CN110186551A - Square wave transforming amplitudes measuring device and method based on self-mixed interference - Google Patents
Square wave transforming amplitudes measuring device and method based on self-mixed interference Download PDFInfo
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- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
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Abstract
The square wave transforming amplitudes measuring device based on self-mixed interference that the invention discloses a kind of, including light source unit, signal processing unit and data processing unit, signal processing unit introduces hysteresis loop comparator processing signal, to export required square-wave signal, data processing unit finds overturning point to the square-wave signal of output, to calculate object vibration amplitude according to the same inclined direction fringe number between adjacent overturning point.The invention also discloses a kind of based on the square wave transforming amplitudes measurement method based on self-mixed interference.The present invention carries out square wave transformation from mixed signal to obtained laser using the adjustable hysteresis loop comparator circuit of bound, effectively reduces influence of the extraneous noise to measurement stability and accuracy.Using self-mixed interference principle to laser light source coherence without particular requirement, laser selects freedom degree big.Meanwhile it is controllable to the amplification factor of signal, measurable minimum amplitude value is up to nanoscale, Yi Shixian wide scope real-time measurement.
Description
Technical field
The present invention relates to optical nano field of measuring technique, and in particular to a kind of square wave transformation vibration based on self-mixed interference
Amplitude measuring device and method.
Background technique
Nanometer vibration measurement has increasingly in many applications such as high-accuracy engineering technology, Precision Machining, aerospace
Important meaning.Researchers propose the vibration amplitude measurement method of some significant weak vibration objects at present.Wherein, base
Has the advantages that contactless high-precision in the measurement means of optical technology and by attention.
Common vibration of optical measurement method has geometrical optics approach and Through Optical Interference Spectra.However, the geometry light having been reported
Method requires the optical adjustment system of complex precise mostly；It is easy in laser interferometry field since its optical texture is simple
The characteristics of collimation, self-mixed interference method is by numerous studies and application.It is surveyed on method for oscillating in self-mixed interference, there is frequency-domain analysis
Measurement method and time domain fringe count method.
Frequency domain measuring method is more demanding to the signal-to-noise ratio of signal to extraneous noise-sensitive, when noise becomes larger, frequency spectrum
Will be unstable, useful frequency component is easily covered by noise spectrum, and measurement result becomes inaccuracy.Traditional Fringe-counting method is divided into
Artificial counting and automatic counting, artificial counting method is very time-consuming when larger for measured object Oscillation Amplitude, and tradition counts automatically
Method is easy to count the noise voltage fluctuations at threshold value as effective striped, generates larger counting error.Meanwhile striped
The precision of counting method is typically only capable to reach λ/2, and therefore, this is for realizing simple in real time, stably measured and requiring nanoscale height
The application of accuracy resolution is simultaneously not suitable for.
Summary of the invention
The purpose of the present invention is to provide a kind of square wave transforming amplitudes measuring device and method based on self-mixed interference,
Simple and compact for structure, method is simple and efficient, measurement result is stable, accurate, high resolution, and use scope is wide.
To achieve the above object, the invention adopts the following technical scheme:
Square wave transforming amplitudes measuring device based on self-mixed interference, comprising:
Light source unit is used to monitor vibrating object to be measured, to be produced from hybrid laser strength signal and be converted into
Corresponding current signal；
Signal processing unit comprising signal pre-processing module and signal post-processing module；The signal pre-processing module
Voltage signal is converted by current signal and is amplified；The signal post-processing module includes hysteresis loop comparator, the hysteresis
Comparator keeps the number within the unit time of the square wave in the square-wave signal of output most and burr level for realizing signal processing
At least；
Data processing unit finds overturning point to the square-wave signal of output, to be inclined according to same between adjacent overturning point
The fringe number of tilted direction calculates object vibration amplitude.
Further, the data processing unit calculates vibrating object to be measured also according to the sampling ordinal number of the overturning point
Vibration information.
Further, the light source unit includes semiconductor laser, laser drive circuit and photodetector；The letter
Number pre-processing module includes spaning waveguide operational amplifier circuit, block isolating circuit and ratio operational amplifier circuit；The data processing unit includes that ADC is adopted
Sample circuit and DSP real-time processing module；The laser drive circuit and photodetector respectively with the semiconductor laser phase
Even, the photodetector, spaning waveguide operational amplifier circuit, block isolating circuit, ratio operational amplifier circuit, hysteresis loop comparator, ADC sample circuit and
DSP real-time processing module is sequentially connected.
Further, the ratio operational amplifier circuit realizes variable amplification using rheostat as negative feedback resistor；Or
Person, the ratio operational amplifier circuit, as negative feedback resistor, realize fixed amplification factor using fixed resistance.
Further, the hysteresis loop comparator realizes lower threshold voltage thereon using variable resistance as feedback resistance
It is variable.
The square wave transforming amplitudes measurement method based on self-mixed interference that the invention also discloses a kind of, comprising the following steps:
The generation and output of S1, signal: the emergent light of semiconductor laser is beaten on vibrating object surface to be measured, and part light returns
It returns in laser cavity, is produced from hybrid laser strength signal；Photodetector detection is from hybrid laser strength signal and is converted
For the output of corresponding current signal；
S2, signal processing: voltage signal is converted by current signal, and carries out signal amplification；Amplified voltage is believed
Number input hysteresis loop comparator, within the scope of signal amplitude adjust hysteresis loop comparator high and low thresholds voltage, make output square wave letter
Number is most within the unit time and burr is minimum for square wave in number；
S3, data processing:
S31, AD sampling is carried out to the square-wave signal of S2 output, and each level width is calculated to the signal after sampling；
S32, overturning point is found according to level width: if the ratio of former and later two same polarity level of certain level and its is more than
Given threshold, then the level is overturning point；
S33, object vibration amplitude: A=λ * N/4 is calculated, wherein A is the amplitude of object, and λ is the wavelength of laser, and N is two-phase
The fringe number of same inclined direction between neighbour's overturning point.
Further, S3 is further comprised the steps of:
S34, object vibration frequency: F=2*fs/ (X is calculated2-X1), wherein F is the vibration frequency of object, X1It is previous
Overturn the sampling ordinal number of point, X2For the sampling ordinal number of the latter overturning point, fs is sample rate.
Further, in S31, the point that low and high level jumps is detected, the time for obtaining each edge of square wave sits
Mark asks difference to obtain the time width of each level, obtains the level width by the time coordinate on adjacent edge edge.
Further, in S32, given threshold >=2.
Further, in S33, the incomplete striped of the same inclined direction between two neighboring overturning point is added less than half
Striped is handled according to 0.5 striped, and greater than 0.5 striped is handled less than 1 striped according to 1 striped.
After adopting the above technical scheme, compared with the background technology, the present invention, having the advantages that
1, the present invention is not necessarily to the reference arm of conventional laser interferometer, and monochromatic light road has easily collimation and reduces system external circle
Noise sensitivity.Using self-mixed interference principle to laser light source coherence without particular requirement, laser selects freedom degree big.
2, due to being handled using hysteresis loop comparator from mixed signal, the different height square wave of width, side are exported
Wave signal corresponding square wave level width at overturning point is significantly greater than non-toggle point prescription wave level width, so as to obtaining
It requires to reduce from the signal-to-noise ratio of hybrid waveform, be influenced from the burr in mixed signal on measurement result negligible, it is possible to no
Need low-pass filter circuit, it is not necessary to low-pass filter of having chance be constituted using the integrated operational amplifier circuit of high-precision, ultra-low noise, dropped
Low cost；And when bad or when having the case where envelope from mixed signal shape of stripes, measurement accuracy still keeps good.
3, the whole design of measuring system is easily integrated, and measurement method is easy to be reliable, and resolution ratio reaches λ/8, is suitble to industry
Change application.
Detailed description of the invention
Fig. 1 is the schematic diagram of laser self-mixing interference technology.
Fig. 2 is the structural schematic diagram of amplitude measuring apparatus of the present invention.
Fig. 3 is the flow diagram of vibration amplitude measurement method of the present invention.
Fig. 4 is the square wave schematic diagram that the present invention obtains.
Fig. 5 is a measurement result schematic diagram of the invention.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.
Before embodiment is described, basic principle of the invention is illustrated first.The present invention is based on sharp
What the self-mixed interference principle of light was designed, when measured object is subjected to displacement, carry the reflected light of external cavity path variable signal
It will affect inner cavity, disturb laser power, is i.e. the displacement information of measured object is embodied in optical power fluctuation.
Embodiment 1
It please refers to shown in Fig. 2, the square wave transforming amplitudes measuring device based on self-mixed interference that the invention discloses a kind of,
Including light source unit, signal processing unit and data processing unit.
The light source unit is for monitoring vibrating object to be measured, to be produced from hybrid laser strength signal and be converted into
Corresponding current signal；The signal that the signal processing unit exports the light source unit is handled, and obtains required side
Wave signal；The data processing unit carries out analytical calculation to square-wave signal, solves the amplitude and frequency of vibrating object to be measured.
In the present embodiment, the light source unit includes semiconductor laser and is connected respectively with the semiconductor laser
Photodetector and laser drive circuit.The photodetector is encapsulated in semiconductor laser, the semiconductor laser
Laser beaten after the focusing lens aggregation that laser carries and be radiated at the laser portion on its surface on vibrating object surface to be measured
Divide back in laser cavity, interfered with intracavitary laser, be produced from hybrid laser strength signal, the photodetector will
Corresponding current signal is converted into from hybrid laser strength signal.
Wherein, the surface requirements of vibrating object to be measured have certain reflectivity, can be by the laser part of irradiation on it
Back in laser cavity, measuring targets surface is not required if surface can paste reflecting mirror.
It is of course also possible to use external independent photodetector is by spectroscope come the output intensity of exploring laser light.Light
The satisfactory laser of other collimations can also be used in source 1, and the present invention is not particularly limited.
In the present embodiment, the signal processing unit includes signal pre-processing module and signal post-processing module.
The signal pre-processing module successively includes spaning waveguide operational amplifier circuit, block isolating circuit and ratio operational amplifier circuit.It is described across
It leads operational amplifier circuit and converts voltage signal for the current signal；The block isolating circuit is filtered out straight in signal by capacitance
Flow ingredient；The ratio operational amplifier circuit amplifies faint signal.In the present embodiment, the ratio operational amplifier circuit can be adopted
It uses rheostat as negative feedback resistor, realizes variable amplification；It can also be realized using fixed resistance as negative feedback resistor
Fixed amplification factor；Ratio amplifier in the same direction can be used, reversed ratio amplifier can also be used.The present invention is not particularly limited.
The signal post-processing module includes hysteresis loop comparator, at the signal of ratio operational amplifier circuit output
Reason, to export square-wave signal.Wherein, the hysteresis loop comparator can cope in the future different amplitudes by adjusting high and low thresholds voltage
Size from mixed signal so that the square wave quantity exported in the unit time is at most and level burr is minimum.
The data processing unit includes ADC sample circuit and DSP real-time processing module.The ADC sample circuit is to institute
The square-wave signal for stating hysteresis loop comparator output is sampled, and obtained sampled signal is input to the DSP real-time processing module
In, overturning point is obtained by what program looks level width was significantly greater than the method for adjacent stripes, then calculate same between overturning point
The fringe number of one inclined direction), to calculate the amplitude of object vibration according to A=λ * N/4, in formula, A is object amplitude, and λ is
Optical maser wavelength, N are the fringe number of the same inclined direction between 2 adjacent overturning points.
Meanwhile the data processing unit can also be according to the sampling ordinal number and sample rate of overturning point, according to F=2*fs/
(X2-X1) vibration frequency of object is calculated, wherein F is the vibration frequency of object, and X1 is the sampling ordinal number of previous overturning point, X2
For the sampling ordinal number of the latter overturning point, fs is sample rate.
Last calculated result is shown by display screen and is exported.
Embodiment 2
It please refers to shown in Fig. 3, the square wave transforming amplitudes measurement method based on self-mixed interference that the present invention also provides a kind of, wraps
Include 3 core procedures.
The generation and output of S1, signal: the emergent light of semiconductor laser is beaten on vibrating object surface to be measured, and part light returns
It returns in laser cavity, is produced from hybrid laser strength signal；Photodetector detection is from hybrid laser strength signal and is converted
For the output of corresponding current signal.
S2, signal processing: voltage signal is converted by current signal, and carries out signal amplification；Amplified voltage is believed
Number input hysteresis loop comparator, within the scope of signal amplitude adjust hysteresis loop comparator high and low thresholds voltage, make output square wave letter
Number is most within the unit time and burr is minimum for square wave in number.
In the present embodiment, current signal is converted into voltage signal and is realized by spaning waveguide operational amplifier circuit；Signal amplification passes through ratio
Example operational amplifier circuit is realized.
When the high and low thresholds voltage of hysteresis loop comparator is tuned too large, the corresponding square wave of striped would not be flipped,
Therefore, it is necessary to which the high and low thresholds voltage of hysteresis loop comparator to be transferred within the scope of signal amplitude, fringe number at this time is most, if on but
Lower threshold voltage tune obtains too small, then burr can increase.Therefore, herein, hysteresis loop comparator should be adjusted within the scope of signal amplitude
High and low thresholds voltage, so that the square wave number of output at most (will not lose the striped between overturning point) and burr level is minimum
(burr level refers to the very small level signal of level width, usually less than 1/6th of width of fringe, is to work as high and low thresholds
When voltage is adjusted to close to 0V, the noise fluctuations on the signal of 0V or so break through high and low thresholds voltage and cause).As shown in Figure 4
Be the schematic diagram that square wave is generated by the processing of the high and low thresholds voltage of hysteresis loop comparator.
S3, data processing:
S31, AD sampling is carried out to the square-wave signal of S3 output, and each level width is calculated to the signal after sampling；
S32, find overturning point: according to overturning striped at corresponding square wave level width be significantly greater than (usually 2 times with
On, the present embodiment is set as 2) its first two square wave level width and latter two square wave level width, judges to overturn point；
S33, object vibration amplitude: A=λ * N/4 is calculated, wherein A is the amplitude of object, and λ is the wavelength of laser, and N is two-phase
The fringe number of same inclined direction between neighbour's overturning point；
S34, object vibration frequency: F=2*fs/ (X2-X1) is calculated, wherein F is the vibration frequency of object, and X1 is previous
The sampling ordinal number of point is overturn, X2 is the sampling ordinal number of the latter overturning point, and fs is sample rate.
In S31, level width obtains in the following way: detecting to the point that low and high level jumps, the side of obtaining
The time coordinate at each edge of wave asks difference to obtain the time width of each level, i.e., described in acquisition by the time coordinate on adjacent edge edge
Level width.
For the present embodiment in S33, N minimum unit is set as 0.5.It specifically calculates in the following manner: between two neighboring overturning point
The incomplete striped of same inclined direction be added handling according to 0.5 striped less than half striped, it is small to be greater than 0.5 striped
In being handled according to 1 striped for 1 striped.In this way, the resolution ratio of measurement can achieve λ/8.
It please refers to shown in Fig. 5, is the example measured using this method.In figure, top is divided into amplified electricity
Press signal, lower part is divided into the square-wave signal that exports after processing, and in the example, overturning point is respectively positioned on top, i.e. grey elliptic region.
Wherein, laser wavelength lambda is equal to 650nm (then Measurement Resolution is 81.25nm), and N is calculated as 2.5, and the formula substituted into S43 calculates
As a result A=406.3nm, actual vibration amplitude are 422.5nm, error 3.8% from mixing fringe number valuation by directly reading.
The vibration frequency that DSP is calculated in experiment is 211Hz, and actual vibration frequency is to be obtained by signal generator for 200Hz, and error is
5.5%, it is able to satisfy commercial measurement accuracy requirement.
It is apparent to those skilled in the art that for convenience of description and succinctly, only with above-mentioned each function
Can unit, module division progress for example, in practical application, there may be another division manner in actual implementation, can be with
It is completed, i.e., divided the internal structure of described device by different functional units, module as needed and by above-mentioned function distribution
At different functional unit or module, to complete all or part of the functions described above.Each functional unit in embodiment,
Module can integrate in one processing unit, is also possible to each unit and physically exists alone, can also two or two with
Upper unit is integrated in one unit, and above-mentioned integrated unit both can take the form of hardware realization, can also use software
The form of functional unit is realized.In addition, the specific name of each functional unit, module is also only for convenience of distinguishing each other, not
For limiting the protection scope of the application.
In the above-described embodiments, it all emphasizes particularly on different fields to the description of each embodiment, is not described in detail or remembers in some embodiment
The part of load may refer to the associated description of other embodiments.
The foregoing is only a preferred embodiment of the present invention, but scope of protection of the present invention is not limited thereto,
In the technical scope disclosed by the present invention, any changes or substitutions that can be easily thought of by anyone skilled in the art,
It should be covered by the protection scope of the present invention.Therefore, protection scope of the present invention should be with scope of protection of the claims
Subject to.
Claims (10)
1. the square wave transforming amplitudes measuring device based on self-mixed interference characterized by comprising
Light source unit is used to monitor vibrating object to be measured, to be produced from hybrid laser strength signal and be converted into correspondence
Current signal；
Signal processing unit comprising signal pre-processing module and signal post-processing module；The signal pre-processing module will be electric
Stream signal is converted into voltage signal and amplifies；The signal post-processing module includes hysteresis loop comparator, and the hysteresis compares
Device for realizing signal processing, make the square wave in the square-wave signal of output within the unit time number at most and burr level most
It is few；
Data processing unit finds overturning point to the square-wave signal of output, according to the same inclination side between adjacent overturning point
To fringe number calculate object vibration amplitude.
2. a kind of square wave transforming amplitudes measuring device based on self-mixed interference as described in claim 1, it is characterised in that: institute
State the vibration information that data processing unit calculates vibrating object to be measured also according to the sampling ordinal number of the overturning point.
3. a kind of square wave transforming amplitudes measuring device based on self-mixed interference as described in claim 1, it is characterised in that: institute
Stating light source unit includes semiconductor laser, laser drive circuit and photodetector；The signal pre-processing module include across
Lead operational amplifier circuit, block isolating circuit and ratio operational amplifier circuit；The data processing unit includes that ADC sample circuit and DSP locate in real time
Manage module；The laser drive circuit and photodetector are connected with the semiconductor laser respectively, the photodetector,
Spaning waveguide operational amplifier circuit, block isolating circuit, ratio operational amplifier circuit, hysteresis loop comparator, ADC sample circuit and DSP real-time processing module according to
It is secondary to be connected.
4. a kind of square wave transforming amplitudes measuring device based on self-mixed interference as claimed in claim 3, it is characterised in that: institute
Ratio operational amplifier circuit is stated using rheostat as negative feedback resistor, realizes variable amplification；Alternatively, the ratio operational amplifier circuit
Using fixed resistance as negative feedback resistor, fixed amplification factor is realized.
5. a kind of square wave transforming amplitudes measuring device based on self-mixed interference as described in claim 1, it is characterised in that: institute
Hysteresis loop comparator is stated using variable resistance as feedback resistance, realizes that lower threshold voltage is variable thereon.
6. the square wave transforming amplitudes measurement method based on self-mixed interference, which comprises the following steps:
The generation and output of S1, signal: the emergent light of semiconductor laser is beaten on vibrating object surface to be measured, and part light, which returns, to swash
In optical cavity, it is produced from hybrid laser strength signal；Photodetector detection is from hybrid laser strength signal and is converted into pair
The current signal output answered；
S2, signal processing: voltage signal is converted by current signal, and carries out signal amplification；Amplified voltage signal is defeated
Enter hysteresis loop comparator, the high and low thresholds voltage of hysteresis loop comparator is adjusted within the scope of signal amplitude, in the square-wave signal for making output
Square wave number is most within the unit time and burr is minimum；
S3, data processing:
S31, AD sampling is carried out to the square-wave signal of S2 output, and each level width is calculated to the signal after sampling；
S32, overturning point is found according to level width: if the ratio of certain level and its former and later two same polarity level is more than setting
Threshold value, then the level is overturning point；
S33, object vibration amplitude: A=λ * N/4 is calculated, wherein A is the amplitude of object, and λ is the wavelength of laser, and N is two adjacent to turn over
The fringe number of same inclined direction between turning point.
7. the square wave transforming amplitudes measurement method based on self-mixed interference as claimed in claim 6, which is characterized in that S3 is also wrapped
Include step:
S34, object vibration frequency: F=2*fs/ (X is calculated2-X1), wherein F is the vibration frequency of object, X1For previous overturning
The sampling ordinal number of point, X2For the sampling ordinal number of the latter overturning point, fs is sample rate.
8. the square wave transforming amplitudes measurement method based on self-mixed interference as claimed in claim 6, it is characterised in that: in S31,
The point that low and high level jumps is detected, the time coordinate at each edge of square wave is obtained, is sat by the time on adjacent edge edge
Mark asks difference to obtain the time width of each level, obtains the level width.
9. the square wave transforming amplitudes measurement method based on self-mixed interference as claimed in claim 6, it is characterised in that: in S32,
Given threshold >=2.
10. the square wave transforming amplitudes measurement method based on self-mixed interference as claimed in claim 6, it is characterised in that: S33
In, the incomplete striped of the same inclined direction between two neighboring overturning point is added less than half striped according to 0.5 striped
Processing, greater than 0.5 striped are handled less than 1 striped according to 1 striped.
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