CN111424239A - Evaporation furnace and double-sided coating device - Google Patents
Evaporation furnace and double-sided coating device Download PDFInfo
- Publication number
- CN111424239A CN111424239A CN202010288248.8A CN202010288248A CN111424239A CN 111424239 A CN111424239 A CN 111424239A CN 202010288248 A CN202010288248 A CN 202010288248A CN 111424239 A CN111424239 A CN 111424239A
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- Prior art keywords
- evaporation
- crucible
- furnace body
- furnace
- magnetic force
- Prior art date
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- 230000008020 evaporation Effects 0.000 title claims abstract description 106
- 238000001704 evaporation Methods 0.000 title claims abstract description 106
- 238000000576 coating method Methods 0.000 title claims abstract description 41
- 239000011248 coating agent Substances 0.000 title claims abstract description 40
- 239000000463 material Substances 0.000 claims abstract description 26
- 238000003756 stirring Methods 0.000 claims description 10
- 229910001220 stainless steel Inorganic materials 0.000 claims description 6
- 239000010935 stainless steel Substances 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- ZVWKZXLXHLZXLS-UHFFFAOYSA-N zirconium nitride Chemical compound [Zr]#N ZVWKZXLXHLZXLS-UHFFFAOYSA-N 0.000 claims description 5
- 238000005253 cladding Methods 0.000 claims description 2
- 238000000151 deposition Methods 0.000 claims 2
- 230000008021 deposition Effects 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 abstract description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 238000009834 vaporization Methods 0.000 description 4
- 230000008016 vaporization Effects 0.000 description 4
- 238000007747 plating Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention relates to an evaporation furnace, which comprises a furnace body and an evaporation crucible, wherein the evaporation crucible is arranged in the furnace body, the top surface of the furnace body is sealed, a heating wire is arranged in the furnace body, the bottom surface of the furnace body is provided with a furnace body opening, the bottom surface of the evaporation crucible is also provided with a crucible through hole coaxial with the furnace body opening, the crucible through hole is positioned above a component to be evaporated, a crucible containing cavity for containing evaporation materials is arranged in the evaporation crucible, and evaporation gas of the evaporation materials in the crucible containing cavity is downwards deposited on the surface of the component after passing through the crucible through hole and the furnace body opening and is evaporated into a required coating. The invention also discloses a double-sided coating device using the evaporation furnace. The invention can realize double-sided coating by modifying the existing single-sided coating device, and has small occupied volume and low manufacturing cost.
Description
Technical Field
The invention belongs to the technical field of evaporation coating, and particularly relates to an evaporation furnace and a double-sided coating device.
Background
The existing evaporation coating method is commonly used in a single-sided coating mode, and in the occasion of double-sided coating, complicated surface changing equipment is required to be added for double-sided coating, so that the occupied area of the equipment is increased and the manufacturing cost is increased.
Disclosure of Invention
The invention aims to solve the technical problem of providing an evaporation furnace and a double-sided coating device with simple structures, which can realize double-sided coating by modifying the existing single-sided coating device, and have small occupied volume and low manufacturing cost.
The invention is realized in such a way, and provides an evaporation furnace, which comprises a furnace body and an evaporation crucible, wherein the evaporation crucible is arranged in the furnace body, the top surface of the furnace body is sealed, a heating wire is arranged in the furnace body, a furnace body opening is arranged at the bottom surface of the furnace body, a crucible through hole coaxial with the furnace body opening is also arranged at the bottom surface of the evaporation crucible, the crucible through hole is positioned above a component to be evaporated, a crucible containing cavity for containing evaporation materials is arranged in the evaporation crucible, and evaporation gas of the evaporation materials in the crucible containing cavity is downwards deposited on the surface of the component after passing through the crucible through hole and the furnace body opening and is evaporated into a.
Furthermore, a stirring device for stirring the evaporation material is arranged in the crucible accommodating cavity.
Further, agitating unit includes magnetic force control system and the magnetic force roating seat of constituteing by a plurality of magnetic force seats and spring coil, the spring coil cup joints the outer fringe at the magnetic force seat, set up the mounting hole bottom every magnetic force seat, bottom at the mounting hole is provided with magnet, set up bellied magnetic force stick on the evaporation crucible correspondingly, the magnetic force seat cup joints on the magnetic force stick through the mounting hole movably, set up the magnetic force post in the furnace body that the magnetic force stick bottom corresponds, magnetic force control system passes through the polarity of magnetic force post transform magnetic force stick, rotate around the magnetic force stick at its place with the drive magnetic force roating seat.
Furthermore, an openable and closable source furnace bottom cover is arranged on the furnace body at the position of the bottom of the evaporation crucible, and an opening of the furnace body is arranged on the source furnace bottom cover.
Furthermore, the outer periphery of the evaporation crucible is provided with an external thread, and the furnace body corresponding to the external thread is provided with an internal thread matched with the external thread.
Furthermore, a porous metal filter layer is arranged at the through hole of the crucible.
Furthermore, the outer wall of the furnace body is made of stainless steel.
Furthermore, the magnetic seat is made of zirconium nitride, and the spring ring is made of stainless steel.
The invention is realized in such a way that the double-sided coating device is provided, and the evaporation furnace is used.
Furthermore, the evaporation furnace is positioned above the component to be subjected to evaporation plating, and simultaneously coats the upper surface and the lower surface of the component to be subjected to evaporation plating together with another evaporation device positioned below the component to be subjected to evaporation plating.
Furthermore, the evaporation furnace and the evaporation device are positioned in the same evaporation chamber.
Compared with the prior art, the evaporation furnace and the double-sided coating device provided by the invention have the advantages that the evaporation furnace comprises a furnace body and an evaporation crucible, the evaporation crucible is arranged in the furnace body, the top surface of the furnace body is closed, a heating wire is arranged in the furnace body, a furnace body opening is formed in the bottom surface of the furnace body, a crucible through hole coaxial with the furnace body opening is also formed in the bottom surface of the evaporation crucible, the crucible through hole is positioned above a component to be coated by evaporation, a crucible containing cavity for containing evaporation materials is formed in the evaporation crucible, and evaporation gas of the evaporation materials in the crucible containing cavity is downwards deposited on the surface of the component after passing through the crucible through hole and the furnace body opening and is. The evaporation furnace is arranged above the component to be evaporated, the upper surface of the component to be evaporated is coated, the defect that the lower surface of the component to be evaporated can only be coated in the conventional single-surface coating mode is overcome, the occupied size is small, the manufacturing cost is low, and double-surface coating can be realized by modifying the conventional single-surface coating device.
Drawings
FIG. 1 is a schematic perspective view of an evaporation furnace of the present invention;
FIG. 2 is a perspective view of the furnace body of FIG. 1;
FIG. 3 is a schematic plan view of the stirring device of FIG. 1;
FIG. 4 is a top view of the magnetic base and spring ring assembly of FIG. 3;
FIG. 5 is a schematic plan view of a double-sided coating apparatus according to the present invention.
Detailed Description
In order to make the technical problems, technical solutions and advantageous effects to be solved by the present invention more clearly apparent, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
Referring to fig. 1 to 4, the direction of the arrows indicates the material flow. The invention discloses a preferred embodiment of an evaporation furnace, which comprises a furnace body 1 and an evaporation crucible 2, wherein the evaporation crucible 2 is arranged in the furnace body 1. The top surface of the furnace body 1 is closed, and a heating wire (not shown in the figure) is arranged in the furnace body 1.
A furnace body opening 3 is provided on the bottom surface of the furnace body 1, and a crucible through hole 4 coaxial with the furnace body opening 3 is also provided on the bottom surface of the evaporation crucible 2. Crucible through-hole 4 is located treats coating by vaporization part top, is equipped with the crucible of splendid attire coating by vaporization material in evaporation crucible 2 and holds the chamber 5, and the evaporation gas that is located the interior coating by vaporization material of crucible chamber 5 passes through crucible through-hole 4 and furnace body trompil 3 back and downward deposit to the part surface and the coating by vaporization deposit becomes required cladding material.
The outer wall of the furnace body 1 is made of stainless steel, and heat-resistant heat-insulating materials are filled in the furnace body. The heating wire is made of tantalum nitride.
A porous metal filter (not shown) is provided at the crucible through-hole 4, and the evaporation gas of the evaporation material is filtered by the porous metal filter and deposited on the surface of the member. The pore size of the porous metal filter layer can be replaced.
A stirring device 6 for stirring the vapor deposition material is provided in the crucible chamber 5. The stirring device 6 comprises a magnetic control system (not shown in the figures) and a magnetic rotary base 63 consisting of a plurality of magnetic bases 61 and spring rings 62. The spring ring 62 is sleeved on the outer edge of the magnetic base 61, and the plurality of magnetic rotary bases 63 form a magnetic rotary array. A mounting hole 64 is arranged at the bottom of each magnetic base 61, a magnet (not shown in the figure) is arranged at the bottom of the mounting hole 64, a convex magnetic rod 65 is correspondingly arranged on the evaporation crucible 2, and the magnetic base 61 is movably sleeved on the magnetic rod 65 through the mounting hole 64. A magnetic column 66 is arranged in the furnace body 1 corresponding to the bottom of the magnetic rod 65. The magnetic force control system changes the polarity of the magnetic force rod 65 through the magnetic force column 66 to drive the magnetic force rotating base 63 to rotate around the magnetic force rod 65. The mounting hole 64 at the bottom of the magnetic base 61 is coaxial with the magnetic rod 65 on the evaporation crucible and the magnetic column 66 in the furnace body 1. The rotating magnetic rotary base 63 sufficiently stirs the evaporation material, thereby increasing the evaporation rate of the evaporation material.
The magnetic base 61 is made of zirconium nitride, and the spring ring 62 is made of stainless steel. The zirconium nitride material is a high-temperature resistant material, and has a long-term heat preservation effect after absorbing heat, so that the evaporation material surrounding the zirconium nitride material can be kept in a stable molten state for a long time, and the evaporation rate is more stable. When the magnetic rotary array moves at a high speed, the coating material in a molten state is rapidly evaporated and deposited on the surface of the member from the crucible pass-through hole 4 of the evaporation crucible 2.
A source furnace bottom cover 7 which can be opened and closed is arranged on the furnace body 1 at the position of the bottom of the evaporation crucible 2, and the furnace body opening 3 is arranged on the source furnace bottom cover 7.
An external thread (not shown in the figure) is arranged on the outer periphery of the evaporation crucible 2, an internal thread 8 matched with the external thread is arranged on the furnace body 1 corresponding to the external thread, and the evaporation crucible 2 is screwed in and out of the furnace body 1 through a thread pair so as to add raw materials of the evaporation coating into the evaporation crucible 2.
The invention also discloses a double-sided coating device which uses the evaporation furnace.
Referring to fig. 1 and 5, the direction of the arrow in the figure indicates the material flow direction, the evaporation furnace a is located above the component D to be vapor deposited, and the evaporation furnace a and another evaporation device B located below the component D to be vapor deposited simultaneously coat the upper and lower surfaces of the component D to be vapor deposited.
The evaporation furnace A and the evaporation device B are positioned in the same evaporation chamber C. The evaporation device B comprises a lower crucible B1 containing evaporation materials, and a lower crucible B1 is positioned below the component D to be evaporated.
The invention is improved on the existing single-side coating device, the evaporation furnace A is additionally arranged in the original evaporation chamber C, and the coating is carried out on the upper surface of the component D to be evaporated, so that the double-side coating can be realized, the occupied volume is small, and the manufacturing cost is low.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention.
Claims (10)
1. The utility model provides an evaporation furnace, a serial communication port, including furnace body and evaporation crucible, the evaporation crucible sets up in the furnace body, the top surface of furnace body is airtight, be equipped with the heater strip in the furnace body, bottom surface at the furnace body is equipped with the furnace body trompil, also be equipped with the crucible through-hole coaxial with the furnace body trompil in the bottom surface of evaporation crucible, the crucible through-hole is located treats evaporation coating parts top, it holds the chamber to be equipped with splendid attire evaporation coating materials's crucible in the evaporation crucible, the evaporation gas that is located the evaporation coating materials of crucible appearance intracavity is through depositing down to part surface and evaporation coating deposition become required cladding material behind.
2. An evaporation furnace as claimed in claim 1, wherein a stirring device for stirring the evaporation material is provided in the crucible accommodating chamber.
3. The evaporation furnace of claim 1, wherein the stirring device comprises a magnetic force control system and a magnetic force rotating base consisting of a plurality of magnetic force bases and a spring ring, the spring ring is sleeved on the outer edge of the magnetic force base, a mounting hole is formed in the bottom of each magnetic force base, a magnet is arranged at the bottom of each mounting hole, a raised magnetic force rod is correspondingly arranged on the evaporation crucible, the magnetic force base is movably sleeved on the magnetic force rod through the mounting hole, a magnetic force column is arranged in the furnace body corresponding to the bottom of the magnetic force rod, and the magnetic force control system changes the polarity of the magnetic force rod through the magnetic force column so as to drive the magnetic force rotating base to rotate around the magnetic force rod.
4. An evaporation furnace according to claim 3, wherein an openable and closable source bottom cover is provided on the furnace body at a position where the bottom of the evaporation crucible is located, and the opening of the furnace body is provided on the source bottom cover.
5. The evaporation furnace of claim 3, wherein the outer wall of the furnace body is made of stainless steel, the magnetic base is made of zirconium nitride, and the spring ring is made of stainless steel.
6. An evaporation furnace as claimed in claim 1, wherein the evaporation crucible is provided with an external thread on its outer periphery, and an internal thread fitted to the external thread is provided on the furnace body corresponding thereto.
7. An evaporation furnace as claimed in claim 1, wherein a porous metal filter is provided at the through-hole of the crucible.
8. A double-sided coating apparatus, characterized in that it uses the evaporation furnace according to any one of claims 1 to 7.
9. The double-sided coating device according to claim 8, wherein the evaporation furnace is located above the member to be coated with a coating film on both upper and lower sides of the member to be coated with a coating film simultaneously with another evaporation device located below the member to be coated with a coating film.
10. The double-sided coating apparatus according to claim 8, wherein the evaporation furnace and the evaporation apparatus are located in the same evaporation chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010288248.8A CN111424239A (en) | 2020-04-14 | 2020-04-14 | Evaporation furnace and double-sided coating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010288248.8A CN111424239A (en) | 2020-04-14 | 2020-04-14 | Evaporation furnace and double-sided coating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111424239A true CN111424239A (en) | 2020-07-17 |
Family
ID=71557853
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010288248.8A Pending CN111424239A (en) | 2020-04-14 | 2020-04-14 | Evaporation furnace and double-sided coating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111424239A (en) |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100848709B1 (en) * | 2007-03-29 | 2008-07-28 | 윤종만 | Downward type deposition source |
| KR20080095127A (en) * | 2007-04-23 | 2008-10-28 | (주)올레돈 | Top down type high temperature evaporation source for metal film on substrate |
| KR20080102081A (en) * | 2007-05-18 | 2008-11-24 | 윤종만 | Downward type linear deposition source |
| KR20110002235A (en) * | 2009-07-01 | 2011-01-07 | 한국과학기술원 | Downward type linear source and device for depositing thin film using the same |
| CN204714886U (en) * | 2015-06-10 | 2015-10-21 | 光驰科技(上海)有限公司 | Two-way deposition plating apparatus |
| CN108103450A (en) * | 2017-12-28 | 2018-06-01 | 成都中建材光电材料有限公司 | A kind of film deposition apparatus and deposition method |
| CN109881156A (en) * | 2019-04-15 | 2019-06-14 | 湖畔光电科技（江苏）有限公司 | A kind of evaporation source preventing material degradation |
| CN110537814A (en) * | 2019-09-20 | 2019-12-06 | 湖北运动人杯壶制造有限公司 | Novel magnetic stirring cup |
| CN211999890U (en) * | 2020-04-14 | 2020-11-24 | 杭州纤纳光电科技有限公司 | Evaporation furnace and double-sided coating device |
-
2020
- 2020-04-14 CN CN202010288248.8A patent/CN111424239A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100848709B1 (en) * | 2007-03-29 | 2008-07-28 | 윤종만 | Downward type deposition source |
| KR20080095127A (en) * | 2007-04-23 | 2008-10-28 | (주)올레돈 | Top down type high temperature evaporation source for metal film on substrate |
| KR20080102081A (en) * | 2007-05-18 | 2008-11-24 | 윤종만 | Downward type linear deposition source |
| KR20110002235A (en) * | 2009-07-01 | 2011-01-07 | 한국과학기술원 | Downward type linear source and device for depositing thin film using the same |
| CN204714886U (en) * | 2015-06-10 | 2015-10-21 | 光驰科技(上海)有限公司 | Two-way deposition plating apparatus |
| CN108103450A (en) * | 2017-12-28 | 2018-06-01 | 成都中建材光电材料有限公司 | A kind of film deposition apparatus and deposition method |
| CN109881156A (en) * | 2019-04-15 | 2019-06-14 | 湖畔光电科技（江苏）有限公司 | A kind of evaporation source preventing material degradation |
| CN110537814A (en) * | 2019-09-20 | 2019-12-06 | 湖北运动人杯壶制造有限公司 | Novel magnetic stirring cup |
| CN211999890U (en) * | 2020-04-14 | 2020-11-24 | 杭州纤纳光电科技有限公司 | Evaporation furnace and double-sided coating device |
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