CN101539454A - Semiconductor laser self-mixing interference vibration meter - Google Patents
Semiconductor laser self-mixing interference vibration meter Download PDFInfo
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- CN101539454A CN101539454A CN200910030093A CN200910030093A CN101539454A CN 101539454 A CN101539454 A CN 101539454A CN 200910030093 A CN200910030093 A CN 200910030093A CN 200910030093 A CN200910030093 A CN 200910030093A CN 101539454 A CN101539454 A CN 101539454A
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Abstract
The invention discloses a semiconductor laser self-mixing interference vibration meter, comprising an optical system and an electrical system. The optical system comprises a photodetector, a semiconductor laser, a collimating lens and a target lens which are sequentially arranged with the same optical axis. The electrical system comprises a signal source circuit, a signal preprocessing circuit, an A/D conversion circuit, a DSP data processing unit and an output terminal. A triangular wave signal source generates triangular wave signals to carry out current modulation on the semiconductor laser after passing through a current modulation circuit. Lasers emitted by the semiconductor laser are changed into parallel lights after passing through the collimating lens and incident on the target lens, and part of the lights returns in a laser cavity to be self mixed with lights in the laser cavity. The self-mixing light intensity is detected by the photodetector, is converted to corresponding current signals, the current signals are firstly converted to voltage signals through the signal preprocessing circuit, and then are divided into stacking and mutational signals which takes square waves as fundamental waves. The signals are converted to digital signals, are finally processed through the DSP data processing unit, and are output through the output terminal.
Description
Technical field
The present invention relates to vibrate fine measuring instrument, a kind of semiconductor laser self-mixing interference vibration meter of saying so exactly.
Background technology
The vialog system often is applied to space flight and aviation, automobile, the vibration survey of mechano-electronic product.Vialog mainly contains two major types: contact piezoelectric sensing vialog and non-contact optical sensing vialog.
Its cardinal principle of contact piezoelectric sensing vialog is a piezoelectric effect, and quartz crystal and artificial polarization pottery (PZT) convert vibration signal to electric signal, by the Treatment Analysis to electric signal, demonstrates acceleration, speed, the shift value of vibration.As: Beijing epoch TV110 vialog, measurement range: displacement, 0.001～1.999mm (peak-to-peak value), frequency range: displacement, 10Hz～500Hz.The shortcoming of contact vialog is that measuring object is limited in scope, and can't measure the vibrating object that vialog does not reach.
Non-contacting optical sensing vialog cardinal principle is that Doppler interferes, system utilizes laser doppler that vibration signal is converted to Doppler frequency signal.By Treatment Analysis, demonstrate acceleration, speed, the shift value of vibration to Doppler frequency signal.For example, the VibroMet500V vialog of U.S. MetroLaser company, vibration frequency range is 0Hz-20kHz, the Oscillation Amplitude scope is 0.1nm-10mm.The shortcoming of Doppler's vialog is to need many optical components in the light path, complex structure, and volume is bigger.
The existing methods shortcoming be difficult to make that volume is little, compact conformation, price is low, precision is high, vialog that can non-cpntact measurement.
Summary of the invention
The semiconductor laser self-mixing interference vibration meter that the purpose of this invention is to provide a kind of measuring vibrations information, the laser self-mixing interference Measuring Object vibration that utilizes optical feedback effect to produce.
Inventive principle:
Laser self-mixing interference is meant in the laser application system, the light of laser instrument output reflected by exterior object or scattering after, wherein a part of light is by the resonator cavity that feeds back to laser instrument, feedback light is carried the information of exterior object vibration, after light in the laser cavity mixes mutually, interfere phenomenon, because of output light signal and traditional two-beam interference similarity is arranged, so be referred to as self-mixed interference.
The triangular current source drives semiconductor laser, and when injection current during by triangular modulation, the output intensity of semiconductor laser is the intensity superposition that resonance and the modulation of light feedback generation produces.Remove the linear modulation component, just obtain periodic light feedback resonance signal.Light feedback resonance signal changes with external cavity is long, and when target mirror 5 moved half wavelength (λ/2), light feedback resonance signal can produce obvious sudden change, and the triangular signal rising edge that photodetector obtains and the jump signal number of negative edge have difference.The mould of mixing certainly that obtains rising edge and negative edge with differential method is jumped signal, then the mould of the negative edge in each modulation period is jumped the mould jumping signal number that signal number deducts rising edge, at last the difference in a plurality of triangular wave cycle is done accumulation process, multiply by fixed coefficient again and just can recover vibrational waveform, thus the frequency that obtains vibrating, amplitude.The positive-negative polarity of difference is represented the direction of motion of object.
Based on the foregoing invention principle, semiconductor laser of the present invention comprises optical system and electricity system from mixing vialog;
Described optical system, by with optical axis the photodetector, semiconductor laser, collimation lens and the target mirror that set gradually constitute;
Described electricity system is by signal source circuit, signal pre-processing circuit, A/D change-over circuit (analog to digital conversion circuit), and DSP data processing unit and outlet terminal constitute;
Described signal source circuit is made of triangular wave signal source and current-modulation circuit;
Triangular wave signal source produces triangular signal, carries out current-modulation through noise spectra of semiconductor lasers behind the current-modulation circuit; The laser that semiconductor laser sends becomes directional light through behind the collimation lens, and this directional light incides on the target mirror, in the part light return laser light chamber, feedback light is carried the information of exterior object, after light in the laser cavity mixes mutually, interfere phenomenon, be called from mixed light; Detected and be converted to corresponding current signal by photodetector from mixing light intensity, at first be converted to voltage signal through signal pre-processing circuit (demodulator circuit), differential is for being first-harmonic with the square wave again, the signal of stack sudden change; This signal is converted to digital signal through the A/D change-over circuit, is handled by DSP data processing unit (digital signal processing circuit) at last, by outlet terminal output result.
The present invention does not need auxiliary optical components such as the beam splitter of conventional laser interferometer and reference mirror, and device is collimation easily, and is simple and compact for structure, with low cost.
Description of drawings
Fig. 1 is that semiconductor laser of the present invention is from mixing vialog optical system synoptic diagram;
Fig. 2 is that semiconductor laser of the present invention is from mixing vialog electricity system block diagram;
Fig. 3 is a DSP data processing unit block diagram of the present invention;
Fig. 4 is a DSP data processing software block diagram of the present invention; Wherein, a figure is the acquisition process software flow pattern; B figure is the Interrupt Process FB(flow block);
Fig. 5 is the signal pre-processing circuit circuit diagram.
Embodiment
Below in conjunction with accompanying drawing, the present invention is described in further detail.
Embodiment:
Present embodiment adopts sine voltage as driving, calibrates for convenience and the confirmatory measurement result, and testee is a loudspeaker.
Utilize optical system to produce self-mixed interference in conjunction with Fig. 1 explanation, carry out the specific implementation method of measuring vibrations.Be equipped with semiconductor laser 1, collimation lens 3, target mirror 8 successively with optical axis ground in apparatus of the present invention.Photodetector 2 uses the photodiode that is encapsulated in the semiconductor laser shell.Semiconductor laser installing is in collimator 7.Collimation lens 3 uses aspheric calibration lens.The target mirror links to each other with testee 4, moves along the optical axis axis with object.
When instrument is interfered in debugging, according to the bias current in the parameter adjustment drive currents such as the threshold current of semiconductor laser and power, make semiconductor laser send laser earlier, general bias current is adjusted in 1.5 times of threshold current.The elliptical beam that lens 3 send laser instrument is transformed into round light beam, regulates the focal length of lens 3 and makes outgoing beam become the collimation directional light.The size modulations Current Regulation of the adjustment modulating current in the adjustment drive current is at 0.1 times of threshold current.After the laser instrument bright dipping, regulate light path, make laser behind the target surface of target mirror in the return laser light chamber, to guarantee to take place self-mixed interference.Regulate light path and make the feedback light intensity be about 5% of incident intensity, obtain periodic laser self-mixing interference signal.
Illustrate that in conjunction with Fig. 2 laser is from the hardware circuit adjusting that mixes vialog.Triangular wave signal source 9 produces triangular signal, forms the modulating current of DC stacked interchange through the stack of current-modulation circuit 10.This modulating current input semiconductor laser.What photodetector 2 will receive is converted to current signal from the mixed light light intensity, converts current signal to voltage signal through signal pre-processing circuit 11, and amplification voltage signal, at last this voltage signal is carried out differential and handles.The voltage signal that differential obtains carries out analog to digital conversion through A/D change-over circuit 12, obtains vibration signal after DSP data processing unit 13 is handled.Vibration signal finally outputs to outlet terminal 14.
In conjunction with Fig. 4 a, the step with DSP (digital signal processing circuit) collection and processing signals is described.Calling system preliminary examination program at first after system powers on is then called GPIO (general I mouth) initialize routine, finishes the output of functional definition of ADS8364 control signal and original levels; Next call the reset routine of ADS8364.Next step calls ADS8364 clock signal generating routine.Call the timer initialize routine then and start timer, make timer 3 cycle interruption, make the every 10us of program advance interrupt routine one time, wait for that ADS8364 is ready to (it is 1 that ADS8364 is ready to quantity of state ADCREADY initial value), start the AD conversion and make ADCREADY=0.Enter interruption after starting A/D conversion 10us, in interrupt routine, read transformation result and preservation, when the data number of preserving reaches 2048, begin to carry out data processing.Otherwise, continue sampling.After data processing finishes, change ADS8364 at last and be ready to quantity of state (ADCREADY=1) and return, this moment, sample frequency was 100KHZ.Sample frequency can be provided with as required flexibly.So move in circles, finish the collection of data.
In conjunction with Fig. 4 b, interrupt handling routine is described.When the number of data acquisition equals 2048, begin to carry out smoothing processing, remove the noise of sudden change.Then, the data processed difference.The later mould of difference is jumped signal and is superimposed upon on the square-wave signal.Determine that according to the positive-negative polarity of data mould jumping signal is in rising edge or negative edge.Then, the mould of taking the threshold decision method to detect rising edge in each modulation period is jumped number.The mould that adopts same disposal route to detect negative edge in same modulation period is jumped number.At last, ask the mould jumping figure that detects difference to add up, and remove error, reconstruct waveform, obtain vibration information.
Claims (1)
1, a kind of semiconductor laser self-mixing interference vibration meter comprises optical system and electricity system;
Described optical system, by with optical axis the photodetector, semiconductor laser, collimation lens and the target mirror that set gradually constitute;
Described electricity system is by signal source circuit, signal pre-processing circuit, the A/D change-over circuit, and DSP data processing unit and outlet terminal constitute;
Described signal source circuit is made of triangular wave signal source and current-modulation circuit;
Triangular wave signal source produces triangular signal, carries out current-modulation through noise spectra of semiconductor lasers behind the current-modulation circuit; The laser that semiconductor laser sends becomes directional light through behind the collimation lens, and this directional light incides on the target mirror, in the part light return laser light chamber, feedback light is carried the information of exterior object, after light in the laser cavity mixes mutually, interfere phenomenon, for from mixed light; Detected and be converted to corresponding current signal by photodetector from mixing light intensity, at first be converted to voltage signal through signal pre-processing circuit, differential is for being first-harmonic with the square wave again, the signal of stack sudden change; This signal is converted to digital signal through the A/D change-over circuit, is handled by the DSP data processing unit at last, by outlet terminal output result.
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Cited By (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102721461A (en) * | 2012-06-25 | 2012-10-10 | 哈尔滨工业大学 | Detection device and detection method for semiconductor laser self-mixing infrasound |
| CN102906534A (en) * | 2010-05-11 | 2013-01-30 | 图卢兹国立综合理工学院 | Device for the optical measurement of a physical parameter |
| CN103337776A (en) * | 2013-06-09 | 2013-10-02 | 安徽大学 | All-optical fiber type self-mixing distance measuring system of laser |
| CN104236464A (en) * | 2014-09-04 | 2014-12-24 | 宁波舜宇智能测量仪器有限公司 | Laser vibration displacement sensor and measuring method thereof |
| CN104460409A (en) * | 2014-10-16 | 2015-03-25 | 北京理工大学 | Laser self-mixing interference system with feedback light intensity self-adaptive adjustment function |
| CN104266584B (en) * | 2014-10-16 | 2017-03-29 | 北京理工大学 | For the feedback luminous intensity self-checking device of laser self-mixing interference system |
| CN106643543A (en) * | 2016-12-30 | 2017-05-10 | 东北石油大学 | Method for detecting deformation of surface of magnetic disk storage |
| CN107560713A (en) * | 2017-10-27 | 2018-01-09 | 罗沛棋 | Vibration signal extraction element based on gradual change transmitance filter |
| CN107817009A (en) * | 2017-09-30 | 2018-03-20 | 中国科学院长春光学精密机械与物理研究所 | A kind of laser detects monitoring device from mixing |
| CN108106715A (en) * | 2017-12-26 | 2018-06-01 | 中国科学院长春光学精密机械与物理研究所 | AC regeneration laser sound measurement method and device |
| CN108225543A (en) * | 2018-03-28 | 2018-06-29 | 中国科学院长春光学精密机械与物理研究所 | The orthogonal detection vibration measurement device and method of a kind of self-mixed interference |
| CN108760236A (en) * | 2018-05-31 | 2018-11-06 | 安徽大学 | The method for measuring feedback factor C in laser linewidth broadening factor α and Laser feedback system |
| CN108775954A (en) * | 2018-06-06 | 2018-11-09 | 岭南师范学院 | A kind of adjustable dual wavelength LD of resolution ratio is from mixing vibration measuring instrument and its measurement method |
| CN108931291A (en) * | 2018-06-30 | 2018-12-04 | 东北石油大学 | A kind of contactless microvibration measuring system and method |
| CN110186551A (en) * | 2019-06-20 | 2019-08-30 | 厦门大学 | Square wave transforming amplitudes measuring device and method based on self-mixed interference |
| CN110806274A (en) * | 2018-04-12 | 2020-02-18 | 安徽大学 | Strain sensing measurement device and method based on multi-longitudinal-mode self-mixing effect |
| WO2020135890A1 (en) * | 2018-12-25 | 2020-07-02 | 茂莱（南京）仪器有限公司 | Low-frequency vibration detection device employing laser interference |
-
2009
- 2009-04-01 CN CN200910030093A patent/CN101539454A/en active Pending
Cited By (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102906534A (en) * | 2010-05-11 | 2013-01-30 | 图卢兹国立综合理工学院 | Device for the optical measurement of a physical parameter |
| CN102721461A (en) * | 2012-06-25 | 2012-10-10 | 哈尔滨工业大学 | Detection device and detection method for semiconductor laser self-mixing infrasound |
| CN103337776A (en) * | 2013-06-09 | 2013-10-02 | 安徽大学 | All-optical fiber type self-mixing distance measuring system of laser |
| CN103337776B (en) * | 2013-06-09 | 2015-07-15 | 安徽大学 | All-optical fiber type self-mixing distance measuring system of laser |
| CN104236464A (en) * | 2014-09-04 | 2014-12-24 | 宁波舜宇智能测量仪器有限公司 | Laser vibration displacement sensor and measuring method thereof |
| CN104236464B (en) * | 2014-09-04 | 2017-03-22 | 宁波舜宇智能科技有限公司 | Laser vibration displacement sensor and measuring method thereof |
| CN104460409A (en) * | 2014-10-16 | 2015-03-25 | 北京理工大学 | Laser self-mixing interference system with feedback light intensity self-adaptive adjustment function |
| CN104266584B (en) * | 2014-10-16 | 2017-03-29 | 北京理工大学 | For the feedback luminous intensity self-checking device of laser self-mixing interference system |
| CN106643543A (en) * | 2016-12-30 | 2017-05-10 | 东北石油大学 | Method for detecting deformation of surface of magnetic disk storage |
| CN107817009A (en) * | 2017-09-30 | 2018-03-20 | 中国科学院长春光学精密机械与物理研究所 | A kind of laser detects monitoring device from mixing |
| CN107817009B (en) * | 2017-09-30 | 2020-10-13 | 中国科学院长春光学精密机械与物理研究所 | Laser self-mixing detection monitoring device |
| CN107560713A (en) * | 2017-10-27 | 2018-01-09 | 罗沛棋 | Vibration signal extraction element based on gradual change transmitance filter |
| CN108106715A (en) * | 2017-12-26 | 2018-06-01 | 中国科学院长春光学精密机械与物理研究所 | AC regeneration laser sound measurement method and device |
| CN108225543A (en) * | 2018-03-28 | 2018-06-29 | 中国科学院长春光学精密机械与物理研究所 | The orthogonal detection vibration measurement device and method of a kind of self-mixed interference |
| CN108225543B (en) * | 2018-03-28 | 2019-06-25 | 中国科学院长春光学精密机械与物理研究所 | A kind of the orthogonal detection vibration measurement device and method of self-mixed interference |
| CN110806274A (en) * | 2018-04-12 | 2020-02-18 | 安徽大学 | Strain sensing measurement device and method based on multi-longitudinal-mode self-mixing effect |
| CN110806274B (en) * | 2018-04-12 | 2020-12-15 | 安徽大学 | Strain sensing measurement device and method based on multi-longitudinal-mode self-mixing effect |
| CN108760236A (en) * | 2018-05-31 | 2018-11-06 | 安徽大学 | The method for measuring feedback factor C in laser linewidth broadening factor α and Laser feedback system |
| CN108775954A (en) * | 2018-06-06 | 2018-11-09 | 岭南师范学院 | A kind of adjustable dual wavelength LD of resolution ratio is from mixing vibration measuring instrument and its measurement method |
| CN108931291A (en) * | 2018-06-30 | 2018-12-04 | 东北石油大学 | A kind of contactless microvibration measuring system and method |
| WO2020135890A1 (en) * | 2018-12-25 | 2020-07-02 | 茂莱（南京）仪器有限公司 | Low-frequency vibration detection device employing laser interference |
| CN110186551A (en) * | 2019-06-20 | 2019-08-30 | 厦门大学 | Square wave transforming amplitudes measuring device and method based on self-mixed interference |
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Open date: 20090923 |