CN109909569B - Method and device for processing high-precision micropores - Google Patents
Method and device for processing high-precision micropores Download PDFInfo
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- CN109909569B CN109909569B CN201910328354.1A CN201910328354A CN109909569B CN 109909569 B CN109909569 B CN 109909569B CN 201910328354 A CN201910328354 A CN 201910328354A CN 109909569 B CN109909569 B CN 109909569B
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Abstract
The invention discloses a method and a device for processing a high-precision micropore, which comprises the following steps: (1) preparing punching electrolyte, introducing the electrolyte into the needle head through a pushing pump, and positioning the punching position; (2) controlling electrolyte at the tip of the needle head to form a micro liquid bead and contact the surface of the material, and controlling the size of a contact surface to be equal to the size of the punched hole by adjusting the distance between the tip of the needle head and the surface of the processed material and the size of the micro liquid bead; (3) constant current voltage is loaded at two ends of the needle head and the processing material, and electrolytic corrosion occurs on the contact part of the micro liquid bead and the processing material; (4) along with the deepening of the corrosion depth, the distance between the tip of the control needle head and different corrosion layers is kept unchanged, and the pushing pump is adjusted to perform feedback compensation on the miniature liquid beads, so that the internal concentration of the miniature liquid beads tends to be balanced, the size of the liquid beads is kept stable, and the whole micropore machining process is further completed. The punching mode of the invention belongs to normal temperature punching, the problems of secondary crystallization, cracking and the like can not occur, and the punching size can reach 10 mu m at present.
Description
Technical Field
The invention belongs to the technical field of micropore machining, relates to a high-precision micropore machining method, and particularly relates to a high-precision micropore machining method and device based on an electrolysis principle.
Background
With the rapid development of aerospace industry in China, the machining requirements of precision parts are more and more, and the machining research on the holes is increasingly wide, because the machining precision and the machining capability of the micropores directly influence the performance indexes of important parts such as engine nozzles, atomizers and air film holes, and the micropores are also applied to the fields of precision molds, medical instruments, electronic parts and the like. According to the division of foreign standards, the pore size ranges from 0.01 mm to 0.1mm, the secondary micropores range from 0.001mm to 0.012mm, and the ultramicropores smaller than 0.001 mm. At present, the machining of domestic bores is mainly divided into two parts, namely traditional machining and special machining, wherein the traditional machining method mainly adopts mechanical drilling, and the special machining method is more in types, such as ultrasonic waves, electron beams, chemical corrosion and the like. Drilling by a drilling machine is the most common processing method in the traditional processing method, and the diameter of the existing minimum drill bit is 0.5 mm. The method has the advantages that the cutter is simple in structure, the hole can be machined in a small hole diameter, but the defects that the hole cannot be too deep, the length-diameter ratio of the hole is small, and the method is suitable for machining forgings and castings with high hardness. In special processing, ultrasonic vibration processing has good effect, the minimum diameter of the processed product can be 0.135mm, and the method is mainly suitable for non-conductive materials such as hard alloy, non-metallic materials, glass, ceramics and the like.
The above methods are difficult to reach the micropore standard, and the processing technology for micropores and the above standards mainly depends on electron beam drilling, laser drilling and electric spark drilling. The method has the advantages that the electron kinetic energy contained in the electron beams is utilized to generate the heat and ionization effect to remove the material, so that a hole is machined, the evaporation material is directly melted by the method, the inner wall of the hole is smooth and fine, and the precision is good, but an auxiliary material needs to be added at the bottom of the hole due to high energy density of the electron beams, so that the method is suitable for refractory metals, ceramics and other materials, and is suitable for machining the hole with the length-diameter ratio of 0.08-0.9 mm and the length-diameter ratio of 5. Laser drilling is widely researched as a novel processing method, the laser processing of micropores raises the temperature of the irradiated position of a workpiece through energy accumulation, so that materials are melted, gasified and ionized to form holes, and the method has the advantages of no contact, flexible processing, low cost, no need of a vacuum chamber, high processing speed, small processing aperture, no need of contact and the like, and the processing range is 0.01-0.5 mm. The electric spark processing is to generate an electric field between an electrode and a workpiece (positive and negative electrodes), the medium between the two electrodes is ionized and punctured to generate pulse spark discharge, and then electron current is generated, and the excess material is removed by electrocorrosion, so as to meet the punching processing requirement of the workpiece. The existing micropore machining methods can generate high temperature to generate a large amount of negative effects on machining materials, for example, when an electric spark process is used for punching a single crystal engine blade, the machining temperature needs to be accurately controlled, otherwise, the single crystal blade is subjected to polycrystalline recrystallization or defects and other adverse results, and the service life of the blade is greatly reduced. Therefore, the existing micropore processing technology has the adverse factors of damage to raw materials, hidden danger to the performance guarantee of the raw materials is buried, an external cooling system is needed to avoid the situation caused by overheating in the processing process, the micropore processing technology is more complicated, the processing cost is greatly improved, and the processing efficiency is also reduced.
Electrolysis is a process of passing current through an electrolyte solution or a molten electrolyte to cause oxidation-reduction reactions at a cathode and an anode, an electrochemical cell can perform an electrolysis process when a direct current voltage is applied, and the oxidation reaction generated at the anode by electrolysis can generate a process of ion conversion on an anode material, namely electrolytic corrosion.
The existing micropore machining methods can generate high temperature to generate a large amount of negative effects on machining materials, for example, when an electric spark process is used for punching a single crystal engine blade, the machining temperature needs to be accurately controlled, otherwise, the single crystal blade is subjected to polycrystalline recrystallization or defects and other adverse results, and the service life of the blade is greatly reduced. Therefore, the existing micropore processing technology has the adverse factors of damaging raw materials, hidden danger of ensuring the performance of the raw materials, increased processing cost and reduced processing efficiency. Therefore, a normal temperature, nondestructive and high precision micro-hole processing technology is one of the problems to be solved by the micro-hole processing technology. The punching mode of the invention belongs to normal temperature punching, secondary crystallization or cracking can not occur, and the punching size can reach 10 mu m at present, so the two aspects of processing damage and processing scale are comprehensively considered, and the micropore processing technology of the invention is superior to electric spark and laser punching.
Disclosure of Invention
The invention aims to provide a method and a device for processing a high-precision micropore at normal temperature, low cost and no damage, which realize micropore processing through an electrolysis process, ensure the precision and efficiency of micropore processing and avoid the negative influence of micropore processing on materials.
The invention provides a processing method of a high-precision micropore, which comprises the following steps:
(1) dispensing punching electrolyte, respectively fixing a needle head and a processing material on a lifting platform and an X-Y moving platform, introducing the electrolyte into the needle head through a pushing pump, and positioning a punching position;
(2) controlling electrolyte at the tip of the needle head to form a micro liquid bead and contact the surface of the material, and adjusting the distance between the tip of the needle head and the surface of the processed material and the size of the micro liquid bead to enable the size of a contact surface to be equal to the size of a punched hole by means of a microscope measurement function;
(3) loading constant current voltage between the inside of the needle head and the two ends of the processing material to enable the contact part and the inside of the needle head to respectively generate oxidation reaction and reduction reaction, and the contact part of the micro liquid bead and the processing material to generate electrolytic corrosion;
(4) along with the deepening of the corrosion depth, the distance between the tip of the control needle head and different corrosion layers is kept unchanged, and the pushing pump is adjusted to perform feedback compensation on the miniature liquid beads, so that the internal concentration of the miniature liquid beads tends to be balanced, the size of the liquid beads is kept stable, and the whole micropore machining process is further completed.
Preferably, in step (1), the precision of the lifting platform and the X-Y moving platform is guaranteed to be 0.1 μm, the X-Y moving platform is controlled by a computer and software, and the design programming path can be read.
Preferably, in the step (2), the micro-beads are spherical, the prepared electrolyte shows weak wettability on the processed material, and the contact surface formed on the material surface by the electrolyte is circular.
Preferably, in step (2), in order to enable the size of the processing micro-hole to be well controlled by the size of the micro-bead, the distance between the tip of the needle and the surface of the processing material is adjusted to be equal to the diameter of the hole.
The liquid bead of the needle tip can be approximately regarded as a sphere, before the machining is started, the liquid bead is not contacted with the machining surface, so the diameter size limit of the sphere is the distance from the tip of the needle to the surface of the machining material, in the machining process, the liquid bead is contacted with the surface of the machining material, the formed contact surface is a circular section of the liquid bead sphere, and the maximum diameter of the section is the diameter of the sphere.
If the distance between the tip of the needle head and the surface of the processing material is smaller than the diameter of the micropore, the maximum diameter of the micro liquid bead at the tip of the needle head is smaller than the processing diameter of the micropore, so that a contact circular surface with the diameter larger than that of the micro liquid bead is needed, the size of the contact surface is not easy to control by controlling the size of the spherical liquid bead under the condition, and the problems of inaccurate processing size of the micropore and the like are caused; if the distance between the tip of the needle and the surface of the processing material is larger than the diameter of the micro-hole, after the size of the liquid bead is controlled, the liquid bead needs to be controlled to descend for a long distance to be possibly contacted with the surface of the processing material, so that unstable factors such as shaking and dropping of the liquid bead (especially a large liquid bead) in the long-distance descending process can be caused.
Therefore, the distance between the tip of the needle head and the surface of the processed material is finally adjusted to be equal to the punching diameter, the precision of the processing size is ensured, and unstable factors caused by excessive movement are avoided.
The invention also provides a high-precision micropore machining device which comprises a lifting platform, a pushing pump and an X-Y moving platform, wherein the lifting platform is arranged above the X-Y moving platform;
the lifting platform is provided with a fixing clamp, a tube body, a needle head and a sealing cover, the tube body is fixedly arranged in the fixing clamp, the needle head is arranged at the lower end of the tube body, and the upper end of the tube body is connected with the sealing cover;
the pushing pump is communicated with the tube body through a guide tube, and the guide tube penetrates through the sealing cover and is used for introducing electrolyte into the needle head;
the X-Y moving platform is used for placing processing materials.
Furthermore, the processing material has conductivity and is connected with the positive pole of the direct current power supply, the tip of the needle head is internally provided with a conductive wire, and the conductive wire penetrates through the tube body and is led out from the sealing cover and is connected with the negative pole of the direct current power supply.
Furthermore, the needle head is a micro-nano level glass needle head made by stretching superfine quartz glass, and the size of the tip end of the needle head can be manufactured and replaced according to the requirement.
Furthermore, the minimum pushing amount of the pushing pump can reach a nanoliter level, and the pushing pump can be connected with a computer for controlling the pushing process in a programming mode.
Along with lift platform descends, forms circular contact surface when miniature liquid pearl contacts with the processing material, and along with descending distance's increase, the diameter of circular contact surface constantly grow, adjusts miniature liquid pearl size simultaneously, with the help of the measuring function of equipment microscope from the area, makes the contact surface size equal to the size of punching, finally controls the size of punching.
The processing material of access positive terminal takes place oxidation reaction under the electric field effect, becomes the ionic state by the solid-state and dissolves in the electrolyte of miniature liquid pearl, takes place reduction reaction at the inside wire of syringe needle and the inside ionic reaction of electrolyte to because the redox process of electrolysis must have mobile ion, consequently positive pole oxidation reaction area is injectd in the adnexed circular region of miniature liquid pearl, and then can guarantee to corrode according to the design size.
The micro liquid beads are transition areas in the whole oxidation-reduction process, ions in electrolyte are in continuous diffusion movement, and the micro liquid beads are subjected to feedback compensation by the aid of a pushing pump controlled by a computer, so that the internal concentration of the micro liquid beads tends to be balanced, the size of the liquid beads is kept stable, and the whole electrolysis process can be stably carried out.
The electrolytic corrosion process is carried out layer by layer, the lifting platform can be controlled by a computer to continuously descend along with the deepening of the corrosion layer by layer, and finally the corrosion layer by layer is carried out along the contact surface (the micropore machining size); on the other hand, the pushing pump controlled by the computer continuously performs feedback compensation in the process, and finally corrosion penetration is completed to form uniform micropores.
Compared with the prior art, the invention has the following advantages:
(1) the punching mode of the invention belongs to normal temperature punching, the problems of secondary crystallization, cracking and the like can not occur, and the punching size can reach 10 mu m at present.
(2) The invention relates to a high-precision micropore processing method based on an electrolysis principle, which can complete the function of continuous positioning and punching by means of computer control, wherein in the electrolysis process, electrochemical corrosion is a process of contacting a processing material with electrolyte, ions in liquid move under the action of electric field force to generate anode dissolution, and the method has great advantages in processing fine parts with complex shapes, has no redundant orifice and is flat and smooth.
(3) The micro-hole printing and processing device is combined with a high-precision three-dimensional moving platform and an extrusion system to complete micro-hole printing and processing, the size of the micro-hole is controlled by controlling the contact area of the micro liquid bead and the surface of the material, and the damage to the processed material in the punching process is avoided while the positioning precision and the punching precision are ensured; on the other hand, in the punching process, only conductive wiring, electrolyte and low-voltage low-constant-current conditions are needed, and the mechanical operation is controlled by a computer, so that the process cost is greatly reduced, and the efficiency of the whole micropore treatment process is ensured.
Drawings
Fig. 1 is a schematic structural view of a high-precision micro-hole processing apparatus according to the present invention.
FIG. 2 is a microscopic picture of a copper plate after being processed with a corroded micropore.
In the figure: 1-a lifting platform; 2-X-Y moving stage; 3, fixing the card; 4, a pipe body; 5-glass needle head; 6, sealing the cover; 7-a catheter; 8, processing the material; 9-conductive filament.
Detailed Description
The invention is further described with reference to the following figures and specific examples.
The high-precision micropore machining device comprises a lifting platform 1, a pushing pump and an X-Y moving platform 2, wherein the lifting platform 1 is arranged above the X-Y moving platform 2;
the lifting platform 1 is provided with a fixing clamp 3, a tube body 4, a glass needle head 5 and a sealing cover 6, the tube body 4 is fixedly arranged in the fixing clamp 3, the glass needle head 5 is arranged at the lower end of the tube body 4, and the upper end of the tube body 4 is connected with the sealing cover 6;
the pushing pump is communicated with the tube body 4 through a conduit 7, and the conduit 7 penetrates through the sealing cover 6 and is used for introducing electrolyte into the glass needle head 5;
the X-Y moving platform 2 is used for placing a processing material 8, the processing material has conductivity and is connected with the positive electrode of the direct-current power supply, a conductive wire 9 is arranged in the tip of the glass needle 5, and the conductive wire 9 penetrates through the tube body 4 and is led out from the sealing cover 6 and is connected with the negative electrode of the direct-current power supply.
The invention provides a processing method of a high-precision micropore, which comprises the following steps:
(1) preparing a punching electrolyte (5-10 wt% of copper sulfate aqueous solution), fixing the glass needle head and the copper plate on a lifting platform and an X-Y moving platform respectively, introducing the electrolyte into the glass needle head through a guide pipe by a pushing pump, and positioning a punching position;
(2) controlling the electrolyte at the tip of the needle head to form a micro liquid bead and contact the surface of the material, so that the distance between the tip of the needle head and the surface of the copper plate is equal to the diameter of the drilled hole; meanwhile, the size of the micro liquid bead is adjusted, and the size of the contact surface is equal to the size of the punched hole by means of the measurement function of a microscope;
(3) loading direct current constant current voltage on the two ends of the needle head conductive wire and the copper plate, respectively carrying out oxidation reaction and reduction reaction on the contact part and the conductive wire in the needle head, and carrying out electrolytic corrosion on the contact part of the micro liquid bead and the copper plate;
(4) along with the deepening of the corrosion depth, the distance between the tip of the needle head and different corrosion layers is kept unchanged through computer programming control, the pushing pump is adjusted to perform feedback compensation on the micro liquid bead, the internal concentration of the micro liquid bead tends to be balanced, the size of the liquid bead is kept stable, and the whole micropore processing process is further completed;
(5) after finishing the processing of one micropore, positioning a new processing position through programming, and further repeating the steps to finish all micropore processing processes.
The foregoing is a preferred embodiment of the present invention, and is not intended to be limiting in any way, and any simple modifications, equivalent variations and modifications made to the foregoing embodiment in accordance with the technical spirit of the present invention are within the scope of the present invention.
Claims (5)
1. A processing method of a high-precision micropore is characterized by comprising the following steps:
(1) dispensing punching electrolyte, respectively fixing a needle head and a processing material on a lifting platform and an X-Y moving platform, introducing the electrolyte into the needle head through a pushing pump, and positioning a punching position;
(2) controlling electrolyte at the tip of the needle head to form a micro liquid bead and contact the surface of the material, and adjusting the distance between the tip of the needle head and the surface of the processed material and the size of the micro liquid bead to enable the size of a contact surface to be equal to the size of a punched hole by means of a microscope measurement function;
(3) loading constant current voltage between the inside of the needle head and the two ends of the processing material to enable the contact part and the inside of the needle head to respectively generate oxidation reaction and reduction reaction, and the contact part of the micro liquid bead and the processing material to generate electrolytic corrosion;
(4) controlling the distance between the tip of the needle head and different corrosion layers to be constant along with the deepening of the corrosion depth, adjusting the pushing pump to perform feedback compensation on the micro liquid bead, enabling the internal concentration of the micro liquid bead to tend to be balanced, and enabling the size of the liquid bead to be stable, thereby completing the whole micropore machining process;
in the step (2), the micro liquid beads are spherical, the prepared electrolyte has weaker wettability on the processed material, and then the contact surface formed by the electrolyte on the surface of the material is circular; the distance between the tip of the needle and the surface of the processed material is adjusted to be equal to the diameter of the punched hole.
2. The method for processing the precision micropore according to claim 1, wherein the adopted device for processing the high precision micropore comprises a lifting platform, a pushing pump and an X-Y moving platform, wherein the lifting platform is arranged above the X-Y moving platform;
the lifting platform is provided with a fixing clamp, a tube body, a needle head and a sealing cover, the tube body is fixedly arranged in the fixing clamp, the needle head is arranged at the lower end of the tube body, and the upper end of the tube body is connected with the sealing cover;
the pushing pump is communicated with the tube body through a guide tube, and the guide tube penetrates through the sealing cover and is used for introducing electrolyte into the needle head;
the X-Y moving platform is used for placing processing materials.
3. A method of machining a precision micro-hole according to claim 2, wherein the machining material has conductivity and is connected to a positive electrode of a dc power supply; the tip of the needle head is internally provided with a conductive wire which passes through the tube body and is led out from the sealing cover and is connected with the negative pole of the direct current power supply.
4. The method for processing the precision micropores according to claim 2, characterized in that the needle head is a micro-nano grade glass needle head made by stretching superfine quartz glass, and the size of the tip of the needle head can be made and replaced according to the requirement.
5. A method of fabricating precision micro-holes according to claim 1, wherein the minimum displacement of the displacement pump is up to nanoliter level and is accessible to computer control for programming the displacement process.
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| JPS56158898A (en) * | 1980-05-10 | 1981-12-07 | Tanaka Denshi Kogyo Kk | Method for working tip of needle of gold alloy needle by electrolytic polishing |
| US5029759A (en) * | 1989-11-17 | 1991-07-09 | Cummins Engine Company, Inc. | Curved hole machining method and fuel injector formed thereby |
| DE102011014364A1 (en) * | 2011-03-17 | 2012-09-20 | Stoba Präzisionstechnik Gmbh & Co. Kg | Method and device for the electrochemical machining of workpieces |
| CN104785871B (en) * | 2015-04-17 | 2017-03-15 | 清华大学深圳研究生院 | A kind of preparation method of probe and preparation facilitiess |
| CN108971676B (en) * | 2018-09-12 | 2020-04-07 | 南京航空航天大学 | Tube electrode for electrolytic punching and cutting integrated machining, device and method |
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