CN115415559A - Large-bearing gas static pressure main shaft with radial throttlers in non-uniform distribution - Google Patents

Large-bearing gas static pressure main shaft with radial throttlers in non-uniform distribution Download PDF

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Publication number
CN115415559A
CN115415559A CN202211049813.0A CN202211049813A CN115415559A CN 115415559 A CN115415559 A CN 115415559A CN 202211049813 A CN202211049813 A CN 202211049813A CN 115415559 A CN115415559 A CN 115415559A
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China
Prior art keywords
air flue
main shaft
radial
rotor
axial air
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Pending
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CN202211049813.0A
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Chinese (zh)
Inventor
王波
吴言功
张凯文
乔政
丁飞
陈文韬
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Harbin Institute of Technology
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Harbin Institute of Technology
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Priority to CN202211049813.0A priority Critical patent/CN115415559A/en
Publication of CN115415559A publication Critical patent/CN115415559A/en
Pending legal-status Critical Current

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/70Stationary or movable members for carrying working-spindles for attachment of tools or work

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Abstract

The utility model provides a radial throttle non-uniform distribution's big load-bearing gas static pressure main shaft, belongs to ultra-precision machine tool technical field, specifically includes main shaft rotor, axle sleeve and base, main shaft rotor is solid of revolution structure, the axle sleeve cover is established on main shaft rotor, and its outside is fixed on the base, be provided with a plurality of axial air flue I along the circumferencial direction level on the axle sleeve, the density that is located axial air flue I of 1 central below of main shaft rotor is greater than the density that is located axial air flue I of main shaft rotor central top, corresponds every axial air flue I and is provided with radial air flue I of a plurality of, the I perpendicular intercommunication of I and the axial air flue I that corresponds of a plurality of radial air flue, the one end of I nearly main shaft rotor of every radial air flue all is provided with throttle I. High-pressure air forms a radial air film on the surface of a main shaft rotor through the radial throttler I to bear radial load, so that the throttler I which is non-uniformly distributed provides higher bearing for the main shaft.

Description

Large-bearing gas static pressure main shaft with radial throttlers in non-uniform distribution
Technical Field
The invention belongs to the technical field of ultra-precision machine tools, and particularly relates to a large-bearing gas static pressure main shaft with a radial restrictor in non-uniform distribution.
Background
The roller mold ultra-precise processing machine tool belongs to the field of high technology, is a high-investment and high-return product, can process an optical microstructure roller mold which is a core part in an RTR production process, and can realize the rapid copying and processing of microstructures through uninterrupted rolling. Most roller machine tools are of a horizontal structure, and because the size and the weight of a die workpiece are large, double-end clamping and in-place adjustment are required to be carried out on the die workpiece during ultra-precision cutting, so that two sets of spindle systems are configured on the machine tools. The ultra-precision machining of the roller die puts forward the requirements of high bearing capacity, high rigidity, high rotation precision, high resolution, small heating deformation, no creeping phenomenon and the like on the main shaft component.
Two major cores of the ultra-precision motorized spindle are respectively the support of a bearing and the drive of a motor, and the precision of the spindle depends on the precision of the bearing. The rolling bearing has short service life and poor thermal stability, and is rarely applied to the prior ultra-precision machine tool. The hydrostatic bearing has the advantages of large bearing capacity, high rigidity and excellent dynamic performance, but the high-viscosity liquid at high rotating speed has severe temperature rise, and the precision of the main shaft is sharply reduced due to structural thermal deformation caused by the severe temperature rise. At present, a spindle of a roller machine tool usually uses a hydrostatic pressure spindle, but a high-precision cooling unit is required to be arranged to control the temperature of lubricating fluid in the spindle in real time, so that the error increase of the spindle caused by temperature rise is avoided.
The aerostatic bearing adopts gas with extremely low viscosity to separate the shaft from the shaft sleeve, and has the advantages of small friction resistance, almost no temperature rise, no creeping phenomenon in low-speed motion, extremely high positioning precision and the like. The main problem of aerostatic bearings is their low stiffness and load bearing, so increasing the load bearing capacity of aerostatic bearings as much as possible is a key to the design of such machine tools.
Disclosure of Invention
In order to improve the bearing capacity of the gas hydrostatic bearing, the invention provides a large-bearing gas hydrostatic main shaft with a radial restrictor in non-uniform distribution.
In order to achieve the purpose, the invention adopts the following technical scheme:
the utility model provides a big load-bearing gas static pressure main shaft of radial flow controller non-uniform distribution, includes main shaft rotor, axle sleeve and base, the axle sleeve cover is established on main shaft rotor, and its outside is fixed on the base, be provided with a plurality of axial air flue I along the circumferencial direction level on the axle sleeve, the density that is located axial air flue I of main shaft rotor center below is greater than the density that is located axial air flue I of main shaft rotor center top, corresponds every axial air flue I and is provided with a plurality of radial air flue I, the I perpendicular intercommunication of the I axial air flue that corresponds of a plurality of radial air flue, the one end that I is close to main shaft rotor of every radial air flue all is provided with flow controller I.
Compared with the prior art, the invention has the beneficial effects that:
1. compared with the traditional orifice throttle bearing, the invention only changes the distribution position of the radial air passage I (radial throttleer), adjusts the distribution position into non-uniform arrangement, does not change other structures, and can fully utilize the existing processing technology and processing equipment.
2. The radial bearing and the thrust bearing are supplied with air separately, the air supply pressure of the thrust bearing ensures that no air hammer exists, the air supply pressure of the radial bearing is improved to be more than 0.8MPa by utilizing the supercharging equipment, and the bearing capacity can be improved.
3. The choke I at the lower part of the gas static pressure main shaft is dense, so that the gas film area through which gas flows out of the choke I is small, and the gas resistance is large. According to the law of partial pressure, the pressure of the gas membrane surface behind the orifice of the small-orifice restrictor is improved. In a similar way, the restrictor I on the upper part of the gas static pressure main shaft is sparse, the gas film area through which gas flowing out of the restrictor I flows is large, the gas resistance is small, and the pressure of the gas film surface in the area is reduced. Analysis shows that under the same air supply condition, the radial throttler is unevenly arranged to provide higher bearing for the main shaft, and the bearing can be increased to more than 1.5 times compared with the traditional small hole throttling.
Drawings
FIG. 1 is a schematic axial sectional view of the present invention;
FIG. 2 is a schematic view of the radial cross-section of the present invention;
fig. 3 is a schematic perspective view of the present invention.
In the figure, 1, a spindle rotor, 2, a shaft sleeve, 3, a base, 4, a front radial plate, 5, a chuck adapter, 6, a chuck, 7, a motor stator, 8, a motor mover, 9, a stator mounting frame, 10, a mover mounting shaft, 11, a long shaft, 12, a thrust plate, 13, a grating, 14, a rotary transformer, 15, a wire plate, 16, a rear cover, 17, a connecting ring, 18, a reading head, 19, a rotary transformer frame, 20, a reading head seat, 21, an axial air passage I, 22, a radial air passage I, 23, a restrictor I, 24, a gas distribution ring I, 25, a gas sealing plug, 26, a radial air passage III, 27, an axial air passage IV, 28, an axial air passage V, 41, a radial air passage II, 42, an axial air passage II, 43, an axial air passage III, 44, a gas distribution ring II, 45, a restrictor II, 141, a rotary transformer mover, 142, and a rotary transformer stator.
Detailed Description
The technical solutions in the present invention will be described clearly and completely with reference to the embodiments of the present invention and the accompanying drawings, and it is obvious that the described embodiments are only a part of the embodiments of the invention, rather than all embodiments, and all other embodiments obtained by those skilled in the art without any inventive work based on the embodiments of the present invention belong to the protection scope of the present invention. For clarity and convenience, in the following embodiments, the front web 4 of the aerostatic spindle is located at the front end, and the rear cover 16 is located at the rear end, and the words "front", "rear", and the like, which are used herein to indicate the orientation, should not be construed as specifically limiting the invention.
Example 1:
the utility model provides a big load-bearing gas static pressure main shaft of radial throttle non-uniform distribution, includes main shaft rotor 1, axle sleeve 2 and base 3, main shaft rotor 1 is the solid of revolution structure, axle sleeve 2 cover is established on main shaft rotor 1, and its outside is fixed on base 3, axle sleeve 2 is gone up and is provided with a plurality of axial air flue I21 along the circumferencial direction level, and the density that is located axial air flue I21 of main shaft rotor 1 center below is greater than the density that is located axial air flue I21 of main shaft rotor 1 center top, corresponds every axial air flue I21 and is provided with a plurality of radial air flue I22, the perpendicular intercommunication of the I21 of the axial air flue that a plurality of radial air flue I22 and correspond, and the one end that every radial air flue I22 is close to main shaft rotor 1 all is provided with throttle I23. High-pressure air forms a radial air film on the surface of the main shaft rotor 1 through the radial throttler I23 to bear radial load, so that the throttler I23 which is non-uniformly distributed provides higher bearing for the main shaft; by increasing the diameter of the spindle rotor 1, the radial bearing area is increased, thereby improving the spindle bearing.
Further, circumference recess I has been seted up on the rear end face of axle sleeve 2, be provided with in the circumference recess I and divide gas ring I24, a plurality of axial air flue I21 all communicates with a gas ring I24, divide gas ring I24 and air feeder intercommunication, only need an air inlet, for the I21 air feed of each axial air flue to for the I23 air feed of the flow controller in every radial air flue I22.
Furthermore, an air sealing plug 25 is arranged at one end, far away from the main shaft rotor 1, of each radial air passage I22, so that air leakage of each radial air passage I22 is avoided.
Preferably, four radial air passages i 22 are correspondingly arranged on each axial air passage i 21.
The shaft sleeve 2, the restrictor I23, the air sealing plug 25 arranged on the radial air passage I22 and the air distribution ring I24 form a radial bearing together.
Further, it still includes preceding radials 4 to bear the weight of greatly the aerostatic spindle, be provided with the holding tank on the rear end face of preceding radials 4, main shaft rotor 1 includes major axis 11 and sets up thrust plate 12 at 11 front ends of major axis, major axis 11 and thrust plate 12 structure as an organic whole, 2 covers of axle sleeve are established on major axis 11, thrust plate 12 is located the holding tank, the front end fixed connection of preceding radials 4 and axle sleeve 2.
Further, be provided with radial air flue II 41 of a plurality of to inside along the circumferencial direction equipartition by the surface on the preceding radials 4, be provided with a plurality of axial air flue II 42 by the rear end face to preceding along the circumferencial direction equipartition on the preceding radials 4, a plurality of axial air flue II 42 sets up and communicates each other with radial air flue II 41 one-to-one of a plurality of, preceding lateral wall by the holding tank is provided with a plurality of axial air flue III 43 to leading edge circumferencial direction equipartition on the preceding radials 4, a plurality of axial air flue III 43 sets up and communicates each other with a plurality of radial air flue II 41 one-to-one, be provided with a plurality of radial air flue III 26 to leading edge circumferencial direction equipartition by the surface to inside on the axle sleeve 2, the preceding terminal surface of axle sleeve 2 is provided with a plurality of axial air flue IV 27 and a plurality of axial air flue V28 to the circumferencial direction equipartition backward, a plurality of axial air flue IV 27 and a plurality of axial air flue V28 all set up and communicate each other with a plurality of radial III 26 one-to one, a plurality of axial II 42 and communicate each other.
Furthermore, a circumferential groove II is formed in the circumferential direction of the outer surface of the front radial plate 4, a gas distribution ring II 44 is arranged in the circumferential groove II, the plurality of radial air passages II 41 are all communicated with the gas distribution ring II 44, the gas distribution ring II 44 is communicated with a gas supply device, a restrictor II 45 is arranged at one end, close to the thrust plate 12, of the plurality of axial air passages III 43 and the plurality of axial air passages V28, an air sealing plug 25 is arranged at the position, communicated with the outside, of the radial air passages III 26, so that gas leakage is avoided, the gas distribution ring II 44 supplies gas for the axial air passages II 42 and the axial air passages IV 27, the gas is further communicated with the restrictor II 45, and the gas can be supplied for all the restrictors II 45 only through one gas inlet hole; after passing through the flow controller II 45, high-pressure gas can form a thrust gas film on the thrust plate 12 of the spindle rotor 1, so that the spindle can bear closed axial load; the front radial plate 4, the air distribution ring II 44, the shaft sleeve 2, the air sealing plug 25 arranged in the radial air passage III 26 and the restrictor II 45 jointly form a thrust bearing.
The radial bearing and the thrust bearing are respectively supplied with air through an air distribution ring I24 and an air distribution ring II 44. High-pressure air of 0.8MPa can be introduced into the radial bearing without air hammer.
Further, the large-load-capacity gas static pressure spindle further comprises a chuck adapter 5 and a chuck 6, the chuck adapter 5 is fixedly connected with the spindle rotor 1 through a bolt, the chuck 6 is mounted on the chuck adapter 5 through a bolt, and preferably, the chuck 6 is a four-jaw chuck.
Further, bear aerostatic spindle greatly still includes motor stator 7, motor rotor 8, stator mounting bracket 9 and active cell installation axle 10, motor stator 7 passes through the bearing with motor rotor 8 and rotates to be connected, and motor stator 7 installs on stator mounting bracket 9, stator mounting bracket 9 passes through go-between 17 and base 3's rear end face fixed connection, motor rotor 8 passes through active cell installation axle 10 and is connected with main shaft rotor 1, motor rotor 8's rotation center and main shaft rotor 1's axis coincidence, motor rotor 8 provides the torque for main shaft rotor 1.
Further, the large-bearing-capacity aerostatic spindle further comprises a grating 13, a rotary transformer 14 and a reading head 18, the rotary transformer 14 comprises a rotary transformer rotor 141 and a rotary transformer stator 142, the rotary transformer rotor 141 and the rotary transformer stator 142 are rotatably connected, the rotary transformer rotor 141 and the grating 13 are both fixedly mounted on the rotor mounting shaft 10, the rotary transformer stator 142 is fixed on the rotary transformer frame 19, the rotary transformer frame 19 is fixedly connected with the stator mounting frame 9, the reading head 18 is matched with the grating 13 for use, the reading head 18 is fixedly mounted on the reading head seat 20, the reading head seat 20 is fixed on the rotary transformer frame 19, and the grating 13 and the rotary transformer 14 are used for providing spindle position and speed feedback.
Further, the large-bearing air-floating spindle structure further comprises a line board 15 and a rear cover 16, the line board 15 is fixed on the reading head seat 20, the rear cover 16 is fixed on the line board 15, and the rotary frame 19, the reading head seat 20, the line board 15 and the rear cover 16 are used for supporting the spindle rotor 1.
Further, the outer side wall of the shaft sleeve 2 is fixedly sleeved in the through hole of the base 3; preferably, the base 3 is a marble member or a cast iron member.
Further, the motor stator 7 and the motor rotor 8 are frameless torque motors.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.

Claims (10)

1. A big load-bearing gas static pressure main shaft of radial flow controller non-uniform distribution which characterized in that: including main shaft rotor (1), axle sleeve (2) and base (3), axle sleeve (2) cover is established on main shaft rotor (1), and its outside is fixed on base (3), axle sleeve (2) are gone up and are provided with a plurality of axial air flue I (21) along the circumferencial direction level, and the density that is located axial air flue I (21) of main shaft rotor (1) center below is greater than the density that is located axial air flue I (21) of main shaft rotor (1) center top, correspond every axial air flue I (21) and are provided with a plurality of radial air flue I (22), a plurality of radial air flue I (22) and the perpendicular intercommunication of the axial air flue I (21) that corresponds, the one end that every radial air flue I (22) is close to main shaft rotor (1) all is provided with flow controller I (23).
2. The non-uniformly distributed large load bearing gas static pressure main shaft of the radial restrictor of claim 1, wherein: be provided with on the rear end face of axle sleeve (2) and divide gas ring I (24), a plurality of axial air flue I (21) all with divide gas ring I (24) intercommunication, divide gas ring I (24) and air feeder intercommunication.
3. The non-uniformly distributed large load bearing gas static pressure main shaft of the radial restrictor of claim 1, wherein: and an air sealing plug (25) is arranged at one end of each radial air passage I (22) far away from the main shaft rotor.
4. The non-uniformly distributed large load bearing gas static pressure main shaft of the radial restrictor of claim 1, wherein: bear aerostatic spindle greatly still includes preceding radials (4), be provided with the holding tank on the rear end face of preceding radials (4), main shaft rotor (1) includes major axis (11) and sets up thrust plate (12) at major axis (11) front end, axle sleeve (2) cover is established on major axis (11), thrust plate (12) are located the holding tank, preceding radials (4) and the front end fixed connection of axle sleeve (2).
5. The non-uniformly distributed large load bearing gas static pressure main shaft of the radial restrictor of claim 4, wherein: preceding radials (4) go up by the surface to being provided with radial air flue II (41) of a plurality of to inside along the circumferencial direction equipartition, be provided with a plurality of axial air flue II (42) by the rear end face to preceding along the circumferencial direction equipartition on preceding radials (4), a plurality of axial air flue II (42) set up and communicate each other with radial air flue II (41) one-to-one of a plurality of, preceding lateral wall by the holding tank is provided with a plurality of axial air flue III (43) to leading edge circumferencial direction equipartition on preceding radials (4), a plurality of axial air flue III (43) set up and communicate each other with radial air flue II (41) one-to-one of a plurality of, be provided with radial air flue III (26) of a plurality of by the surface to inside along the circumferencial direction equipartition on axle sleeve (2), the preceding terminal face of axle sleeve (2) is provided with a plurality of axial air flue IV (27) and a plurality of axial air flue V (28) and a plurality of axial air flue V (27) and a plurality of axial air flue IV (27) and a plurality of axial V (28) communicate each other with radial air flue (26) one-to set up and communicate each other.
6. The non-uniformly distributed large load bearing gas static pressure main shaft of the radial restrictor of claim 5, wherein: be provided with on the surface circumferencial direction of preceding radials (4) and divide gas ring II (44), a plurality of radial air flue II (41) all with divide gas ring II (44) intercommunication, divide gas ring II (44) and air feeder intercommunication, a plurality of axial air flue III (43) and the one end of a plurality of axial air flue V (28) near thrust plate (12) all are provided with flow controller II (45), be provided with external intercommunication department and seal gas end cap (25) on radial air flue III (26).
7. The non-uniformly distributed large load bearing gas static pressure main shaft of the radial restrictor of claim 1, wherein: the large-bearing gas static pressure spindle further comprises a chuck adapter (5) and a chuck (6), the chuck adapter (5) is fixedly connected with the spindle rotor (1), and the chuck (6) is installed on the chuck adapter (5).
8. The non-uniformly distributed large-load-bearing gas static pressure main shaft with the radial flow restrictor of claim 1, wherein: big bear gas static pressure main shaft still includes motor stator (7), motor rotor (8), stator mounting bracket (9) and active cell installation axle (10), motor rotor (8) are connected through the bearing rotation with motor stator (7), and motor stator (7) are installed on stator mounting bracket (9), stator mounting bracket (9) and base (3) fixed connection, motor rotor (8) are connected with spindle rotor (1) through active cell installation axle (10), the center of rotation of motor rotor (8) and the coincidence of the axis of spindle rotor (1).
9. The non-uniformly distributed large load bearing gas static pressure main shaft of the radial restrictor of claim 8, wherein: the large-bearing-capacity aerostatic spindle further comprises a grating (13), a rotary transformer (14) and a reading head (18), wherein the rotary transformer (14) comprises a rotary transformer rotor (141) and a rotary transformer stator (142), the rotary transformer rotor (141) and the rotary transformer stator (142) are rotationally connected, the rotary transformer rotor (141) and the grating (13) are fixedly mounted on a rotor mounting shaft (10), the rotary transformer stator (142) is fixed on a rotary transformer frame (19), the rotary transformer frame (19) is fixedly connected with a stator mounting frame (9), the reading head (18) is matched with the grating (13) for use, the reading head (18) is fixedly mounted on a reading head seat (20), and the reading head seat (20) is fixed on the rotary transformer frame (19).
10. The non-uniformly distributed large-load-bearing gas static pressure spindle of the radial flow restrictor of claim 9, wherein: the large-bearing air-floating spindle structure further comprises a line board (15) and a rear cover (16), the line board (15) is fixed on the reading head base (20), and the rear cover (16) is fixed on the line board (15).
CN202211049813.0A 2022-08-30 2022-08-30 Large-bearing gas static pressure main shaft with radial throttlers in non-uniform distribution Pending CN115415559A (en)

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CN202211049813.0A CN115415559A (en) 2022-08-30 2022-08-30 Large-bearing gas static pressure main shaft with radial throttlers in non-uniform distribution

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CN202211049813.0A CN115415559A (en) 2022-08-30 2022-08-30 Large-bearing gas static pressure main shaft with radial throttlers in non-uniform distribution

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116021048A (en) * 2023-01-19 2023-04-28 哈尔滨工业大学 Low-wind-resistance high-speed main shaft rotor structure
CN116117190A (en) * 2023-02-20 2023-05-16 哈尔滨工业大学 Anti-low head boring bar system
CN116748539A (en) * 2023-08-22 2023-09-15 霖鼎光学(江苏)有限公司 Ultra-precise turning system
CN116765442A (en) * 2023-08-28 2023-09-19 凌远科技股份有限公司 Bearing element and bearing

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JPH08303464A (en) * 1995-05-09 1996-11-19 Canon Inc Indexing device
WO2008053196A1 (en) * 2006-10-31 2008-05-08 Gsi Group Limited Aerostatic bearing spindles
CN101780547A (en) * 2010-03-30 2010-07-21 哈尔滨工业大学 Separated drive spindle system of ultraprecision machining tool
CN102476193A (en) * 2010-11-23 2012-05-30 大连创达技术交易市场有限公司 Separating type flexibly driven spindle system for high-precision processing machine tool
CN103758866A (en) * 2014-02-20 2014-04-30 中国工程物理研究院总体工程研究所 Combined radial thrust bearing for precision centrifuge
CN108194507A (en) * 2018-01-26 2018-06-22 中国计量大学 A kind of non-uniform Distribution variable orifice diameter is radial gas bearing provided
CN108620948A (en) * 2018-05-17 2018-10-09 北京工业大学 A kind of detection compensation control system for the Aerostatic Spindle
CN110293235A (en) * 2019-07-24 2019-10-01 马鞍山市恒利达机械刀片有限公司 A kind of ultraprecise hydrodynamic and hydrostatic pressure electro spindle
CN110894854A (en) * 2019-09-25 2020-03-20 北京工业大学 Integrated permanent magnetism suspension's heavy load air supporting main shaft
CN114909399A (en) * 2022-06-14 2022-08-16 哈尔滨工业大学 Anti-overturning load large-bearing air-floating main shaft structure

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08303464A (en) * 1995-05-09 1996-11-19 Canon Inc Indexing device
WO2008053196A1 (en) * 2006-10-31 2008-05-08 Gsi Group Limited Aerostatic bearing spindles
CN101780547A (en) * 2010-03-30 2010-07-21 哈尔滨工业大学 Separated drive spindle system of ultraprecision machining tool
CN102476193A (en) * 2010-11-23 2012-05-30 大连创达技术交易市场有限公司 Separating type flexibly driven spindle system for high-precision processing machine tool
CN103758866A (en) * 2014-02-20 2014-04-30 中国工程物理研究院总体工程研究所 Combined radial thrust bearing for precision centrifuge
CN108194507A (en) * 2018-01-26 2018-06-22 中国计量大学 A kind of non-uniform Distribution variable orifice diameter is radial gas bearing provided
CN108620948A (en) * 2018-05-17 2018-10-09 北京工业大学 A kind of detection compensation control system for the Aerostatic Spindle
CN110293235A (en) * 2019-07-24 2019-10-01 马鞍山市恒利达机械刀片有限公司 A kind of ultraprecise hydrodynamic and hydrostatic pressure electro spindle
CN110894854A (en) * 2019-09-25 2020-03-20 北京工业大学 Integrated permanent magnetism suspension's heavy load air supporting main shaft
CN114909399A (en) * 2022-06-14 2022-08-16 哈尔滨工业大学 Anti-overturning load large-bearing air-floating main shaft structure

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116021048A (en) * 2023-01-19 2023-04-28 哈尔滨工业大学 Low-wind-resistance high-speed main shaft rotor structure
CN116117190A (en) * 2023-02-20 2023-05-16 哈尔滨工业大学 Anti-low head boring bar system
CN116748539A (en) * 2023-08-22 2023-09-15 霖鼎光学(江苏)有限公司 Ultra-precise turning system
CN116765442A (en) * 2023-08-28 2023-09-19 凌远科技股份有限公司 Bearing element and bearing
CN116765442B (en) * 2023-08-28 2023-11-10 凌远科技股份有限公司 Bearing element and bearing

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