CN110039330B - High-thrust closed gas static pressure rotary table - Google Patents
High-thrust closed gas static pressure rotary table Download PDFInfo
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- CN110039330B CN110039330B CN201910442417.6A CN201910442417A CN110039330B CN 110039330 B CN110039330 B CN 110039330B CN 201910442417 A CN201910442417 A CN 201910442417A CN 110039330 B CN110039330 B CN 110039330B
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- 230000003068 static effect Effects 0.000 title claims abstract description 37
- 238000007789 sealing Methods 0.000 claims abstract description 9
- 238000013016 damping Methods 0.000 claims description 11
- 230000005540 biological transmission Effects 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 7
- 238000007667 floating Methods 0.000 description 33
- 230000002706 hydrostatic effect Effects 0.000 description 14
- 230000009286 beneficial effect Effects 0.000 description 5
- 238000009826 distribution Methods 0.000 description 3
- 230000002349 favourable effect Effects 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 238000007792 addition Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/38—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports
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Abstract
The invention belongs to the field of ultra-precision manufacturing equipment, particularly relates to a radial thrust combined closed type gas static pressure rotary table, and particularly relates to a high thrust closed type gas static pressure rotary table, which comprises an air bearing stator, an upper stop push plate, a workpiece rotary table, a radial bearing, a shell, a lower thrust plate, a rotor rotating shaft, a sealing bottom plate, a damper, a restrictor I and a restrictor II, wherein the air bearing stator is fixedly connected to the upper end of the inner side of the shell; the lower end of the shell is fixedly connected with a sealing bottom plate; the radial bearing is connected in the air bearing stator in an interference fit manner; the upper end and the lower end of the radial bearing are respectively fixedly connected with the upper stop push plate and the lower thrust plate; the upper end of the upper stop push plate is fixedly connected with a workpiece turntable; the lower end of the lower thrust plate is fixedly connected with a rotor rotating shaft; the invention can improve the bearing capacity of the gas static pressure turntable, ensure certain rigidity and meet the use requirement of high-bearing capacity precision manufacturing equipment.
Description
Technical Field
The invention belongs to the field of ultra-precision manufacturing equipment, particularly relates to a radial thrust combined closed type gas static pressure rotary table, and particularly relates to a high-thrust closed type gas static pressure rotary table.
Background
In the field of ultra-precision machining, a measuring instrument is particularly important. The aerostatic bearing is widely applied to a measuring turntable due to the characteristics of high precision and no pollution. However, due to the compressibility of the gas, the bearing capacity and rigidity of the aerostatic bearing are low, so that the performance of the turntable cannot meet the application of high precision and large load.
The aerostatic bearing in the prior art has the following problems:
(1) the bearing capacity is insufficient, and the stability is lost due to self-excited vibration of the air hammer easily caused by improving the air supply pressure;
(2) the bearing capacity of the aerostatic bearing is improved, so that the rigidity is greatly lost, and the precision of the rotary table is reduced.
Due to the above problems, the existing aerostatic bearing technology cannot meet the use requirements of high-bearing-capacity precision manufacturing equipment, such as aerospace simulation test equipment, roundness measuring instruments and the like.
Disclosure of Invention
The invention aims to provide a high-thrust closed type gas static pressure rotary table, which can effectively solve the problems in the prior art, can improve the bearing capacity of the gas static pressure rotary table, ensure certain rigidity and meet the use requirement of high-bearing capacity precision manufacturing equipment.
The purpose of the invention is realized by the following technical scheme:
a high-thrust closed gas static pressure rotary table comprises an air bearing stator, an upper stop push plate, a workpiece rotary table, a radial bearing, a shell, a lower thrust plate, a rotor rotating shaft, a sealing bottom plate, a damper, a restrictor I and a restrictor II, wherein the air bearing stator is fixedly connected to the upper end of the inner side of the shell; the lower end of the shell is fixedly connected with a sealing bottom plate; the radial bearing is connected in the air bearing stator in an interference fit manner; the upper end and the lower end of the radial bearing are respectively fixedly connected with the upper stop push plate and the lower thrust plate; the upper end of the upper stop push plate is fixedly connected with a workpiece turntable; the lower end of the lower thrust plate is fixedly connected with a rotor rotating shaft;
the air bearing stator, the upper stop push plate, the lower thrust plate, the radial bearing and the rotor rotating shaft are all in a ring shape, and the workpiece turntable is circular; the upper stop push plate, the radial bearing and the lower thrust plate are fixedly connected, the axial distance between the upper stop push plate and the lower thrust plate is adjusted while the height of the center lines of the upper stop push plate, the radial bearing and the lower thrust plate is ensured to be coincident, the axial distance is adjusted during assembly, and the upper stop push plate, the radial bearing and the lower thrust plate are fixedly connected after adjustment. The upper surface of the workpiece turntable is vertical to the central line of the upper stop push plate, and the rotor rotating shaft is arranged at the center of the lower thrust plate and the central lines of the upper stop push plate and the lower thrust push plate are superposed.
A plurality of throttling holes and a plurality of damping holes are uniformly distributed on the upper surface of the air bearing stator along the circumferential direction, and the damping holes are positioned on the outer side of the throttling holes; the throttles I are fixedly connected in the throttle holes respectively, and are communicated with each other through micro grooves I milled from the upper surface of the air bearing stator along the circumferential direction; the dampers are respectively and fixedly connected in the damping holes and are communicated with each other through a micro groove II milled from the upper surface of the air bearing stator along the circumferential direction; the throttleers I and the dampers in the same radius direction are communicated through micro grooves III milled along the radial direction on the upper surface of the air bearing stator; and an upper row and a lower row of a plurality of radial mounting holes are formed in the inner ring surface of the air bearing stator, and a flow controller II is fixedly connected in each radial mounting hole.
The pressure gas enters a gap between the upper stop pushing plate and the upper surface of the air bearing stator through a restrictor I and a damper on the upper surface of the air bearing stator to form a floating gas hydrostatic bearing thrust gas film, and a floating gas hydrostatic thrust bearing is formed by the upper stop pushing plate, the upper surface of the air bearing stator, the restrictor I and the damper on the upper surface of the air bearing stator.
And the pressurized gas enters the space between the radial bearing and the inner ring surface of the air bearing stator from the restrictor II to form a radial aerostatic bearing gas film. The radial gas hydrostatic bearing is composed of a radial bearing, an inner ring surface of a stator of the air bearing and a restrictor II. In addition, pressure gas enters the gap between the lower surface of the air bearing stator and the lower thrust plate from the gap between the upper surface of the air bearing stator and the upper stop thrust plate and from the gap between the inner ring surface of the air bearing stator and the radial bearing to form a lower air-floating static thrust air film. The lower surface of the air-floating bearing stator and the lower thrust plate form a lower-floating gas static pressure thrust bearing. The closed gas static pressure thrust bearing is formed by the upper floating gas static pressure thrust bearing and the lower floating gas static pressure thrust bearing.
The high-thrust closed gas static pressure turntable further comprises a driving module and a measuring module; the driving module is in transmission connection with the rotor rotating shaft; the measuring module is fixedly connected to the lower end of the inner side of the shell, and the rotor rotating shaft is located on the inner side of the measuring module.
The central lines of the air bearing stator, the upper stop push plate, the radial bearing, the lower thrust plate and the rotor rotating shaft are superposed.
The upper surface of the workpiece turntable is perpendicular to the central line of the upper stop push plate.
The diameter of the upper stop push plate is larger than that of the lower thrust plate.
The driving module adopts a torque motor.
The measuring module adopts a circular grating component.
The throttler I is arranged along the axial direction of the air bearing stator.
The throttler II is arranged along the radial direction of the air bearing stator.
The invention has the beneficial effects that: the high-thrust closed type gas static pressure rotary table can effectively solve the problems in the prior art, can improve the bearing capacity of the gas static pressure rotary table, simultaneously ensures certain rigidity, and meets the use requirement of high-bearing capacity precision manufacturing equipment.
Compared with the prior art, the invention has the beneficial effects that:
1) the upper thrust plate with a larger diameter and the lower thrust plate with a smaller diameter are adopted, so that the bearing capacity of the closed gas static pressure thrust bearing is improved, and meanwhile, the closed gas static pressure thrust bearing has certain rigidity to ensure the precision of the rotary table.
2) The radial thrust combined closed gas hydrostatic bearing structure (namely, the radial cylindrical bearing is combined with the upper and lower plane thrust bearings) is adopted, so that the machining precision is improved, and the precision and the rotation precision of the rotary table are improved.
3) The lower surface of the air bearing stator is not provided with a throttling hole, and the air film of the floating gas static pressure thrust bearing and the air film of the radial gas static pressure bearing supply air for the lower floating gas static pressure thrust bearing, so that the bearing capacity of the rotary table can be further improved, and the gas consumption can be greatly reduced.
4) The micro grooves are formed in the upper surface of the air-floating bearing stator to uniformly expand the high-pressure area of the thrust air film of the floating aerostatic bearing, so that the bearing capacity and rigidity of the floating aerostatic thrust bearing are improved, and the purposes of improving the bearing capacity of the aerostatic rotary table and ensuring certain rigidity are finally achieved.
5) The damping holes are formed in the upper surface of the air bearing stator, so that the phenomenon of self-excited vibration of an air hammer can be effectively avoided, and the stability of the aerostatic bearing is improved.
In conclusion, the invention can meet the performance requirements of high-bearing-capacity precision manufacturing equipment for measuring large-mass workpieces, such as aerospace simulation test equipment, roundness measuring instruments and the like.
Drawings
FIG. 1 is a front view of the overall construction of the present invention;
fig. 2 is a top view of a portion of the structure of the present invention.
In the figure: an air bearing stator 1; the micro groove I1-1; the micro groove II 1-2; the micro groove III 1-3; orifices 1-4; 1-5 of a damping hole; an upper stop push plate 2; a workpiece turntable 3; a radial bearing 4; a housing 5; a lower thrust plate 6; a rotor shaft 7; sealing the bottom plate 8.
Detailed Description
The present invention is described in further detail below with reference to FIGS. 1-2.
The first embodiment is as follows:
as shown in fig. 1-2, a high thrust closed gas static pressure turntable comprises an air bearing stator 1, an upper stop push plate 2, a workpiece turntable 3, a radial bearing 4, a housing 5, a lower thrust plate 6, a rotor rotating shaft 7, a sealing bottom plate 8, a damper, a restrictor I and a restrictor II, wherein the air bearing stator 1 is fixedly connected to the upper end of the inner side of the housing 5; the lower end of the shell 5 is fixedly connected with a sealing bottom plate 8; the radial bearing 4 is connected in the air bearing stator 1 in an interference fit manner; the upper end and the lower end of the radial bearing 4 are fixedly connected with the upper stop push plate 2 and the lower thrust plate 6 respectively, the axial distance between the upper stop push plate 2 and the lower thrust plate 4 is adjusted while the height coincidence of the center lines of the radial bearing 4, the upper stop push plate 2 and the lower thrust plate 6 is ensured, the structure is compact, the structure size is reduced, and the processing precision is improved. The upper end of the upper stop push plate 2 is fixedly connected with a workpiece turntable 3; the lower end of the lower thrust plate 6 is fixedly connected with a rotor rotating shaft 7; a plurality of throttling holes 1-4 and a plurality of damping holes 1-5 are uniformly distributed on the upper surface of the air-floatation bearing stator 1 along the circumferential direction, and the damping holes 1-5 are positioned at the outer sides of the throttling holes 1-4; a plurality of throttles I are fixedly connected in the throttle holes 1-4 respectively, and are communicated with each other through a tiny groove I1-1 on the upper surface of the air bearing stator 1; the multiple damping holes 1-5 are respectively and fixedly connected with a damper, and the multiple dampers are communicated through a tiny groove II1-2 on the upper surface of the air bearing stator 1; the throttler I and the damper in the same radius direction are communicated through a tiny groove III1-3 on the upper surface of the air bearing stator 1; the structure arrangement of the micro groove I1-1, the micro groove II1-2 and the micro groove III1-3 is beneficial to improving the pressure distribution of the gas film of the aerostatic bearing, and further the purpose of improving the performance of the aerostatic turntable is achieved. An upper row and a lower row of a plurality of radial mounting holes are formed in the inner ring surface of the air bearing stator 1, and a restrictor II is fixedly connected in each radial mounting hole, so that the rotation precision and the angular rigidity of the air bearing stator are improved. The plurality of throttles II, the plurality of throttles I and the plurality of dampers are connected through the same gas circuit formed by the micro groove I1-1, the micro groove II1-2 and the micro groove III1-3, so that the equal air supply pressure is ensured, and the angular rigidity and the stability of the damper are improved.
Compressed air enters a gap between the upper stop push plate 2 and the upper surface of the air bearing stator 1 through a restrictor I and a damper on the upper surface of the air bearing stator 1 to form a floating air hydrostatic bearing thrust air film, and a floating air hydrostatic thrust bearing is formed by the upper stop push plate 2, the upper surface of the air bearing stator 1, the restrictor I and the damper on the upper surface of the air bearing stator 1.
The compressed air enters the space between the radial bearing 4 and the inner ring surface of the air bearing stator 1 from the restrictor II to form a radial air hydrostatic bearing air film. The radial gas hydrostatic bearing is composed of a radial bearing 4, an inner ring surface of a gas bearing stator 1 and a restrictor II. In addition, the pressure gas enters the gap between the lower surface of the air-floating bearing stator 1 and the lower thrust plate 6 from the gap between the upper surface of the air-floating bearing stator 1 and the upper thrust plate 2 and the gap between the inner annular surface of the air-floating bearing stator 1 and the radial bearing 4 to form a lower air-floating static pressure thrust gas film. The lower surface of the air-floating bearing stator 1 and the lower thrust plate 6 form a lower-floating gas static pressure thrust bearing. The closed gas static pressure thrust bearing is formed by the upper floating gas static pressure thrust bearing and the lower floating gas static pressure thrust bearing.
When the air-float bearing stator works, compressed air enters the throttler I and the damper on the upper surface of the air-float bearing stator 1 through the air passage, a floating air hydrostatic bearing air film is formed between the upper thrust plate 2 and the upper surface of the air-float bearing stator 1, and the structure arrangement of the micro groove I1-1, the micro groove II1-2 and the micro groove III1-3 on the upper surface of the air-float bearing stator 1 is favorable for improving the pressure distribution of the floating air hydrostatic bearing air film, so that the pressure integral, namely the bearing capacity of the air film is improved; and compressed gas simultaneously enters a flow controller II arranged in the radial direction, and a radial gas hydrostatic bearing gas film is formed on the inner ring surface of the air bearing stator 1 and the outer ring surface of the radial bearing 4. And a lower floating aerostatic bearing air film is formed between the air-floatation bearing stator 1 and the lower thrust plate 6, and because the air of the lower floating aerostatic bearing air film comes from the upper thrust air film and the radial bearing air film and no throttling hole is used for supplying air, the pressure integral of the lower floating aerostatic bearing air film is smaller, which is beneficial to improving the bearing capacity of the whole closed aerostatic bearing. In addition, the diameter of the lower thrust plate 6 is smaller than that of the upper stop push plate 2, so that the bearing capacity of the whole closed gas static pressure bearing is further increased, and the bearing capacity of the gas static pressure rotary table is further improved.
The second embodiment is as follows:
as shown in fig. 1-2, the high thrust closed type gas static pressure rotary table further comprises a driving module and a measuring module; the driving module is in transmission connection with a rotor rotating shaft 7; the measuring module is fixedly connected to the lower end of the inner side of the shell 5, and the rotor rotating shaft 7 is located on the inner side of the measuring module. The driving and measuring of the high-thrust closed type gas static pressure rotary table are completed by a driving module and a measuring module, and the content of the part is conventional content, but not the main content of the invention, so the content is only briefly described.
The third concrete implementation mode:
as shown in fig. 1-2, the center lines of the air-floating bearing stator 1, the upper stop push plate 2, the radial bearing 4, the lower thrust plate 6 and the rotor rotating shaft 7 are overlapped, so that the structure is compact, the structure size is reduced, and the processing precision is improved.
The fourth concrete implementation mode:
as shown in fig. 1-2, the upper surface of the workpiece turntable 3 is perpendicular to the center line of the upper stop push plate 2, and the upper surface of the workpiece turntable 3 is perpendicular to the center line of the upper stop push plate 2, so that the measurement accuracy can be ensured.
The fifth concrete implementation mode:
as shown in fig. 1-2, the diameter of the upper thrust plate 2 is larger than that of the lower thrust plate 6.
The sixth specific implementation mode:
as shown in fig. 1-2, the driving module adopts a torque motor, and can also adopt a flexible coupling, and is driven by a general motor, which is selected according to specific requirements.
The seventh embodiment:
as shown in fig. 1-2, the measurement module employs a circular grating member 9.
The specific implementation mode is eight:
as shown in fig. 1-2, the restrictor I is disposed along the axial direction of the air bearing stator 1.
The specific implementation method nine:
as shown in fig. 1-2, the restrictor II is arranged in the radial direction of the air bearing stator 1.
The working principle of the invention is as follows: when the air-float bearing stator works, compressed air enters the throttler I and the damper on the upper surface of the air-float bearing stator 1 through the air passage, a floating air hydrostatic bearing air film is formed between the upper thrust plate 2 and the upper surface of the air-float bearing stator 1, and the structure arrangement of the micro groove I1-1, the micro groove II1-2 and the micro groove III1-3 on the upper surface of the air-float bearing stator 1 is favorable for improving the pressure distribution of the floating air hydrostatic bearing air film, so that the pressure integral, namely the bearing capacity of the air film is improved; and compressed gas simultaneously enters a flow controller II arranged in the radial direction, and a radial gas hydrostatic bearing gas film is formed on the inner ring surface of the air bearing stator 1 and the outer ring surface of the radial bearing 4. And a lower floating aerostatic bearing air film is formed between the air-floatation bearing stator 1 and the lower thrust plate 6, and because the air of the lower floating aerostatic bearing air film comes from the upper thrust air film and the radial bearing air film and no throttling hole is used for supplying air, the pressure integral of the lower floating aerostatic bearing air film is smaller, which is beneficial to improving the bearing capacity of the whole closed aerostatic bearing. In addition, the diameter of the lower thrust plate 6 is smaller than that of the upper stop push plate 2, so that the bearing capacity of the whole closed gas static pressure bearing is further increased, and the bearing capacity of the gas static pressure rotary table is further improved.
It is to be understood that the above description is not intended to limit the present invention, and the present invention is not limited to the above examples, and that various changes, modifications, additions and substitutions which are within the spirit and scope of the present invention and which may be made by those skilled in the art are also within the scope of the present invention.
Claims (9)
1. The utility model provides a high thrust closed gas static pressure revolving stage, includes air supporting bearing stator (1), goes up and ends push pedal (2), work piece carousel (3), journal bearing (4), shell (5), lower thrust plate (6), rotor rotating shaft (7), sealing bottom plate (8), attenuator, flow controller I and flow controller II, its characterized in that: the air bearing stator (1) is fixedly connected to the upper end of the inner side of the shell (5); the lower end of the shell (5) is fixedly connected with a sealing bottom plate (8); the radial bearing (4) is connected in the air bearing stator (1) in an interference fit manner; the upper end and the lower end of the radial bearing (4) are respectively fixedly connected with the upper stop push plate (2) and the lower thrust plate (6); the upper end of the upper stop push plate (2) is fixedly connected with a workpiece turntable (3); the lower end of the lower thrust plate (6) is fixedly connected with a rotor rotating shaft (7); a plurality of throttling holes (1-4) and a plurality of damping holes (1-5) are uniformly distributed on the upper surface of the air bearing stator (1) along the circumferential direction, and the damping holes (1-5) are positioned on the outer sides of the throttling holes (1-4); a plurality of throttles I are respectively and fixedly connected in the throttle holes (1-4), and are communicated with each other through a tiny groove I (1-1) on the upper surface of the air bearing stator (1); a plurality of dampers are respectively and fixedly connected in the plurality of damping holes (1-5) and are communicated through micro grooves II (1-2) on the upper surface of the air bearing stator (1); the throttler I and the damper in the same radius direction are communicated through a micro groove III (1-3) on the upper surface of the air bearing stator (1); the air bearing comprises an air bearing stator (1) and is characterized in that an upper row and a lower row of a plurality of radial mounting holes are formed in the inner ring surface of the air bearing stator (1), and a restrictor II is fixedly connected in each radial mounting hole.
2. A high thrust closed aerostatic turret according to claim 1, characterized in that: the high-thrust closed gas static pressure turntable further comprises a driving module and a measuring module; the driving module is in transmission connection with a rotor rotating shaft (7); the measuring module is fixedly connected to the lower end of the inner side of the shell (5), and the rotor rotating shaft (7) is located on the inner side of the measuring module.
3. A high thrust closed aerostatic turret according to claim 1, characterized in that: the central lines of the air bearing stator (1), the upper stop push plate (2), the radial bearing (4), the lower thrust plate (6) and the rotor rotating shaft (7) are overlapped.
4. A high thrust closed aerostatic turret according to claim 1, characterized in that: the upper surface of the workpiece turntable (3) is vertical to the central line of the upper stop push plate (2).
5. A high thrust closed aerostatic turret according to claim 1, characterized in that: the diameter of the upper stop push plate (2) is larger than that of the lower thrust plate (6).
6. A high thrust closed aerostatic turret according to claim 2, characterized in that: the driving module adopts a torque motor.
7. A high thrust closed aerostatic turret according to claim 2, characterized in that: the measuring module adopts a circular grating component (9).
8. A high thrust closed aerostatic turret according to claim 1, characterized in that: the throttler I is arranged along the axial direction of the air bearing stator (1).
9. A high thrust closed aerostatic turret according to claim 1, characterized in that: the throttler II is arranged along the radial direction of the air bearing stator (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910442417.6A CN110039330B (en) | 2019-05-25 | 2019-05-25 | High-thrust closed gas static pressure rotary table |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910442417.6A CN110039330B (en) | 2019-05-25 | 2019-05-25 | High-thrust closed gas static pressure rotary table |
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| CN110039330A CN110039330A (en) | 2019-07-23 |
| CN110039330B true CN110039330B (en) | 2020-03-10 |
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| CN201910442417.6A Expired - Fee Related CN110039330B (en) | 2019-05-25 | 2019-05-25 | High-thrust closed gas static pressure rotary table |
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| CN110449921A (en) * | 2019-08-20 | 2019-11-15 | 江苏集萃精凯高端装备技术有限公司 | A kind of gas-static turntable and its starting protection, locking method |
| CN111421412B (en) * | 2020-05-20 | 2022-03-04 | 清华大学 | Grinding workbench and wafer thinning equipment |
| CN112692795B (en) * | 2020-12-28 | 2024-05-31 | 江苏集萃精凯高端装备技术有限公司 | Precise air-floatation rotary table with high-vacuum suction disc |
| CN113124057B (en) * | 2021-04-27 | 2022-07-22 | 北京工业大学 | Static pressure air-float thrust bearing based on multi-ring belt exhaust |
| CN113635084A (en) * | 2021-08-25 | 2021-11-12 | 中国工程物理研究院机械制造工艺研究所 | Air-float rotary table |
| CN113894300B (en) * | 2021-10-26 | 2022-08-05 | 中国工程物理研究院机械制造工艺研究所 | Porous and micropore combined throttling gas static pressure turning electric spindle |
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| CN114406730B (en) * | 2022-02-17 | 2024-05-31 | 江苏恒望机械科技有限公司 | Numerical control rotary workbench |
| CN114523453A (en) * | 2022-03-15 | 2022-05-24 | 合肥御微半导体技术有限公司 | Precise air-floating rotary table |
| CN115596767A (en) * | 2022-09-30 | 2023-01-13 | 哈尔滨工业大学（Cn） | Gas static pressure turntable with magnetic fluid damper |
| CN115839644A (en) * | 2023-02-15 | 2023-03-24 | 广东优社动力科技有限公司 | Circumference pulsation measuring instrument |
| CN115890275B (en) * | 2023-02-20 | 2023-07-14 | 中国机械总院集团宁波智能机床研究院有限公司 | Static pressure composite turntable and protection method thereof |
| CN116717541A (en) * | 2023-07-20 | 2023-09-08 | 通用技术集团机床工程研究院有限公司 | Aerostatic bearing and aerostatic turntable |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3746242B2 (en) * | 2002-03-08 | 2006-02-15 | ファナック株式会社 | Laminar air static pressure bearing |
| CN1654840A (en) * | 2005-02-17 | 2005-08-17 | 哈尔滨工业大学 | Composite throttling pressurized air thrust bearing |
| CN102128206B (en) * | 2011-03-15 | 2013-02-06 | 中国科学院光电技术研究所 | Air static pressure thrust bearing |
| CN103111855B (en) * | 2013-02-18 | 2014-12-24 | 哈尔滨工业大学 | Large-diameter-height-ratio ultra-precision hydrostatic pressure rotary table |
| CN103801944B (en) * | 2014-03-10 | 2016-03-30 | 北京微纳精密机械有限公司 | A kind of heavy caliber gas-static turntable structure |
| CN206845691U (en) * | 2017-07-12 | 2018-01-05 | 哈尔滨工业大学 | A kind of plane air-bearing with air drain |
| CN207377968U (en) * | 2017-09-30 | 2018-05-18 | 中国工程物理研究院机械制造工艺研究所 | A kind of air-float turntable |
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