CN109596209A - 一种高温压电振动传感器及压电元件制备方法 - Google Patents
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Abstract
本发明公开了一种高温压电振动传感器及压电元件制备方法。高温压电振动传感器包括质量块、压电元件等部件,其中,多片圆环形压电元件通过导电片串联并压紧安装在安装座上,质量块置于由多片圆环形压电元件与导电片构成的组合件上方,质量块通过紧固螺栓压紧固定并安装在安装座上。压电元件制备时选用材料为铋层状结构压电陶瓷Bi4Ti3O12的改性材料,选用无水乙醇为研磨介质,称重配料后经过粗磨、敞开合成、细磨、烘干等步骤,最终获得符合性能要求的压电元件。本发明解决了压电元件高居里温度和高压电系数不可兼得问题,传感器正常工作最高耐温500℃,在10~2500Hz频率响应范围内灵敏度偏差±5%以内。
Description
技术领域
本发明涉及传感器技术领域,具体涉及一种高温压电振动传感器及压电元件制备方法。
背景技术
高温压电振动传感器是发动机等高温部件振动状态监测的专用特殊传感器,其主要是利用压电材料的正压电效应进行振动测量,具有自发电、使用温度高、体积小、抗电磁干扰能力强、寿命长、可靠性高等优点。与普通压电振动传感器相比,其在高温环境下长期稳定工作提出了更高要求。高温压电元件是其关键敏感核心元件,与惯性质量块等形成组件,实现振动信号向电信号的转变,对振动传感器的性能起到关键作用。
当前,市面上的高温压电振动传感器通常存在最高测量温度较低、测量频率范围较窄、测量精度较低等问题,胡子俭等公开了一种《改进型450℃高温压电加速度计》(公开号:CN1109248C),传感器最高测量温度450℃,随着发动机性能的提升,目前已无法满足发动机高动力高温度需求,且垫片与质量块和底座之间采用粘结剂结合,限制了传感器的高温应用。除传感器零件选择、加工精度、结构设计等因素影响外,压电元件性能也对传感器性能有较大程度影响。研究表明,铋层状结构高温压电陶瓷由于具有居里温度高、老化率低、介电击穿强度高、机械品质因数高和易烧结等特点,且比一般钙钛矿结构陶瓷(如BaTiO3和PZT)和钨青铜结构陶瓷(如PbNb2O6)等具有更高的居里温度和高温电阻率,是目前高温压电振动传感器关键核心敏感元件高温压电陶瓷元件的最优解决方案。然而,压电元件的高居里温度和高压电系数往往不可兼得。李玉臣等公开了《一种高温下稳定使用的铋层状结构压电陶瓷材料及其制备方法》(公开号:CN1994966A),材料可在室温~480℃范围内反复使用,但压电系数d33只有19pC/g,通常需要串联多片压电元件以达到传感器灵敏度输出要求,不利于传感器体积和质量小型化,当传感器灵敏度输出要求较高时,由于压电元件d33较低,难以装配成传感器。
发明内容
本发明的目的是针对现有市面上压电振动传感器测量温度偏低、频率响应范围较窄,以及压电元件高居里温度和高压电系数不可兼得等问题,研制出一种最高测量温度500℃、在10~2500Hz频率响应范围内灵敏度偏差±5%以内、精度高、稳定性好的高温压电振动传感器及Tc=660℃,d33=32pC/g配套压电元件。
为了实现上述发明目的,本发明提供了如下的技术方案:一种高温压电振动传感器,包括质量块、压电元件、导电片、安装座、紧固螺栓,其中,多片圆环形压电元件通过导电片串联并利用适宜的工装夹具压紧安装在安装座上,压电元件的数量根据传感器灵敏度要求结合质量块的质量计算,质量块置于由多片圆环形压电元件与导电片构成的组合件上方,质量块通过紧固螺栓压紧固定并安装在安装座上,压紧调试到位后,紧固螺栓与压电元件组合压紧处根部涂抹少量的螺纹锁紧液;由多片圆环形压电元件与导电片构成的组合件和安装座之间夹设有绝缘片,由质量块、压电元件、导电片、绝缘片、安装座、紧固螺栓构成的组合件置于由安装座与外壳连接构成的密闭壳体内,在密闭壳体外侧还设有插接件,插接件通过导线与压电元件连接。
优选地,所述外壳、安装座选用耐高温性能良好的NS312合金。
优选地,所述质量块选用质量稳定性和一致性良好的钨镍铜或钨镍铁合金。
优选地,所述压电元件选用材料为铋层状结构压电陶瓷Bi4Ti3O12的改性材料。
优选地,所述铋层状结构压电陶瓷Bi4Ti3O12的改性材料,材料的主要性能为Tc=660℃,d33=32pC/g,tanδ=0.10%,其配方为Bi4Ti3-x-yNbxWyO12,其中0.005≤x≤0.025,0.005≤y≤0.025。
优选地,所述压电元件在装配成传感器前,需进行温度450~550℃、时间2~10h的老化处理。
优选地,所述导电片选用耐高温Inconel600轧制合金带材线切割加工而成,为保证更优异的导电性能,装配使用前需进行高导电金属溅射。
优选地,所述绝缘片采用熔点和纯度较高的99氧化铝圆环形绝缘片,绝缘片的尺寸与压电元件的尺寸相同。
优选地,所述紧固螺栓选用Incoloy909高温合金。
一种压电元件,选用材料为铋层状结构压电陶瓷Bi4Ti3O12的改性材料,材料的主要性能为Tc=660℃,d33=32pC/g,tanδ=0.10%,其配方为Bi4Ti3-x-yNbxWyO12,其中0.005≤x≤0.025,0.005≤y≤0.025。
一种压电元件的制备方法,其特征在于包括以下步骤:
1)材料制备选用所述的铋层状结构压电陶瓷Bi4Ti3O12的改性材料,选用无水乙醇为研磨介质,称重配料;
2)粗磨:采用行星球磨方式,球磨时间为4~8h;
3)敞开合成:合成工艺为缓慢升温至650~800℃保温1~2h后随炉冷却;
4)细磨:采用行星球磨方式,球磨时间为4~8h;
5)烘干;
6)加粘结剂造粒;
7)成型;
8)排塑:排塑工艺为缓慢升温至700~800℃保温1~2h后随炉冷却;
9)烧结:烧结工艺为缓慢升温至1050℃~1250℃保温1~3h后随炉冷却;
10)冷加工;
11)超声清洗;
12)上电极:上电极材料采用高温银浆或铂浆,上电极工艺为缓慢升温至600~800℃后随炉冷却;
13)极化:极化工艺为100~200℃高温油浴极化,极化电压5~8kV/mm,极化时间10~30min;
14)最终制备获得满足性能要求的压电元件。
本发明通过传感器结构设计、材料选用、核心元件设计与工艺研究等,研制出一种最高测量温度500℃、在10~2500Hz频率响应范围内灵敏度偏差±5%以内、精度高、稳定性好的高温压电振动传感器及Tc=660℃,d33=32pC/g配套压电元件,相比于现有技术具有如下效果:
1)传感器结构简单,所有零部件选用耐高温稳定性良好材料,零部件间连接除紧固螺栓处涂抹少量螺纹锁紧液外均通过焊接连接,结构稳定可靠;
2)传感器正常工作最高耐温500℃,在10~2500Hz频率响应范围内灵敏度偏差±5%以内,传感器耐高温工作稳定性良好;
3)解决了压电元件高居里温度和高压电系数不可兼得问题,使压电元件在保持高温度稳定性的同时,d33也有较大幅度提高,且压电元件温度稳定性良好。
附图说明
图1是本发明高温压电振动传感器结构剖视图。
图2是本发明实施例中压电振动传感器灵敏度随温度变化曲线图。
图3是本发明实施例中压电振动传感器频率响应测试结果。
图4是本发明制备的圆环形压电元件。
图5是本发明实施例中压电元件压电系数d33随温度变化趋势图。
具体实施方式
下面结合附图和实施例进一步说明本发明,但并不因此将本发明限制在所述的实施例范围之中。
如图1所示的一种高温压电振动传感器,包括质量块2、压电元件3、导电片4、安装座、紧固螺栓8,其中,多片圆环形压电元件3通过导电片4串联并压紧安装在安装座上,质量块2置于由多片圆环形压电元件3与导电片4构成的组合件上方,质量块2通过紧固螺栓8压紧固定并安装在安装座上;由多片圆环形压电元件3与导电片4构成的组合件和安装座之间夹设有绝缘片5,由质量块2、压电元件3、导电片4、绝缘片5、安装座、紧固螺栓8构成的组合件置于由安装座与外壳1连接构成的密闭壳体内,在密闭壳体外侧还设有插接件9,插接件9通过导线与压电元件3连接。所述安装座包括支撑座6和底座7,支撑座6底部与底座7内外侧通过连续激光焊焊接或采用一体加工,底座7与外壳1通过氩弧焊焊接连接。
所述外壳1、支撑座6和底座7均选用NS312合金。
所述质量块2选用钨镍铜或钨镍铁合金。
所述压电元件3选用材料为铋层状结构压电陶瓷Bi4Ti3O12的改性材料。所述铋层状结构压电陶瓷Bi4Ti3O12的改性材料,材料的主要性能为Tc=660℃,d33=32pC/g,tanδ=0.10%,其配方为Bi4Ti3-x-yNbxWyO12,其中0.005≤x≤0.025,0.005≤y≤0.025,本实施例中,成分选择为x=0.01,y=0.01。
所述压电元件3在装配成传感器前,需进行温度450~550℃、时间2~10h的老化处理。
所述导电片4选用耐高温Inconel600轧制合金带材线切割加工而成,装配使用前需进行高导电金属溅射。
所述绝缘片5采用99氧化铝圆环形绝缘片,绝缘片5的尺寸与压电元件3的尺寸相同。
所述紧固螺栓8选用Incoloy909高温合金。
本实施例中,各零件均按照高精度指标要求加工。图2是装配出的传感器灵敏度随温度变化曲线图,在500℃以内传感器灵敏度变化在规定偏差范围内。图3是装配出的传感器频率响应测试结果,在10~2500Hz范围内,传感器频响变化不超过±5%,可进行较高精度测量。
压电元件3的制备:选用无水乙醇作为研磨介质,铋层状结构压电陶瓷Bi4Ti3O12的改性材料的成分选择为x=0.01,y=0.01,称重配料后首先行星球磨6h后敞开合成,合成工艺为缓慢升温至750℃保温2h后随炉冷却;合成粉料研磨后再进行行星球磨细磨6h,出料烘干后加粘结剂造粒、成型;24h后,将成型料缓慢升温至750℃保温1h后随炉冷却排塑;1140℃下保温2h烧结成瓷;烧结陶瓷采用专用磨床冷加工并超声清洗烘干,双面印刷高温铂浆,并在750℃下烧银;最后,涂有电极层的陶瓷在180℃高温油浴极化20min,极化电压6kV/mm,最终制备获得满足性能要求的压电元件,如图4所示。压电元件的压电系数d33随温度变化趋势图如图5,可以看到压电元件在600℃以下的温度稳定性良好,满足传感器使用要求。
Claims (10)
1.一种高温压电振动传感器,其特征在于:包括质量块(2)、压电元件(3)、导电片(4)、安装座、紧固螺栓(8),其中,多片圆环形压电元件(3)通过导电片(4)串联并压紧安装在安装座上,质量块(2)置于由多片圆环形压电元件(3)与导电片(4)构成的组合件上方,质量块(2)通过紧固螺栓(8)压紧固定并安装在安装座上;由多片圆环形压电元件(3)与导电片(4)构成的组合件和安装座之间夹设有绝缘片(5),由质量块(2)、压电元件(3)、导电片(4)、绝缘片(5)、安装座、紧固螺栓(8)构成的组合件置于由安装座与外壳(1)连接构成的密闭壳体内。
2.如权利要求1所述的一种高温压电振动传感器,其特征在于:所述外壳(1)、安装座选用NS312合金。
3.如权利要求1所述的一种高温压电振动传感器,其特征在于:所述质量块(2)选用钨镍铜或钨镍铁合金。
4.如权利要求1所述的一种高温压电振动传感器,其特征在于:所述压电元件(3)选用材料为铋层状结构压电陶瓷Bi4Ti3O12的改性材料,材料的主要性能为Tc=660℃,d33=32pC/g,tanδ=0.10%,其配方为Bi4Ti3-x-yNbxWyO12,其中0.005≤x≤0.025,0.005≤y≤0.025。
5.如权利要求1或4所述的一种高温压电振动传感器,其特征在于:所述压电元件(3)在装配成传感器前,需进行温度450~550℃、时间2~10h的老化处理。
6.如权利要求1所述的一种高温压电振动传感器,其特征在于:所述导电片(4)选用耐高温Inconel600轧制合金带材线切割加工而成,装配使用前需进行高导电金属溅射。
7.如权利要求1所述的一种高温压电振动传感器,其特征在于:所述绝缘片(5)采用99氧化铝圆环形绝缘片,绝缘片(5)的尺寸与压电元件(3)的尺寸相同。
8.如权利要求1所述的一种高温压电振动传感器,其特征在于:所述紧固螺栓(8)选用Incoloy909高温合金。
9.一种压电元件,其特征在于:选用材料为铋层状结构压电陶瓷Bi4Ti3O12的改性材料,材料的主要性能为Tc=660℃,d33=32pC/g,tanδ=0.10%,其配方为Bi4Ti3-x-yNbxWyO12,其中0.005≤x≤0.025,0.005≤y≤0.025。
10.一种压电元件的制备方法,其特征在于包括以下步骤:
1)材料制备选用如权利要求9所述的铋层状结构压电陶瓷Bi4Ti3O12的改性材料,选用无水乙醇为研磨介质,称重配料;
2)粗磨:采用行星球磨方式,球磨时间为4~8h;
3)敞开合成:合成工艺为缓慢升温至650~800℃保温1~2h后随炉冷却;
4)细磨:采用行星球磨方式,球磨时间为4~8h;
5)烘干;
6)加粘结剂造粒;
7)成型;
8)排塑:排塑工艺为缓慢升温至700~800℃保温1~2h后随炉冷却;
9)烧结:烧结工艺为缓慢升温至1050℃~1250℃保温1~3h后随炉冷却;
10)冷加工;
11)超声清洗;
12)上电极:上电极材料采用高温银浆或铂浆,上电极工艺为缓慢升温至600~800℃后随炉冷却;
13)极化:极化工艺为100~200℃高温油浴极化,极化电压5~8kV/mm,极化时间10~30min;
14)最终制备获得满足性能要求的压电元件。
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