CN107462149A - A kind of phase shift interference measuring system and its wave plate phase shift method - Google Patents
A kind of phase shift interference measuring system and its wave plate phase shift method Download PDFInfo
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- CN107462149A CN107462149A CN201710533969.9A CN201710533969A CN107462149A CN 107462149 A CN107462149 A CN 107462149A CN 201710533969 A CN201710533969 A CN 201710533969A CN 107462149 A CN107462149 A CN 107462149A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
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- Instruments For Measurement Of Length By Optical Means (AREA)
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Abstract
The present invention relates to optical interferometry and digital hologram field of measuring technique, a kind of phase shift interference measuring system and its wave plate phase shift method are provided, build phase shift interference measuring system, including light source, optical filter, first half wave plate, polarization beam splitter, first beam splitter, quarter-wave plate, second half wave plate, first polarizer and the first monochromatic black white image sensor, angle by the fixation quarter-wave plate is constant, adjust the anglec of rotation of the second half wave plate, realize any phase shift, it is not limited to be combined with the phase shift algorithm of particular step size, it is quick realization to be combined with the phase shift algorithm of present any phase-shift phase, high-precision phase shift interference measurement；And the drive device that accurately need not can be moved or rotate, system are succinct, easy to operate；Second half wave plate is equivalent to phase-shifter, it is not necessary to it is placed in optical interference circuit, therefore system will not be influenceed by mechanical movement, the stability of a system is more preferable.
Description
Technical field
The present invention relates to optical interferometry and digital hologram field of measuring technique, and in particular to a kind of phase shift interference measurement
System and its wave plate phase shift method.
Background technology
Phase-shift interferometry is that one kind has the non-contact, whole audience, non-demolition, measurement is quick, measurement accuracy is high, can
The optical phase measurement technology for the features such as being measured to irregular object, optical surface detection, three-dimensional have been widely used in it
The fields such as topography measurement, imaging biological cells and digital hologram.In recent years, with computer technology and digital image processing techniques
Continuous development, make interferometry this using the technology of light wave as measurement scale and measuring basis obtain more widely should
With.
In the phase shift interference measurement of reality, the phase displacement error of phase-shifter and mechanical shock etc. can all directly affect phase
Measurement accuracy.Therefore, the Stability and veracity of phase-shift phase plays vital effect in phase shift interference measurement.Traditional
Time domain phase shifting method mainly includes：Piezoelectric ceramics (PZT) method, moving grating method, stretch light nanofarads, liquid crystal phase shift method, polarization
Phase shift method, air phase shift method etc..But these methods all have the following disadvantages：(1) can accurately be moved due to needing
Or the drive device of rotation, therefore systematic comparison is complicated；(2) phase-shifter is required for being placed in optical interference circuit, therefore system is held
It is vulnerable to the influence of mechanical movement, the stability of a system is poor；(3) although traditional wave plate phase shift method can realize simple phase shift,
But some special phase-shift values can only be obtained, any phase shift can not be realized, therefore can only be combined and make with some specific algorithms
With precision and application are limited.
The content of the invention
The problem of existing for prior art, the present invention provide a kind of phase shift interference measuring system and its wave plate phase shift side
Method, combination is simple, easy to operate and stably, effectively solves phase shift in single channel and multichannel phase shift interference measuring system
Problem, realize simple, quick, high-precision, stable phase shift.
To achieve these goals, the present invention adopts the following technical scheme that：
A kind of phase shift interference measuring system, including light source, optical filter, the first half wave plate, polarization beam splitter,
One beam splitter, quarter-wave plate, the second half wave plate, the first polarizer and the first monochromatic black white image sensor, institute
The light that light source is sent is stated after the optical filter and the first half wave plate into the polarization beam splitter to be divided into
Light beam and the second beam light, the optical path direction of the light beam are provided with the first plane mirror and the first microcobjective,
The optical path direction of the second beam light is provided with the second plane mirror and the second microcobjective, and object under test is positioned over described
It is anti-by first plane mirror and second plane mirror between two plane mirrors and second microcobjective
The light penetrated enters first beam splitter after first microcobjective and second microcobjective respectively, and passes through institute
Enter first polarizer after stating quarter-wave plate and the second half wave plate, by the described first monochromatic artwork master
As sensor gathers.
Further, first polarizer and the first monochromatic black white image sensor are arranged at the light beam
On optical path direction, the first monochromatic black white image sensor is used to gather from the light beam of the first polarizer outgoing
Optical signal, the second polarizer and the second monochromatic black white image sensor are additionally provided with the optical path direction of the second beam light, it is described
Second monochromatic black white image sensor is used for the optical signal for gathering the second beam light from second polarizer outgoing.
Further, the polarization direction setting at 45 ° of first polarizer and second polarizer.
A kind of wave plate phase shift method of phase shift interference measuring system, including：
Step 1：Build above-mentioned phase shift interference measuring system；
Step 2：The optical filter and the first half wave plate in regulating step one, to adjust contrast；
Step 3：The angle of the fixed quarter-wave plate is constant, adjusts the rotation of the second half wave plate
Angle, to realize any phase shift.
Further, using the radiation direction that light source is sent as z-axis direction, then x-axis direction or y-axis direction are mutually hung down with z-axis direction
Directly, the fast axle of quarter-wave plate described in step 1 and x-axis or y-axis are at 45 °.
Further, the anglec of rotation of the second half wave plate is adjusted in step 3 to realize the specific of any phase shift
Method is：
The reference light and object light of interferometer are respectively a pair of orthogonal polarised light of polarization direction in the horizontal and vertical directions,
Phase difference isTheir Jones vector E1And E2Respectively
Direction is shaken thoroughly in 45 ° of the first polarizer or the Jones matrix of the second polarizer, four point at 45 ° with x-axis of fast axle
One of wave plate Jones matrix, and fast axle is respectively into the Jones matrix of θ half wave plate with x-axis：
Then reference light, object light are by the quarter-wave plate, the second half wave plate and first polarization
The Jones vector of emergent light is expressed as after piece or second polarizer：
The light intensity I of the interference pattern finally formed on image device is：
Wherein symbol * represents conjugation, and e is natural constant, and i is imaginary unit, A1, A2It is shaking for reference light and object light respectively
Width, from above formula (4) as can be seen that the light intensity that certain in interference field is put, is not only differed with positionIt is relevant, also with it is described
The placed angle θ of second half wave plate is relevant, therefore, changes placed angle when rotating the second half wave plate
When, interference fringe light and shade changes.
Further, phase-shift phase is 4 times of the second half wave plate anglec of rotation.
Beneficial effects of the present invention：
The phase shifting method of phase shift interference measuring system of the present invention can realize any phase shift, be not limited to and particular step size
Phase shift algorithm combines, and can be combined with the phase shift algorithm of present any phase-shift phase and realize that quick, high-precision phase shift interference is surveyed
Amount；And the drive device that accurately need not can be moved or rotate, system are succinct, easy to operate；Second half ripple
Piece is equivalent to phase-shifter, it is not necessary to it is placed in optical interference circuit, therefore system will not be influenceed by mechanical movement, system is stable
Property is more preferable.
Brief description of the drawings
Fig. 1 is a kind of structural representation for binary channels simultaneous phase shifting interference system that first embodiment of the invention provides；
Fig. 2 is a kind of structural representation for single channel phase shift interference system that second embodiment of the invention provides；
Fig. 3 is the width phase shifting interference gathered during second embodiment of the invention experiment measurement；
Fig. 4 is that phase-shift phase distribution corresponding to the 37 width phase shifting interferences gathered during second embodiment of the invention experiment measurement is bent
Line；
It is 1-light source, 2-optical filter, the 3-the first half wave plate, 4-polarization beam splitter, 5-the first flat in figure
Face speculum, the 6-the second plane mirror, 7-object under test, the 8-the second microcobjective, the 9-the first microcobjective, 10-the
One beam splitter, 11-quarter-wave plate, the 12-the second half wave plate, the 13-the second beam splitter, the 14-the first polarizer,
15-the second polarizer, the 16-the first monochromatic black white image sensor, the 17-the second monochromatic black white image sensor, 101-light
Source, 102-optical filter, the 103-the first half wave plate, 104-polarization beam splitter, the 105-the first plane mirror,
106-the second plane mirror, 107-object under test, the 108-the second microcobjective, the 109-the first microcobjective, 110-the
One beam splitter, 111-quarter-wave plate, the 112-the second half wave plate, the 113-the first polarizer, the 114-the first list
Color black white image sensor.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation describes, it is clear that described embodiment is only the part of the embodiment of the present invention, rather than whole embodiments.Base
Embodiment in the present invention, those of ordinary skill in the art obtained under the premise of creative work is not made it is all its
His embodiment, belongs to the scope of protection of the invention.
Such as Fig. 1, first embodiment of the invention provides binary channels simultaneous phase shifting interferometer measuration system, including light source 1, optical filter
2nd, the first half wave plate 3, polarization beam splitter 4, the first beam splitter 10, quarter-wave plate 11, the second half ripple
The beam splitter 13 of piece 12 and second, the light that light source 1 is sent enter polarization spectro member after the half wave plate 3 of optical filter 2 and first
Part 4, incident light are decomposed into P polarization light and S-polarization light by polarization beam splitter 4, and first is provided with the optical path direction of P polarization light
The microcobjective 9 of plane mirror 5 and first, it is micro- that the second plane mirror 6 and second is provided with the optical path direction of S-polarization light
Object lens 8, object under test 7 are placed between the second plane mirror 6 and the second microcobjective 8, and P polarization light is through the first plane reflection
Mirror 5 reflects and enters the first beam splitter 10 after the first microcobjective 9, and S-polarization light reflects and passed through through the second plane mirror 6
Enter the first beam splitter 10 after crossing the microcobjective 8 of object under test 7 and second, then P polarization light and S-polarization light pass through a quarter
Enter the second beam splitter 13 after the half wave plate 12 of wave plate 11 and second, it is inclined that first is provided with the optical path direction of P polarization light
Shaken 14 and first monochromatic black white image sensor 16 of piece, and the second polarizer 15 and second is provided with the optical path direction of S-polarization light
Monochromatic black white image sensor 17, the P that the first monochromatic black white image sensor 16 is used for collection from the outgoing of the first polarizer 14 are inclined
Shake the optical signal of light, and the second monochromatic black white image sensor 17 is used for the light for gathering the S-polarization light from the outgoing of the second polarizer 15
Signal.
In the present embodiment, the light source 1 is the He-Ne lasers that a wavelength is 632.8nm, and the optical filter 2 is
Neutral-density filter.
Binary channels simultaneous phase shifting interferometer measuration system of the present invention can be achieved to appoint by rotating the second half wave plate 12
Meaning phase shift.
In the present embodiment, using the radiation direction that light source 1 is sent as z-axis direction, x-axis direction or y-axis direction and z-axis direction
Perpendicular, then the fast axle of quarter-wave plate 11 is at 45 ° with x or y.
First polarizer 14 is identical with the parameter of the second polarizer 15.In the present embodiment, the first polarizer 14 and second
The polarization direction setting at 45 ° of polarizer 15.
First monochromatic black white image sensor 16 is identical with the specification of the second monochromatic black white image sensor 17.
Such as Fig. 2, second embodiment of the invention provides single channel phase shift interference measuring system, including light source 101, optical filter
102nd, the first half wave plate 103, polarization beam splitter 104, the first beam splitter 110, quarter-wave plate the 111, the 2nd 2
/ mono- wave plate 112, the first polarizer 113 and the first monochromatic black white image sensor 114.The light that light source 101 is sent is through filtering
Enter polarization beam splitter 104 after the half wave plate 103 of piece 102 and first, incident light is decomposed into by polarization beam splitter 104
P polarization light and S-polarization light, the first plane mirror 105 and the first microcobjective 109 are provided with the optical path direction of P polarization light,
The second plane mirror 106 is provided with the optical path direction of S-polarization light and the second microcobjective 108, object under test 107 are placed on
Between second plane mirror 106 and the second microcobjective 108, P polarization light reflects through the first plane mirror 105 and by the
Enter the first beam splitter 110 after one microcobjective 109, S-polarization light reflects through the second plane mirror 106 and passes through object under test
107 and second enter the first beam splitter 110 after microcobjective 108, and then P polarization light and S-polarization light pass through quarter-wave plate
111 and second enter the first polarizer 113 after half wave plate 112, and are adopted by the first monochromatic black white image sensor 114
Collection, the first monochromatic black white image sensor 114 are used for the optical signal for gathering the P polarization light from the outgoing of the first polarizer 113.
In the present embodiment, the He-Ne lasers that the light source 101 is 632.8nm for a wavelength, the optical filter 2
For neutral-density filter.
Any phase can be achieved by rotating the second half wave plate 112 in single channel phase shift interference measuring system of the present invention
Move.
In the present embodiment, using the radiation direction that light source 101 is sent as z-axis direction, x-axis direction or y-axis direction and z-axis side
To perpendicular, then the fast axle of quarter-wave plate 111 is at 45 ° with x or y.
The present invention also provides a kind of wave plate phase shift method of phase shift interference measuring system, including：
Step 1：Build phase shift interference measuring system as shown in Figure 1 or 2；
Step 2：By the optical filter 2,102 in regulating step one and the first half wave plate 3,103, with regulation pair
Degree of ratio；
Step 3：The angle of fixed quarter-wave plate 11,111 is constant, the second half wave plate 12,112 of regulation
The anglec of rotation, to realize any phase shift.
Specifically, the fast axle of quarter-wave plate 11,111 should be at 45 ° with the x-axis in diagram or y-axis in step 1.
Specifically, the polarization direction of the first polarizer 14 and the second polarizer 15 is at 45 ° in first embodiment step 1
Set.
In the present invention, any phase is realized by adjusting the anglec of rotation of the second half wave plate 12,112 in step 3
The specific method of shifting is：
The reference light and object light of interferometer are respectively a pair of orthogonal polarised light of polarization direction in the horizontal and vertical directions,
Phase difference isTheir Jones vector E1And E2Respectively
The saturating direction that shakes is at 45 ° in 45 ° of the first polarizer 14 or the Jones matrix of the second polarizer 15, fast axle and x-axis
The Jones matrix of quarter-wave plate 11, and fast axle are distinguished with x-axis into the Jones matrix of θ the second half wave plate 12
For：
Then reference light, object light pass through quarter-wave plate 11, the second half wave plate 12 and the first polarizer 14 or the
The Jones vector of emergent light is expressed as after two polarizers 15：
The light intensity I of the interference pattern finally formed on image device is：
Wherein symbol * represents conjugation, and e is natural constant, and i is imaginary unit, A1, A2It is shaking for reference light and object light respectively
Width, from above formula (4) as can be seen that the light intensity that certain in interference field is put, is not only differed with positionIt is relevant, also with second
The placed angle θ of half wave plate 12 is relevant, therefore, when rotating the second half wave plate 12 change placed angle, does
Striped light and shade is related to change.Here the second half wave plate 12 is equivalent to time domain phase-shifter, and phase-shift phase is the two or two/
4 times of the one wave plate anglec of rotation.
In order to further prove the practicality of the inventive method, the present invention is using second embodiment measurement as shown in Figure 2
Light path system carries out experiment measurement.Keep fast axle and the x directions of quarter-wave plate 111 at 45 °, be spaced 10 ° to rotate second
Half wave plate 112, until rotate a circle 360 °, while interference pattern is gathered come corresponding using CCD, finally using it is improved most
The method (AIA) that a young waiter in a wineshop or an inn multiplies iteration calculates the phase-shift phase of this 37 width interference pattern, wherein a width phase shifting interference such as Fig. 3 institutes gathered
Show, phase-shift phase distribution curve is as shown in Figure 4 corresponding to 37 width.From the result in Fig. 4 can be seen that by rotation the two or two/
One wave plate 112 can realize any phase shift of system, and phase-shift phase is 4 times of the anglec of rotation of the second half wave plate 112.
The above embodiments are merely illustrative of the technical solutions of the present invention and it is unrestricted, although with reference to preferred embodiment to this hair
It is bright to be described in detail, it will be appreciated by those skilled in the art that technical scheme can be modified or waited
With replacing, without departing from the objective and scope of the technical program, it all should cover in scope of the presently claimed invention.
Claims (7)
- A kind of 1. phase shift interference measuring system, it is characterised in that including：Light source, optical filter, the first half wave plate, polarization Beam splitter, the first beam splitter, quarter-wave plate, the second half wave plate, the first polarizer and the first monochromatic artwork master As sensor, the light that the light source is sent enters the polarization spectro after the optical filter and the first half wave plate Element is divided into light beam and the second beam light, and the optical path direction of the light beam is provided with the first plane mirror and first Microcobjective, the optical path direction of the second beam light is provided with the second plane mirror and the second microcobjective, object under test are put It is placed between second plane mirror and second microcobjective, by first plane mirror and described second flat The light of face speculum reflection enters first beam splitting after first microcobjective and second microcobjective respectively Mirror, and enter first polarizer after the quarter-wave plate and the second half wave plate, by described One monochromatic black white image sensor collection.
- 2. phase shift interference measuring system according to claim 1, it is characterised in that：First polarizer and described first Monochromatic black white image sensor is arranged on the optical path direction of the light beam, and the first monochromatic black white image sensor is used Optical signal in collection from the light beam of the first polarizer outgoing, the is additionally provided with the optical path direction of the second beam light Two polarizers and the second monochromatic black white image sensor, the second monochromatic black white image sensor are used to gather from described second The optical signal of second beam light of polarizer outgoing.
- 3. phase shift interference measuring system according to claim 2, it is characterised in that：First polarizer and described second The polarization direction setting at 45 ° of polarizer.
- A kind of 4. wave plate phase shift method of phase shift interference measuring system, it is characterised in that including：Step 1：Build phase shift interference measuring system as claimed any one in claims 1 to 3；Step 2：The optical filter and the first half wave plate in regulating step one, to adjust contrast；Step 3：The angle of the fixed quarter-wave plate is constant, adjusts the anglec of rotation of the second half wave plate, To realize any phase shift.
- 5. the wave plate phase shift method of phase shift interference measuring system according to claim 4, it is characterised in that：Sent with light source Radiation direction be z-axis direction, then x-axis direction or y-axis direction and z-axis direction are perpendicular, quarter-wave described in step 1 The fast axle of piece and x-axis or y-axis are at 45 °.
- 6. the wave plate phase shift method of phase shift interference measuring system according to claim 4, it is characterised in that：Adjusted in step 3 Save the anglec of rotation of the second half wave plate using realize the specific method of any phase shift as：The reference light and object light of interferometer are respectively a pair of orthogonal polarised light of polarization direction in the horizontal and vertical directions, phase Difference isTheir Jones vector E1And E2RespectivelyDirection is shaken thoroughly in 45 ° of the first polarizer or the Jones matrix of the second polarizer, fast axle and x-axis a quarter at 45 ° The Jones matrix of wave plate, and fast axle is respectively into the Jones matrix of θ half wave plate with x-axis：<mrow> <mi>P</mi> <mrow> <mo>(</mo> <mi>&pi;</mi> <mo>/</mo> <mn>4</mn> <mo>)</mo> </mrow> <mo>=</mo> <mfenced open = "[" close = "]"> <mtable> <mtr> <mtd> <mrow> <mn>1</mn> <mo>/</mo> <mn>2</mn> </mrow> </mtd> <mtd> <mrow> <mn>1</mn> <mo>/</mo> <mn>2</mn> </mrow> </mtd> </mtr> <mtr> <mtd> <mrow> <mn>1</mn> <mo>/</mo> <mn>2</mn> </mrow> </mtd> <mtd> <mrow> <mn>1</mn> <mo>/</mo> <mn>2</mn> </mrow> </mtd> </mtr> </mtable> </mfenced> </mrow><mrow> <mi>W</mi> <mrow> <mo>(</mo> <mi>&pi;</mi> <mo>/</mo> <mn>2</mn> <mo>,</mo> <mi>&pi;</mi> <mo>/</mo> <mn>4</mn> <mo>)</mo> </mrow> <mo>=</mo> <mfrac> <mn>1</mn> <mn>2</mn> </mfrac> <mfenced open = "[" close = "]"> <mtable> <mtr> <mtd> <mrow> <mn>1</mn> <mo>+</mo> <mi>i</mi> </mrow> </mtd> <mtd> <mrow> <mn>1</mn> <mo>-</mo> <mi>i</mi> </mrow> </mtd> </mtr> <mtr> <mtd> <mrow> <mn>1</mn> <mo>-</mo> <mi>i</mi> </mrow> </mtd> <mtd> <mrow> <mn>1</mn> <mo>+</mo> <mi>i</mi> </mrow> </mtd> </mtr> </mtable> </mfenced> </mrow> 1<mrow> <mi>W</mi> <mrow> <mo>(</mo> <mi>&pi;</mi> <mo>,</mo> <mi>&theta;</mi> <mo>)</mo> </mrow> <mo>=</mo> <mfenced open = "[" close = "]"> <mtable> <mtr> <mtd> <mrow> <msup> <mi>cos</mi> <mn>2</mn> </msup> <mi>&theta;</mi> <mo>+</mo> <msup> <mi>sin</mi> <mn>2</mn> </msup> <msup> <mi>&theta;e</mi> <mrow> <mi>i</mi> <mi>&pi;</mi> </mrow> </msup> </mrow> </mtd> <mtd> <mrow> <mfrac> <mn>1</mn> <mn>2</mn> </mfrac> <mi>sin</mi> <mn>2</mn> <mi>&theta;</mi> <mrow> <mo>(</mo> <mn>1</mn> <mo>-</mo> <msup> <mi>e</mi> <mrow> <mi>i</mi> <mi>&pi;</mi> </mrow> </msup> <mo>)</mo> </mrow> </mrow> </mtd> </mtr> <mtr> <mtd> <mrow> <mfrac> <mn>1</mn> <mn>2</mn> </mfrac> <mi>sin</mi> <mn>2</mn> <mi>&theta;</mi> <mrow> <mo>(</mo> <mn>1</mn> <mo>-</mo> <msup> <mi>e</mi> <mrow> <mi>i</mi> <mi>&pi;</mi> </mrow> </msup> <mo>)</mo> </mrow> </mrow> </mtd> <mtd> <mrow> <msup> <mi>sin</mi> <mn>2</mn> </msup> <mi>&theta;</mi> <mo>+</mo> <msup> <mi>cos</mi> <mn>2</mn> </msup> <msup> <mi>&theta;e</mi> <mrow> <mi>i</mi> <mi>&pi;</mi> </mrow> </msup> </mrow> </mtd> </mtr> </mtable> </mfenced> <mo>-</mo> <mo>-</mo> <mo>-</mo> <mrow> <mo>(</mo> <mn>2</mn> <mo>)</mo> </mrow> </mrow>Then reference light, object light by the quarter-wave plate, the second half wave plate and first polarizer or The Jones vector of emergent light is expressed as after second polarizer：The light intensity I of the interference pattern finally formed on image device is：Wherein symbol * represents conjugation, and e is natural constant, and i is imaginary unit, A1, A2It is reference light and the amplitude of object light respectively, from Above formula (4) not only differs as can be seen that the light intensity that certain in interference field is put with positionIt is relevant, also with described second The placed angle θ of half wave plate is relevant, therefore, when rotating the second half wave plate change placed angle, does Striped light and shade is related to change.
- 7. the wave plate phase shift method of phase shift interference measuring system according to claim 4, it is characterised in that：Phase-shift phase is institute State the second half wave plate anglec of rotation 4 times.
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| CN109186764A (en) * | 2018-09-11 | 2019-01-11 | 天津大学 | A kind of acousto-optic modulation phase conjugation method for realizing scattering medium internal focus |
| CN109470173A (en) * | 2018-12-29 | 2019-03-15 | 华南师范大学 | A kind of binary channels simultaneous phase shifting interference microscopic system |
| CN110186388A (en) * | 2019-05-13 | 2019-08-30 | 天津大学 | Synchronization phase shift measurement system and method based on white light interference spectrum |
| CN112945083A (en) * | 2021-01-29 | 2021-06-11 | 中国科学院长春光学精密机械与物理研究所 | Parallel phase shift digital holographic microscopic imaging system with optical fiber interconnection |
| CN113405489A (en) * | 2021-08-19 | 2021-09-17 | 南京施密特光学仪器有限公司 | Method for inhibiting wave plate delay error interference in dynamic interferometer |
| CN113899305A (en) * | 2021-09-30 | 2022-01-07 | 广东技术师范大学 | Improved phase shift phase measurement method and system |
| CN114200723A (en) * | 2021-10-29 | 2022-03-18 | 华南师范大学 | Liquid crystal variable phase delay device without transverse deviation of light beam |
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