CN109470173A - A kind of binary channels simultaneous phase shifting interference microscopic system - Google Patents
A kind of binary channels simultaneous phase shifting interference microscopic system Download PDFInfo
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- CN109470173A CN109470173A CN201811635318.1A CN201811635318A CN109470173A CN 109470173 A CN109470173 A CN 109470173A CN 201811635318 A CN201811635318 A CN 201811635318A CN 109470173 A CN109470173 A CN 109470173A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/254—Projection of a pattern, viewing through a pattern, e.g. moiré
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
Abstract
The present invention discloses a kind of binary channels simultaneous phase shifting interference microscopic system, is related to optical interference field, including spectrophotometric unit, reference path unit, optical path unit, combined beam unit and image acquisition units；Spectrophotometric unit is used to incident light wave being separated into the measuring beam and reference beam that transmission direction is mutually perpendicular to, plane of polarization is mutually orthogonal；Reference path unit is used for transmission reference beam and reference beam is carried out airspace phase shift；Optical path unit is used for transmission measuring beam and carries out airspace phase shift to measuring beam, and measuring beam is generated object beam after object to be measured；Combined beam unit is for carrying out conjunction beam to the dephased reference beam in airspace and object beam；Image acquisition units be divided for the light beam after pairing beam and acquisition obtains two width phase shift interference bar graphs on both channels；Cost, technical difficulty are reduced, on the basis of having airspace simultaneous phase shifting function, time domain phase shift function is also equipped with, measuring system can be also corrected.
Description
Technical field
The present invention relates to a kind of optical interference microscopic systems more particularly to a kind of binary channels simultaneous phase shifting to interfere micro- system
System.
Background technique
In recent decades, with photoelectric image sensing technology, the development of computer technology, image processing techniques, optics phase
Position measurement microscopy has also been made significant headway；Optical phase measurement microscopy have the whole audience, quickly, high-precision, it is non-contact,
Undamaged advantage acquires a width interference pattern by electro-optical imaging sensors (such as CCD, CMOS) or several phase-shift phases is monotonically changed
Interference pattern, the phase distribution of sample can be calculated using phase demodulation algorithm, while realizing sample three-dimensional appearance information
High-acruracy survey, measurement accuracy can reach 1/100 wavelength；Cell biology, biological tissue, organ, clinical detection and diagnosis,
Optical surface detection etc. has a wide range of applications.
Phase shift interference measuring technique have compared with other interferometry technologies ambient noise eliminate than more thoroughly, measurement essence
The advantages that high is spent, but there is also needs the problem of different moments acquiring several phase shifting interferences using phase changer, so that
Influence of the measurement result vulnerable to extraneous vibration and air crosstalk, and cannot achieve dynamic phasing measurement.And use airspace same
When phase-shifting technique can solve above-mentioned problem, it be using polarization optical element to crossed polarized light carry out phase shift, at one
Or the interference pattern of three width or four width phase-shift phases difference pi/2 is formed simultaneously on the target surface of the sensitive chip of multiple cameras, then pass through three
The method that step or four-step phase-shifting algorithm calculate phase.It can be realized there are mainly three types of mode: first is that using Amici prism and polarization
Device forms the interference pattern with different phase-shift phases on the target surface of the sensitive chip of multiple cameras；Second is that using grating or
Other beam splitters and polarizer so that the different zones on the target surface of a sensitive chip, while collecting and have
The interference pattern of different phase-shift phases；Third is that using polarization phase-shifting array device, so that on the target surface of the sensitive chip of a camera,
With four pixels for a unit, during the pixel of different location has specific phase shift, acquired image can pass through separation
Phase shifting interference, then the phase distribution that can be asked by phase shift Phase Retrieve Algorithm are formed with the mode of interpolation, realizes dynamic phase
Position measurement.
The dynamic phasing of phase shift while above method can all realize airspace measures, but there is also following some problems:
One, multiple images sensing system needs to guarantee polyphaser synchronous acquisition image, and the photoelectric properties of multiple CCD are not
Unanimously, relative space position difference all can bring larger impact to measurement result；
Two, collect several phase shifting interferences then will receive the limitation of all many conditions to single CCD target surface different zones simultaneously,
If optical grating diffraction direction is influenced by wavelength, so that this method can be only applied to Single wavelength measurement without can be carried out white light or narrowband
The measurement of light, spatial resolution is insufficient, needs particular image sensor etc.；
Three, pixel mask element is difficult to realize extensive commercial application then because of cost of manufacture valuableness.
Summary of the invention
The present invention provides a kind of binary channels simultaneous phase shifting interference microscopic system for the problems in background technique, reduce at
Originally, technical difficulty is also equipped with time domain phase shift function on the basis of having airspace simultaneous phase shifting function, can be realized time domain phase
Jayrator measurement, can also be corrected measuring system.
To achieve the goals above, the present invention proposes a kind of binary channels simultaneous phase shifting interference microscopic system, includes at least: point
Light unit, reference path unit, optical path unit, combined beam unit and image acquisition units；Wherein,
The spectrophotometric unit, for by incident light wave be separated into transmission direction be mutually perpendicular to, plane of polarization it is mutually orthogonal
Measuring beam and reference beam；
The reference path unit is used for transmission reference beam and reference beam is carried out airspace phase shift；
The optical path unit is used for transmission measuring beam and carries out airspace phase shift to measuring beam, and will measure light
Beam generates object beam after object to be measured；
The combined beam unit, for carrying out conjunction beam to the dephased reference beam in airspace and object beam；
Described image acquisition unit be divided for the light beam after pairing beam and acquisition obtains two width on both channels
Phase shift interference bar graph.
Preferably, the system further include: light source unit, for generating the uniform plane light wave of light distribution, and by plane
Light wave transmissions are to spectrophotometric unit.
Preferably, the light source unit, comprising: light source generator, polarization fading device and beam expander collimator assembly,
In, the light source generator generates linear polarized beams, and linear polarized beams are decayed by polarization fading device and to rotate light wave inclined
Shake direction, is forming the uniform plane light wave of light distribution by beam-expanding collimation component.
Preferably, the reference path unit, can set gradually are as follows: the first quarter wave plate and the first reflecting mirror, reference light
Beam forms the reference beam of circularly polarized light after first quarter wave plate and the reflection of the first reflecting mirror；
The optical path unit, setting are as follows: the one 1/2 wave plate, the second reflecting mirror and an image-forming objective lens, it is to be measured
Object is set to image-forming objective lens front end, and there are the lines of certain angle with horizontal direction by the formation of the one 1/2 wave plate for measuring beam
Polarised light, linearly polarized light are irradiated to body surface to be measured through the second reflecting mirror, transmitted through object to be measured after through image-forming objective lens
Form Object light wave.
Preferably, the reference path unit, can also set gradually are as follows: the 2nd 1/2 wave plate, the first quarter wave plate and
One reflecting mirror, reference beam form circular polarization after the reflection of the 2nd 1/2 wave plate, the first quarter wave plate and the first reflecting mirror
The reference beam of light；
The optical path unit, setting are as follows: the one 1/2 wave plate, the second reflecting mirror and an image-forming objective lens, it is to be measured
Object is set to image-forming objective lens front end, and there are the lines of certain angle with horizontal direction by the formation of the one 1/2 wave plate for measuring beam
Polarised light, linearly polarized light are irradiated to body surface to be measured through the second reflecting mirror, transmitted through object to be measured after through image-forming objective lens
Form Object light wave.
Preferably, the reference path unit, can also set gradually are as follows: the first quarter wave plate, the 2nd 1/2 wave plate and
One reflecting mirror, reference beam form circular polarization after the reflection of first quarter wave plate, the 2nd 1/2 wave plate and the first reflecting mirror
The reference beam of light；
The optical path unit, setting are as follows: the one 1/2 wave plate, the second reflecting mirror and an image-forming objective lens, it is to be measured
Object is set to image-forming objective lens front end, and there are the lines of certain angle with horizontal direction by the formation of the one 1/2 wave plate for measuring beam
Polarised light, linearly polarized light are irradiated to body surface to be measured through the second reflecting mirror, transmitted through object to be measured after through image-forming objective lens
Form Object light wave.
Preferably, the image acquisition units, comprising: a polarization splitting prism, the first electro-optical imaging sensors and
Second electro-optical imaging sensors, the light beam after closing beam carry out light splitting by polarization splitting prism and obtain orthogonal two-way light
Beam obtains two width phase shift interference items by acquiring on two channels of the first electro-optical imaging sensors and the second electro-optical imaging sensors
Line figure.
Preferably, the reflecting mirror can be replaced piezoelectric ceramics, to carry out time domain phase shift to reference beam.
Preferably, certain angle is 45 °.
Preferably, the light beam after the conjunction beam carries out light splitting by polarization splitting prism and obtains orthogonal two-way light
Shu Hou makes beam sizes and the photosurface size of the first electro-optical imaging sensors and the first electro-optical imaging sensors match.
The present invention proposes a kind of binary channels simultaneous phase shifting interference microscopic system, has the following beneficial effects:
(1) the invention patent is that space-time mixing phase shift binary channels interferes microscopic system, in conjunction with two step phase shift algorithms, Ke Yishi
Existing static and dynamic phasing measurement, other opposite airspace phase-shifting techniques greatly reduce cost and technical difficulty；
(2) interference microscopic system is on the basis of having airspace simultaneous phase shifting function described in the invention patent, when being also equipped with
Domain phase shift function can be realized time domain phase-shifting phase measurement (changing reflecting mirror into PZT in reference path), also can be to measurement
System is corrected；
(3) the invention patent is more simple compared to other systems, for two spatial positions CCD matching operation difficulty more
It is low, and the system efficiency of light energy utilization is higher.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of invention for those of ordinary skill in the art without creative efforts, can be with
The structure shown according to these attached drawings obtains other attached drawings.
Fig. 1 is that binary channels simultaneous phase shifting interferes microscopic system structural block diagram in first preferred embodiment of the invention；
Fig. 2 is light source unit structural block diagram in first preferred embodiment of the invention；
Fig. 3 is reference path cellular construction block diagram in first preferred embodiment of the invention；
Fig. 4 is optical path cellular construction block diagram in first preferred embodiment of the invention；
Fig. 5 is image acquisition units structural block diagram in first preferred embodiment of the invention；
Fig. 6 is that binary channels simultaneous phase shifting interferes microscopic system entirety detailed structure frame in first preferred embodiment of the invention
Figure；
Fig. 7 is reference path cellular construction block diagram in second preferred embodiment of the invention；
Fig. 8 is reference path cellular construction block diagram in third preferred embodiment of the invention；
Symbol description:
1- light source unit；2- spectrophotometric unit；3- reference path unit；4- optical path unit；5- combined beam unit；6- image
Acquisition unit；101- light source generator；102- polarization fading device；103- beam expander collimator assembly；The first quarter wave plate of 301-；
The first reflecting mirror of 302-；The 2nd 1/2 wave plate of 303-；The one 1/2 wave plate of 401-；The second reflecting mirror of 402-；403- image-forming objective lens；
601- polarization splitting prism；The monochromatic black white image sensor of 602- first；The monochromatic black white image sensor of 603- second；
The embodiments will be further described with reference to the accompanying drawings for the realization, the function and the advantages of the object of the present invention.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiment is only a part of the embodiments of the present invention, instead of all the embodiments.Base
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts it is all its
His embodiment, shall fall within the protection scope of the present invention.
It is to be appreciated that if relating to directionality instruction (such as up, down, left, right, before and after ...) in the embodiment of the present invention,
Then directionality instruction be only used for explain under a certain particular pose (as shown in the picture) between each component relative positional relationship,
Motion conditions etc., if the particular pose changes, directionality instruction is also correspondingly changed correspondingly.
In addition, being somebody's turn to do " first ", " second " etc. if relating to the description of " first ", " second " etc. in the embodiment of the present invention
Description be used for description purposes only, be not understood to indicate or imply its relative importance or implicitly indicate indicated skill
The quantity of art feature." first " is defined as a result, the feature of " second " can explicitly or implicitly include at least one spy
Sign.It in addition, the technical solution between each embodiment can be combined with each other, but must be with those of ordinary skill in the art's energy
It is enough realize based on, will be understood that the knot of this technical solution when conflicting or cannot achieve when occurs in the combination of technical solution
Conjunction is not present, also not the present invention claims protection scope within.
The present invention proposes a kind of binary channels simultaneous phase shifting interference microscopic system；
In first preferred embodiment of the invention, as shown in Figure 1, comprising: light source unit 1, spectrophotometric unit 2, reference path list
Member 3, optical path unit 4, combined beam unit 5 and image acquisition units 6；Wherein, light source unit 1 is uniform for generating light distribution
Plane light wave, and plane light wave is transmitted to spectrophotometric unit 2；Spectrophotometric unit 2 is used to incident light wave being separated into transmission side
To the measuring beam and reference beam being mutually perpendicular to, plane of polarization is mutually orthogonal；Reference path unit 3 be used for transmission reference beam and
Reference beam is subjected to airspace phase shift；Optical path unit 4 is used for transmission measuring beam and carries out airspace phase shift to measuring beam,
And measuring beam is generated into object beam after object to be measured；Combined beam unit 5 be used for the dephased reference beam in airspace and
Object beam carries out conjunction beam；Image acquisition units 6 be divided for the light beam after pairing beam and acquisition obtains on both channels
Two width phase-shift phases are the interference pattern of pi/2.
In the embodiment of the present invention, as shown in Fig. 2, the light source unit 1, comprising: light source generator 101 (laser),
Polarization fading device 102 and beam expander collimator assembly 103, wherein light source generator 101 generates linearly polarized laser light wave, that is, mentions
For the measurement light wave of interferometer, polarization fading device 102 can be used for adjusting the total light intensity for testing light wave and reference light and test light
Beam intensity ratio, linear polarized beams are decayed and are rotated light wave polarization direction by polarization fading device 102, are passing through beam-expanding collimation group
Part 103 forms the uniform plane light wave of light distribution；
In the embodiment of the present invention, spectrophotometric unit 2 uses the first polarization splitting prism, and incident beam is separated into transmission direction
It is mutually perpendicular to, the measuring beam and reference beam that plane of polarization is mutually orthogonal, the light beam of normally incident direction is as reference beam, i.e.,
The direction x polarized component is transmitted to plane of reference direction, and the light beam (direction y polarized component) in glancing incidence direction is as measurement light
Beam；
Space coordinates regulation in the embodiment of the present invention, during beam Propagation are as follows: light beam is transmitted along systematic optical axis
Direction is the direction z, and perpendicular to the plane of incidence and the direction z, y is oriented parallel to the plane of incidence and vertical with the direction z in the direction x, x, y, z three
Direction is at right-handed coordinate system；
In the embodiment of the present invention, as shown in figure 3, the reference path unit 3, sets gradually are as follows: the first quarter wave plate
301 and first reflecting mirror 302, its fast axis direction of the first quarter wave plate and horizontal direction angle are 45 °, described in reference beam passes through
First quarter wave plate 301 forms circularly polarized light after the reflection of the first reflecting mirror 302 so that P light becomes a branch of circularly polarized light
Reference beam；
In the embodiment of the present invention into, the first reflecting mirror 302 can be changed to phase of the piezoelectric ceramics (PZT) as time domain phase-shift unit
Device is moved, realizes the time domain phase shift function of system.
In the embodiment of the present invention, as shown in figure 4, the optical path unit 4, setting are as follows: the one 1/2 wave plate 401, the
Two-mirror 402 and an image-forming objective lens 403, the one 1/2 described its fast axis direction of wave plate 401 are with horizontal direction angle
22.5 °, object (test object is placed and fixed by objective table) to be measured is set to 403 front end of image-forming objective lens, measuring beam
S light is made to become a branch of linearly polarized light for being 45 ° with horizontal direction angle by the one 1/2 wave plate 401, linearly polarized light is through second
Reflecting mirror 402 is irradiated to body surface to be measured, transmitted through object to be measured after through image-forming objective lens 403 formed Object light wave；Imaging
Object lens 403 be used for make from by object 9 to be measured modulation transmission after diffraction object light on the image sensor at clearly as；
In the embodiment of the present invention, the combined beam unit 5 makes measuring beam and reference beam using unpolarized beam splitter prism
Equidirectional propagation again；
In the embodiment of the present invention, as shown in figure 5, the image acquisition units 6, comprising: a polarization splitting prism
601, the first monochromatic black white image sensor CCD 602 and the second monochromatic black white image sensor CCD 603, the light beam after closing beam
Light splitting is carried out by polarization splitting prism and obtains orthogonal two-way light beam, makes beam sizes and the first electro-optical imaging sensors
602 and second the photosurface size of electro-optical imaging sensors 603 match, that is, may make the P light and S light difference shape in two-way light
At interference optical field, acquisition and recording is distinguished by the first electro-optical imaging sensors 602 and the second electro-optical imaging sensors 603, it can be
The two width phase shift interference bar graphs that phase-shift phase is 90 ° are obtained on two channels simultaneously.
In the embodiment of the present invention, using PZT as phase shifting devices, two groups of interference patterns can be collected in two channels simultaneously, benefit
The background phase that two channels are calculated separately with AIA algorithm, the phase-shift phase that subtracting each other can calculate between two channels is 1.5915；
In the embodiment of the present invention, the derivation process of system Jones matrix is as follows:
Since the polarization fading device polarization state final on system is without influence, if through the laser of polarization fading device are as follows:
Wherein a and b be respectively laser in the horizontal direction with the component of vertical direction；
In the embodiment of the present invention, the Jones matrix of 1/2 wave plate are as follows:
Wherein, α1For the angle of 1/2 wave plate fast axis direction and horizontal direction, α in the present embodiment1=22.5 °；
In the embodiment of the present invention, the Jones matrix of quarter wave plate are as follows:
Wherein, α is the angle of quarter wave plate fast axis direction and horizontal direction, α=45 ° in the present embodiment；
Object phase isMirror-reflectionThe transmitted light of PBS is denoted asReflected light note
Make
The process can be indicated with Jones matrix:
Through the light after BS1 are as follows:
The light obtained on the first electro-optical imaging sensors CCD after PBS2 are as follows:
Similarly, the light obtained on the second electro-optical imaging sensors CCD are as follows:
In conclusion the overall schematic of system is as shown in fig. 6, the space coordinates during beam Propagation provide are as follows:
Light beam along the direction that systematic optical axis transmits be the direction z, the direction x perpendicular to the plane of incidence and the direction z, y be oriented parallel to the plane of incidence and
Vertical with the direction z, three directions of x, y, z are at right-handed coordinate system；The present invention proposes a kind of airspace based on cross-polarization light modulation
Simultaneous phase shifting and the binary channels interference microscopic system for having time domain phase shift function；System simple possible is easily operated, and is applicable in
In a variety of phase demodulation algorithms.The present invention utilize polarization beam splitter prism separating and measuring light and reference light, use lateral reflecting surface as
The plane of reference is added quarter wave plate in reference light and forms circularly polarized light, and the formation of 1/2 wave plate and horizontal direction are added in test light
The linearly polarized light that angle is 45 ° closes beam by unpolarized beam splitter prism and polarization beam splitter prism is divided, finally by two light
Electrical image sensor records the two width interference patterns that phase-shift phase is pi/2 simultaneously.
In second preferred embodiment of the invention, as shown in Figure 1, comprising: light source unit 1, spectrophotometric unit 2, reference path list
Member 3, optical path unit 4, combined beam unit 5 and image acquisition units 6；Wherein, light source unit 1 is uniform for generating light distribution
Plane light wave, and plane light wave is transmitted to spectrophotometric unit 2；Spectrophotometric unit 2 is used to incident light wave being separated into transmission side
To the measuring beam and reference beam being mutually perpendicular to, plane of polarization is mutually orthogonal；Reference path unit 3 be used for transmission reference beam and
Reference beam is subjected to airspace phase shift；Optical path unit 4 is used for transmission measuring beam and carries out airspace phase shift to measuring beam,
And measuring beam is generated into object beam after object to be measured；Combined beam unit 5 be used for the dephased reference beam in airspace and
Object beam carries out conjunction beam；Image acquisition units 6 be divided for the light beam after pairing beam and acquisition obtains on both channels
Two width phase-shift phases are the interference pattern of pi/2.
In the embodiment of the present invention, as shown in Fig. 2, the light source unit 1, comprising: light source generator 101, polarization fading
Device 102 and beam expander collimator assembly 103, wherein light source generator 101 generates linear polarized beams, that is, provides the survey of interferometer
Light wave is measured, polarization fading device 102 can be used for adjusting the total light intensity for testing light wave and reference light and test light beam intensity ratio, linear polarization
Light wave is decayed and is rotated light wave polarization direction by polarization fading device 102, is forming light intensity by beam-expanding collimation component 103
The plane light wave being evenly distributed；
In the embodiment of the present invention, spectrophotometric unit 2 uses the first polarization splitting prism, and incident beam is separated into transmission direction
It is mutually perpendicular to, the measuring beam and reference beam that plane of polarization is mutually orthogonal, the light beam of normally incident direction is as reference beam, i.e.,
The direction x polarized component is transmitted to plane of reference direction, and the light beam (direction y polarized component) in glancing incidence direction is as measurement light
Beam；
Space coordinates regulation in the embodiment of the present invention, during beam Propagation are as follows: light beam is transmitted along systematic optical axis
Direction is the direction z, and perpendicular to the plane of incidence and the direction z, y is oriented parallel to the plane of incidence and vertical with the direction z in the direction x, x, y, z three
Direction is at right-handed coordinate system.
In the embodiment of the present invention, as shown in fig. 7, the reference path unit 3, can also set gradually are as follows: the 2nd 1/2 wave
Piece 303, the first quarter wave plate 301 and the first reflecting mirror 302, the 2nd 1/2 described its fast axis direction of wave plate 303 and horizontal direction
Angle is 22.5 °, and first its fast axis direction of quarter wave plate 301 and horizontal direction angle are 0 ° or 90 °；Described in reference beam passes through
2nd 1/2 wave plate 303 and the first quarter wave plate 301 reflect so that P light becomes a branch of circularly polarized light by the first reflecting mirror 302
The reference beam of circularly polarized light is formed afterwards；
In the embodiment of the present invention into, the first reflecting mirror 302 can be changed to phase of the piezoelectric ceramics (PZT) as time domain phase-shift unit
Device is moved, realizes the time domain phase shift function of system.
In the embodiment of the present invention, as shown in figure 4, the optical path unit 4, setting are as follows: the one 1/2 wave plate 401, the
Two-mirror 402 and an image-forming objective lens 403, the one 1/2 described its fast axis direction of wave plate 401 are with horizontal direction angle
22.5 °, object to be measured is set to 403 front end of image-forming objective lens, and measuring beam makes S light become one by the one 1/2 wave plate 401
The linearly polarized light that beam and horizontal direction angle are 45 °, linearly polarized light are irradiated to body surface to be measured through the second reflecting mirror 402,
Object light wave is formed through image-forming objective lens 403 after transmitted through object to be measured；Image-forming objective lens 403 are for making from by object 9 to be measured
Modulation transmission after diffraction object light on the image sensor at clearly as；
In the embodiment of the present invention, the combined beam unit 5 carries out conjunction beam to light beam using unpolarized beam splitter prism；
In the embodiment of the present invention, the image acquisition units 6 a, comprising: polarization splitting prism 601, first is monochromatic
The monochromatic black white image sensor CCD 603 of black white image sensor CCD 602 and second, the light beam after closing beam pass through polarization spectro
Prism carries out light splitting and obtains orthogonal two-way light beam, makes beam sizes and the first electro-optical imaging sensors 602 and the second light
The photosurface size of electrical image sensor 603 matches, that is, P light and S light in two-way light may make to be respectively formed interference optical field,
Acquisition and recording is distinguished by the first electro-optical imaging sensors 602 and the second electro-optical imaging sensors 603, it can be same on both channels
When to obtain phase-shift phase be 90 ° of two width phase shift interference bar graphs.
In the embodiment of the present invention, the calculating derivation process about light wave has illustrated in the first preferred embodiment, herein not
It repeats again；
In third preferred embodiment of the invention, as shown in Figure 1, comprising: light source unit 1, spectrophotometric unit 2, reference path list
Member 3, optical path unit 4, combined beam unit 5 and image acquisition units 6；Wherein, light source unit 1 is uniform for generating light distribution
Plane light wave, and plane light wave is transmitted to spectrophotometric unit 2；Spectrophotometric unit 2 is used to incident light wave being separated into transmission side
To the measuring beam and reference beam being mutually perpendicular to, plane of polarization is mutually orthogonal；Reference path unit 3 be used for transmission reference beam and
Reference beam is subjected to airspace phase shift；Optical path unit 4 is used for transmission measuring beam and carries out airspace phase shift to measuring beam,
And measuring beam is generated into object beam after object to be measured；Combined beam unit 5 be used for the dephased reference beam in airspace and
Object beam carries out conjunction beam；Image acquisition units 6 be divided for the light beam after pairing beam and acquisition obtains on both channels
Two width phase-shift phases are the interference pattern of pi/2.
In the embodiment of the present invention, as shown in Fig. 2, the light source unit 1, comprising: light source generator 101, polarization fading
Device 102 and beam expander collimator assembly 103, wherein light source generator 101 generates linear polarized beams, that is, provides the survey of interferometer
Light wave is measured, polarization fading device 102 can be used for adjusting the total light intensity for testing light wave and reference light and test light beam intensity ratio, linear polarization
Light wave is decayed and is rotated light wave polarization direction by polarization fading device 102, is forming light intensity by beam-expanding collimation component 103
The plane light wave being evenly distributed；
In the embodiment of the present invention, spectrophotometric unit 2 uses the first polarization splitting prism, and incident beam is separated into transmission direction
It is mutually perpendicular to, the measuring beam and reference beam that plane of polarization is mutually orthogonal, the light beam of normally incident direction is as reference beam, i.e.,
The direction x polarized component is transmitted to plane of reference direction, and the light beam (direction y polarized component) in glancing incidence direction is as measurement light
Beam；
Space coordinates regulation in the embodiment of the present invention, during beam Propagation are as follows: light beam is transmitted along systematic optical axis
Direction is the direction z, and perpendicular to the plane of incidence and the direction z, y is oriented parallel to the plane of incidence and vertical with the direction z in the direction x, x, y, z three
Direction is at right-handed coordinate system.
In the embodiment of the present invention, as shown in figure 8, the reference path unit 3, can also set gradually are as follows: the one 1/4 wave
Piece 301, the 2nd 1/2 wave plate 303 and the first reflecting mirror 302, first described its fast axis direction of quarter wave plate 301 and horizontal direction
Angle is 45 °, and the 2nd 1/2 its fast axis direction of wave plate 303 and horizontal direction angle are 45 °, and reference beam passes through the described 1st
Wave plate 301 and the 2nd 1/2 wave plate 303 form circle after the reflection of the first reflecting mirror 302 so that P light becomes a branch of circularly polarized light
The reference beam of polarised light；
In the embodiment of the present invention into, the first reflecting mirror 302 can be changed to phase of the piezoelectric ceramics (PZT) as time domain phase-shift unit
Device is moved, realizes the time domain phase shift function of system.
In the embodiment of the present invention, as shown in figure 4, the optical path unit 4, setting are as follows: the one 1/2 wave plate 401, the
Two-mirror 402 and an image-forming objective lens 403, the one 1/2 described its fast axis direction of wave plate 401 are with horizontal direction angle
22.5 °, object to be measured is set to 403 front end of image-forming objective lens, and measuring beam makes S light become one by the one 1/2 wave plate 401
The linearly polarized light that beam and horizontal direction angle are 45 °, linearly polarized light are irradiated to body surface to be measured through the second reflecting mirror 402,
Object light wave is formed through image-forming objective lens 403 after transmitted through object to be measured；Image-forming objective lens 403 are for making from by object 9 to be measured
Modulation transmission after diffraction object light on the image sensor at clearly as；
In the embodiment of the present invention, the combined beam unit 5 carries out conjunction beam to light beam using unpolarized beam splitter prism；
In the embodiment of the present invention, the image acquisition units 6 a, comprising: polarization splitting prism 601, first is monochromatic
The monochromatic black white image sensor CCD 603 of black white image sensor CCD 602 and second, the light beam after closing beam pass through polarization spectro
Prism carries out light splitting and obtains orthogonal two-way light beam, makes beam sizes and the first electro-optical imaging sensors 602 and the second light
The photosurface size of electrical image sensor 603 matches, that is, P light and S light in two-way light may make to be respectively formed interference optical field,
Acquisition and recording is distinguished by the first electro-optical imaging sensors 602 and the second electro-optical imaging sensors 603, it can be same on both channels
When to obtain phase-shift phase be 90 ° of two width phase shift interference bar graphs.
In the embodiment of the present invention, the calculating derivation process about light wave has illustrated in the first preferred embodiment, herein not
It repeats again；
The above description is only a preferred embodiment of the present invention, is not intended to limit the scope of the invention, all at this
Under the inventive concept of invention, using equivalent structure transformation made by description of the invention and accompanying drawing content, or directly/use indirectly
It is included in other related technical areas in scope of patent protection of the invention.
Claims (10)
1. a kind of binary channels simultaneous phase shifting interferes microscopic system, which is characterized in that include at least: spectrophotometric unit, reference path list
Member, optical path unit, combined beam unit and image acquisition units；Wherein,
The spectrophotometric unit, for incident light wave to be separated into the measurement that transmission direction is mutually perpendicular to, plane of polarization is mutually orthogonal
Light beam and reference beam；
The reference path unit is used for transmission reference beam and reference beam is carried out airspace phase shift；
The optical path unit is used for transmission measuring beam and carries out airspace phase shift to measuring beam, and measuring beam is passed through
Object beam is generated after crossing object to be measured；
The combined beam unit, for carrying out conjunction beam to the dephased reference beam in airspace and object beam；
Described image acquisition unit be divided for the light beam after pairing beam and acquisition obtains two width phase shifts on both channels
Interference fringe picture.
2. binary channels simultaneous phase shifting according to claim 1 interferes microscopic system, which is characterized in that the system further include:
Plane light wave for generating the uniform plane light wave of light distribution, and is transmitted to spectrophotometric unit by light source unit.
3. binary channels simultaneous phase shifting according to claim 2 interferes microscopic system, which is characterized in that the light source list
Member, comprising: light source generator, polarization fading device and beam expander collimator assembly, wherein
The light source generator generates linear polarized beams, and linear polarized beams are decayed by polarization fading device and to rotate light wave inclined
Shake direction, is forming the uniform plane light wave of light distribution by beam-expanding collimation component.
4. binary channels simultaneous phase shifting according to claim 1 interferes microscopic system, which is characterized in that
The reference path unit, can set gradually are as follows: the first quarter wave plate and the first reflecting mirror, reference beam pass through described in
The reference beam of circularly polarized light is formed after first quarter wave plate and the reflection of the first reflecting mirror；
The optical path unit, setting are as follows: the one 1/2 wave plate, the second reflecting mirror and an image-forming objective lens, object to be measured
It is set to image-forming objective lens front end, there are the linear polarizations of certain angle with horizontal direction by the formation of the one 1/2 wave plate for measuring beam
Light, linearly polarized light are irradiated to body surface to be measured through the second reflecting mirror, transmitted through object to be measured after formed through image-forming objective lens
Object light wave.
5. binary channels simultaneous phase shifting according to claim 1 interferes microscopic system, which is characterized in that
The reference path unit, can also set gradually are as follows: the 2nd 1/2 wave plate, the first quarter wave plate and the first reflecting mirror, ginseng
Examine the reference light that light beam forms circularly polarized light after the reflection of the 2nd 1/2 wave plate, the first quarter wave plate and the first reflecting mirror
Beam；
The optical path unit, setting are as follows: the one 1/2 wave plate, the second reflecting mirror and an image-forming objective lens, object to be measured
It is set to image-forming objective lens front end, there are the linear polarizations of certain angle with horizontal direction by the formation of the one 1/2 wave plate for measuring beam
Light, linearly polarized light are irradiated to body surface to be measured through the second reflecting mirror, transmitted through object to be measured after formed through image-forming objective lens
Object light wave.
6. binary channels simultaneous phase shifting according to claim 1 interferes microscopic system, which is characterized in that
The reference path unit, can also set gradually are as follows: the first quarter wave plate, the 2nd 1/2 wave plate and the first reflecting mirror, ginseng
Examine the reference light that light beam forms circularly polarized light after the reflection of first quarter wave plate, the 2nd 1/2 wave plate and the first reflecting mirror
Beam；
The optical path unit, setting are as follows: the one 1/2 wave plate, the second reflecting mirror and an image-forming objective lens, object to be measured
It is set to image-forming objective lens front end, there are the linear polarizations of certain angle with horizontal direction by the formation of the one 1/2 wave plate for measuring beam
Light, linearly polarized light are irradiated to body surface to be measured through the second reflecting mirror, transmitted through object to be measured after formed through image-forming objective lens
Object light wave.
7. binary channels simultaneous phase shifting according to claim 1 interferes microscopic system, which is characterized in that the Image Acquisition
Unit a, comprising: polarization splitting prism, the first electro-optical imaging sensors and the second electro-optical imaging sensors, the light after closing beam
Beam carries out light splitting by polarization splitting prism and obtains orthogonal two-way light beam, passes through the first electro-optical imaging sensors and second
Acquisition obtains two width phase shift interference bar graphs on two channels of electro-optical imaging sensors.
8. interfering microscopic system according to binary channels simultaneous phase shifting described in claim 4 or 5 or 6, which is characterized in that described is anti-
Penetrating mirror can be replaced piezoelectric ceramics, to carry out time domain phase shift to reference beam.
9. interfering microscopic system according to binary channels simultaneous phase shifting described in claim 4 or 5 or 6, which is characterized in that described one
Clamp angle is 45 °.
10. binary channels simultaneous phase shifting according to claim 7 interferes microscopic system, which is characterized in that after the conjunction beam
Light beam carry out making beam sizes and the first photoelectricity figure after light splitting obtains orthogonal two-way light beam by polarization splitting prism
As the photosurface size of sensor and the first electro-optical imaging sensors matches.
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