CN112319060B - Heating method of ink-jet printing device - Google Patents

Heating method of ink-jet printing device Download PDF

Info

Publication number
CN112319060B
CN112319060B CN202010987871.2A CN202010987871A CN112319060B CN 112319060 B CN112319060 B CN 112319060B CN 202010987871 A CN202010987871 A CN 202010987871A CN 112319060 B CN112319060 B CN 112319060B
Authority
CN
China
Prior art keywords
heating
temperature
substrate
ink
pixel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202010987871.2A
Other languages
Chinese (zh)
Other versions
CN112319060A (en
Inventor
夏宇飞
岳春波
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to CN202010987871.2A priority Critical patent/CN112319060B/en
Publication of CN112319060A publication Critical patent/CN112319060A/en
Application granted granted Critical
Publication of CN112319060B publication Critical patent/CN112319060B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J11/00Devices or arrangements  of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form
    • B41J11/0015Devices or arrangements  of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form for treating before, during or after printing or for uniform coating or laminating the copy material before or after printing
    • B41J11/002Curing or drying the ink on the copy materials, e.g. by heating or irradiating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J29/00Details of, or accessories for, typewriters or selective printing mechanisms not otherwise provided for
    • B41J29/38Drives, motors, controls or automatic cut-off devices for the entire printing mechanism
    • B41J29/393Devices for controlling or analysing the entire machine ; Controlling or analysing mechanical parameters involving printing of test patterns

Landscapes

  • Ink Jet (AREA)

Abstract

The invention relates to the technical field of ink-jet printing, and particularly discloses an ink-jet printing device which comprises a transmission mechanism, a spray head module connected with the transmission mechanism, a substrate bearing table positioned below the spray head module, and a heating table arranged in the substrate bearing table, wherein heating units are arranged in the heating table, the heating units are arranged in parallel, the long sides of the heating units are vertical to the advancing direction of the spray head module during printing, and the heating units are also arranged corresponding to each pixel column formed by the pixels of the substrate. Further, a heating method is provided. In addition, the heating table is heated in a subarea manner, and only the printed substrate area is heated. The heating method provided by the invention adopts zone control, the temperature rise mode is stage temperature rise, the uniformity of film formation in the pixel is improved, and the obtained ink-jet printing product has a good film formation effect.

Description

Heating method of ink-jet printing device
Technical Field
The invention relates to the technical field of ink-jet printing, in particular to an ink-jet printing device based on in-situ zone temperature control and a heating method.
Background
The statements herein merely provide background information related to the present disclosure and may not necessarily constitute prior art.
The method for manufacturing the Organic Light Emitting Device (OLED) and the quantum dot light emitting device (QLED) by adopting solution processing is an important direction for the development of the future display technology due to the advantages of low cost, high productivity, easy realization of large size and the like. Among them, inkjet printing technology is considered as the most effective way to achieve low cost and large area full color display of OLED, QLED. The ink-jet printing technology is a process capable of directly patterning and depositing a thin film, and can realize efficient patterning processing on a flexible and large-area substrate. The ink-jet printing technology also has the advantages of high resolution, high automation degree, low cost, simple manufacturing process, high material utilization rate, small environmental pollution, suitability for manufacturing large-size screens and the like. However, there are a number of technical challenges to printing including inkjet printing devices, printing inks and printing processes that need to be overcome.
The inventor finds that at least the following problems exist in the existing ink-jet printing technology:
the ink material generally used in the printing process is usually optimized in cooperation with the printing apparatus, for example, a certain proportion of high boiling point solvent is usually added to the solvent of the material, so as to effectively prevent the Nozzle (Nozzle) of the Inkjet printing apparatus (Inkjet Printer) from being blocked due to too fast volatilization of the material solvent. The solvent with high boiling point is difficult to be treated after the ink-jet printing is finished, and the common ink-jet printing device uses a special vacuum drying and heating baking device to fully volatilize the solvent. Before the printing ink is dried and heated, a plurality of rows of pixels are required to be printed on a display substrate in sequence, the whole process may take more than one hour, so that part of the ink printed firstly may be unstable, and the solvent is volatilized firstly to analyze the phase composition, which results in the unevenness of the final film formation. Meanwhile, a certain time is required from the printing of the ink onto the substrate to the transfer of the substrate to the vacuum drying and heating apparatus. In addition, in the process of transferring the printed substrate to the vacuum drying device by using the conveying device, the thin film in the pixel is lifted by a thimble (Ping) when the thin film is still in a liquid state and has fluidity, and is transferred by a transmission device such as a mechanical arm, so that a coffee ring (Mura) is easily generated due to uneven heating of the thin film when the thin film is contacted due to the temperature difference between the thimble, the mechanical arm and the substrate, and the final film forming is uneven.
How to further improve the uniformity of film formation in the pixel is of great significance.
Disclosure of Invention
The first objective of the present invention is to provide an in-situ zoned temperature control-based inkjet printing apparatus to solve the defect of non-uniform film formation in pixels.
In order to achieve the purpose, the technical scheme provided by the invention is as follows: an ink-jet printing device based on in-situ zone temperature control comprises a transmission mechanism, a spray head module, a substrate bearing table and a heating table;
the transmission mechanism is connected with the sprayer module, the substrate bearing table is arranged below the sprayer module, the transmission mechanism drives the sprayer module to move in an area above the substrate bearing table, the substrate bearing table is used for placing a substrate, and the heating table is arranged in the substrate bearing table;
more than one strip-shaped heating unit is arranged in the heating table, the heating units are arranged in parallel, the long edge of each heating unit is perpendicular to the advancing direction of the spray head module during printing, and each pixel row formed by the heating units and the pixels of the substrate is correspondingly arranged.
Furthermore, the device also comprises a working cavity, wherein the transmission mechanism, the spray head module, the substrate bearing table and the heating table are arranged in the working cavity.
Furthermore, when the nozzle module prints a pixel row, the heating unit corresponding to the pixel row starts heating.
Further, the heating unit is a heating pipe array.
Further, the heating stage can be used integrally with a substrate vacuum adsorption device.
The ink-jet printer combines the heating device with the substrate bearing table, and avoids the phenomenon of uneven film caused by phase separation of the liquid film when the printing substrate is transferred, uneven heating of the contact point of the transmission device and the substrate and the like.
A second object of the present invention is to provide a heating method for the above inkjet printing apparatus, comprising the steps of:
the pixel rows of the substrate correspond to each heating unit one by one;
after the ink-jet printer works, whether the pixel row printed by the spray head module is printed is judged;
if printing is finished, starting a heating unit corresponding to the pixel row to heat the pixel row;
judging whether the pixel rows form a flat dry film or not;
if a smooth dry film is formed, the heating unit corresponding to the pixel row stops heating.
Further, the heating temperature and the heating mode are determined according to the material of the printing material.
Further, the temperature rising mode is a step temperature rising mode, and specifically includes setting a first preset time to rise to a first preset temperature, maintaining the first preset time after the temperature reaches the first preset temperature, setting a third preset time to rise to a second preset temperature when the time meets the second preset time, and maintaining the fourth preset time after the temperature reaches the second preset temperature.
Further, the temperature is raised to the first predetermined temperature at a constant speed, and the temperature is raised to the second predetermined temperature at a constant speed.
Further, the first predetermined temperature is used for volatilization of a solvent in the ink droplets, and the second predetermined temperature is used for high-temperature film formation of the ink droplets in the pixel columns.
The method can heat the ink in different areas, and the ink can be heated after being printed, so that the uniformity of ink film forming is ensured.
The invention has the beneficial effects that:
according to the ink-jet printing device and the heating method provided by the invention, the substrate bearing table is combined with the heating table, the substrate can be directly heated after pixel printing, the substrate does not need to be transferred into a vacuum drying device or other heating devices for heating, and the phenomenon of uneven solvent volatilization caused by long-time printing of pixels and the phenomenon of uneven film caused by phase separation of a liquid film in the transfer process of the printed substrate, uneven heating of a contact point of a transmission device and the substrate and the like are avoided. In addition, the heating table can be used for heating in a partition mode, only the printed substrate area is heated, and the phenomenon that the temperature of the unprinted area is too high due to the fact that the whole substrate is heated to influence the printing effect is avoided.
Drawings
In order to more clearly illustrate the embodiments or technical solutions of the present invention, the drawings used in the embodiments or technical solutions of the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the structures shown in the drawings without creative efforts.
FIG. 1 is a schematic structural diagram of an embodiment of the present invention;
FIG. 2 is a top view of an embodiment of the present invention;
FIG. 3 is a flow chart of a heating method of the present invention;
fig. 4 is a flowchart of the temperature increasing method of the present invention.
Reference numerals are as follows:
100-a showerhead module;
200-a heating table; 201-a heating unit;
300-a transmission mechanism;
400-a substrate carrier; 401-a substrate; 402-pixel ink;
500-working chamber.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without inventive step based on the embodiments of the present invention, are within the scope of protection of the present invention.
It should be noted that all directional indicators (such as upper, lower, left, right, front and rear … …) in the embodiment of the present invention are only used to explain the relative position relationship between the components, the movement situation, etc. in a specific posture (as shown in the drawing), and if the specific posture is changed, the directional indicator is changed accordingly.
It will also be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present.
In addition, the descriptions related to "first", "second", etc. in the present invention are for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicit indication of the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the feature. In addition, technical solutions between various embodiments may be combined with each other, but must be realized by a person skilled in the art, and when the technical solutions are contradictory or cannot be realized, such a combination should not be considered to exist, and is not within the protection scope of the present invention.
Fig. 1-2 show an embodiment of an ink jet printer according to the present invention.
Referring to fig. 1-2, the inkjet printer includes a head module 100, a heating stage 200, a driving mechanism 300, a substrate stage 400, and a processing chamber 500.
The showerhead module 100, the heating stage 200, the transmission mechanism 300, and the substrate support stage 400 are disposed in the working chamber 500, and the working chamber 500 adjusts the internal environment according to actual requirements. The driving mechanism 300 is connected to the head module 100, the driving mechanism 300 drives the head module 100 to move in the region above the substrate platform 400, the substrate platform 400 is located below the head module 100, the substrate platform 400 is used for placing the substrate 401, and the substrate 401 bears the effect of the substrate 401, and the substrate 401 has the printed pixel ink 402 thereon.
The substrate stage 400 is provided with a heating stage 200, the heating stage 200 and the substrate stage 400 are integrated, and heat generated by the heating stage 200 can be transferred to a substrate 401 supported on the substrate stage 400. This kind of integrated design of warm-up table 200 and base plate plummer 400 can make the base plate pixel directly heat after printing, need not shift the base plate to vacuum drying and heat in other heating device, avoids the pixel to print the inhomogeneous phenomenon of solvent volatilization that causes for a long time to and the phase separation of the liquid film in the print substrate transfer process, and also can not produce the inhomogeneous phenomenon of film that causes such as the contact point of transmission and base plate is heated unevenly.
The heating table 200 is provided with a plurality of strip-shaped heating units 201 inside, and in another embodiment, the heating units 201 are heating pipe arrays.
The heating units 201 are arranged in parallel, the long sides of the heating units 201 are perpendicular to the advancing direction of the spray head module 100 during printing, and each heating unit 201 and each pixel row formed by pixels on the substrate 401 are arranged in a one-to-one correspondence mode. By the one-to-one design, each heating unit 201 can heat the corresponding pixel column to heat the printed pixel column, and the pixel columns which are not printed are not heated, so that the partition heating is realized. The design of the partition heating can enable the printed pixel rows to be heated in time, and meanwhile, the phenomenon that the temperature of an unprinted area is too high due to the heating of the whole substrate and the printing effect is influenced is avoided.
In another embodiment, the heating stage 200 can be used integrally with a substrate vacuum chucking apparatus.
Fig. 3 is a flow chart of a heating method of an inkjet printing apparatus according to the present invention.
Referring to fig. 3, the heating method includes the following steps:
10. the pixel rows of the substrate are in one-to-one correspondence with the heating units
The substrate pixel rows and each heating unit enable the heating units to correspondingly heat the substrate pixel rows, and the heating among the pixel rows cannot be influenced mutually;
20. detecting whether printing of pixel column is completed
After the ink-jet printer starts working, printing a substrate pixel column, and judging whether the pixel column is printed or not according to the working condition of the spray head module;
30. is heated up
And if the pixel column is printed, starting a heating unit corresponding to the pixel column to heat the pixel column, wherein the heating temperature and the heating mode are determined according to the material of the printing material.
40. Stopping heating
And judging whether the pixel row forms a flat dry film or not through the sensor, and if so, stopping heating the heating unit corresponding to the pixel row.
The heating method uses the condition that the printing of the pixel columns is completed as the heating starting condition, and uses the condition that the pixel columns form the flat dry film as the heating stopping condition, thereby realizing the heating of different pixel columns in different areas.
Specifically, after the ink jet module prints one vertical column of pixels, the motion control system starts the heating unit corresponding to the lower part of the column of pixels through software control before the printing head is detected to transversely move to print the next column of pixel columns, and controls the heating process and the closing time, so that the heating mode and the total heating time of the heating pipe below the printed column of pixels are kept consistent.
In another embodiment, the heating temperature-increasing manner in the method is a step temperature-increasing manner, as shown in fig. 4, specifically including the following steps:
31. first temperature rise
Setting a first preset time, heating to a first preset temperature, and keeping for a second preset time after the temperature reaches the first preset temperature;
32. second temperature rise
And when the time meets the second preset time, setting a third preset time to increase the temperature to the second preset temperature, and keeping the temperature for a fourth preset time after the temperature reaches the second preset temperature.
The preset temperature and the preset time in the step-type heating method are set according to different solvents and solutes in the printing ink, and the heating process is constant-speed heating, so that the phenomenon that the ink drops of pixel columns are influenced greatly due to temperature change is avoided, and the pixel ink foams due to too early high-temperature heating. And the first temperature rise is a lower temperature for volatilizing the solvent in the pixel row ink drops, and the second temperature rise is a high temperature for forming a film by the pixel row ink drops at a high temperature.
For example, the temperature is uniformly raised to 80 ℃ for 10 minutes, the temperature is maintained at 80 ℃ for 30 minutes, the solvent in the pixel ink is volatilized after the temperature is maintained for 30 minutes, the temperature is uniformly raised to 200 ℃ for 30 minutes, the temperature is maintained at 200 ℃ for 60 minutes, and the pixel ink is formed into a film at a high temperature.
In addition, the number of heating times is not limited to two, and two or more heating times may be performed as needed.
In summary, in the embodiments provided by the present invention, the substrate bearing table is combined with the heating table, so that the substrate can be directly heated after the pixels are printed, thereby avoiding the non-uniform solvent volatilization caused by long-time printing of the pixels and the non-uniform thin film caused in the subsequent transfer process. The heating method provided by the invention adopts zone control, the heating mode is staged heating, the uniformity of film formation in the pixel is improved, and the obtained ink-jet printing product has good film formation effect.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention, and all equivalent structural changes made by using the contents of the present specification and the drawings, or any other related technical fields, which are directly or indirectly applied to the present invention, are included in the scope of the present invention.

Claims (7)

1. A heating method of an inkjet printing apparatus, characterized in that the inkjet printing apparatus comprises: the device comprises a transmission mechanism, a spray head module, a substrate bearing table and a heating table;
the transmission mechanism is connected with the sprayer module, the substrate bearing table is arranged below the sprayer module, the transmission mechanism drives the sprayer module to move in an area above the substrate bearing table, the substrate bearing table is used for placing a substrate, and the heating table is arranged in the substrate bearing table; more than one strip-shaped heating unit is arranged in the heating table, the heating units are arranged in parallel, the long edge of each heating unit is vertical to the advancing direction of the spray head module during printing, and each pixel row formed by the heating units and the pixels of the substrate is correspondingly arranged;
the heating method comprises the following steps:
the pixel rows of the substrate correspond to each heating unit one by one;
after the ink-jet printer works, whether the pixel row printed by the spray head module is printed is judged;
if the printing is finished, starting a heating unit corresponding to the pixel row to heat the pixel row;
judging whether the pixel rows form a flat dry film or not;
if a smooth dry film is formed, stopping heating the heating units corresponding to the pixel rows;
the heating temperature and the heating mode are determined according to the material quality of the printing material;
the temperature rising method is a step temperature rising method, and specifically comprises the steps of setting a first preset time to rise to a first preset temperature, keeping the temperature for a second preset time after the temperature reaches the first preset temperature, setting a third preset time to rise to the second preset temperature when the time meets the second preset time, and keeping the temperature for a fourth preset time after the temperature reaches the second preset temperature.
2. The method according to claim 1, wherein the step of raising the temperature to the first predetermined temperature is a constant temperature raising, and the step of raising the temperature to the second predetermined temperature is a constant temperature raising.
3. The method of claim 2, wherein the first predetermined temperature is used for evaporation of solvent from the ink droplets, and the second predetermined temperature is used for high temperature filming of the ink droplets in the pixel columns.
4. The method according to claim 1, further comprising a working chamber, wherein the driving mechanism, the nozzle module, the substrate stage and the heating stage are disposed in the working chamber.
5. The heating method of the ink-jet printing device according to claim 1, wherein when the nozzle module prints a pixel row, the heating unit corresponding to the pixel row starts heating.
6. The method of claim 1, wherein the heating element is an array of heating tubes.
7. The method of claim 1, wherein the heating stage is capable of being integrated with a substrate vacuum chuck.
CN202010987871.2A 2020-09-18 2020-09-18 Heating method of ink-jet printing device Active CN112319060B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202010987871.2A CN112319060B (en) 2020-09-18 2020-09-18 Heating method of ink-jet printing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202010987871.2A CN112319060B (en) 2020-09-18 2020-09-18 Heating method of ink-jet printing device

Publications (2)

Publication Number Publication Date
CN112319060A CN112319060A (en) 2021-02-05
CN112319060B true CN112319060B (en) 2022-07-22

Family

ID=74304312

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202010987871.2A Active CN112319060B (en) 2020-09-18 2020-09-18 Heating method of ink-jet printing device

Country Status (1)

Country Link
CN (1) CN112319060B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113212007B (en) * 2021-04-15 2022-03-29 华南理工大学 Temperature control printing system applied to thin film device and optimization method thereof
CN114834165B (en) * 2022-05-13 2024-03-26 昆山国显光电有限公司 Ink jet printing drying device and ink jet printing equipment

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109968832A (en) * 2017-12-27 2019-07-05 京瓷办公信息***株式会社 Ink-jet recording apparatus
CN109968831A (en) * 2017-12-27 2019-07-05 京瓷办公信息***株式会社 Ink-jet recording apparatus
CN110920271A (en) * 2019-11-14 2020-03-27 Tcl华星光电技术有限公司 Ink-jet printing equipment and use method thereof
CN111497444A (en) * 2019-01-31 2020-08-07 精工爱普生株式会社 Medium heating device and liquid ejecting apparatus

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019006071A (en) * 2017-06-28 2019-01-17 京セラドキュメントソリューションズ株式会社 Ink jet recording device
JP7163721B2 (en) * 2018-10-31 2022-11-01 セイコーエプソン株式会社 Drying equipment, printing equipment

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109968832A (en) * 2017-12-27 2019-07-05 京瓷办公信息***株式会社 Ink-jet recording apparatus
CN109968831A (en) * 2017-12-27 2019-07-05 京瓷办公信息***株式会社 Ink-jet recording apparatus
CN111497444A (en) * 2019-01-31 2020-08-07 精工爱普生株式会社 Medium heating device and liquid ejecting apparatus
CN110920271A (en) * 2019-11-14 2020-03-27 Tcl华星光电技术有限公司 Ink-jet printing equipment and use method thereof

Also Published As

Publication number Publication date
CN112319060A (en) 2021-02-05

Similar Documents

Publication Publication Date Title
CN112319060B (en) Heating method of ink-jet printing device
JP4168934B2 (en) Manufacturing method of semiconductor device
CN104260554B (en) The preparation method of inkjet printing methods and equipment, display base plate
CN1986224B (en) Manufacturing equipment of display device and manufacturing method of display device
KR100511118B1 (en) Eject pattern data generation method, head operating pattern data generation method, eject pattern data generation device, function liquid drop eject device, depiction device, producing methods of liquid crystal display, organic el device, electron emission device, pdp device, electrophoresis display device, color filter, and organic el, and forming methods of spacer, metal wired, lens, resist, and light diffusion body
CN1751805B (en) Ink-jet application method and display device producing method
TW565510B (en) Head unit and method of setting same, drawing device, methods of manufacturing liquid crystal display device, organic EL device, electron discharge device, PDP device, electrophoresis display device, color filter and organic EL, methods of forming spacer
JP2005502455A (en) Inkjet deposition apparatus and method
JP4533625B2 (en) Inkjet apparatus, inkjet printing method, electronic apparatus, electro-optical apparatus, optical apparatus, and sensor apparatus
JP6557825B2 (en) Printing method
WO2021138999A1 (en) Ink-jet printing method, apparatus, device, and computer-readable storage medium
CN109801939B (en) Display substrate, manufacturing method thereof and display device
US8100522B2 (en) Recording apparatus and recording method of recording apparatus
CN109823061B (en) Ink-jet printing device
CN109651882B (en) Hole injection layer ink for ink-jet printing and application thereof in organic light-emitting display
CN111873648B (en) Inkjet printing vacuum drying device and inkjet printing method
CN111086339A (en) Method for improving film thickness uniformity of different areas of ink-jet printing substrate
US10406807B1 (en) Inkjet printer and printing method thereof
JP5089092B2 (en) Method for producing functional membrane
JP5168029B2 (en) Printing apparatus and printed matter manufacturing method
Funamoto et al. 27.5: Late News Paper: A 130‐ppi, Full‐Color Polymer OLED Display Fabricated Using an Ink‐jet Process
JP4385631B2 (en) Droplet coating method, computer program, organic EL panel manufacturing method, electro-optical panel manufacturing method and electronic device manufacturing method, and droplet coating apparatus, electro-optical panel, electro-optical device and electronic device
CN217715699U (en) Vacuum drying device
JP2006015693A (en) Method of measuring liquid droplet discharge characteristic, liquid droplet discharge characteristic measuring apparatus, liquid droplet discharging apparatus, and manufacturing method for electro-optic apparatus
KR20070069735A (en) Apparutus and method for manufacturing display device

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant