CN108917909A - High-precision amplitude real-time measurement apparatus and method based on self-mixed interference - Google Patents
High-precision amplitude real-time measurement apparatus and method based on self-mixed interference Download PDFInfo
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- CN108917909A CN108917909A CN201810648440.6A CN201810648440A CN108917909A CN 108917909 A CN108917909 A CN 108917909A CN 201810648440 A CN201810648440 A CN 201810648440A CN 108917909 A CN108917909 A CN 108917909A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
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Abstract
The invention discloses a kind of high-precision amplitude real-time measurement apparatus based on self-mixed interference, including laser light source, beam splitter, photodetector, reflecting mirror, signal processing unit, data processing display unit and measured object, the laser light source, beam splitter, photodetector, measured object and reflecting mirror are sequentially connected by an optical path, the input terminal of the signal processing unit is connected with the photodetector, and output end is connected with the data processing unit.The invention also discloses vibration amplitude measurement methods when a kind of high-precision real based on self-mixed interference.The present invention is not necessarily to the reference arm of conventional laser interferometer, and single armed optical path has easily collimation and reduces the noise sensitivity of system external circle.Using self-mixed interference principle to laser light source coherence without particular requirement, laser selects freedom degree big.Meanwhile the gain parameter of device is controllable, measurable minimum amplitude value is up to nanoscale；Signal spectrum characteristic value is obtained in frequency domain, several lines is not necessarily to, easily realizes wide scope real-time measurement.
Description
Technical field
The invention belongs to optical nano field of measuring technique, and in particular to a kind of high-precision amplitude based on self-mixed interference
Real-time measurement apparatus and method.
Background technique
Nanometer vibration measurement has increasingly in many applications such as high-accuracy engineering technology, Precision Machining, aerospace
Important meaning.Researchers propose the vibration amplitude measurement method of some significant weak vibration objects at present.Wherein, base
Has the advantages that contactless high-precision in the measurement means of optical technology and by attention.Common vibration of optical measurement method has
Geometrical optics approach and Through Optical Interference Spectra.However, the measuring method having been reported requires the pH effect of complex precise mostly
System, while measurement range is limited to the influence of optical maser wavelength, and extremely weak vibration can not be perceived；It is vibrated further for measured object
When amplitude is larger, traditional Fringe-counting method is time-consuming and is easy error.The Spectrum Method having been reported that before this【Optical
Engineering,52(5),2013】The minimum amplitude value that can be detected is about 0.21 λ, and resolution ratio is about λ/11.94.Repeatedly
Bounce technique【IEEE Photonics Journal,5(3),2013】Although increasing its measurement accuracy also phase with order of reflection
That answers gets higher, but it is larger for amplitude when, pursue high-precision while fringe number also increase severely therewith, to traditional fringe count
Method brings difficulty.Therefore, these are for realizing that the real-time applied field for obtaining nano high-precision resolution ratio of simple measurement merges
It is not suitable for.
Summary of the invention
For the vibration amplitude of the extremely weak Nano-level vibration object of efficient, simple, accurate measurement, the present invention devises one
High-precision amplitude measuring apparatus and method of the kind based on self-mixed interference；Its simple and compact for structure, method is simple and efficient, using model
It encloses wide.
To achieve the above object, the present invention uses following technical scheme：
A kind of high-precision amplitude measuring apparatus based on self-mixed interference, including laser light source, beam splitter, photodetection
Device, reflecting mirror, measured object, signal processing unit and data processing display unit；The laser light source, beam splitter, measured object and
Reflecting mirror is sequentially connected by an optical path；The photodetector, signal processing unit and data processing display unit successively circuit connection；
The laser that the laser light source issues is divided into two beams by the beam splitter, wherein a branch of be radiated at the measured object table
Face, it is dry from mixing laser occurs in the inner cavity for returning to the laser light source through the reflecting mirror again after measured object reflection
It relates to；Another beam is input to the photodetector, and the photodetector detects the output power of the laser light source, acquisition pair
The signal answered；The signal processing unit is delivered to the data processing unit after handling signal；The data processing
Display unit carries out calculating analysis to signal, obtains the amplitude of measured object.
Further, the signal processing unit includes Current Voltage converter amplifier circuit, block isolating circuit and filter circuit；
The input terminal of the Current Voltage converter amplifier circuit connects the output end of the photodetector, the input of the block isolating circuit
End connects the output end of the Current Voltage converter amplifier circuit, and output end connects the input terminal of the filter circuit.
Further, the data processing display unit includes data collecting card and computer, and the data collecting card connects
The output end of the signal processing unit is connect, and is communicated with the computer, the computer is for storing the signal
The data of processing unit sending simultaneously carry out real-time analysis processing.
The invention also discloses a kind of high-precision vibration amplitude measurement method based on self-mixed interference, using it is above-mentioned based on from
The high-precision amplitude measuring apparatus of mixed interference measures, and includes the following steps：
S1, prepare measured object, guarantee that the measured object has certain reflectivity, if allowing to paste mirror on measured object surface,
Measured object can not have reflectivity；
S2, the positional relationship for adjusting measured object and reflecting mirror guarantee that measured object and reflecting mirror form more light path structures；
S3, laser light source is opened, adjusts reflecting mirror and change more light path structures to adapt to various amplitude measurement demand, and guarantees
Laser being capable of return laser light light source；
The variation of S4, photodetector exploring laser light power obtain corresponding signal, and the signal processing unit is to signal
It carries out being transmitted to the digital processing display unit after value, filtering processing；
S5, the data processing display unit carry out analytical calculation to signal, solve the amplitude of measured object：
S51, according to the ratio of signal amplitude maximum frequency and fundamental frequency, it is corresponding from becoming to search corresponding Bessel function
Amount obtains the characteristic value m of signal spectrum；
S52, the gain parameter G for solving more light path structures；
Wherein N is order of reflection, and θ is laser light incident angle；
S53, amplitude solving model is established, solves the amplitude A of measured object：
Wherein, λ is optical maser wavelength.
After adopting the above technical scheme, compared with the background technology, the present invention, having the following advantages that：
1. the present invention is not necessarily to the reference arm of conventional laser interferometer, single armed optical path has easily collimation and reduces system external
The noise sensitivity on boundary.Using self-mixed interference principle to laser light source coherence without particular requirement, laser selects freedom degree
Greatly.
2. not only having the invention proposes the new method of more light path structure combination frequency spectrums compared to single Spectrum Method
Higher resolution ratio, and there is bigger measurement range；And compared to single multiple echo method, it is identical in order of reflection
In the case of, this method not only has higher measurement accuracy (up to nanoscale), while avoiding and overturning point is looked for combine striped meter
The triviality of number method measurement amplitude.
3. the whole design of measuring system is easily integrated, measurement method is easy to be reliable, is suitble to industrial application.
Detailed description of the invention
Fig. 1 is the schematic diagram of laser self-mixing interference technology.
Fig. 2 is the structural schematic diagram of amplitude measuring apparatus of the present invention.
Fig. 3 is the flow diagram of vibration amplitude measurement method of the present invention.
Fig. 4 is the LabVIEW surface chart of present invention measurement display.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.
Before embodiment is described, basic principle of the invention is illustrated first.The present invention is based on sharp
What the self-mixed interference principle of light was designed, when measured object is subjected to displacement, carry the reflected light of external cavity path variable signal
It will affect inner cavity, disturb laser power, is i.e. the displacement information of measured object is embodied in optical power fluctuation.
Embodiment one
Referring to Fig. 2, the invention discloses a kind of amplitude measuring apparatus based on self-mixed interference, including laser light source 1,
Beam splitter 2, photodetector 3, reflecting mirror 4, signal processing unit 5, data processing display unit 6 and measured object 7, wherein：
Laser light source 1 uses semiconductor pumped all-solid-state green laser.Certainly, other standards can also be used in laser light source 1
Straightforward satisfactory laser, the present invention are not particularly limited.
Refering to what is shown in Fig. 2, beam splitter 2 is used to the laser of outgoing being divided into two-way, measured object 7 is got to all the way, another way is beaten
The fluctuation of laser power is detected to photodetector 3；
Reflecting mirror 4 is used to form more light path structures from measured object to meet different measurement demands, while guaranteeing that laser returns
Return to laser light source 1.In the present embodiment, laser light source 1, beam splitter 2, photodetector 3, measured object 7 and reflecting mirror 4 are shared the same light
Axis is set gradually.
Signal processing unit 5 includes Current Voltage converter amplifier circuit 51, block isolating circuit 52 and filter circuit 53, wherein：
The output end of the input terminal connection photodetector 3 of Current Voltage converter amplifier circuit 51, Current Voltage conversion electricity
Sample resistance, triode or integrating circuit can be used in road 51, and in the present embodiment, current-to-voltage converting circuit 51 is using integral electricity
Road, the current signal that photodetector 3 exports are converted into voltage signal by integrating circuit.
The output end of the input terminal connection Current Voltage converter amplifier circuit 51 of block isolating circuit 52, output end connection filtering
The input terminal of circuit 53.
It will be understood by those skilled in the art that when laser light source 1 is using other above-mentioned photodetectors, signal
The structure of processing unit 5 is also required to do corresponding adjustment, to meet the processing requirement to optical power signals.
Data processing display unit 6 includes data collecting card 61 and computer 62, the processing of 61 connection signal of data collecting card
The output end of unit 5, and communicated with computer 62, computer 62 is used to store the data of the sending of signal processing unit 5 simultaneously
Carry out real-time analysis processing.
Embodiment two
Cooperate shown in Fig. 2 and Fig. 3, the invention discloses a kind of high-precision vibration amplitude measurement method based on self-mixed interference,
This method uses the high-precision amplitude measuring apparatus based on self-mixed interference of embodiment one, realizes especially by following steps：
S1, prepare measured object, guarantee that the measured object has certain reflectivity；
S2, the positional relationship for adjusting measured object and reflecting mirror guarantee that measured object and reflecting mirror form more light path structures；
S3, laser light source is opened, adjusts reflecting mirror and change more light path structures to adapt to various amplitude measurement demand, and guarantees
Laser being capable of return laser light light source；
The variation of S4, photodetector exploring laser light power obtain corresponding signal, and the signal processing unit is to signal
The digital processing display unit is transmitted to after being handled；
Specially：Start computer 62 on LabVIEW program, photodetector 3 generate current signal through signal at
Reason unit 5 carries out being transferred to data collecting card 61 after value, filtering processing, and is sent to computer 62 by data collecting card 61
Carry out processing display in real time.
S5, the data processing display unit carry out analytical calculation to signal, solve the amplitude of measured object：
S51, according to the ratio of signal amplitude maximum frequency and fundamental frequency, it is corresponding from becoming to search corresponding Bessel function
Amount obtains the characteristic value m of signal spectrum；
S52, the gain parameter G for solving more light path structures；
Wherein N is order of reflection, and θ is laser light incident angle；
S53, amplitude solving model is established, solves the amplitude A of measured object：
Wherein, λ is optical maser wavelength.
S63, the value of λ, m, G are substituted into amplitude solving model, calculates the amplitude A of measured object 7.
In order to verify feasibility of the invention, chooses nanometer translation stage (setting amplitude is 75nm) and be used as measured object 7, use
Measurement method of the invention carries out amplitude measurement, specific as follows：
Semiconductor pumped all-solid-state green laser central wavelength lambda is 532nm.
In measurement process, the gain parameter G of more light path structures is 3.924, and the characteristic value m of signal spectrum is 6.5.
The value of above λ, G, m are substituted into following formula：
Finally calculating amplitude A is 70.13nm, and compared with the amplitude 75nm of the setting of nanometer translation stage, error is
4.87nm, Fig. 4 are that LabVIEW shows measurement result, so as to show that measurement method of the invention is feasible.
The foregoing is only a preferred embodiment of the present invention, but scope of protection of the present invention is not limited thereto,
In the technical scope disclosed by the present invention, any changes or substitutions that can be easily thought of by anyone skilled in the art,
It should be covered by the protection scope of the present invention.Therefore, protection scope of the present invention should be with scope of protection of the claims
Subject to.
Claims (4)
1. a kind of high-precision amplitude measuring apparatus based on self-mixed interference, it is characterised in that：Including laser light source, beam splitter,
Photodetector, reflecting mirror, measured object, signal processing unit and data processing display unit；The laser light source, beam splitter,
Measured object and reflecting mirror are sequentially connected by an optical path；The photodetector, signal processing unit and data processing display unit are successively
Circuit connection；
The laser that the laser light source issues is divided into two beams by the beam splitter, wherein a branch of be radiated at the measured object surface,
Laser self-mixing interference occurs in the inner cavity for returning to the laser light source through the reflecting mirror again after measured object reflection；
Another beam is input to the photodetector, and the photodetector detects the output power of the laser light source, corresponded to
Signal；The signal processing unit is delivered to the data processing unit after handling signal；The data processing is aobvious
Show that unit carries out calculating analysis to signal, obtains the amplitude of measured object.
2. a kind of high-precision amplitude measuring apparatus based on self-mixed interference as described in claim 1, it is characterised in that：It is described
Signal processing unit includes Current Voltage converter amplifier circuit, block isolating circuit and filter circuit；The Current Voltage conversion amplification
The input terminal of circuit connects the output end of the photodetector, and the input terminal of the block isolating circuit connects the Current Voltage and turns
The output end of amplifying circuit is changed, output end connects the input terminal of the filter circuit.
3. a kind of high-precision amplitude measuring apparatus based on self-mixed interference as described in claim 1, it is characterised in that：It is described
Data processing display unit includes data collecting card and computer, and the data collecting card connects the defeated of the signal processing unit
Outlet, and communicated with the computer, the computer is used to store the data that the signal processing unit issues and goes forward side by side
The real-time analysis processing of row.
4. a kind of high-precision vibration amplitude measurement method based on self-mixed interference, using as described in claim 1 based on mixing certainly
The high-precision amplitude measuring apparatus of interference measures, which is characterized in that includes the following steps：
S1, prepare measured object, guarantee that the measured object has certain reflectivity, if allowing to paste mirror on measured object surface, be tested
Object can not have reflectivity；
S2, the positional relationship for adjusting measured object and reflecting mirror guarantee that measured object and reflecting mirror form more light path structures；
S3, laser light source is opened, adjusts reflecting mirror and change more light path structures to adapt to various amplitude measurement demand, and guarantees laser
It being capable of return laser light light source；
The variation of S4, photodetector exploring laser light power obtain corresponding signal, and the signal processing unit carries out signal
The digital processing display unit is transmitted to after blocking, filtering processing processing；
S5, the data processing display unit carry out analytical calculation to signal, solve the amplitude of measured object：
S51, according to the ratio of signal amplitude maximum frequency and fundamental frequency, search the corresponding independent variable of corresponding Bessel function and obtain
Obtain the characteristic value m of signal spectrum；
S52, the gain parameter G for solving more light path structures；
Wherein N is order of reflection, and θ is laser light incident angle；
S53, amplitude solving model is established, solves the amplitude A of measured object：
Wherein, λ is optical maser wavelength.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201810648440.6A CN108917909A (en) | 2018-06-22 | 2018-06-22 | High-precision amplitude real-time measurement apparatus and method based on self-mixed interference |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110186551A (en) * | 2019-06-20 | 2019-08-30 | 厦门大学 | Square wave transforming amplitudes measuring device and method based on self-mixed interference |
| CN112414534A (en) * | 2020-10-19 | 2021-02-26 | 厦门大学 | Phase multiplication amplitude measuring method and device based on self-mixing interference |
| CN112648882A (en) * | 2020-12-24 | 2021-04-13 | 航天科工微电子***研究院有限公司 | Coupling photoelectric data transmission system in high-light equipment |
-
2018
- 2018-06-22 CN CN201810648440.6A patent/CN108917909A/en active Pending
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| 伍迪: "基于激光自混合干涉技术的井下成像研究与应用", 《中国优秀硕士学位论文全文数据库工程科技Ⅰ辑》 * |
| 季新昕: "基于半导体激光器自混合干涉效应对振动振幅的测量与研究", 《中国优秀硕士学位论文全文数据库信息科技辑》 * |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110186551A (en) * | 2019-06-20 | 2019-08-30 | 厦门大学 | Square wave transforming amplitudes measuring device and method based on self-mixed interference |
| CN112414534A (en) * | 2020-10-19 | 2021-02-26 | 厦门大学 | Phase multiplication amplitude measuring method and device based on self-mixing interference |
| CN112648882A (en) * | 2020-12-24 | 2021-04-13 | 航天科工微电子***研究院有限公司 | Coupling photoelectric data transmission system in high-light equipment |
| CN112648882B (en) * | 2020-12-24 | 2022-08-02 | 航天科工微电子***研究院有限公司 | Coupling photoelectric data transmission system in high-light equipment |
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