限公司 | Cavity spray pipe of combustion type POU equipment |
-
2019
- 2019-08-02 CN CN201921237934.1U patent/CN211119393U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110345498A (en) * | 2019-08-02 | 2019-10-18 | 上海盛剑环境***科技股份有限公司 | A kind of cavity jet pipe of combustion-type POU equipment |
| CN110345498B (en) * | 2019-08-02 | 2024-05-24 | 上海盛剑环境***科技股份有限公司 | Cavity spray pipe of combustion type POU equipment |
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| GR01 | Patent grant | ||
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| TR01 | Transfer of patent right |
Effective date of registration: 20220616 Address after: 201000 room j11226, building 4, zone B, No. 925, Yecheng Road, Jiading Industrial Zone, Jiading District, Shanghai Patentee after: Shanghai Shengjian Semiconductor Technology Co.,Ltd. Address before: 201821 room 210, 2 / F, building 2, 2229 Yongsheng Road, Jiading District, Shanghai Patentee before: SHANGHAI SHENGJIAN ENVIRONMENTAL SYSTEM TECHNOLOGY Co.,Ltd. |