CN109633893B - Electromagnetic driving vibrating mirror - Google Patents
Electromagnetic driving vibrating mirror Download PDFInfo
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- CN109633893B CN109633893B CN201910104553.4A CN201910104553A CN109633893B CN 109633893 B CN109633893 B CN 109633893B CN 201910104553 A CN201910104553 A CN 201910104553A CN 109633893 B CN109633893 B CN 109633893B
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- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims abstract description 83
- 230000005291 magnetic effect Effects 0.000 claims abstract description 58
- 229910052742 iron Inorganic materials 0.000 claims abstract description 26
- 239000000696 magnetic material Substances 0.000 claims description 27
- 239000011162 core material Substances 0.000 claims description 17
- 230000003014 reinforcing effect Effects 0.000 claims description 14
- 238000005452 bending Methods 0.000 claims description 10
- 230000004907 flux Effects 0.000 claims description 9
- 241000270295 Serpentes Species 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 5
- 229910000519 Ferrosilicon Inorganic materials 0.000 claims description 3
- 229910001209 Low-carbon steel Inorganic materials 0.000 claims description 3
- WYTGDNHDOZPMIW-RCBQFDQVSA-N alstonine Natural products C1=CC2=C3C=CC=CC3=NC2=C2N1C[C@H]1[C@H](C)OC=C(C(=O)OC)[C@H]1C2 WYTGDNHDOZPMIW-RCBQFDQVSA-N 0.000 claims description 3
- 229910000859 α-Fe Inorganic materials 0.000 claims description 3
- 229910000863 Ferronickel Inorganic materials 0.000 claims description 2
- 230000005662 electromechanics Effects 0.000 abstract description 2
- 230000003139 buffering effect Effects 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 238000004804 winding Methods 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000013473 artificial intelligence Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 210000000078 claw Anatomy 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 230000005294 ferromagnetic effect Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K33/00—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Micromachines (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Abstract
The invention belongs to the field of micro-optics and electromechanics, and particularly relates to an electromagnetic driving vibrating mirror. The driving magnetic circuit comprises a coil and an iron core; the iron core is crab claw-shaped and comprises an iron yoke part and a core column part, and a coil is wound on the core column part; the iron yoke part comprises a first iron yoke part, a second iron yoke part and an opening end which are sequentially and integrally arranged, the first iron yoke part and the stem part are integrally arranged, and the sectional areas of the first iron yoke part, the second iron yoke part and the opening end are changed from large to small. The magnetic field of the electromagnet is concentrated to the permanent magnet to the maximum, so that the energy loss is less, and the energy utilization rate is high.
Description
Technical Field
The invention belongs to the field of micro-optics and electromechanics, and particularly relates to an electromagnetic driving vibrating mirror.
Background
Compared with the traditional beam deflection element, the MEMS galvanometer has the advantages of microminiaturization, low energy consumption, quick response, easy integration, long service life and the like, and along with the development of artificial intelligence and the high-precision, miniaturization and low-cost requirements of devices, the MEMS galvanometer is used for amplifying the abnormal colors in the fields of three-color laser projection, laser radar, 3D measurement and the like. The electromagnetic drive has the advantages of linear response, large driving force, high response speed, low driving voltage, insensitivity to size and the like, and is one of the most common driving modes of the micro-vibrating mirror. Electromagnetic driving torsion mirrors can be divided into Lorentz force driving and interaction driving of electromagnetic films and alternating magnetic fields from magnetic sources. The former makes the coil on the micro torsion mirror, the coil is connected with the current which changes periodically, and the micro torsion mirror structure is put in the externally applied permanent magnetic field, the coil will generate the Lorentz force which changes periodically, so as to drive the micro torsion mirror to twist; the latter typically produces a thin film of magnetic material on a scanning micro-torsion mirror structure that generates a driving force under the action of an alternating magnetic field generated by an external periodically varying electric field.
Leakage magnetic flux is unavoidable in electromagnetic driving, and if the vibrating mirror is required to achieve a target rotation angle, the electromagnetic vibrating mirror module reduces the volume, reduces the power consumption and only improves the energy utilization rate.
Disclosure of Invention
In order to improve the utilization rate of electromagnetic energy, the invention provides a crab claw type electromagnetic iron core structure for an electromagnetic driving vibrating mirror and the electromagnetic driving vibrating mirror, which are used for concentrating an electromagnetic ferromagnetic magnetic field to the permanent magnet to the maximum extent and driving the electromagnetic vibrating mirror to twist.
The technical proposal of the invention is to improve a driving magnetic circuit of an electromagnetic driving vibrating mirror, which is characterized in that: comprises a coil and an iron core;
The iron core is crab claw-shaped and comprises an iron yoke part and a core column part, and the coil is wound on the core column part;
The iron yoke part comprises a first iron yoke part, a second iron yoke part and an open end which are sequentially and integrally arranged, wherein the first iron yoke part and the stem part are integrally arranged, and the sectional areas of the first iron yoke part, the second iron yoke part and the open end are changed from large to small.
Further, the stem part can be in a simple strip shape, an arc shape or other linear shapes, so that the length of the stem part is ensured, the thickness of the coil winding is prevented from being too large, the driving coil is ensured to be as close to the iron core as possible, and the magnetic field intensity of the iron core is improved;
Further, the iron core material is high-permeability pure iron, low-carbon steel, ferronickel, ferrosilicon or ferrite.
The invention also provides an electromagnetic driving vibrating mirror, which is characterized in that: comprises an electromagnetic vibrating mirror chip, a structural body and the driving magnetic circuit; the structure body is used for fixing the electromagnetic vibrating mirror chip and the driving magnetic circuit;
The electromagnetic vibrating mirror chip comprises a movable structure, a torsion beam and a fixed frame, wherein the movable structure is fixed on the fixed frame through the torsion beam; the movable structure comprises a movable mirror surface and a magnetic material arranged on the back surface of the movable mirror surface;
the open end of the iron core of the driving magnetic circuit is close to the magnetic material;
The main magnetic flux of the magnetic field generated by the coil is transmitted to the opening end of the iron core along the iron yoke and then goes out of the iron core to act on the magnetic material to drive the electromagnetic vibrating mirror chip to vibrate.
Further, in order to prevent the deformation of the mirror surface due to inertia, the movable structure further comprises a reinforcing rib arranged on the reverse side of the movable mirror surface.
Further, a positioning member is provided on the first yoke portion or the second yoke portion of the driving magnetic circuit, by which the driving magnetic circuit is fitted to the structure.
Further, in order to reduce the stress born by the vibrating mirror structure when the temperature of the working environment of the system changes, a stress buffer structure is arranged between the electromagnetic vibrating mirror chip and the structural body; the thermal expansion coefficients of the material of the stress buffer structure and the electromagnetic vibrating mirror chip are the same or similar;
Further, in order to improve the problem of stress concentration of the torsion beam, the torsion beam is a snake beam symmetrical to the rotation axis of the vibrating mirror;
The snake-shaped beam comprises a first straight line segment, two second straight line segments and two third straight line segments, wherein the second straight line segments and the third straight line segments are symmetrical with each other about the first straight line segment; one end of the first straight line section is fixedly connected with the reinforcing rib or the movable mirror surface, the other end of the first straight line section is connected with one end of the second straight line section through a U-shaped or C-shaped bending section, the other end of the second straight line section is connected with one end of the third straight line section through the U-shaped or C-shaped bending section, and the other end of the third straight line section is fixed on a snake-shaped beam anchor point; the two serpentines Liang Maodian are symmetrically distributed about a first straight line segment.
The beneficial effects of the invention are as follows:
1. The invention designs the iron core as the crab claw-shaped iron core, and the electromagnetic vibrating mirror formed by the crab claw-shaped iron core drives the magnetic circuit to drive the vibrating mirror to twist, so that the magnetic field of the electromagnet is concentrated to the permanent magnet to the maximum extent, the energy loss is less, and the energy utilization rate is high;
2. The invention designs the torsion beam as a snake-shaped beam and designs the bending part of the snake-shaped beam as a C or U-shaped structure, thereby reducing stress concentration and facilitating the stress in the snake-shaped torsion Liang Junbu.
Drawings
FIG. 1 is a schematic diagram of a driving magnetic circuit of an electromagnetic galvanometer according to an embodiment of the invention;
FIG. 2 is a schematic diagram of an electromagnetic driving galvanometer according to a second or third embodiment of the invention;
FIG. 3 is a schematic diagram illustrating the installation of a driving magnetic circuit and a structural body of a second electromagnetic vibrating mirror according to an embodiment of the present invention;
FIG. 4a is a schematic front view of an electromagnetic galvanometer chip according to a fourth embodiment of the invention;
fig. 4b is a schematic view of a serpentine beam structure according to a fourth embodiment of the present invention.
The reference numerals in the drawings are: 11-movable mirror, 12-torsion beam, 121-first straight line segment, 122-second straight line segment, 123-third straight line segment, 124-serpentine Liang Maodian, 125-U-shaped or C-shaped bent segment, 13-fixed frame, 14-magnetic material, 31-electromagnetic mirror chip, 32-structure, 33-stress buffer structure, 34-driving magnetic circuit, 41-coil, 42-stem portion, 43-first yoke portion, 44-second yoke portion, 45-open end.
Detailed Description
The invention is further described below with reference to the accompanying drawings and specific examples.
Example 1
As can be seen from fig. 1, the driving magnetic circuit 34 of the present embodiment includes a crab claw-shaped iron core, and the iron core material may be a high-permeability pure iron, a low-carbon steel, an iron-nickel alloy, a ferrosilicon alloy, a ferrite, or the like.
The core includes a stem portion 42 and a yoke portion, a coil 41 having a certain number of turns is wound around the stem portion 42, a varying current is applied to the coil 41 to generate a varying magnetic field, the core permeability is much higher than that of air, and the magnetic flux is concentrated on the core, and the yoke portion is composed of a first yoke portion 43, a second yoke portion 44 and an open end 45 for guiding a magnetic circuit to the vicinity of a magnetic material as a galvanometer drive. The stem portion 42 may be a simple bar shape, or may be an arc shape or other line shape, so as to ensure the length of the portion, to prevent the winding thickness of the coil 41 from being too large, to ensure that the driving coil is as close to the iron core as possible, and to improve the magnetic field strength of the iron core;
The iron core material is not closed, the open end 45 is near the driven magnetic material, part of the magnetic field of the iron core and the magnetic poles of the magnetic material form a closed magnetic circuit, and the magnetic field changed in the iron core generates force on the magnetic material; the open end 45 should be as close to the magnetic material as possible to reduce flux loss, but prevent the movable mirror or magnetic material from touching the core when the vibrating mirror vibrates;
The core column part 42 and the magnetic flux transmission areas of the first yoke part 43 and the second yoke part 44 have core sectional areas larger than that of the open end 45 so as to reduce magnetic resistance as much as possible, the open end 45 has a properly reduced cross section so as to be capable of properly reducing the core sectional area of the magnetic material approaching the opposite side of the mirror surface in the case that the core magnetic field is not saturated.
Example two
As can be seen from fig. 2, the electromagnetic driving galvanometer of the present embodiment mainly includes an electromagnetic galvanometer chip 31, a structural body 32, and a driving magnetic circuit 34. The structure 32 supports and fixes the electromagnetic vibrating mirror chip 31 and the driving magnetic circuit 32, combines the electromagnetic vibrating mirror chip 31 and the driving magnetic circuit 32 together, ensures the relative positions of the electromagnetic vibrating mirror chip and the driving magnetic circuit 32, and simultaneously provides an external interface (comprising a mechanical interface or a fixed electric element or interface) of the electromagnetic driving vibrating mirror.
The electromagnetic mirror chip 31 of the present embodiment includes a movable mirror 11, a torsion beam 12, and a fixed frame 13, and the movable mirror 11 is fixed to the fixed frame 13 by the torsion beam 12. The back surface of the movable mirror 11 is provided with a magnetic material 14 and reinforcing ribs, and when the inertial deformation of the movable mirror 11 is small, the reinforcing ribs can be omitted. In this embodiment, the center of the reinforcing rib is annular and is disposed on the opposite side of the movable mirror 11, the magnetic material 14 passes through the center ring of the reinforcing rib and is adhered on the opposite side of the movable mirror 11, and the reinforcing rib limits the magnetic material 14. In other embodiments, the reinforcing ribs may have any other shape, and the magnetic material may be adhered to the surface of the reinforcing ribs. The magnetic material 14, the reinforcing ribs, and the movable mirror 11 form a movable structure of the electromagnetic mirror chip 31.
In order to ensure the driving torque of the coil to the vibrating mirror and reduce the power consumption as much as possible, the magnetic flux loss is reduced, the driving magnetic circuit 34 is the driving magnetic circuit in the first embodiment, the iron core material is not closed, the open end 45 is near the driven magnetic material, part of the magnetic field of the iron core and the magnetic pole of the magnetic material form a closed magnetic circuit, and the changing magnetic field in the iron core exerts a force on the magnetic material; the open end 45 should be as close to the magnetic material as possible to reduce flux loss, but prevent the movable mirror or magnetic material from touching the core when the vibrating mirror vibrates; the coil generates a variable magnetic field by applying a variable current signal to the coil, and the main magnetic flux of the magnetic field is concentrated near the magnetic material fixed on the back surface of the vibrating mirror through the iron core to drive the magnetic material to move, so that the movable mirror surface is driven to move. The first and second yoke portions 43, 44 may provide a core securing area to be positionable and mountable to the electromagnetic mirror structure 32, as shown in fig. 3.
Example III
As can be seen from fig. 2, in this embodiment, on the basis of the second embodiment, a stress buffering structure 33 is disposed between the electromagnetic galvanometer chip 31 and the structural body 32. The stress buffering structure 33 may be positioned and fixed to the structural body 32, while the electromagnetic galvanometer chip 31 may be positioned and fixed to the stress buffering structure 33; the stress buffering structure 33 is made of a material having a thermal expansion coefficient similar to that of the electromagnetic mirror chip 31, for example, if the material of the electromagnetic mirror chip 31 is silicon-based, the stress buffering structure 33 may be made of silicon, alumina ceramic, aluminum nitride ceramic, or other materials having a thermal expansion coefficient similar to that of silicon.
Example IV
In order to raise the torsional mode frequency of the vibrating mirror and inhibit other modes, the embodiment provides an electromagnetic driving vibrating mirror with a low-stress torsion beam on the basis of any one of the embodiments.
As can be seen from fig. 4a, the torsion beam of the electromagnetic driving vibrating mirror in this embodiment is a snake beam, one end of the snake beam is fixedly connected with the movable mirror or the reinforcing rib, and the other end is fixedly connected with the fixed frame.
As can be seen from fig. 4b, the serpentine beam comprises a first straight line segment 121, two second straight line segments 122 symmetrical about the first straight line segment 121, and two third straight line segments 123; one end of the first straight line segment 121 is fixedly connected with a movable mirror surface or a reinforcing rib, the other end of the first straight line segment 121 is connected with one end of the second straight line segment 122 through a U-shaped or C-shaped bending segment 125, the other end of the second straight line segment 122 is connected with one end of a third straight line segment 123 through the U-shaped or C-shaped bending segment 122, and the other end of the third straight line segment 123 is fixed on an anchor point 124 of the snake beam; the two serpentines Liang Maodian 124,124 are symmetrically distributed about the first straight line segment 121. The snakelike Liang Guanyu vibrating mirror of the embodiment has symmetrical rotating shafts, and torsion Liang Maodian is symmetrically distributed on two sides of the vibrating mirror rotating shaft; c-shaped or U-shaped structures perpendicular to the rotating shaft direction are symmetrically added at the bending position of the snake-shaped beam, and stress concentration at the bending position of the snake-shaped beam is improved.
Claims (6)
1. An electromagnetic drive galvanometer, characterized in that: comprises an electromagnetic vibrating mirror chip, a structural body and a driving magnetic circuit; the structure body is used for fixing the electromagnetic vibrating mirror chip and the driving magnetic circuit;
The electromagnetic galvanometer chip comprises a movable structure, a torsion beam (12) and a fixed frame (13), wherein the movable structure is fixed on the fixed frame (13) through the torsion beam (12); the movable structure comprises a movable mirror surface (11), a reinforcing rib arranged on the back surface of the movable mirror surface (11) and a magnetic material (14) arranged on the back surface of the movable mirror surface (11);
The torsion beam (12) is a snake beam;
The serpentine beam comprises a first straight line segment (121), two second straight line segments (122) symmetrical about the first straight line segment (121), and two third straight line segments (123); one end of the first straight line segment (121) is fixedly connected with the reinforcing rib, the other end of the first straight line segment (121) is connected with one end of the second straight line segment (122) through a U-shaped or C-shaped bending segment (125), the other end of the second straight line segment (122) is connected with one end of the third straight line segment (123) through the U-shaped or C-shaped bending segment (125), and the other end of the third straight line segment (123) is fixed on an anchor point (124) of the snake-shaped beam; the two serpentines Liang Maodian (124) are symmetrically distributed about the first straight line segment (121); the C-shaped or U-shaped bending section is perpendicular to the rotating shaft direction (125) and is used for improving stress concentration of the snake-shaped beam, so that stress is uniformly distributed on the snake-shaped beam;
the open end of the iron core of the driving magnetic circuit (34) is close to the magnetic material;
The main magnetic flux of the magnetic field generated by the coil is transmitted to the opening end of the iron core along the iron yoke and then goes out of the iron core to act on the magnetic material to drive the electromagnetic vibrating mirror chip to vibrate.
2. The electromagnetically driven galvanometer according to claim 1, wherein: a positioning member is provided on either the first yoke portion (43) or the second yoke portion (44) of the driving magnetic circuit, and the driving magnetic circuit is fitted to the structure through the positioning member.
3. The electromagnetically driven galvanometer according to claim 2, wherein: a stress buffer structure (33) is arranged between the electromagnetic galvanometer chip (31) and the structural body (32); the material of the stress buffer structure (33) and the thermal expansion coefficient of the electromagnetic vibrating mirror chip (31) are the same or similar.
4. The electromagnetically driven galvanometer according to claim 1, wherein: the driving magnetic circuit includes a coil (41) and an iron core;
The iron core is crab claw-shaped and comprises an iron yoke part and a stem part (42), and the coil (41) is wound on the stem part (42);
The iron yoke part comprises a first iron yoke part (43), a second iron yoke part (44) and an opening end (45) which are sequentially and integrally arranged, wherein the first iron yoke part (43) and the stem part (42) are integrally arranged, and the cross sections of the first iron yoke part (43), the second iron yoke part (44) and the opening end (45) are changed from large to small.
5. The driving magnetic circuit of the electromagnetically driven galvanometer according to claim 4, wherein: the stem portion (42) is bar-shaped or arcuate.
6. The driving magnetic circuit of the electromagnetically driven galvanometer according to claim 5, wherein: the iron core material is high-permeability pure iron, low-carbon steel, ferronickel, ferrosilicon or ferrite.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910104553.4A CN109633893B (en) | 2019-02-01 | 2019-02-01 | Electromagnetic driving vibrating mirror |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910104553.4A CN109633893B (en) | 2019-02-01 | 2019-02-01 | Electromagnetic driving vibrating mirror |
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| CN109633893A CN109633893A (en) | 2019-04-16 |
| CN109633893B true CN109633893B (en) | 2024-05-14 |
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| CN110347119B (en) * | 2019-06-29 | 2021-11-16 | 瑞声科技（南京）有限公司 | Motion control structure and actuator |
| WO2021168850A1 (en) * | 2020-02-29 | 2021-09-02 | 深圳市速腾聚创科技有限公司 | Driving device and driving method for electromagnetic galvanometer, and laser radar |
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| KR20100063996A (en) * | 2008-12-04 | 2010-06-14 | 삼성전자주식회사 | Scanner and image forming apparatus employing the same |
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| EP1215518A1 (en) * | 2000-12-18 | 2002-06-19 | Olympus Optical Co., Ltd. | Mirror rocking member for optical deflector |
| CN1981230A (en) * | 2004-06-30 | 2007-06-13 | 德克萨斯仪器股份有限公司 | Stabilization of mems mirrors in closed loop operation |
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| CN109633893A (en) | 2019-04-16 |
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