CN217207355U - Static pressure gas radial bearing with elastic wave foil support - Google Patents

Static pressure gas radial bearing with elastic wave foil support Download PDF

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Publication number
CN217207355U
CN217207355U CN202121406586.3U CN202121406586U CN217207355U CN 217207355 U CN217207355 U CN 217207355U CN 202121406586 U CN202121406586 U CN 202121406586U CN 217207355 U CN217207355 U CN 217207355U
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Prior art keywords
bearing
inner ring
elastic wave
wave foil
foil
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CN202121406586.3U
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Inventor
杨山举
郝杰
王琪
冶文莲
化文灿
白文超
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Qicheng Suspension Technology Xi'an Co ltd
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Bengbu Zhongxing Siyuan Refrigeration Technology Co ltd
Northwest A&F University
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Abstract

The invention discloses a static pressure gas radial bearing with an elastic wave foil support. The static pressure gas radial bearing comprises a bearing base, an elastic wave foil, a bearing inner ring, an inner ring positioning pin and a fixed gasket. A fixing groove is formed in the bearing base, and the elastic bump foil is welded in the fixing groove through a fixing gasket; a certain number of throttling holes are uniformly formed in the bearing base and the bearing inner ring along the circumferential direction, and positioning grooves are formed in the side faces of the throttling holes; the inner ring positioning pin is positioned in the positioning groove and can prevent the bearing inner ring from rotating along the circumferential direction. The elastic wave foil and the bearing inner ring are additionally arranged, the elastic wave foil can play an elastic supporting role, a shaft is allowed to have larger vibration amplitude, and the stability and the impact resistance of the bearing are improved; the bearing inner ring is convenient to replace, and the cost is reduced; meanwhile, the bearing base and the bearing inner ring are provided with a plurality of rows of orifices which are uniformly distributed, so that the uniformity of air supply can be improved; the double-layer throttling hole structure can reduce the punching depth and reduce the processing difficulty.

Description

Static pressure gas radial bearing with elastic wave foil support
Technical Field
The invention belongs to the field of gas bearings and high-speed rotating machinery, and particularly relates to a static pressure gas radial bearing with an elastic wave foil support.
Background
The static pressure gas radial bearing has the advantages of small vibration, high rotation precision, small friction loss, long service life, no pollution to the environment and the like, and is widely applied to the aerospace industry, the semiconductor industry, ultra-precision machining equipment and precision measurement equipment. The bearing rigidity is the main performance index of the static pressure gas radial bearing and is the key for ensuring the bearing precision. The load-bearing capacity and stiffness of a hydrostatic gas bearing are related to the form of throttling, the pressure of the supply gas and the form of the structure of the support. The throttling modes of the static pressure gas bearing mainly include small hole throttling, slit throttling, surface throttling, porous throttling and the like. At present, the throttling modes are researched and applied to different degrees in China, wherein the orifice with a smaller aperture and a smaller bearing gap are generally adopted for the small-hole gas supply static pressure gas bearing, so that the gas generates a stronger throttling effect in the process of passing through the orifice and the bearing gap, and the rigidity of the bearing is favorably improved. The small-hole throttling static pressure gas radial bearing which is widely applied has higher rigidity, but has lower bearing capacity and poorer stability. At present, the bearing capacity of the orifice throttling static pressure gas radial bearing is usually improved through high gas supply pressure, but the orifice throttling static pressure gas radial bearing is easy to generate air hammer vibration when the gas supply pressure is high, so that the bearing is failed, and the improvement of the bearing capacity is greatly restricted. Meanwhile, under the condition that the main shaft rotates at a high speed, if external impact and disturbance occur, when a rotor is unstable, sintering and adhesion can occur between the main shaft and the bearing, so that the main shaft and the bearing are seriously abraded and even destroyed, and the safety and stable operation of equipment are seriously influenced.
Based on some research difficulties in the prior art, the invention discloses a static pressure gas radial bearing with an elastic wave foil support. Compared with the traditional static pressure gas radial bearing, the static pressure gas radial bearing is additionally provided with the elastic wave foil and the bearing inner ring, the elastic wave foil can play an elastic supporting role, a shaft is allowed to have larger vibration amplitude, and the stability and the impact resistance of the bearing are improved; the bearing inner ring is convenient to replace, and the cost is reduced; meanwhile, the bearing base and the bearing inner ring are provided with a plurality of rows of orifices which are uniformly distributed, so that the uniformity of air supply can be improved; the double-layer throttling hole structure can reduce the punching depth and reduce the processing difficulty, so that the bearing has higher adaptability.
Disclosure of Invention
The static pressure gas radial bearing with the elastic wave foil support is provided, the structural form and the throttling form of the bearing support are improved, the elastic wave foil and the bearing inner ring are additionally arranged, the elastic wave foil can play an elastic supporting role, a shaft is allowed to have larger vibration amplitude, and the stability and the impact resistance of the bearing are improved; the bearing inner ring is convenient to replace, and the cost is reduced; meanwhile, multiple rows of uniformly distributed throttle holes are formed in the bearing base and the bearing inner ring, so that the uniformity of air supply can be improved; the double-layer throttling hole structure can reduce the punching depth and reduce the processing difficulty, so that the bearing has higher adaptability. The technical scheme of the invention is as follows.
The invention relates to a static pressure gas radial bearing with an elastic corrugated foil support. A fixing groove is formed in the bearing base, and the elastic wave foil is welded in the fixing groove through a fixing gasket; a certain number of throttling holes are uniformly formed in the bearing base and the bearing inner ring along the circumferential direction, and positioning grooves are formed in the side faces of the throttling holes; the inner ring positioning pin is positioned in the positioning groove, can position the bearing base and the throttling hole of the bearing inner ring, and simultaneously prevents the bearing inner ring from rotating along the circumferential direction; the diameter of the bearing inner ring is slightly larger than that of the main shaft, so that a bearing gap is formed; and the manufactured bearing base, the elastic wave foil and the bearing inner ring are sequentially superposed.
Bearing pedestal evenly be provided with the orifice that the several structure is the same along the circumferencial direction, macropore aperture is 2~4mm, aperture is 1~2mm, the hole number is 4~14, is equipped with 1~4 rows, but bearing pedestal orifice equidistance in axial direction arranges also can the displacement arrange.
Elastic wave foil be the metal wave foil type, wave foil evenly is provided with the through-hole that the several structure is the same along the circumferencial direction, the aperture is 1~2mm, the figure is 4~14, is equipped with 1~4 rows, but the foil through-hole equidistance is arranged at axial direction also can the displacement and arrange, the foil through-hole aligns with the bearing base orifice and arranges.
The width of the foil of the elastic wave foil is smaller than that of the bearing base, the difference is 2-4 mm, the height of the pressed foil is 0.2-0.7 mm, and the number of wave arches is 8-50.
The bearing inner ring is evenly provided with a plurality of orifices with the same structure along the circumferential direction, the aperture of a large hole is 1-2 mm, the aperture of a small hole is 0.2-1 mm, the number of the holes is 4-14, the bearing inner ring orifices are arranged in the axial direction at equal intervals or in variable intervals, and the bearing inner ring orifices and the bearing base orifices are arranged in an aligned mode.
The width of the bearing inner ring is slightly smaller than the width of the bearing base, the difference value is not more than 1mm, the inner diameter of the bearing inner ring is slightly larger than the diameter of the main shaft, and the difference value is 0.02 mm-0.2 mm.
Drawings
Fig. 1 is an exploded view of a hydrostatic gas radial bearing with an elastic wave foil support according to the present invention.
Fig. 2 is an assembly schematic of a hydrostatic gas radial bearing with an elastic wave foil support according to the present invention.
Fig. 3 is a schematic diagram of the installation and positioning of the bearing base, the elastic wave foil and the bearing inner ring adopted by the static pressure gas radial bearing with the elastic wave foil support provided by the invention.
FIG. 4 is a schematic diagram of the distribution of orifices and positioning grooves in the bearing pedestal of the hydrostatic gas radial bearing with elastic wave foil support according to the present invention.
FIG. 5 is a schematic diagram of the distribution of orifices and positioning grooves in the inner ring of the bearing used in the static pressure gas radial bearing with elastic wave foil support according to the present invention.
A hydrostatic gas radial bearing with elastic wave foil support according to an embodiment of the application, reference numbers indicate:
1. a bearing base; 11. a bearing pedestal orifice; 12. fixing grooves; 13. a bearing pedestal side; 14. a bearing base locating slot; 15. the other side surface of the bearing base; 2. an elastic wave foil; 21. An elastic wave foil side; 3. a bearing inner race; 31. a bearing inner race orifice; 32. a bearing inner race positioning groove; 33. the side surface of the bearing inner ring; 4. an inner ring positioning pin; 5. and fixing the gasket.
Detailed Description
For those skilled in the art to better understand the objects, technical solutions and advantages of the present invention, the technical solutions in the embodiments of the present invention will be described below with reference to the drawings in the embodiments of the present invention.
As shown in fig. 1, the present invention provides a hydrostatic gas radial bearing with an elastic wave foil support. The static pressure gas radial bearing comprises a bearing base 1, an elastic wave foil 2, a bearing inner ring 3, an inner ring positioning pin 4 and a fixing gasket 5. The elastic bump foil 2 is formed by punching a certain number of small holes on a metal sheet, wherein the hole diameter is 1-2 mm, the number is 4-14, 1-4 rows are arranged, and the foil through holes can be arranged at equal intervals or at variable intervals in the axial direction and then pressed on a die to form the bump foil type elastic supporting foil. The bump foil through hole is aligned with the bearing base orifice and then welded in the fixing groove 12 of the bearing base 1 by the fixing washer 5.
As shown in fig. 2, the elastic bump foil 2 is welded to the fixing groove 12 of the bearing base 1 via the fixing spacer 5, and the foil side surface 21 overlaps the bearing base side surface 13. The inner ring positioning pin 4 is positioned at the bearing base positioning groove 14 and the bearing inner ring positioning groove 32, can position the throttling holes of the bearing base and the bearing inner ring, and can prevent the bearing inner ring from rotating along the circumferential direction; the manufactured bearing base 1, the elastic wave foil 2 and the bearing inner ring 3 are sequentially superposed according to the arrangement mode shown in fig. 2.
As shown in fig. 3, the width of the elastic bump foil 2 is smaller than the width of the bearing base 1, the difference is 2-4 mm, the height of the pressed foil is 0.2-0.7 mm, and the number of bumps is 8-50; the width of the bearing inner ring 3 is slightly smaller than that of the bearing base 1, and the difference value is not more than 1 mm; the inner diameter of the bearing inner ring 3 is slightly larger than the diameter of the main shaft, and the difference values are 0.02 mm-0.2 mm. The elastic wave foil 2 is respectively contacted with the inner ring of the bearing base 1 and the outer ring of the bearing inner ring 3, and plays the roles of elastic support and vibration buffering.
As shown in FIG. 4, the bearing base 1 is uniformly provided with a plurality of orifices 11 with the same structure along the circumferential direction, the aperture of the large hole is 2-4 mm, the aperture of the small hole is 1-2 mm, the number of the holes is 4-14, 1-4 rows are provided, and the bearing base orifices 11 can be arranged at equal intervals or at variable intervals in the axial direction. The side surface 15 of the bearing base 1 is provided with a bearing base positioning groove 14.
As shown in FIG. 5, a plurality of orifices 31 with the same structure are uniformly arranged on the bearing inner ring 3 along the circumferential direction, the aperture of the large hole is 1-2 mm, the aperture of the small hole is 0.2-1 mm, the number of the holes is 4-14, 1-4 rows are arranged, the orifices 31 of the bearing inner ring can be arranged at equal intervals or at variable intervals in the axial direction, and the orifices of the bearing inner ring and the orifices of the bearing base are arranged in an alignment way. The side 33 of the bearing inner ring 3 is provided with a bearing inner ring positioning groove 32.

Claims (6)

1. The static pressure gas radial bearing with the elastic wave foil support is characterized by comprising a bearing base, an elastic wave foil, a bearing inner ring, an inner ring positioning pin and a fixing gasket; a fixing groove is formed in the bearing base, and the elastic wave foil is welded in the fixing groove through a fixing gasket; a certain number of throttling holes are uniformly formed in the bearing base and the bearing inner ring along the circumferential direction, and positioning grooves are formed in the side faces of the throttling holes; the inner ring positioning pin is positioned in the positioning groove, can position the bearing base and the throttling hole of the bearing inner ring, and simultaneously prevents the bearing inner ring from rotating along the circumferential direction; the diameter of the bearing inner ring is slightly larger than that of the main shaft, so that a bearing gap is formed; and the manufactured bearing base, the elastic wave foil and the bearing inner ring are sequentially superposed.
2. The static pressure gas radial bearing with the elastic wave foil support as claimed in claim 1, wherein the bearing base is uniformly provided with a plurality of orifices with the same structure along the circumferential direction, the diameter of the big hole is 2-4 mm, the diameter of the small hole is 1-2 mm, the number of the holes is 4-14, 1-4 rows are provided, and the orifices of the bearing base can be arranged at equal intervals or at variable intervals in the axial direction.
3. The static pressure gas radial bearing with elastic wave foil support according to claim 1, characterized in that the elastic wave foil is of a metal wave foil type, a plurality of through holes with the same structure are uniformly arranged on the wave foil along the circumferential direction, the hole diameter is 1-2 mm, the number is 4-14, 1-4 rows are arranged, the foil through holes can be arranged at equal intervals or variable intervals in the axial direction, and the foil through holes are arranged in alignment with the bearing base throttling holes.
4. The hydrostatic gas radial bearing with elastic wave foil support of claim 1, wherein the foil width of the elastic wave foil is smaller than the bearing pedestal width by 2 to 4mm, the pressed foil height is 0.2 to 0.7mm, and the number of wave arches is 8 to 50.
5. The static pressure gas radial bearing with the elastic wave foil support as claimed in claim 1, wherein the bearing inner ring is uniformly provided with a plurality of orifices with the same structure along the circumferential direction, the diameter of the large hole is 1-2 mm, the diameter of the small hole is 0.2-1 mm, the number of the holes is 4-14, 1-4 rows are provided, the orifices of the bearing inner ring can be arranged at equal intervals or at variable intervals in the axial direction, and the orifices of the bearing inner ring and the orifices of the bearing base are arranged in alignment.
6. The hydrostatic gas radial bearing with elastic wave foil support according to claim 1, wherein the width of the bearing inner ring is slightly smaller than the width of the bearing base, the difference is not more than 1mm, the inner diameter of the bearing inner ring is slightly larger than the diameter of the main shaft, and the difference is 0.02 mm-0.2 mm.
CN202121406586.3U 2021-06-24 2021-06-24 Static pressure gas radial bearing with elastic wave foil support Active CN217207355U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202121406586.3U CN217207355U (en) 2021-06-24 2021-06-24 Static pressure gas radial bearing with elastic wave foil support

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202121406586.3U CN217207355U (en) 2021-06-24 2021-06-24 Static pressure gas radial bearing with elastic wave foil support

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CN217207355U true CN217207355U (en) 2022-08-16

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113251075A (en) * 2021-06-24 2021-08-13 西北农林科技大学 Static pressure gas radial bearing with elastic wave foil support

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113251075A (en) * 2021-06-24 2021-08-13 西北农林科技大学 Static pressure gas radial bearing with elastic wave foil support

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Effective date of registration: 20240119

Address after: Room 01053, 5th Floor, Unit 1, Building 2, Hailiang Mingzhu Garden, Bengbu City, Anhui Province, 231399

Patentee after: Bengbu Zhongxing Siyuan Refrigeration Technology Co.,Ltd.

Address before: No.22 Xinong Road, Yangling Demonstration Zone, Xianyang City, Shaanxi Province, 712100

Patentee before: NORTHWEST A & F University

Patentee before: Bengbu Zhongxing Siyuan Refrigeration Technology Co.,Ltd.

TR01 Transfer of patent right
TR01 Transfer of patent right

Effective date of registration: 20240612

Address after: 710086, 1st and 2nd floors of Building 9, Fengdong Chuangzhi Yungu, No. 1212 Tianzhang Third Road, West Section of Fengye Avenue, Fengdong New City, Xi'an City, Shaanxi Province

Patentee after: Qicheng Suspension Technology (Xi'an) Co.,Ltd.

Country or region after: China

Address before: Room 01053, 5th Floor, Unit 1, Building 2, Hailiang Mingzhu Garden, Bengbu City, Anhui Province, 231399

Patentee before: Bengbu Zhongxing Siyuan Refrigeration Technology Co.,Ltd.

Country or region before: China

TR01 Transfer of patent right