CN110228293A - Inkjet-printing device - Google Patents

Inkjet-printing device Download PDF

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Publication number
CN110228293A
CN110228293A CN201910546876.9A CN201910546876A CN110228293A CN 110228293 A CN110228293 A CN 110228293A CN 201910546876 A CN201910546876 A CN 201910546876A CN 110228293 A CN110228293 A CN 110228293A
Authority
CN
China
Prior art keywords
temperature
inkjet
printing device
substrate
cooling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201910546876.9A
Other languages
Chinese (zh)
Inventor
宋媛媛
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TCL China Star Optoelectronics Technology Co Ltd
Original Assignee
Shenzhen China Star Optoelectronics Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shenzhen China Star Optoelectronics Technology Co Ltd filed Critical Shenzhen China Star Optoelectronics Technology Co Ltd
Priority to CN201910546876.9A priority Critical patent/CN110228293A/en
Publication of CN110228293A publication Critical patent/CN110228293A/en
Pending legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J11/00Devices or arrangements  of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form
    • B41J11/0015Devices or arrangements  of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form for treating before, during or after printing or for uniform coating or laminating the copy material before or after printing
    • B41J11/002Curing or drying the ink on the copy materials, e.g. by heating or irradiating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J3/00Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed
    • B41J3/407Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed for marking on special material
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10Deposition of organic active material
    • H10K71/12Deposition of organic active material using liquid deposition, e.g. spin coating
    • H10K71/13Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
    • H10K71/135Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing using ink-jet printing

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Ink Jet (AREA)

Abstract

The present invention provides a kind of inkjet-printing device, the inkjet-printing device includes board, is used for bearing substrate, print component, luminescent material is printed for the pixel region in the substrate, temperature control component is arranged above board, the rate of volatilization of solvent in control base board, wherein, temperature control component includes at least two temperature controlled zones, the temperature of each temperature controlled zone is controlled in print component work, so that the rate of volatilization of each corresponding region internal solvent of substrate meets preset requirement;In the present invention, inkjet-printing device is by temperature control component when the print component works, control the temperature of each temperature controlled zone, so that the rate of volatilization of each corresponding region internal solvent of substrate meets preset requirement, the non-uniform phenomenon of solvent volatilization on substrate is alleviated in this way, corrosion of the solvent to inkjet-printing device is also reduced simultaneously, alleviates the non-uniform technical problem of solvent volatilization on substrate existing for existing inkjet printing technology.

Description

Inkjet-printing device
Technical field
The present invention relates to field of display technology more particularly to a kind of inkjet-printing devices.
Background technique
With the development of OLED technology, inkjet printing technology can realize that one direction and twocouese such as back and forth print at the modes, greatly Amplitude improves the preparation speed of OLED device.
But in ink jet printing process, still have some problems and occur: for example as printing carries out, it may appear that on substrate The non-uniform phenomenon of solvent volatilization, being mainly shown as that first printing portion has dried then printing portion is unseasoned or edge Convection drying and it is internal unseasoned phenomena such as.
That is, existing inkjet printing technology needs to improve there are the non-uniform technical problem of solvent volatilization on substrate.
Summary of the invention
The present invention provides a kind of inkjet-printing device, is volatilized with alleviating solvent on substrate existing for existing inkjet printing technology Non-uniform technical problem.
To solve the above problems, technical solution provided by the invention is as follows:
The embodiment of the present invention provides a kind of inkjet-printing device comprising:
Board is used for bearing substrate;
Print component prints luminescent material for the pixel region in the substrate;
Temperature control component is arranged above the board, for controlling the rate of volatilization of solvent on the substrate;
Wherein, the temperature control component includes at least two temperature controlled zones, in print component work, controls each temperature control The temperature in region, so that the rate of volatilization of each corresponding region internal solvent of the substrate meets preset requirement.
In inkjet-printing device provided in an embodiment of the present invention, the temperature control component includes:
Coldplate forms at least two temperature controlled zones;
Cooling pipe is arranged in the coldplate;
Temperature sensor is arranged in the temperature controlled zone, for detecting the actual temperature of the temperature controlled zone;
Driving device drives cooling medium in institute for the actual temperature and target temperature according to the temperature controlled zone Flowing in cooling pipe is stated, to reduce the temperature of the temperature controlled zone.
In inkjet-printing device provided in an embodiment of the present invention, the temperature control component include at least two coldplates, one A coldplate forms a temperature controlled zone.
In inkjet-printing device provided in an embodiment of the present invention, in temperature control component work, described at least two The actual temperature of coldplate is different, and the distance apart from the substrate is identical.
In inkjet-printing device provided in an embodiment of the present invention, in temperature control component work, described at least two The actual temperature of coldplate is identical, and the distance apart from the substrate is different.
In inkjet-printing device provided in an embodiment of the present invention, the temperature control component includes a coldplate, described cold But plate includes at least two independent cooling zones, and a cooling zone forms a temperature controlled zone.
In inkjet-printing device provided in an embodiment of the present invention, the shape of the cooling zone is rectangle.
In inkjet-printing device provided in an embodiment of the present invention, the shape of the cooling zone is triangle.
In inkjet-printing device provided in an embodiment of the present invention, the shape of the cooling zone includes rectangle and irregular Shape, two sides of the irregular shape at least about the rectangle.
In inkjet-printing device provided in an embodiment of the present invention, the cooling medium include cooling air, cooling water and At least one of coolant liquid.
The invention has the benefit that the present invention provides a kind of inkjet-printing device, which includes board, For bearing substrate, print component prints luminescent material for the pixel region in the substrate, and temperature control component is arranged in institute It states above board, for controlling the rate of volatilization of solvent on the substrate, wherein the temperature control component includes at least two temperature controls Region controls the temperature of each temperature controlled zone, so that each corresponding region internal solvent of the substrate in print component work Rate of volatilization meet preset requirement;In the present invention, inkjet-printing device includes temperature control component, by temperature control component described When print component works, the temperature of each temperature controlled zone is controlled, so that the rate of volatilization of each corresponding region internal solvent of the substrate Meet preset requirement, the such as less than rate of volatilization of a velocity amplitude and each region internal solvent is approximately uniform, alleviates base in this way The non-uniform phenomenon of solvent volatilization on plate, while corrosion of the solvent to inkjet-printing device is also reduced, alleviate existing ink-jet The non-uniform technical problem of solvent volatilization, ensure that the homogeneity and stability of luminescent layer on substrate existing for printing technique.
Detailed description of the invention
It, below will be to embodiment or the prior art in order to illustrate more clearly of embodiment or technical solution in the prior art Attached drawing needed in description is briefly described, it should be apparent that, the accompanying drawings in the following description is only some of invention Embodiment for those of ordinary skill in the art without creative efforts, can also be attached according to these Figure obtains other attached drawings.
Fig. 1 is the structural schematic diagram of inkjet-printing device provided in an embodiment of the present invention.
Fig. 2 is the first composition schematic diagram of inkjet-printing device provided in an embodiment of the present invention.
Fig. 3 is the first operation schematic diagram of inkjet-printing device provided in an embodiment of the present invention.
Fig. 4 is second of operation schematic diagram of inkjet-printing device provided in an embodiment of the present invention.
Fig. 5 is second of composition schematic diagram of inkjet-printing device provided in an embodiment of the present invention.
Fig. 6 a to Fig. 6 i is the composition schematic diagram of coldplate provided in an embodiment of the present invention.
Fig. 7 to Fig. 9 is the printing schematic diagram of inkjet-printing device provided in an embodiment of the present invention.
Specific embodiment
The explanation of following embodiment is referred to the additional illustration, the particular implementation that can be used to implement to illustrate the present invention Example.The direction term that the present invention is previously mentioned, such as [on], [under], [preceding], [rear], [left side], [right side], [interior], [outer], [side] Deng being only the direction with reference to annexed drawings.Therefore, the direction term used be to illustrate and understand the present invention, rather than to The limitation present invention.The similar unit of structure is with being given the same reference numerals in the figure.
For the non-uniform technical problem of solvent volatilization, the embodiment of the present invention on substrate existing for existing inkjet printing technology It can alleviate.
In one embodiment, as shown in Figure 1, inkjet-printing device provided by the invention 10 includes:
Board 101 is used for bearing substrate 20;
Print component 102, generally comprises 3 printing sprayings, prints the material that shines for the pixel region in the substrate 20 Material;
Temperature control component 103 is arranged above the board 101, for controlling the rate of volatilization of solvent on the substrate 20;
Wherein, the temperature control component 103 includes at least two temperature controlled zones, in the print component 102 work, control The temperature of each temperature controlled zone, so that the rate of volatilization of each corresponding region internal solvent of the substrate meets preset requirement.
The present embodiment provides a kind of inkjet-printing device, which includes board, is used for bearing substrate, printing Component prints luminescent material for the pixel region in the substrate, and temperature control component is arranged above the board, for controlling Make the rate of volatilization of solvent on the substrate, wherein the temperature control component includes at least two temperature controlled zones, in the printing structure When part works, the temperature of each temperature controlled zone is controlled, so that the rate of volatilization of each corresponding region internal solvent of the substrate meets in advance If it is required that;In the present embodiment, inkjet-printing device includes temperature control component, is worked by temperature control component in the print component When, the temperature of each temperature controlled zone is controlled, so that the rate of volatilization of each corresponding region internal solvent of the substrate meets preset requirement, The such as less than rate of volatilization of a velocity amplitude and each region internal solvent is approximately uniform, alleviates solvent on substrate in this way and volatilizees not Uniform phenomenon, while corrosion of the solvent to inkjet-printing device is also reduced, it alleviates existing for existing inkjet printing technology The non-uniform technical problem of solvent volatilization, ensure that the homogeneity and stability of luminescent layer on substrate.
In one embodiment, preset requirement includes that the rate of volatilization of each region internal solvent of substrate is below preset value, and The rate of volatilization of each region internal solvent is approximately uniform.
In one embodiment, as shown in Figure 1, the temperature control component 103 includes:
Coldplate 1031 forms at least two temperature controlled zones;
Cooling pipe 1032 is arranged in the coldplate;
Temperature sensor 1033 is arranged in the temperature controlled zone, for detecting the actual temperature of the temperature controlled zone;
Driving device 1034 drives cooling medium for the actual temperature and target temperature according to the temperature controlled zone It is flowed in the cooling pipe, to reduce the temperature of the temperature controlled zone.
In one embodiment, the cooling medium includes at least one of cooling air, cooling water and coolant liquid.
In one embodiment, as shown in Fig. 2, the temperature control component 103 includes at least two coldplates 1031, i.e. Fig. 2 Shown in coldplate 1031a and coldplate 1031b, a coldplate forms a temperature controlled zone.The present embodiment is more by being arranged A coldplate simplifies the realization difficulty of at least two temperature controlled zones.
In one embodiment, as shown in figure 3, in temperature control component work, the reality of at least two coldplate Border temperature ta and tb is different, and the distance apart from the substrate is identical.
In one embodiment, as shown in figure 4, in temperature control component work, the reality of at least two coldplate Border temperature is identical, and the distance apart from the substrate is different.
In one embodiment, when the temperature control component works, the actual temperature of at least two coldplate is different, Distance apart from the substrate is different.
In one embodiment, as shown in figure 5, the temperature control component includes a coldplate 1031, the coldplate 1031 include at least two independent cooling zone S, and a cooling zone forms a temperature controlled zone.
In one embodiment, the shape of the cooling zone is rectangle.
In one embodiment, as shown in Fig. 6 a to Fig. 6 c, the cooling zone S of the coldplate 1031 is rectangle.
In one embodiment, as shown in Figure 6 a, the coldplate 1031 include cooling zone S-a1 to cooling zone S-a5 this 5 A cooling zone, the temperature of this 5 cooling zones are gradually successively decreased from cooling zone S-a1 to cooling zone S-a5.
In one embodiment, as shown in Figure 6 b, the coldplate 1031 include cooling zone S-b1 to cooling zone S-b5 this 5 A cooling zone, the temperature of this 5 cooling zones are gradually successively decreased from cooling zone S-b1 to cooling zone S-b3, cooling zone S-b3 to cooling Area S-b5 is gradually incremented by.
In one embodiment, as fig. 6 c, the coldplate 1031 include cooling zone S-c1 to cooling zone S-c7 this 7 A cooling zone, cooling zone S-c6 and cooling zone S-c7 are located at the relative side of coldplate 1031, cooling zone S-c1 to cooling zone S- This 5 cooling zones c5 are successively set on the intermediate region of coldplate 1031, the temperature of this 7 cooling zones, from cooling zone S-c1 to Cooling zone S-c3 gradually successively decreases, and cooling zone S-c3 to cooling zone S-c5 is gradually incremented by, the temperature of cooling zone S-c6 and cooling zone S-c7 It spends identical and minimum.
In one embodiment, the shape of the cooling zone is triangle.
In one embodiment, as shown in Fig. 6 d to Fig. 6 e, the cooling zone S of the coldplate 1031 is triangle.
In one embodiment, as shown in fig 6d, the coldplate 1031 include cooling zone S-d1 to cooling zone S-d4 this 4 A cooling zone, this 4 cooling zones are diagonally arranged, the temperature of this 4 cooling zones, and the temperature of cooling zone S-d1 is minimum, cooling zone S- The temperature highest of d4, cooling zone S-d2 are identical with the temperature of cooling zone S-d3.
In one embodiment, as shown in fig 6e, the coldplate 1031 include cooling zone S-e1 and cooling zone S-e2 this 2 A cooling zone, this 2 cooling zones are oppositely arranged, and the temperature of cooling zone S-e1 is higher than the temperature of cooling zone S-e2.
In one embodiment, the shape of the cooling zone includes rectangle and irregular shape, the irregular shape At least about two sides of the rectangle.
In one embodiment, as shown in Fig. 6 f to Fig. 6 i, the cooling zone S of the coldplate 1031 includes rectangle, Back Word The irregular shapes such as shape, stud, concave shape.
In one embodiment, as shown in Figure 6 f, the coldplate 1031 includes cooling zone S-f1, cooling zone S-f2 and cold But this 3 cooling zones area S-f3, cooling zone S-f1 are stud, and cooling zone S-f2 and cooling zone S-f3 are rectangle, cooling zone S- F1 surrounds 4 sides of cooling zone S-f2 and cooling zone S-f3, and cooling zone S-f2 is identical with the temperature of cooling zone S-f3, and is higher than The temperature of cooling zone S-f1.
In one embodiment, as shown in figure 6g, the coldplate 1031 include cooling zone S-g1 and cooling zone S-g2 this 2 A cooling zone, cooling zone S-g1 are rectangular-ambulatory-plane, and cooling zone S-g2 is rectangle, and cooling zone S-g1 surrounds 4 sides of cooling zone S-g2 Side, the temperature of cooling zone S-g2, and it is higher than the temperature of cooling zone S-g1.
In one embodiment, as shown in figure 6h, the coldplate 1031 include cooling zone S-h1 to cooling zone S-h4 this 4 A cooling zone, cooling zone S-h1 to cooling zone S-h3 are concave shape, and cooling zone S-h4 is rectangle, and cooling zone S-h1 surrounds cooling zone 3 sides of S-h2, cooling zone S-h2 surround 3 sides of cooling zone S-h3, and cooling zone S-h3 surrounds 3 of cooling zone S-h4 Side, the temperature of this 4 cooling zones are successively decreased from cooling zone S-h1 to cooling zone S-h4.
In one embodiment, as shown in Fig. 6 i, the coldplate 1031 include cooling zone S-i1 to cooling zone S-i4 this 4 A cooling zone, cooling zone S-i1 and cooling zone S-i2 are concave shape, and cooling zone S-i3 is rectangular-ambulatory-plane, and cooling zone S-i4 is rectangle, Cooling zone S-i1 surrounds 3 sides of cooling zone S-i2, and cooling zone S-i2 surrounds 3 sides of cooling zone S-i3, cooling zone S- I3 surrounds 4 sides of cooling zone S-i4, and the temperature of this 4 cooling zones is successively decreased from cooling zone S-h1 to cooling zone S-h4.
In one embodiment, the embodiment of the invention provides a kind of inkjet printing methods, should the following steps are included:
As shown in fig. 7, before printing, according to printed design, adjust coldplate between substrate at a distance from (comprising all around With upper and lower distance), steady temperature range and the cooling zone of coldplate are adjusted, at this point, the temperature of 5 cooling zones is identical.
As shown in figure 8, cooling Board position is reduced and fixed in printing, the temperature of coldplate difference cooling zone is set not Together, at this point, the temperature of 5 cooling zones is successively decreased along Print direction, and stability contorting monitors in time, and substrate, which is moved forward and backward, to be completed to beat Print.
As shown in figure 9, after printing is complete for a period of time, adjusting the cooling zone temperature and cooling Board position of coldplate, protecting After card printing, solvent low volatility stable and uniform on substrate.
Inkjet-printing device provided in an embodiment of the present invention, can be different according to a kind of inkjet printing design, setting The temperature of coldplate above substrate;Coldplate is fixed on above substrate, can adjusting position up and down;It can be according to print zone Domain is arranged coldplate different temperatures and is distributed, and the position first printed uses relatively low low temperature, and the region setting printed afterwards is than first The slightly higher low temperature in the region of printing controls each region ink degree of volatility by temperature control.
There is temperature inductor in each cooling zone, feeds back to computer terminal and guarantees printing environment stable temperature control, is based on The mode adjusted using this sensor feedback reduces the evaporation rate of print area solvent, and ink volatilizees in print area Speed is uniform, observes convenient for printing effect, realizes more stable temperature control printing, avoids the rapid volatilization of gas to board equipment Corrosion.
In one embodiment, in inkjet-printing device provided by the invention, cooling board device in printing mechanism, Above substrate.
In one embodiment, in inkjet-printing device provided by the invention, coldplate can do upper and lower, left and right and move It is dynamic, and can its left and right relative position is adjustable according to the design of substrate.
In one embodiment, in inkjet-printing device provided by the invention, coldplate at a distance from substrate for 1cm extremely 15cm;
In one embodiment, in inkjet-printing device provided by the invention, temperature is arranged in each cooling zone of coldplate Sensing device is spent, monitoring temperature changes and is precisely controlled each region cooling temperature.
In one embodiment, in inkjet-printing device provided by the invention, coldplate temperature range is -5 DEG C to 30 DEG C, temperature gradient is within 0 to 10 DEG C.
Inkjet-printing device provided in an embodiment of the present invention, black liquid is non-volatile in print area when ensure that printing or has low Evaporation rate, while different rates dry according to each region set different cooling temperatures, make each after printing Region degree of volatility promotes device film uniformity close to unanimously.
According to above-described embodiment:
The present invention provides a kind of inkjet-printing device, which includes board, is used for bearing substrate, prints structure Part prints luminescent material for the pixel region in the substrate, and temperature control component is arranged above the board, for controlling The rate of volatilization of solvent on the substrate, wherein the temperature control component includes at least two temperature controlled zones, in the print component When work, the temperature of each temperature controlled zone is controlled, is preset so that the rate of volatilization of each corresponding region internal solvent of the substrate meets It is required that;In the present invention, inkjet-printing device includes temperature control component, through temperature control component when the print component works, control The temperature of each temperature controlled zone is made, so that the rate of volatilization of each corresponding region internal solvent of the substrate meets preset requirement, such as Rate of volatilization lower than a velocity amplitude and each region internal solvent is approximately uniform, and it is uneven to alleviate solvent volatilization on substrate in this way The phenomenon that, while corrosion of the solvent to inkjet-printing device is also reduced, alleviate substrate existing for existing inkjet printing technology The non-uniform technical problem of upper solvent volatilization, ensure that the homogeneity and stability of luminescent layer.
In conclusion although the present invention has been disclosed above in the preferred embodiment, but above preferred embodiment is not to limit The system present invention, those skilled in the art can make various changes and profit without departing from the spirit and scope of the present invention Decorations, therefore protection scope of the present invention subjects to the scope of the claims.

Claims (10)

1. a kind of inkjet-printing device characterized by comprising
Board is used for bearing substrate;
Print component prints luminescent material for the pixel region in the substrate;
Temperature control component is arranged above the board, for controlling the rate of volatilization of solvent on the substrate;
Wherein, the temperature control component includes at least two temperature controlled zones, in print component work, controls each temperature controlled zone Temperature so that the rate of volatilization of each corresponding region internal solvent of the substrate meets preset requirement.
2. inkjet-printing device according to claim 1, which is characterized in that the temperature control component includes:
Coldplate forms at least two temperature controlled zones;
Cooling pipe is arranged in the coldplate;
Temperature sensor is arranged in the temperature controlled zone, for detecting the actual temperature of the temperature controlled zone;
Driving device drives cooling medium described cold for the actual temperature and target temperature according to the temperature controlled zone But flowing in pipeline, to reduce the temperature of the temperature controlled zone.
3. inkjet-printing device according to claim 2, which is characterized in that the temperature control component includes at least two cooling Plate, a coldplate form a temperature controlled zone.
4. inkjet-printing device according to claim 3, which is characterized in that the temperature control component work when, it is described extremely The actual temperature of few two coldplates is different, and the distance apart from the substrate is identical.
5. inkjet-printing device according to claim 3, which is characterized in that the temperature control component work when, it is described extremely The actual temperature of few two coldplates is identical, and the distance apart from the substrate is different.
6. inkjet-printing device according to claim 2, which is characterized in that the temperature control component includes a coldplate, The coldplate includes at least two independent cooling zones, and a cooling zone forms a temperature controlled zone.
7. inkjet-printing device according to claim 6, which is characterized in that the shape of the cooling zone is rectangle.
8. inkjet-printing device according to claim 6, which is characterized in that the shape of the cooling zone is triangle.
9. inkjet-printing device according to claim 6, which is characterized in that the shape of the cooling zone include rectangle and Irregular shape, two sides of the irregular shape at least about the rectangle.
10. according to the described in any item inkjet-printing devices of claim 2 to 9, which is characterized in that the cooling medium includes cold But at least one of gas, cooling water and coolant liquid.
CN201910546876.9A 2019-06-24 2019-06-24 Inkjet-printing device Pending CN110228293A (en)

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Application Number Priority Date Filing Date Title
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CN111354869A (en) * 2020-02-25 2020-06-30 纳晶科技股份有限公司 Display substrate, manufacturing method thereof and display device
CN114122302A (en) * 2021-11-15 2022-03-01 深圳市华星光电半导体显示技术有限公司 Drying device
CN114203933A (en) * 2021-12-11 2022-03-18 深圳市华星光电半导体显示技术有限公司 Packaging base station of display panel and manufacturing method of display panel

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111354869A (en) * 2020-02-25 2020-06-30 纳晶科技股份有限公司 Display substrate, manufacturing method thereof and display device
CN111354869B (en) * 2020-02-25 2023-02-07 纳晶科技股份有限公司 Display substrate, manufacturing method thereof and display device
CN114122302A (en) * 2021-11-15 2022-03-01 深圳市华星光电半导体显示技术有限公司 Drying device
CN114203933A (en) * 2021-12-11 2022-03-18 深圳市华星光电半导体显示技术有限公司 Packaging base station of display panel and manufacturing method of display panel

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Application publication date: 20190913