CN110082432A - Plate fault of construction ultrasound resonance quantitative NDT method based on uniform design - Google Patents

Plate fault of construction ultrasound resonance quantitative NDT method based on uniform design Download PDF

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CN110082432A
CN110082432A CN201910416897.9A CN201910416897A CN110082432A CN 110082432 A CN110082432 A CN 110082432A CN 201910416897 A CN201910416897 A CN 201910416897A CN 110082432 A CN110082432 A CN 110082432A
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焦敬品
马百义
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Beijing University of Technology
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    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/12—Analysing solids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/44—Processing the detected response signal, e.g. electronic circuits specially adapted therefor
    • G01N29/4409—Processing the detected response signal, e.g. electronic circuits specially adapted therefor by comparison
    • G01N29/4418—Processing the detected response signal, e.g. electronic circuits specially adapted therefor by comparison with a model, e.g. best-fit, regression analysis

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Abstract

The invention discloses the plate fault of construction ultrasound resonance quantitative NDT methods based on uniform design, and piezoelectricity singing piece to be attached in detection plate for flat-bottom hole defects detection, and measuring microphone is mounted on scanning support and places perpendicular to detection plate；Using computer gantry, drives measuring microphone to receive each test point vibration signal of detection zone, saved after the averaged processing of signal；Collected vibration signal is handled by computer, maximum variance between clusters is based on, obtains local defect resonance frequency and defect imaging figure, Uniform Design is based on, establishes the relational model of local defect resonance frequency, defect radius and depth of defect；Binary conversion treatment is carried out to defect imaging figure, calculates the equivalent redius of defect；Local defect resonance frequency and defect radius are updated in established relational model, depth of defect is obtained；The final quantitative NDT realized to defect.

Description

Plate fault of construction ultrasound resonance quantitative NDT method based on uniform design
Technical field
The present invention relates to a kind of lossless detection method of defect quantitative, the plate fault of construction for being based particularly on uniform design is super Acoustic resonance quantitative detecting method.This method is suitable for fault in material quantitatively characterizing, belongs to field of non destructive testing.
Background technique
Hardened structure is a kind of common structure type in industrial equipment, is widely used in aerospace, ship, machine-building Equal industrial circles.For common hardened structure, construction features and complicated working environment because of itself are rushed by external load Hit, the factors effect such as stress is concentrated, chemical attack and temperature fatigue when, easily crack on the surface of hardened structure and inside, The defects of hole, corrosion；Meanwhile the composite panels such as carbon fibre reinforced composite, fiber glass reinforcement were manufacturing In journey and in use process, it is also possible to other various damages occur, common type of impairment has stomata, layering, degumming, divides Layer etc., these damages can cause the reduction of the strength and stiffness of composite laminated structures, in addition the effect of external applied load then can The extension that layering may be caused, eventually leading to structure, simultaneously recurring structure destroys overall collapse when far below design value.In industry In the application such as field, if existing defect can not be detected in time and take corresponding measure, it is likely that the serious consequence that will cause. Therefore, in order to ensure the safety of hardened structure, the generation of peril is reduced, studies effective hardened structure defect quantitative detection method Not only there is important scientific research meaning, but also there is very big engineering application value.
Currently, mainly having Magnetic testing, EDDY CURRENT, ray detection, infiltration for plate fault of construction lossless detection method Detection, ultrasound detection, above-mentioned various lossless detection methods have its unique application field and susceptible lesions class that can be detected Type.What ultrasound detection utilized is that ultrasonic wave generates reflection, transmission and decaying when encountering defect, carries out defects detection, this method tool Have the advantages that detection depth is big, good directionality, penetration capacity is strong, detection range is wide.But conventional ultrasonic wave detection technique belong to by Point detection, efficiency is lower, and non-destructive tests and quantitative detection ability are limited.And conventional Ultrasound Resonance detector method has detection consistent Property good, the advantages that operating process is simple, be widely used in damage check and evaluation.Ultrasound resonance method [1-6] is usually base In the measurement of the resonance frequency of solid, to determine elasticity modulus.And these resonance frequencies are the geometry of testee, quality and bullet The function of property constant (rigidity), so any defect may all cause the variation of resonance spectrum.Therefore, object is not damaged It can determine that testee is with the frequency spectrum of testee, such as the change of resonance frequency shift, peak width, response amplitude variation information It is no impaired, and may also determine position and the injury severity score of defect.Ultrasound resonance method has in terms of defects detection There is certain application, no matter any defect where is located at, can all influence one or more resonance frequencies in object frequency spectrum.Thing In reality, the part of material stiffness reduces the opposite ruler that defect and test specimen are apparently depended on to the influence that sample overall stiffness changes It is very little.In practical applications, traditional ultrasound resonance non-destructive testing technology is mainly used in small parts, in detection large component The ability of small defect is severely limited.Therefore, ultrasound resonance detection technique can according to standard to similar component carry out it is qualified/ Unqualified classification, rather than position and visualize defect [5].
Medical domain research in, it is a kind of for improve small field trash acoustics act on method be applied to gas in liquid It steeps ultrasonics [7].Due to the resonance characteristic of bubble, the local nonlinearity of medicine contrast agent is significantly improved, this is abnormal non- The discovery of linear ultrasonic response achieves breakthrough [8-9] in ultrasound medicine diagnosis.The interaction of sound wave and defect The amplitude of defect vibration can be caused to characterize by excitation sound wave.Similarly, making a more reasonable mode of defect vibration is Acoustic excitation is carried out under its own intrinsic frequency, to generate so-called local defect resonance, this meeting is so that fault location vibrates Amplitude aggravates and is confined to affected area.Rokhlin S I scholar [10] theoretically analyzes defect in sound wave and solid The condition of resonance interaction, gives the simple approximate equation of resonance frequency.Sarens B [11] and Angelis G D [12] It is layered in composite material and the vibrational structure of flat-bottom hole Deng being analyzed by way of numerical simulation and cutting imagination.In recent years, The scholars such as Solodov I [13] propose the interaction that sound wave and defect are improved using local defect resonance, effectively distinguish Defect and other positions of material out.Meanwhile the scholar theoretically system survey local defect resonance and flat-bottom hole and grooving The local defect resonance frequency theoretical calculation model of defect, resonance frequency are related with the effective rigidity of defect and effective mass. The formula constructs the relationship between flaw size and local defect resonance frequency, but the calculating of resonance frequency is to the geometry of defect The requirement of size relationship is stringenter, which has certain limitation.In addition to this, [14] Solodov I Equal particular resonance characteristic of the scholars based on defect, has also built a set of contactless local defect resonance scanning from experimental system Imaging system, and applied it in the various types of defects detections of material well.For the part for accurately obtaining unknown defect Defect resonance frequency, Hettler J [15] etc. propose a kind of local defect Resonance detector side based on maximum variance between clusters Method, by emulation with experimental verification this method for being detected the defects of layering, unsticking in flat hole defect and composite material Validity, and using the maximum value of defect imaging figure characteristic value decline 12dB as the quantitatively characterizing foundation of blemish surface, but this Research does not account for the quantitatively characterizing to defect in the depth direction.
In order to carry out quantitative assessment to defect from multiple angles, except the surface geometry parameter to defect characterizes Outside, the detection of defect in the depth direction is also particularly important for the accurate evaluation of defect.If can set up and defect table Face geometric parameter and the related mathematical model of depth of defect geometric parameter, then the quantitative assessment of defect in the depth direction just becomes It obtains easy to accomplish.And in practical problem analysis, founding mathematical models usually require largely to test, so that model becomes It is more significant, but test number (TN) will increase the complexity of calculation amount and problem analysis too much.Accordingly it is desirable to establishing During relational model, the test number (TN) carried out is minimum, and obtained information content is most.Well-distributed design is exactly suitable It answers this requirement and generates, it is a kind of a kind of experimental design side for only considering testing site uniformly dispersing in trial stretch Method.It can pick out the representative testing site in part from uniformity angle from comprehensive test point, these testing sites are abundant Equilibrium dispersion, but remain to the main feature of antimer system.It, which is focused on, considers testing site uniformly dispersing in the hope of logical in trial stretch Least test is crossed to obtain most information, the processing of test result mostly uses regression analysis, utilizes regression analysis The model obtained can carry out the importance analysis of influence factor and the resulting estimate of New Terms test, forecast and optimization [16-17]。
For defect quantitative test problems, each defect has its corresponding local defect resonance frequency.It is more accurate Ground to blemish surface geometric parameter carry out quantitative assessment, this method be on the Research foundation of the scholars such as Hettler J [15], it is right Defect imaging figure carries out binary conversion treatment, to obtain the surface geometry parameter of defect.Meanwhile to realize defect in the depth direction Quantitative detection completed to lacking by the relational model established between local defect resonance frequency, defect radius and depth of defect Fall into the detection of geometric parameter in the depth direction.The final quantitative NDT realized to defect.
Summary of the invention
It is an object of the invention to develop a kind of plate fault of construction ultrasound resonance quantitative NDT based on uniform design Method.By taking flat hole defect as an example, maximum variance between clusters are based on, seek out local defect resonance frequency and its corresponding are lacked Image is fallen into, binary conversion treatment then is carried out to defect imaging figure, to obtain the equivalent redius of defect.To realize defect in depth Quantitative detection on direction is based on Uniform Design, establishes between local defect resonance frequency, defect radius and depth of defect Relational model.Local defect resonance frequency and defect radius are updated in model, in the hope of depth of defect.Final realization pair The quantitative NDT of defect geometry parameter (defect radius and depth of defect).
Plate fault of construction ultrasound resonance quantitative NDT method proposed by the present invention based on uniform design, it is substantially former Reason is:
Local defect resonance shows as the vibrational eigenmode formula of own, i.e., strong office is shown at defective locations The characteristics such as portion, quasi-circular, amplitude.In local defect resonance frequency corresponding position, the vibration amplitude and its remaining part of plate of defect area Contrast between the average amplitude of position reaches maximum.Using broadband signal (such as Chirp signal) as excitation, with detection zone Frequency spectrum of each point from surface vibration makees every group of data of the spectral magnitude composition of each test point under each frequency as analysis object Binary conversion treatment, the method for the treatment process foundation is maximum between-cluster variance (OTSU) algorithm in image procossing, i.e., between class Threshold value when variance reaches maximum is best binarization segmentation threshold value, the hypothesis defect area of every group of data available in this way with Non-defective region.
OTSU algorithm is the highly effective algorithm that a kind of pair of image carries out binaryzation.Original image is divided into prospect and back using threshold value Two images of scape.When background and when prospect difference maximum, the threshold value taken be it is best, the standard for measuring this difference is exactly maximum Inter-class variance.Note prospect points account for image ratio w0, average gray x0；Background points account for image ratio w1, average gray x1, then image Overall average gray scale be
X=w0x0+w1x1 (1)
So, the variance of prospect and background is
When variance Var maximum, it is believed that prospect and background difference are maximum at this time.
Using contrast function, i.e. formula (3), analytical calculation is carried out to the contrast value of every group of data.
S (x, y, f)=FFT [s (x, y, t)] (4)
F '=arg max [g (f)] (5)
In formula, s (x, y, t) is from face time domain response；S (x, y, f) is the Fourier transformation from face time domain response；Ω is inspection Survey region；ΩdFor the defect area of hypothesis；Ω\ΩdFor the non-defective region of hypothesis；G (f) is the contrast value under each frequency； F ' is the local defect resonance frequency of defect.When contrast value reaches maximum in frequency band, corresponding frequency is defect Local defect resonance frequency f ', detection zone each point spectral magnitude S (x, y, f ') corresponding to the frequency is defect imaging figure.
Defect imaging figure is subjected to binarization segmentation processing based on maximum variance between clusters, it is equivalent to obtain the defects of image Area, and then calculate the equivalent redius of defect.
For the relational model for establishing local defect resonance frequency, defect radius and depth of defect, with the radius and depth of defect Degree obtains geometric parameter and is testing as experimental factor using Data Processing System (DPS) data processing software The uniform designs table of the defects of range.Based on uniform designs table, the defect carry out office that different radii in table and depth are combined The test of portion's defect Resonance detector, obtains its local defect resonance frequency.Based on relational model (6), Statistical is utilized Product and Service Solutions (SPSS) software carries out regression analysis to its result, according to the inspection of regression result Index is tested, determines model regression coefficient, to obtain the higher regression model of conspicuousness.
In formula, (h, a) is local defect resonant frequency value to f ', and a, h are the factor of Uniform Design, the i.e. radius of defect And depth, x1…x11For the regression coefficient of model.
Local defect resonance frequency and defect radius are updated in established regression relation model, in the hope of defect depth Degree.
Technical scheme is as follows:
Device of the present invention is referring to Fig. 1, including arbitrary-function generator 1, voltage amplifier 2, piezoelectricity singing piece 3, measuring microphone 4, capture card 5, computer 6 and scanning support 7.Firstly, function generator 1 is connected with voltage amplifier 2, use Amplify in the output of pumping signal；The delivery outlet of voltage amplifier 2 is connected with piezoelectricity singing piece 3, for motivating detection test specimen Vibration；Then, measuring microphone 4 is connected with capture card 5, the vibration signal for collection plate；The number that capture card 5 collects According to being transmitted to computer 6, the analysis and processing for data；Scanning support 7 drives measuring microphone 4 to scan fortune in detection zone It is dynamic, so that measuring microphone 4 receives the vibration signal at scanning area different location.
Plate fault of construction ultrasound resonance quantitative NDT method proposed by the present invention based on uniform design be by with What lower step was realized, flow chart is as shown in Figure 2:
1) DPS data processing software is utilized, obtains geometric parameter in the uniform designs table of the defects of trial stretch.
2) test specimen chooses the plate of the flat hole defect combined comprising two groups of different radiis, different depth.Wherein, one group For the uniform designs table sample set defect for opening relationships model, another group is prediction defect to be detected；
3) apply Chirp broadband signal in piezoelectricity singing piece, piezoelectricity singing piece is attached to detection zone external position, between the two It is coated with couplant.It will test plate to be placed in parallel below scanning support, measuring microphone is mounted on scanning support and perpendicular to detection Plate；
4) computer gantry is utilized, measuring microphone is driven to sweep the detection zone in detection plate with serpentine path It retouches, the vibration signal for receiving each test point of scanning area saves the detection signal after signal averaging is handled；
5) collected vibration signal is handled by computer.Based on maximum variance between clusters, according to formula (3) (4) (5) calculate local defect resonance frequency；
6) change energized position and scanning area position, repeat step 3)~5), obtain the office of each defect in sample set Portion's defect resonance frequency according to actual defects radius, depth of defect parameter, and is based on model (6), is returned and divided using SPSS software Module is analysed, the relational model of local defect resonance frequency, defect radius and depth of defect is obtained；
7) for the defect to be detected in forecast set, step 6) is repeated, its local defect resonance frequency is obtained.Based on maximum Ostu method carries out binary conversion treatment to defect imaging figure S (x, y, f '), calculates defect radius.
8) local defect resonance frequency and defect radius are updated in the relational model that step 6) is established, find out defect Depth.
Detailed description of the invention
Fig. 1 detection device system diagram.
1, arbitrary-function generator in figure, 2, voltage amplifier, 3, piezoelectricity singing piece, 4, measuring microphone, 5, capture card, 6, computer, 7, scanning support
Fig. 2 is this method implementation flow chart.
Fig. 3 is the processing flow schematic diagram of system.
Specific embodiment
Below with reference to specific experiment, the invention will be further described:
This experiment implementation process the following steps are included:
Experimental system is built: building experimental system according to detection device system diagram shown in FIG. 1, system includes arbitrary function Generator 1, voltage amplifier 2, piezoelectricity singing piece 3, measuring microphone 4, capture card 5, computer 6 and scanning support 7.Firstly, will Function generator 1 is connected with voltage amplifier 2, and the output for pumping signal is amplified；The delivery outlet and piezoelectricity of voltage amplifier 2 Piezo 3 is connected, for motivating the vibration of detection test specimen；Then, measuring microphone 4 is connected with capture card 5, for collection plate Vibration signal；The data that capture card 5 collects are transmitted to computer 6, the analysis and processing for data；Scanning support 7 drives The scanning motion in detection zone of measuring microphone 4, so that measuring microphone 4 receives the vibration at scanning area different location Signal；
Test specimen selection: test specimen is chosen having a size of 500mm × 500mm × 9.5mm poly (methyl methacrylate) plate, contains in plate There is the flat hole defect of multiple and different radiuses, different depth combination.These defects are divided into two groups, A group is for opening relationships The uniform designs table sample set defect of model, table 1 give the specific geometric parameter of these defects；B group is predicted with to be detected Defect；
Detection parameters setting: for piezoelectricity singing piece through couplant patch on test specimen, pumping signal is Chirp broadband signal, Signal frequency range is 0~100kHz, when excitation a length of 1ms.Pumping signal is amplified through voltage amplifier, amplitude 20Vpp.It surveys Amount microphone vertical panel is fixed on scanning support, apart from 1~2mm of detection plate, to receive detection zone each point vibration signal, signal A length of 2ms when reception.Signal is transmitted to capture card, and data are 256 times average；
The experiment of local defect Resonance detector: run function generator and voltage amplifier are controlled by computer to defect Scan path saves collected detection zone each point vibration signal.Similarly, for the detection of other defect on plate, change Become energized position and scanning area position, repeat the above detecting step and stores signal；
Digital Signal Analysis and Processing: being based on maximum variance between clusters, is calculated according to formula (3) (4) (5) each in sample set The local defect resonance frequency of defect；According to actual defects radius, depth of defect parameter, and model (6) are based on, it is soft using SPSS Part regression analysis module, obtains the relational model of local defect resonance frequency, defect radius and depth of defect.For in forecast set Defect to be detected, repeat step 5, obtain its local defect resonance frequency.Based on maximum variance between clusters, to defect imaging figure S (x, y, f ') carries out binary conversion treatment, calculates defect radius；Local defect resonance frequency and defect radius are updated to and are built In vertical relational model, depth of defect is found out.
Analysis of experimental results: as shown in Table 2, the geometric parameter calculated result of forecast set defect is predicted close to actual value As a result more accurate.Therefore, the plate fault of construction ultrasound resonance quantitative detecting method based on uniform design is for realizing defect Quantitative NDT is feasible.
It is a typical case of the invention above, it is of the invention using without being limited thereto.
Table 1
Regression relation model:
Table 2
Bibliography
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[2]Kam T Y,Lee T Y.Detection of cracks in structures using modal test data[J].Engineering Fracture Mechanics,1992,42(2):381-387.
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[4]Rizos P F,Aspragathos N,Dimarogonas A D.Identification ofcrack location and magnitude in a cantilever beam from the vibration modes[J] .Journal of Sound&Vibration,1990, 138(3):381-388.
[5]Migliori A,Sarrao J L.Resonant ultrasound spectroscopy: applications to physics,materials measurements,andnondestructive evaluation [M].Wiley-Interscience,1997.
[6]Kaewunruen S,Remennikov A M.Field trials for dynamic characteristics of railway track and its components using impact excitation technique[J].NDT&E International,2007, 40(7):510-519.
[7]De Jong N.Ultrasound scattering properties ofAlbunex microspheres [J].Ultrasonics,1993, 31(3):175.
[8]Frinking P J A,Bouakaz A,Kirkhorn J,et al.Ultrasound contrast imaging:current and new potential methods[J].Ultrasound in Medicine&Biology, 2000,26(6):965-975.
[9]Averkiou MA.Tissue harmonic imaging[C]//Ultrasonics Symposium.IEEE,2002.
[10]Rokhlin S I.Resonance phenomena of Lamb waves scattering by a finite crack in a solid layer[J].Journal oftheAcoustical Society ofAmerica, 1981,69(4):922-928.
[11]Sarens B,Verstraeten B,Glorieux C,et al.Investigation of contact acoustic nonlinearity in delaminations by shearographic imaging,laser doppler vibrometric scanning and finite difference modeling[J].IEEE Transactions on Ultrasonics Ferroelectrics&Frequency Control,2010,57(6):1383-95.
[12]Angelis G D,Meo M,Almond D P,et al.A new technique to detect defect size and depth in composite structures using digital shearography and unconstrained optimization[J].NDT&E International,2012,45(1):91-96.
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Claims (2)

1. the plate fault of construction ultrasound resonance quantitative NDT method based on uniform design, it is characterised in that:
Local defect resonance shows as the vibrational eigenmode formula of own, i.e., shows at defective locations strong local, quasi- Round, amplitude characteristic；In local defect resonance frequency corresponding position, the vibration amplitude of defect area and being averaged for remaining position of plate Contrast between amplitude reaches maximum；Using broadband signal as excitation, frequency spectrum using detection zone each point from surface vibration as Analyze object, binary conversion treatment made to every group of data of the spectral magnitude composition of each test point under each frequency, treatment process according to According to method be maximum between-cluster variance OTSU algorithm in image procossing, i.e., threshold value when reaching maximum with inter-class variance is best Binarization segmentation threshold value, obtain so every group of data hypothesis defect area and non-defective region；
OTSU algorithm is the highly effective algorithm that a kind of pair of image carries out binaryzation；Original image is divided into foreground and background two using threshold value A image；When background and when prospect difference maximum, the threshold value taken be it is best, the standard for measuring this difference is exactly between maximum kind Variance；Note prospect points account for image ratio w0, average gray x0；Background points account for image ratio w1, average gray x1, then image is total Average gray is
X=w0x0+w1x1 (1)
So, the variance of prospect and background is
When variance Var maximum, it is believed that prospect and background difference are maximum at this time；
Using contrast function, i.e. formula (3), analytical calculation is carried out to the contrast value of every group of data；
S (x, y, f)=FFT [s (x, y, t)] (4)
F '=arg max [g (f)] (5)
In formula, s (x, y, t) is from face time domain response；S (x, y, f) is the Fourier transformation from face time domain response；Ω is detection zone Domain；ΩdFor the defect area of hypothesis；Ω\ΩdFor the non-defective region of hypothesis；G (f) is the contrast value under each frequency；F ' is The local defect resonance frequency of defect；When contrast value reaches maximum in frequency band, corresponding frequency is the office of defect Portion defect resonance frequency f ', detection zone each point spectral magnitude S (x, y, f ') corresponding to the frequency are defect imaging figure；
Defect imaging figure is subjected to binarization segmentation processing based on maximum variance between clusters, obtains the defects of image equivalent face Product, and then calculate the equivalent redius of defect；
For the relational model for establishing local defect resonance frequency, defect radius and depth of defect, made with the radius of defect and depth Geometric parameter is obtained in the uniform designs table of the defects of trial stretch using DPS data processing software for experimental factor；Base In uniform designs table, the defect combined to different radii in table and depth carries out the test of local defect Resonance detector, obtains its office Portion's defect resonance frequency；Based on relational model (6), regression analysis is carried out to its result using SPSS software, according to regression result Test rating, model regression coefficient is determined, to obtain the higher regression model of conspicuousness；
In formula, (h, a) is local defect resonant frequency value to f ', and a, h are the factor of Uniform Design, the i.e. radius and depth of defect Degree, x1…x11For the regression coefficient of model.
2. the plate fault of construction ultrasound resonance quantitative NDT method according to claim 1 based on uniform design, Be characterized in that: this method through the following steps that realize,
1) DPS data processing software is utilized, obtains geometric parameter in the uniform designs table of the defects of trial stretch；
2) test specimen chooses the plate of the flat hole defect combined comprising two groups of different radiis, different depth；Wherein, one group is use In the uniform designs table sample set defect of opening relationships model, another group is prediction defect to be detected；
3) apply Chirp broadband signal in piezoelectricity singing piece, piezoelectricity singing piece is attached to detection zone external position, is coated between the two Couplant；It will test plate to be placed in parallel below scanning support, measuring microphone is mounted on scanning support and perpendicular to detection plate；
4) computer gantry is utilized, measuring microphone is driven to scan the detection zone in detection plate with serpentine path, The vibration signal for receiving each test point of scanning area saves the detection signal after signal averaging is handled；
5) collected vibration signal is handled by computer；Based on maximum variance between clusters, according to formula (3), (4), (5) local defect resonance frequency is calculated；
6) change energized position and scanning area position, repeat step 3)~5), the part for obtaining each defect in sample set lacks Resonance frequency is fallen into, according to actual defects radius, depth of defect parameter, and model (6) is based on, utilizes SPSS software regression analysis mould Block obtains the relational model of local defect resonance frequency, defect radius and depth of defect；
7) for the defect to be detected in forecast set, step 6) is repeated, its local defect resonance frequency is obtained；Based between maximum kind Variance method carries out binary conversion treatment to defect imaging figure S (x, y, f '), calculates defect radius；
8) local defect resonance frequency and defect radius are updated in the relational model that step 6) is established, find out defect depth Degree.
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