CN111796501A - Common-path phase shift digital holographic microscopic measuring device - Google Patents
Common-path phase shift digital holographic microscopic measuring device Download PDFInfo
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- CN111796501A CN111796501A CN202010597987.5A CN202010597987A CN111796501A CN 111796501 A CN111796501 A CN 111796501A CN 202010597987 A CN202010597987 A CN 202010597987A CN 111796501 A CN111796501 A CN 111796501A
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- 230000010363 phase shift Effects 0.000 title claims abstract description 26
- 239000013078 crystal Substances 0.000 claims abstract description 50
- 238000003384 imaging method Methods 0.000 claims abstract description 21
- 239000000919 ceramic Substances 0.000 claims abstract description 16
- 239000013307 optical fiber Substances 0.000 claims abstract description 11
- 230000003287 optical effect Effects 0.000 claims abstract description 7
- 239000000835 fiber Substances 0.000 claims description 11
- 238000005259 measurement Methods 0.000 claims description 6
- 238000009647 digital holographic microscopy Methods 0.000 claims 7
- 238000001093 holography Methods 0.000 abstract description 11
- 238000012360 testing method Methods 0.000 abstract description 11
- 230000008859 change Effects 0.000 abstract description 3
- 238000001914 filtration Methods 0.000 description 11
- 238000001514 detection method Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000004445 quantitative analysis Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
- G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
- G03H1/04—Processes or apparatus for producing holograms
- G03H1/0443—Digital holography, i.e. recording holograms with digital recording means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02041—Interferometers characterised by particular imaging or detection techniques
- G01B9/02047—Interferometers characterised by particular imaging or detection techniques using digital holographic imaging, e.g. lensless phase imaging without hologram in the reference path
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
- G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
- G03H1/04—Processes or apparatus for producing holograms
- G03H1/10—Processes or apparatus for producing holograms using modulated reference beam
- G03H1/12—Spatial modulation, e.g. ghost imaging
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
- G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
- G03H1/0005—Adaptation of holography to specific applications
- G03H2001/0033—Adaptation of holography to specific applications in hologrammetry for measuring or analysing
- G03H2001/0038—Adaptation of holography to specific applications in hologrammetry for measuring or analysing analogue or digital holobjects
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
- G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
- G03H1/0005—Adaptation of holography to specific applications
- G03H2001/005—Adaptation of holography to specific applications in microscopy, e.g. digital holographic microscope [DHM]
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
- G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
- G03H1/04—Processes or apparatus for producing holograms
- G03H1/0443—Digital holography, i.e. recording holograms with digital recording means
- G03H2001/0445—Off-axis recording arrangement
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computing Systems (AREA)
- Theoretical Computer Science (AREA)
- Holo Graphy (AREA)
- Microscoopes, Condenser (AREA)
Abstract
The invention discloses a common-path phase-shift digital holographic microscopic measuring device which comprises an optical fiber laser (1), an optical fiber collimator (2), an adjustable attenuator (3), a microobjective (5), a planar flat crystal I (6), a planar flat crystal II (7), a piezoelectric ceramic driver (8), a convergent lens (9), a filter (10) and an imaging detector (11) which are fixedly arranged along the direction of an optical path in sequence, wherein the imaging detector (11) is connected with a computer (12) through a cable. The invention utilizes two adjacent plane flat crystals to realize the phase difference change between the reference light and the test light and obtain the phase shift digital holographic microscopic imaging of the measured target. The device not only eliminates the influence of system noise in a non-common optical path, but also is easy to realize high-precision phase shift holography, and effectively improves the phase reconstruction precision of digital holography.
Description
Technical Field
The invention belongs to the technical field of digital holography, and particularly relates to a common-path phase shift digital holographic microscopic measuring device.
Background
The digital holography technology utilizes an imaging detection device to record interference information, and obtains amplitude and phase information of a target through diffraction reconstruction, so that three-dimensional imaging of the target to be detected is realized. The method has the advantages of no damage, no scanning, quantitative analysis and the like, and can be applied to imaging and measurement in the fields of micro-opto-electro-mechanical systems, particle analysis, biological cells and the like.
In most cases, the digital holographic microscopic measuring device utilizes a mach-zender or a tayman-greens type interference light path to realize the meeting interference of the test light and the reference light obtained by modulation of the measured object, so as to obtain a digital holographic interference pattern, and thus, the test light and the reference light pass through different optical devices or different paths, and unnecessary system errors are introduced. 2017, the document "Dual-wavelength common-path digital holographic for quantitative pharmaceutical imaging of biological cells. opt. eng.56(11), 111712", Jianglei Di realizes common-path shear holography by using a single parallel plate; applied optics,57 (6), 1504-; 2018, "Dual-plate weighted off-axis differential based on a single cup beam splitter. applied Optics,57(10),. 2727-
GUEZ uses a single right-angle prism to realize common-path off-axis holography. However, the above three digital holographic measuring devices all adopt two paths of test lights to meet to generate a digital hologram, so that the numbers are generatedThe phase reconstruction of the hologram becomes complicated and the improvement of the phase reconstruction accuracy is not favorable.
Disclosure of Invention
In order to solve the above problems, the present invention provides a common-path phase shift digital holographic microscopic measuring device, which comprises an optical fiber laser 1, an optical fiber collimator 2, an adjustable attenuator 3, a microscope objective 5, a planar flat crystal I6, a planar flat crystal II7, a piezoelectric ceramic driver 8, a convergent lens 9, a filter 10 and an imaging detector 11, which are fixedly arranged along the optical path direction in sequence, wherein the imaging detector 11 is connected with a computer 12 through a cable.
The further scheme is that the optical fiber laser 1 and the optical fiber collimator 2 are connected through a single mode optical fiber.
The further proposal is that a sample 4 to be measured is placed on the focal plane of the microscope objective 5.
The further scheme is that the plane flat crystal I6 and the plane flat crystal II7 are closely adjacent, the rear surface of the plane flat crystal I6 is plated with an antireflection film, the front surface of the plane flat crystal II7 is plated with a high-reflection film, and the rear surface is fixedly connected with the piezoelectric ceramic driver 8.
Further, the piezoelectric ceramic driver 8 is connected with the computer 12 by a control line.
Further alternatively, the filter 10 is placed at the focal point of convergence of the light reflected from the front surface of the planar plate I6.
Further, the filter 10 includes a pinhole filter window 14 and a circular hole filter window 15.
Further, a beam splitter 13 is further disposed between the adjustable attenuator 3 and the microscope objective 5.
The invention has the beneficial effects that:
(1) the invention utilizes two adjacent plane flat crystals to realize the phase difference change between the reference light and the test light and obtain the phase shift digital holographic microscopic imaging of the measured target. The device not only eliminates the influence of system noise in a non-common optical path, but also is easy to realize high-precision phase shift holography, and effectively improves the phase reconstruction precision of digital holography.
(2) The test light and the reference light pass through the same light path, so that the system error of the digital holographic measuring device is avoided;
(3) the invention drives the planar flat crystal through the piezoelectric ceramic driver, can realize common-path phase shift digital holography, eliminates the frequency spectrum filtering window limitation of the traditional Fourier transform during phase reconstruction, and improves the phase reconstruction precision.
Drawings
FIG. 1: an assembly schematic diagram of a transmission type common-path digital holographic microscopic measuring device;
FIG. 2: the assembly schematic diagram of the reflection type common-path digital holographic microscopic measuring device;
FIG. 3: a design schematic diagram of a filter;
description of reference numerals: 1-an optical fiber laser, 2-an optical fiber collimator, 3-an adjustable attenuator, 4-a sample to be detected, 5-a microscope objective, 6-a plane flat crystal I, 7-a plane flat crystal II, 8-a piezoelectric ceramic driver, 9-a converging lens, 10-a filter, 11-an imaging detection device, 12-a computer, 13-a beam splitter, 14-a pinhole filtering window and 15-a circular hole filtering window.
Detailed Description
The invention will be further explained with reference to the drawings and the embodiments.
Example 1
As shown in fig. 1 and fig. 3, the present embodiment provides a common-path phase-shift digital holographic microscopic measuring apparatus, which includes a fiber laser 1, a fiber collimator 2, an adjustable attenuator 3, a sample 4 to be measured, a microscope objective 5, a planar flat crystal I6, a planar flat crystal II7, a piezoelectric ceramic driver 8, a converging lens 9, a filter 10, an imaging detection device 11, and a computer 12. The structure forms a transmission type common-path phase shift digital holographic microscopic measuring device.
The fiber laser 1 and the fiber collimator 2 are connected by a single mode fiber to form a parallel beam;
the parallel light beam directly irradiates to a tested sample 4 after penetrating through the adjustable attenuator 3, wherein the adjustable attenuator 3 can adjust the energy of the parallel light beam, so that the laser energy meets the requirement of an imaging detection device 11;
the detected sample 4 is positioned on the focal plane of the microscope objective 5, so that the detected sample 4 can be clearly imaged on the imaging detection device 11;
the plane flat crystal I6 is adjacent to the plane flat crystal II 7;
the planar flat crystal I6 is characterized in that the rear surface is plated with an antireflection film;
the planar flat crystal II7 is characterized in that the front surface is plated with a high-reflection film, and the rear surface is fixedly connected with a piezoelectric ceramic driver 8;
the piezoelectric ceramic driver 8 is connected with the computer 12 by a control line, and the computer 12 can drive the piezoelectric ceramic driver 8 by the control line to realize phase shift;
the laser beam collected by the microscope objective 5 reaches the plane flat crystal I6 and is reflected on the front surface of the plane flat crystal I6 to form a reflected beam; the transmitted light beam of the plane flat crystal I6 reaches the front surface of the plane crystal II7 to be reflected, and a reflected light beam is formed;
the reflected light beams of the front surfaces of the plane flat crystal I6 and the plane flat crystal II7 are focused by a converging lens 9;
the filter 10 is arranged at the focus point of the reflected light beam on the front surface of the planar flat crystal I6, and at the moment, the reflected light beam on the front surface of the planar flat crystal II7 forms a larger light spot on the filter 10;
the filter 10 is characterized by comprising an upper filter window and a lower filter window, wherein the lower filter window is a round hole filter window 15 with the diameter of 5mm, so that a reflected beam on the front surface of the planar flat crystal I6 can completely pass through after being focused by the convergent lens 9 to form a test beam; the upper filtering window is a pinhole filtering window 14 with the diameter of 50 mu m, so that a reflected beam on the front surface of the planar flat crystal II7 is ensured to illuminate a pinhole after being focused by a converging lens 9, and pinhole diffraction is formed to obtain an ideal spherical reference beam;
reference beams emitted by the upper filtering window and the lower filtering window of the filter 10 meet with the test beam to form an off-axis holographic interference pattern, and the off-axis holographic interference pattern is acquired by the imaging detection device 11 and transmitted to the computer 12 for phase reconstruction processing.
The invention aims to provide a common-path phase-shift digital holographic microscopic measuring device, which utilizes two adjacent plane flat crystals to realize the phase difference change between reference light and test light and obtain phase-shift digital holographic microscopic imaging of a measured target. The device not only eliminates the influence of system noise in a non-common optical path, but also is easy to realize high-precision phase shift holography, and effectively improves the phase reconstruction precision of digital holography.
Example 2
As shown in fig. 2 and fig. 3, on the basis of embodiment 1, a beam splitter 13 is further disposed between the adjustable attenuator 3 and the microscope objective 5 to form a reflective common-path phase-shift digital holographic microscopic measurement apparatus, wherein the fiber laser 1 and the fiber collimator 2 are connected by a single-mode fiber to form a parallel beam;
after the parallel light beams penetrate through the adjustable attenuator 3, the light beams are reflected by the beam splitter 13 and then irradiate the microscope objective 5, wherein the adjustable attenuator 3 can adjust the energy of the parallel light beams, so that the laser energy meets the requirements of the imaging detection device 11;
the detected sample 4 is positioned on the focal plane of the microscope objective 5, so that the detected sample 4 can be clearly imaged on the imaging detection device 11;
the plane flat crystal I6 is adjacent to the plane flat crystal II 7;
the planar flat crystal I6 is characterized in that the rear surface is plated with an antireflection film;
the planar flat crystal II7 is characterized in that the front surface is plated with a high-reflection film, and the rear surface is fixedly connected with a piezoelectric ceramic driver 8;
the piezoelectric ceramic driver 8 is connected with the computer 12 by a control line, and the computer 12 can drive the piezoelectric ceramic driver 8 by the control line to realize phase shift;
the laser beam collected by the microscope objective 5 reaches the plane flat crystal I6 and is reflected on the front surface of the plane flat crystal I6 to form a reflected beam;
the transmitted light beam of the plane flat crystal I6 reaches the front surface of the plane crystal II7 to be reflected, and a reflected light beam is formed;
the reflected light beams of the front surfaces of the plane flat crystal I76 and the plane flat crystal II7 are focused by a converging lens 9;
the filter 10 is arranged at the focus point of the reflected light beam on the front surface of the planar flat crystal I6, and at the moment, the reflected light beam on the front surface of the planar flat crystal II7 forms a larger light spot on the filter 10;
the filter 10 is characterized by comprising an upper filter window and a lower filter window, wherein the lower filter window is a round hole filter window 15 with the diameter of 5mm, so that a reflected beam on the front surface of the planar flat crystal I6 can completely pass through after being focused by the convergent lens 9 to form a test beam; the upper filtering window is a pinhole filtering window 14 with the diameter of 50 mu m, so that a reflected beam on the front surface of the planar flat crystal II7 is ensured to illuminate a pinhole after being focused by a converging lens 10, and pinhole diffraction is formed to obtain an ideal spherical reference beam;
reference beams emitted by the upper filtering window and the lower filtering window of the filter 10 meet with the test beam to form an off-axis holographic interference pattern, and the off-axis holographic interference pattern is acquired by the imaging detection device 11 and transmitted to the computer 12 for phase reconstruction processing.
The above description is only an embodiment of the present invention, and not intended to limit the scope of the present invention, and all modifications of equivalent structures and equivalent processes, which are made by using the contents of the present specification and the accompanying drawings, or directly or indirectly applied to other related technical fields, are included in the scope of the present invention.
Claims (8)
1. The common-path phase-shift digital holographic microscopic measuring device is characterized by comprising an optical fiber laser (1), an optical fiber collimator (2), an adjustable attenuator (3), a microobjective (5), a planar flat crystal I (6), a planar flat crystal II (7), a piezoelectric ceramic driver (8), a convergent lens (9), a filter (10) and an imaging detector (11) which are fixedly arranged along the direction of an optical path in sequence, wherein the imaging detector (11) is connected with a computer (12) through a cable.
2. The common-path phase-shift digital holographic microscopy measurement device according to claim 1, characterized in that the fiber laser (1) and the fiber collimator (2) are connected by a single mode fiber.
3. A common-path phase-shift digital holographic microscopy device as claimed in claim 2, characterized in that the microscope objective (5) has a focal plane on which the sample (4) to be measured is placed.
4. The common-path phase-shift digital holographic microscopy device as claimed in claim 3, wherein the planar flat crystal I (6) and the planar flat crystal II (7) are closely adjacent, the rear surface of the planar flat crystal I (6) is plated with an antireflection film, the front surface of the planar flat crystal II (7) is plated with a high-reflection film, and the rear surface is fixedly connected with the piezoelectric ceramic driver (8).
5. A common-path phase-shift digital holographic microscopy measurement device as claimed in claim 4 characterized in that the piezo ceramic actuator (8) is connected to the computer (12) with a control line.
6. A common-path phase-shift digital holographic microscopy measurement device as claimed in claim 5 characterized in that the filter (10) is placed at the convergent focus of the reflected beam from the front surface of the planar plate I (6).
7. A common-path phase-shift digital holographic microscopy measurement device according to claim 6, characterized in that the filter (10) comprises a pinhole filter window (14) and a circular hole filter window (15).
8. A common-path phase-shift digital holographic microscopy device as claimed in claim 1, characterized in that a beam splitter (13) is further arranged between the adjustable attenuator (3) and the microscope objective (5).
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| CN202010597987.5A CN111796501B (en) | 2020-06-28 | 2020-06-28 | Common-path phase shift digital holographic microscopic measuring device |
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| CN202010597987.5A CN111796501B (en) | 2020-06-28 | 2020-06-28 | Common-path phase shift digital holographic microscopic measuring device |
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2020
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