CN110057337A - Compare the free curved face measurement method and device of measurement based on datum plane - Google Patents
Compare the free curved face measurement method and device of measurement based on datum plane Download PDFInfo
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- CN110057337A CN110057337A CN201910268999.0A CN201910268999A CN110057337A CN 110057337 A CN110057337 A CN 110057337A CN 201910268999 A CN201910268999 A CN 201910268999A CN 110057337 A CN110057337 A CN 110057337A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/20—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring contours or curvatures, e.g. determining profile
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- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The free curved face measurement method and device disclosed by the invention for comparing measurement based on datum plane, belongs to optical precision detection technique field.The present invention uses reference data plane of the high precision plane optical flat as X-Y plane, high precision plane optical flat and tested free form surface apparent height information are detected respectively using coaxial mounted high-precision elevation carrection sensor and free-float space robot sensor, the high precision plane optical flat apparent height information monitoring and compensation straightness error of the X to air-float guide rail and Y-direction air-float guide rail obtained using high-precision elevation carrection sensor, dimensionality reduction error separate is carried out to free form surface surface topography, realizes the nano-precision detection of free form surface pattern.The present invention can be realized free form surface detection and provide the positioning of high accuracy three-dimensional straight line and scanning survey, it is able to suppress the influence of X, Y-direction guide rail motion straightness error to free-float space robot, reduce influence of the Z axis Abbe error to measurement, realizes that free form surface is a wide range of, nanometer accuracy measurement.
Description
Technical field
The invention belongs to optical precision detection technique fields, are related to the high-precision detecting method and dress of a kind of free form surface
It sets, can be used for the nano-precision detection of free form surface in precision optical system.
Technical background
Free form surface element has maximum surface topography freedom degree, easily eliminates aberration in imaging systems, and having improves
Optical system imaging quality, improve resolution capability, increase operating distance, simplify apparatus structure, reduce equipment instrument and weight and
The advantages that improving reliability.It is replaced with freeform optics system past by plane, spherical mirror, coaxial quadratic surface mirror etc.
The optical system of composition improves image quality, reduces system bulk and weight, and then solves imaging precision, portability and reliable
Property the problems such as have become optical system development important trend.
But free form surface proposes optical design, processing and detection higher while increasing design freedom
Requirement, as optics CAD and numerical control diamond point processing technology are succeeded application in optical design and fabrication, free song
The design and processing in face are no longer major technical barrier, but measure problem and have become the problem urgently researched and solved.Buddha's warrior attendant
The measurement that stone point processing technology depends primarily on each point space coordinate in the shape of opposite to the machining accuracy of free-curved-surface shape is accurate
Degree, therefore can component side shape meet design requirement and must be guaranteed by high-precision detection technique.
Currently, the surface profile measurement method of free form surface is broadly divided into light field image probe method, computed tomography scanning in the world
Probe method and probe 3-D scanning probe method three categories.Image detection method measurement process is without being scanned sample, measurement speed
Degree is fast, but its free form surface high-acruracy survey that can not adapt to arbitrary angle variation, while vulnerable to sample surfaces reflectivity, thick
The property differences such as rugosity influence.Computed tomography scanning method principle is simple, but size to tested part and material all have certain limitations, right
Running environment is more demanding, and existing Instrument measuring precision is lower, only 1~10mm.Probe 3-D scanning probe method uses probe
Tested free form surface sample surfaces are positioned point by point, the coordinate by measuring each location point reconstructs to obtain sample surfaces shape
Looks usually drive probe or sample to be detected by coordinate measuring machine, and this method is high, applied widely etc. with measurement accuracy
Advantage has been increasingly becoming the mainstream technology of free-float space robot.
Traditional probe three-dimensional scanning measurement method includes: Resolution method, time-of-flight method and confocal positioning mode.Clarity
Method is determined using image quality of the digital image processing techniques to optical system, is found imaging and is the most clearly put as fixed
Burnt position, but be limited diffraction it is fairly obvious, aim at positioning sensitivity it is lower, precision float between 1%~2%, positioning accurate
Degree is only micron dimension.Time-of-flight method measuring principle is simple, does not need image procossing, but resolution ratio is lower, and measurement accuracy is about
For 20~50mm, it is not suitable in accurate measurement environment.The sensitivity of interference technique is very high, and the theoretical limit of axially position can
Reach 1nm, but it is harsh to measurement environmental requirement, and the property differences shadow such as easy inclination angle, roughness by sample surfaces
It rings, practical engineering application is by larger limitation.Confocal method Focus accuracy is higher, and environment resistant interference performance is strong, and to sample table
Face attribute difference influences have certain rejection ability, and axially position resolving power can reach 200nm.
In conclusion shadow of the existing measurement method measurement accuracy by property differences such as sample surfaces roughness, fluctuating, inclination angles
Ringing is the current major technology bottleneck for improving Free-Form Surface Profile measurement accuracy greatly.
In view of the above-mentioned problems, the present invention is using high precision plane optical flat as the reference datum of X-Y plane, by monitoring criteria
The sensor of the sensor of plane and measurement free form surface elevation information is co-axially mounted, reduce guide rail and truss inclination bring Ah
Shellfish error；By reference to the height change monitoring and compensation X of datum level to the straightness error with Y to air-float guide rail, realize certainly
By the dimensionality reduction error separate of curved surface high-acruracy survey, in conjunction with residual air recovery type air-float guide rail macro-micro- across scale nanometer precision without
Driving and localization method are disturbed, provides the positioning of high accuracy three-dimensional straight line and scanning survey means for free form surface detection.
Summary of the invention
In order to improve the precision and efficiency of detecting of free form surface, overcome the deficiencies in the prior art is disclosed by the invention to be based on
Datum plane compares the free curved face measurement method of measurement and device technical problems to be solved are: realizing that free form surface detection mentions
For the positioning of high accuracy three-dimensional straight line and scanning survey, it is able to suppress X, Y-direction guide rail motion straightness error surveys free form surface
The influence of amount reduces influence of the Z axis Abbe error to measurement, realizes that free form surface is a wide range of, nanometer accuracy measurement.
The purpose of the present invention is what is be achieved through the following technical solutions.
The free curved face measurement method disclosed by the invention for comparing measurement based on datum plane, uses high precision plane optical flat
As the reference data plane of X-Y plane, sensed using coaxial mounted high-precision elevation carrection sensor and free-float space robot
Device detects high precision plane optical flat and tested free form surface apparent height information respectively, is then sensed using high-precision elevation carrection
The high precision plane optical flat apparent height information that device obtains monitors and compensates straight line of the X to air-float guide rail and Y-direction air-float guide rail
Error is spent, dimensionality reduction error separate is carried out to the free form surface surface topography that free-float space robot sensor obtains, is realized freely bent
The nano-precision of face pattern detects；Wherein, high-precision elevation carrection sensor and free-float space robot sensor are coaxially mounted to
On truss, and its axis is parallel with Z-direction air-float guide rail, can reduce the mobile bring Abbe error of Z axis；Specifically include following step
It is rapid:
Step 1: high precision plane optical flat is placed in reference on optical flat device for adjusting posture, high-precision elevation carrection is utilized
Sensor is monitored high precision plane optical flat surface, and adjustment refers to the posture of optical flat device for adjusting posture, makes itself and Z-direction gas
Floating guide rail is vertical；
Step 2: high precision plane optical flat is placed on free form surface sample device for adjusting posture, is surveyed using free form surface
Quantity sensor is monitored high precision plane optical flat surface, adjusts the posture of free form surface sample device for adjusting posture, makes it
It is vertical with Z-direction air-float guide rail；
Step 3: tested free form surface sample and high precision plane optical flat are individually positioned in free form surface sample posture tune
It in engagement positions and reference optical flat device for adjusting posture, is moved using Z-direction air-float guide rail driving truss along Z-direction, it is high to pass through high-precision
Degree measurement sensor and free-float space robot sensor obtain the Z-direction of high precision plane optical flat and tested free form surface sample simultaneously
Apparent height information；
Step 4: when tested free form surface sample surfaces inclination angle is more than the inclination angle measurement range of free-float space robot sensor
When, pose discrimination is carried out by longitudinal minimum area method, adjusting free form surface sample device for adjusting posture (9) makes tested freely song
The inclination angle of face sample can be surveyed in range in system；Then, driving X is scanned to air-float guide rail and Y-direction air-float guide rail along serpentine path
Tested free form surface sample, obtains each measurement point by high-precision elevation carrection sensor and free-float space robot sensor
Surface height data realizes the X-Y plane Scanning Detction of tested free form surface sample profile；
Step 5: X-Y plane is scanned using the surface height data that high-precision elevation carrection sensor measurement obtains and is examined
Straight-line motion accuracy when survey compensates, by free form surface sample three-dimensional appearance data { D11(x,y,z), D12(x,y,
z),…,D12(x,y,z),Dij(x,y,z),…,DMN(x, y, z) } fitting, obtain the integral face type wheel of tested free form surface sample
Exterior feature solves the characterization multinomial of free form surface surface profile, and then realizes the nano-precision detection of free form surface pattern.
Of the invention is compared in the free curved face measurement method of measurement based on datum plane, free form surface sample pose adjustment
Device is used to improve the measurement range of tested free form surface sample；
The free-float space robot device for comparing measurement based on datum plane of the invention, by residual air recovery type air-float guide rail skill
Art, big stroke lead screw actuation techniques, nanoscale Piezoelectric Ceramic technology and unperturbed connector technological incorporation, realize it is macro-micro- across
The driving of scale nanometer precision unperturbed and measurement, using the profile measurement mode of gantry structure three coordinate measuring machine, including active gas
Floating shock insulation spring, air supporting vibration isolation pedestal, X are to air-float guide rail, portal frame, high-precision elevation carrection sensor, free-float space robot
Sensor, Y-direction air-float guide rail, Z-direction air-float guide rail, free form surface sample device for adjusting posture, with reference to optical flat device for adjusting posture,
Truss；
Wherein, air supporting vibration isolation pedestal is placed on active air bearing shock insulation spring, and X is fixed on air bearing to air-float guide rail and portal frame
On vibro-damping mount, Y-direction air-float guide rail is installed on the gantry, and Z-direction air-float guide rail is mounted on Y on air-float guide rail guide sleeve；Freely
Curved surface sample device for adjusting posture and reference optical flat device for adjusting posture are installed in parallel in X on air-float guide rail guide sleeve, and and Z-direction
Air-float guide rail is vertical；High-precision elevation carrection sensor and free-float space robot sensor pass through truss and are coaxially fixed on Z-direction gas
On floating guide rail, and it is parallel with Z-direction air-float guide rail.
The free-float space robot device of the present invention for being compared measurement based on datum plane, high precision plane optical flat is set
In on reference optical flat device for adjusting posture be used as X-Y reference data plane device；High-precision elevation carrection sensor is for monitoring
With compensation straightness error of the X to air-float guide rail and Y-direction air-float guide rail, realizes the separation of X-Y Linearity error dimensionality reduction, mention
The measurement accuracy of high free form surface pattern；The free form surface surface topography that free-float space robot sensor measurement obtains is dropped
Error separate is tieed up, realizes the nano-precision detection of free form surface pattern.
Of the invention is compared in the free-float space robot device of measurement based on datum plane, the free form surface sample posture
It adjusts device and uses three-point support structure, for improving the measurable range of tested free form surface sample.
The utility model has the advantages that
1) free curved face measurement method and device disclosed by the invention for comparing measurement based on datum plane uses high-precision
3 D Measurement of Free Form Surface method of the plane-parallel crystal as X-Y reference data plane, can substantially reduce X, Y-direction guide rail straightness
Influence of the error to free form surface Z-direction measurement sensitive direction；Utilize the high-precision height sensor and free form surface of monitoring optical flat
The mobile bring Abbe error of Z axis can be greatly lowered in the coaxial mounted mode of measurement sensor, can be by free form surface sample
The Scanning Detction precision of product profile is increased to 50nm；
2) free curved face measurement method and device disclosed by the invention for comparing measurement based on datum plane is based on three point branch
The spherical surface air bearing free form surface sample device for adjusting posture of support structure design, can adjust tested free form surface by piezoelectric ceramics
The posture of sample can improve the inclination angle measurement range of tested free form surface sample profile to 45 ° from 15 °；
3) free curved face measurement method and device disclosed by the invention for being compared measurement based on datum plane is missed based on movement
The 3-D scanning driving localization method of the nano-precision of difference decoupling unperturbed actuation techniques scheme can be in the mobile model for being greater than 100mm
Place and realize nanoscale feeding resolution ratio and positioning, can be improved free form surface sample carry out X to when Y-direction Scanning Detction
Precision improves X, Y-direction positions and dimensions measurement accuracy to 0.6 μm from 2 μm.
Detailed description of the invention
Fig. 1 a) it is that the present invention is based on one schematic diagrames of free curved face measurement method and device that datum plane compares measurement；
Fig. 1 b) it is that the present invention is based on two schematic diagrames of free curved face measurement method and device that datum plane compares measurement；
Fig. 2 is Scanning Detction in the X-Y plane for the free-float space robot device for comparing measurement the present invention is based on datum plane
Path schematic diagram；
Fig. 3 is that the present invention is based on datum planes to compare free form surface sample in the free-float space robot device and method of measurement
Device for adjusting posture schematic diagram；
Figure label, 1- active air supporting vibration isolation spring, 2- air supporting vibration isolation pedestal, 3-X are to air-float guide rail, 4- portal frame, 5-
High-precision elevation carrection sensor, 6- free-float space robot sensor, 7-Y are free to air-float guide rail, 8-Z to air-float guide rail, 9-
Curved surface sample device for adjusting posture, 10- refer to optical flat device for adjusting posture, 11- truss, 12- measurement point, 13- supporting point.
Specific embodiment
Present invention will be further explained below with reference to the attached drawings and examples.
The free curved face measurement method for comparing measurement based on datum plane of the present embodiment is flat first with high precision plane
Crystalline substance is used as Z-direction reference mirror, by the high-precision elevation carrection of high-precision free-float space robot sensor 6 and monitoring plane-parallel crystal
Sensor 5 is coaxially mounted on truss, and 8 driving truss of Z-direction air-float guide rail is mobile；It is passed by handling corresponding high-precision elevation carrection
5 displacement measurement of sensor reduces X to air-float guide rail 3 and 7 straightness of Y-direction air-float guide rail to the free form surface sensitive measurement side Z
To influence, thus realize free form surface nano-precision detection；Then, free form surface sample is driven to air-float guide rail 3 using X
Device for adjusting posture and reference optical flat device for adjusting posture move, and realize that free form surface sample X to scanning survey, utilizes Y-direction gas
Floating guide rail 7 drives Z-direction air-float guide rail 8 to move along Y-direction, realizes free form surface sample Y-direction scanning survey；Finally, according to measuring
Several free form surface sample surface profiles data carry out reverse modeling, fit tested free form surface sample surface profiles, realize
The nano-precision detection of tested free form surface.According to free form surface dimensionality reduction error separate detection method, the invention patent building makes
Use Spectral Confocal displacement measurement sensor as the freedom of free-float space robot sensor 6 and high-precision elevation carrection sensor 5
The non-contact dimensionality reduction error separate detection device of curved surface.
Embodiment 1
As shown in Fig. 1 a), the disclosed free-float space robot device for comparing measurement based on datum plane of the present embodiment includes
Active air bearing shock insulation spring 1, air supporting vibration isolation pedestal 2, X to air-float guide rail 3, portal frame 4, high-precision elevation carrection sensor 5, from
By measurement of curved surface sensor 6, Y-direction air-float guide rail 7, Z-direction air-float guide rail 8, free form surface sample device for adjusting posture 9, with reference to flat
Brilliant device for adjusting posture 10, truss 11；
The disclosed free curved face measurement method for comparing measurement based on datum plane of the present embodiment, detecting step are as follows:
Step 1: high precision plane optical flat is placed in reference on optical flat device for adjusting posture 10, the first Spectral Confocal is utilized
Distance measurement sensor 5 is monitored high precision plane optical flat surface, and adjustment refers to the posture of optical flat device for adjusting posture 10,
Keep it vertical with Z-direction air-float guide rail 8；
Step 2: high precision plane optical flat is placed on free form surface sample device for adjusting posture 9, is surveyed using free form surface
Quantity sensor 6 is monitored high precision plane optical flat surface, adjusts the posture of free form surface sample device for adjusting posture 9, makes
It is vertical with Z-direction air-float guide rail 8；
Step 3: tested free form surface sample and high precision plane optical flat are individually positioned in free form surface sample posture tune
Engagement positions 9 and with reference on optical flat device for adjusting posture 10, are moved using 8 driving truss 11 of Z-direction air-float guide rail along Z-direction, by the
One Spectral Confocal distance measurement sensor 5 and the second Spectral Confocal distance measurement sensor 6 obtain high precision plane optical flat simultaneously
With the Z-direction apparent height information of tested free form surface sample；
Step 4: when the inclination angle that tested free form surface sample surfaces inclination angle is more than free-float space robot sensor 6 measures model
When enclosing, pose discrimination is carried out by longitudinal minimum area method, adjusting free form surface sample device for adjusting posture 9 makes tested freely song
The inclination angle of face sample can be surveyed in range in system；Then, driving X is swept to air-float guide rail 3 and Y-direction air-float guide rail 7 along serpentine path
Tested free form surface sample is retouched, each survey is obtained by high-precision elevation carrection sensor 5 and free-float space robot sensor 6
The surface height data of amount point 12, realizes the X-Y plane Scanning Detction of tested free form surface sample profile；
Step 5: obtained surface height data is measured using high-precision elevation carrection sensor 5, inspection is scanned to X-Y plane
Straight-line motion accuracy when survey compensates, by free form surface sample three-dimensional appearance data { D11(x,y, z),D12(x,y,
z),…,D12(x,y,z),Dij(x,y,z),…,DMN(x, y, z) } fitting, obtain the integral face type wheel of tested free form surface sample
Exterior feature solves the characterization multinomial of free form surface surface profile, and then realizes the nano-precision detection of free form surface pattern.
Embodiment 2
As shown in Fig. 1 b), the disclosed free-float space robot device for comparing measurement based on datum plane of the present embodiment includes
Active air bearing shock insulation spring 1, air supporting vibration isolation pedestal 2, X to air-float guide rail 3, portal frame 4, high-precision elevation carrection sensor 5, from
By measurement of curved surface sensor 6, Y-direction air-float guide rail 7, Z-direction air-float guide rail 8, free form surface sample device for adjusting posture 9, with reference to flat
Brilliant device for adjusting posture 10, truss 11；
Tested free form surface and high precision plane optical flat are installed on Z axis, and two coaxial Spectral Confocal range measurements pass
Sensor is installed on the X of snakelike driving on air-float guide rail 3 by truss 11；
The disclosed free curved face measurement method for comparing measurement based on datum plane of the present embodiment, detecting step are as follows:
Step 1: high precision plane optical flat is placed in reference on optical flat device for adjusting posture 10, is surveyed using high-precision height
Quantity sensor 5 is monitored high precision plane optical flat surface, adjustment refer to optical flat device for adjusting posture 10 posture, make its with
Z-direction air-float guide rail 8 is vertical；
Step 2: high precision plane optical flat is placed on free form surface sample device for adjusting posture 9, is surveyed using free form surface
Quantity sensor 6 is monitored high precision plane optical flat surface, adjusts the posture of free form surface sample device for adjusting posture 9, makes
It is vertical with Z-direction air-float guide rail 8；
Step 3: tested free form surface sample and high precision plane optical flat are individually positioned in free form surface sample posture tune
In engagement positions 9 and reference optical flat device for adjusting posture 10, is moved using 8 driving truss 11 of Z-direction air-float guide rail along Z-direction, pass through height
Precision elevation carrection sensor 5 and free-float space robot sensor 6 obtain high precision plane optical flat and tested freely song simultaneously
The Z-direction apparent height information of face sample；
Step 4: obtained surface height data is measured using high-precision elevation carrection sensor 5, inspection is scanned to X-Y plane
Straight-line motion accuracy when survey compensates, by free form surface sample three-dimensional appearance data { D11(x,y, z),D12(x,y,
z),…,D12(x,y,z),Dij(x,y,z),…,DMN(x, y, z) } fitting, obtain the integral face type wheel of tested free form surface sample
Exterior feature solves the characterization multinomial of free form surface surface profile, and then realizes the nano-precision detection of free form surface pattern.
A specific embodiment of the invention is described in conjunction with attached drawing above, but these explanations cannot be understood to limit
The scope of the present invention, protection scope of the present invention are limited by appended claims, any in the claims in the present invention base
The change carried out on plinth is all protection scope of the present invention.
Claims (5)
1. comparing the free curved face measurement method of measurement based on datum plane, it is characterised in that: made using high precision plane optical flat
For the reference data plane of X-Y plane, sensed using coaxial mounted high-precision elevation carrection sensor (5) and free-float space robot
Device (6) detects high precision plane optical flat and tested free form surface apparent height information respectively, then utilizes high-precision elevation carrection
The high precision plane optical flat apparent height information that sensor (5) obtains monitors and compensates X to air-float guide rail (3) and Y-direction air bearing
The straightness error of guide rail (7) carries out dimensionality reduction error to the free form surface surface topography that free-float space robot sensor (6) obtain
The nano-precision detection of free form surface pattern is realized in separation；Wherein, high-precision elevation carrection sensor (5) and free form surface are surveyed
Quantity sensor (6) is coaxially mounted on truss (11), and its axis is parallel with Z-direction air-float guide rail (8), and it is mobile can to reduce Z axis
Bring Abbe error；Specifically include following steps,
Step 1: high precision plane optical flat is placed in reference on optical flat device for adjusting posture (10), high-precision elevation carrection is utilized
Sensor (5) is monitored high precision plane optical flat surface, and adjustment refers to the posture of optical flat device for adjusting posture (10), makes it
It is vertical with Z-direction air-float guide rail (8)；
Step 2: high precision plane optical flat is placed on free form surface sample device for adjusting posture (9), free-float space robot is utilized
Sensor (6) is monitored high precision plane optical flat surface, adjusts the posture of free form surface sample device for adjusting posture (9),
Keep it vertical with Z-direction air-float guide rail (8)；
Step 3: tested free form surface sample and high precision plane optical flat are individually positioned in free form surface sample pose adjustment dress
It sets (9) and with reference on optical flat device for adjusting posture (10), is moved, led to along Z-direction using Z-direction air-float guide rail (8) driving truss (11)-
It crosses high-precision elevation carrection sensor (5) and free-float space robot sensor (6) while obtaining high precision plane optical flat and being tested
The Z-direction apparent height information of free form surface sample；
Step 4: when tested free form surface sample surfaces inclination angle is more than the inclination angle measurement range of free-float space robot sensor (6)
When, pose discrimination is carried out by longitudinal minimum area method, adjusting free form surface sample device for adjusting posture (9) makes tested freely song
The inclination angle of face sample can be surveyed in range in system；Then, driving X is to air-float guide rail (3) and Y-direction air-float guide rail (7) along hairpin bend
Diameter scans tested free form surface sample, is obtained by high-precision elevation carrection sensor (5) and free-float space robot sensor (6)
The surface height data of each measurement point (12) realizes the X-Y plane Scanning Detction of tested free form surface sample profile；
Step 5: the surface height data obtained using high-precision elevation carrection sensor (5) measurement is to X-Y plane Scanning Detction
When straight-line motion accuracy compensate, by free form surface sample three-dimensional appearance data { D11(x,y,z),D12(x,y,z),…,
D12(x,y,z),Dij(x,y,z),…,DMN(x, y, z) } fitting, the integral face type profile of tested free form surface sample is obtained, is asked
The characterization multinomial of free form surface surface profile is solved, and then realizes the nano-precision detection of free form surface pattern.
2. the free curved face measurement method according to claim 1 for comparing measurement based on datum plane, it is characterised in that: institute
Free form surface sample device for adjusting posture (9) is stated for improving the measurement range of tested free form surface sample.
3. comparing the free-float space robot device of measurement based on datum plane, by residual air recovery type air-float guide rail technology, big stroke
Macro-micro- across scale nanometer essence is realized in lead screw actuation techniques, nanoscale Piezoelectric Ceramic technology and unperturbed connector technological incorporation
Spend unperturbed driving and measurement, it is characterised in that: using the profile measurement mode of gantry structure three coordinate measuring machine, including active gas
Floating shock insulation spring (1), air supporting vibration isolation pedestal (2), X are to air-float guide rail (3), portal frame (4), high-precision elevation carrection sensor
(5), free-float space robot sensor (6), Y-direction air-float guide rail (7), Z-direction air-float guide rail (8), free form surface sample pose adjustment
Device (9), with reference to optical flat device for adjusting posture (10), truss (11)；
Wherein, air supporting vibration isolation pedestal (2) is placed on active air bearing shock insulation spring (1), and X is solid to air-float guide rail (3) and portal frame (4)
It is scheduled on air supporting vibration isolation pedestal (2), Y-direction air-float guide rail (7) is mounted on portal frame (4), and Z-direction air-float guide rail (8) is mounted on Y-direction
On air-float guide rail (7) guide sleeve；Free form surface sample device for adjusting posture (9) peace parallel with reference optical flat device for adjusting posture (10)
Mounted in X on air-float guide rail (3) guide sleeve, and it is vertical with Z-direction air-float guide rail (8)；High-precision elevation carrection sensor (5) and freedom
Measurement of curved surface sensor (6) is coaxially fixed on Z-direction air-float guide rail (8) by truss (11), and flat with Z-direction air-float guide rail (8)
Row.
4. the free-float space robot device according to claim 3 for comparing measurement based on datum plane, it is characterised in that: will
High precision plane optical flat be placed in reference on optical flat device for adjusting posture (10) be used as X-Y reference data plane device；High-precision is high
The straightness error that degree measurement sensor (5) is used to monitor and compensate X to air-float guide rail (3) and Y-direction air-float guide rail (7) is realized
The separation of X-Y plane straightness error dimensionality reduction, improves the measurement accuracy of free form surface pattern；To free-float space robot sensor (6)
It measures obtained free form surface surface topography and carries out dimensionality reduction error separate, realize the nano-precision detection of free form surface pattern.
5. the free-float space robot device according to claim 3 for comparing measurement based on datum plane, it is characterised in that: institute
Free form surface sample device for adjusting posture (9) is stated using three-point support structure, for improving the measurement of tested free form surface sample
Range.
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110940270A (en) * | 2019-10-30 | 2020-03-31 | 深圳市凯中精密技术股份有限公司 | Position degree detection method and detection device |
| CN110954019A (en) * | 2019-11-28 | 2020-04-03 | 北京理工大学 | Large-inclination-angle free-form surface measuring method and device based on reference plane comparison measurement |
| CN110954020A (en) * | 2019-11-28 | 2020-04-03 | 北京理工大学 | Free-form surface measuring method and device based on liquid reference plane comparison measurement |
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