CN109881156A - A kind of evaporation source preventing material degradation - Google Patents
A kind of evaporation source preventing material degradation Download PDFInfo
- Publication number
- CN109881156A CN109881156A CN201910300405.XA CN201910300405A CN109881156A CN 109881156 A CN109881156 A CN 109881156A CN 201910300405 A CN201910300405 A CN 201910300405A CN 109881156 A CN109881156 A CN 109881156A
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- China
- Prior art keywords
- crucible
- evaporation source
- heater strip
- evaporation
- permanent
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Abstract
The present invention relates to OLED vacuum evaporation equipment technical field, especially a kind of evaporation source for preventing material degradation, including crucible is provided with evaporation source heater strip on the crucible outer wall, and the evaporation source heater strip is electrically connected to a power source；The crucible inside bottom is placed with Permanentmagnet bar, and the electromagnetic generator of control magnetic field size and alternate cycle is provided on the outside of the evaporation source heater strip.After adopting the above structure, the present invention is by adjusting magnetic field size and alternate cycle, and Permanentmagnet bar can move in crucible under the influence of a magnetic field, to keep the heating of material more uniform, the rate of evaporation is more stable.
Description
Technical field
The present invention relates to OLED vacuum evaporation equipment technical field, especially a kind of evaporation source for preventing material degradation is filled
It sets.
Background technique
With the continuous improvement of oled panel generation line, vacuum evaporation equipment evaporation source crucible capacity is constantly promoted, in addition
The reason for using organic material heating conduction difference is deposited, the material temperature of bottom is far below the material temperature near sidewall of crucible in crucible
Degree, this results in the material near sidewall of crucible and deteriorates denaturation at high temperature, influences the yield of OLED.
In the prior art, to prevent evaporation material from deteriorating in thermal histories, the following two kinds scheme is generallyd use:
The material of scheme one, each vapor deposition of control, then shuts down and begins to speak to increase material, such scheme is not only to the production capacity of volume production
It impacts, and frequently shuts down and begin to speak also have large effect to the stability of equipment, be not suitable for volume production；
Scheme two, the same auxiliary agents for adding good heat conductivity in the material, but thermal conductivity is only passively improved relatively
Can, material internal temperature can not be made to reach balanced.
105441878 A of Chinese invention patent CN discloses a kind of heating device for vapor deposition, comprising: crucible is used
Raw material is deposited in containing；Removable heating unit is higher than vapor deposition raw material when being set to the outside of the crucible and vapor deposition；Weighing passes
Induction device is set to the lower section of the crucible, for weight and the output of raw material to be deposited in the weigh crucible and crucible；Control
Device, for receiving the output of the weighing sensing device, according to the weight calculating that raw material is deposited in the crucible and crucible
The liquid level of vapor deposition raw material in crucible, and the removable heating unit is controlled to the vapor deposition original according to the liquid level
The height of material.
Summary of the invention
The technical problem to be solved by the invention is to provide a kind of evaporation sources that material degradation can be effectively prevented.
In order to solve the above technical problems, a kind of evaporation source for preventing material degradation of the invention, including crucible, it is described
Evaporation source heater strip is provided on crucible outer wall, the evaporation source heater strip is electrically connected to a power source；The crucible inside bottom is put
It is equipped with Permanentmagnet bar, the electromagnetic generator of control magnetic field size and alternate cycle is provided on the outside of the evaporation source heater strip.
Preferably, the Permanentmagnet bar is made of high temperature resistance high heat conduction material, and the high temperature resistance high heat conduction material can be
One in Al-Ni-Co series permanent-magnet alloy, siderochrome cobalt system permanent-magnet alloy, permanent-magnet ferrite, rare earth permanent-magnetic material and composite permanent-magnetic material
Kind.
After adopting the above structure, the present invention can be in the work in magnetic field by adjusting magnetic field size and alternate cycle, Permanentmagnet bar
It is moved in crucible under, to keep the heating of material more uniform, the rate of evaporation is more stable.
Detailed description of the invention
The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.
Fig. 1 is a kind of structural schematic diagram for the evaporation source for preventing material degradation of the present invention.
In figure: 1 is crucible, and 2 be evaporation source heater strip, and 3 be electromagnetic generator, and 4 be organic material, and 5 be Permanentmagnet bar.
Specific embodiment
As shown in Figure 1, a kind of evaporation source for preventing material degradation of the invention, including crucible 1, outside the crucible 1
Evaporation source heater strip 2 is provided on wall, the evaporation source heater strip 2 is electrically connected to a power source；The crucible inside bottom is placed with
Permanentmagnet bar 5 is provided with the electromagnetic generator 3 of control magnetic field size and alternate cycle on the outside of the evaporation source heater strip 2.
The material good using thermostable heat-conductive of Permanentmagnet bar 5, the Permanentmagnet bar are made of high temperature resistance high heat conduction material, institute
Stating high temperature resistance high heat conduction material can be Al-Ni-Co series permanent-magnet alloy, siderochrome cobalt system permanent-magnet alloy, permanent-magnet ferrite, rare earth permanent magnet
One of material and composite permanent-magnetic material.The both ends of Permanentmagnet bar 5 are respectively the pole N and S, when evaporation source heater strip 2 is heated
While material, power control is carried out to electromagnetic generator 3, the electromagnetic generator of two sides is alternately produced N and S polarity respectively
Magnetic field, by adjusting magnetic field size and alternate cycle, Permanentmagnet bar can move in crucible under the influence of a magnetic field, to make material
The heating of material is more uniform, and the rate of evaporation is more stable.Permanentmagnet bar is put into crucible first, and crucible is added in organic material
In, while carrying out heating heating to organic material 4 by evaporation source heater strip 2, start electromagnetic generator 3, by setting
Magnetic field size and period frequency are set, movement of the Permanentmagnet bar 5 in organic material 4 is controlled, reaches the temperature inside organic material 4
Unanimously.The present invention is first is that can be evenly dispersed by heating temperature by the Permanentmagnet bar 5 of high thermal conductivity, second is that having by Permanentmagnet bar 5
Temperature inside organic material 4 can be reached balanced state faster, ensure that the equal of plated film by the agitation inside machine material 4
Even property and stability.
Although specific embodiments of the present invention have been described above, those skilled in the art should be appreciated that this
It is merely illustrative of, various changes or modifications can be made to present embodiment, without departing from the principle and substance of the present invention,
Protection scope of the present invention is only limited by the claims that follow.
Claims (2)
1. a kind of evaporation source for preventing material degradation, including crucible, it is characterised in that: be provided with steaming on the crucible outer wall
Rise heater strip, and the evaporation source heater strip is electrically connected to a power source；The crucible inside bottom is placed with Permanentmagnet bar, the evaporation
The electromagnetic generator of control magnetic field size and alternate cycle is provided on the outside of the heater strip of source.
2. a kind of evaporation source for preventing material degradation described in accordance with the claim 1, it is characterised in that: the Permanentmagnet bar is adopted
It is made of high temperature resistance high heat conduction material, the high temperature resistance high heat conduction material can be Al-Ni-Co series permanent-magnet alloy, siderochrome cobalt system forever
One of magnetic alloy, permanent-magnet ferrite, rare earth permanent-magnetic material and composite permanent-magnetic material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910300405.XA CN109881156A (en) | 2019-04-15 | 2019-04-15 | A kind of evaporation source preventing material degradation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910300405.XA CN109881156A (en) | 2019-04-15 | 2019-04-15 | A kind of evaporation source preventing material degradation |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109881156A true CN109881156A (en) | 2019-06-14 |
Family
ID=66937476
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910300405.XA Pending CN109881156A (en) | 2019-04-15 | 2019-04-15 | A kind of evaporation source preventing material degradation |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109881156A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111424239A (en) * | 2020-04-14 | 2020-07-17 | 杭州纤纳光电科技有限公司 | Evaporation furnace and double-sided coating device |
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| CN1678767A (en) * | 2002-07-17 | 2005-10-05 | 应用材料股份有限公司 | Method and apparatus for providing gas to a processing chamber |
| CN101855380A (en) * | 2007-10-12 | 2010-10-06 | 安赛乐米塔尔法国公司 | Industrial vapour generator for the deposition of an alloy coating onto a metal strip |
| CN103124473A (en) * | 2011-11-18 | 2013-05-29 | 珠海方正科技高密电子有限公司 | Device and method for blackening or browning copper blocks |
| CN103551069A (en) * | 2013-09-17 | 2014-02-05 | 广州佩尔美容器械制造有限公司 | Stirring apparatus |
| CN207659540U (en) * | 2017-02-22 | 2018-07-27 | 上海仟纳真空镀膜科技有限公司 | For the Preparation equipment without very golden rose golden membranous layer |
| CN207760423U (en) * | 2018-01-05 | 2018-08-24 | 上海万明眼镜有限公司 | Isolated form fast heating type colored lens coating apparatus |
-
2019
- 2019-04-15 CN CN201910300405.XA patent/CN109881156A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1678767A (en) * | 2002-07-17 | 2005-10-05 | 应用材料股份有限公司 | Method and apparatus for providing gas to a processing chamber |
| CN101855380A (en) * | 2007-10-12 | 2010-10-06 | 安赛乐米塔尔法国公司 | Industrial vapour generator for the deposition of an alloy coating onto a metal strip |
| CN103124473A (en) * | 2011-11-18 | 2013-05-29 | 珠海方正科技高密电子有限公司 | Device and method for blackening or browning copper blocks |
| CN103551069A (en) * | 2013-09-17 | 2014-02-05 | 广州佩尔美容器械制造有限公司 | Stirring apparatus |
| CN207659540U (en) * | 2017-02-22 | 2018-07-27 | 上海仟纳真空镀膜科技有限公司 | For the Preparation equipment without very golden rose golden membranous layer |
| CN207760423U (en) * | 2018-01-05 | 2018-08-24 | 上海万明眼镜有限公司 | Isolated form fast heating type colored lens coating apparatus |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111424239A (en) * | 2020-04-14 | 2020-07-17 | 杭州纤纳光电科技有限公司 | Evaporation furnace and double-sided coating device |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20190614 |