CN109230317A - A kind of transhipment cabin for semiconductor substrate storage transport - Google Patents
A kind of transhipment cabin for semiconductor substrate storage transport Download PDFInfo
- Publication number
- CN109230317A CN109230317A CN201811119002.7A CN201811119002A CN109230317A CN 109230317 A CN109230317 A CN 109230317A CN 201811119002 A CN201811119002 A CN 201811119002A CN 109230317 A CN109230317 A CN 109230317A
- Authority
- CN
- China
- Prior art keywords
- cabin
- rotating turret
- placing
- semiconductor substrate
- bar shaped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 64
- 239000004065 semiconductor Substances 0.000 title claims abstract description 27
- 238000003860 storage Methods 0.000 title claims abstract description 17
- 238000001514 detection method Methods 0.000 claims abstract description 39
- 238000007789 sealing Methods 0.000 claims abstract description 22
- 230000007246 mechanism Effects 0.000 claims description 28
- 239000004020 conductor Substances 0.000 claims description 5
- 238000012360 testing method Methods 0.000 claims description 3
- 238000009434 installation Methods 0.000 claims description 2
- 239000002245 particle Substances 0.000 abstract description 15
- 238000011109 contamination Methods 0.000 abstract description 7
- 238000000034 method Methods 0.000 abstract description 5
- 238000012546 transfer Methods 0.000 abstract description 5
- 230000008569 process Effects 0.000 abstract description 3
- 239000010410 layer Substances 0.000 description 25
- 108010066057 cabin-1 Proteins 0.000 description 18
- 230000005540 biological transmission Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000005611 electricity Effects 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000001727 in vivo Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G35/00—Mechanical conveyors not otherwise provided for
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
- B65G43/08—Control devices operated by article or material being fed, conveyed or discharged
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2203/00—Indexing code relating to control or detection of the articles or the load carriers during conveying
- B65G2203/04—Detection means
- B65G2203/042—Sensors
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Ventilation (AREA)
Abstract
The invention discloses a kind of transhipment cabins for semiconductor substrate storage transport, its key points of the technical solution are that including the cabin of upper end opening, it is in symmetrically to be respectively arranged with mutually matched apparatus for placing on the narrow side in cabin intracorporal two, apparatus for placing presents lower vertical direction in cabin and is evenly arranged at least one layer, air curtain sealing device is provided at the upper end opening of cabin, controller and external power supply port are provided on the outside of cabin, the first detection device is provided on apparatus for placing, second detection device is provided at the upper end opening of cabin, first detection device and second detection device are electrically connected the input terminal of controller, the output end of controller is electrically connected the control terminal of apparatus for placing and air curtain sealing device.The present invention, which can reduce, there is particle contamination in substrate transport process, and can be improved substrate transfer efficiency.
Description
Technical field
The present invention relates to a kind of semiconductor fabrication techniques fields, more specifically, it is related to one kind for semiconductor substrate
Store the transhipment cabin of transport.
Background technique
Current semiconductor production factory, in semiconductor substrate transport process, by the way that conveyer belt is arranged, and in conveyer belt
Upper setting rack, then rests on semiconductor substrate on rack, is transferred to next step processing workshop by conveyer belt, but
Be current rack it is mostly single layer, so that each rack can only place a piece of semiconductor substrate, causes transmission belt substrate
Under transfer efficiency, and rack is mostly open type, in semiconductor field, needs to guarantee the degree of purity of substrate surface, avoids base
Plate standard adheres to molecule, causes particle contamination to substrate, so that the rack of open type is easy during transporting substrate
It improves substrate surface particle contamination and asks condition.
Summary of the invention
In view of the deficiencies of the prior art, the present invention intends to provide one kind to can reduce in substrate transport process
There is particle contamination, and can be improved the transhipment cabin for semiconductor substrate storage transport of substrate transfer efficiency.
To achieve the above object, the present invention provides the following technical scheme that a kind of store transport for semiconductor substrate
Transport cabin, the cabin including upper end opening, in being symmetrically respectively arranged with mutually matched put on the narrow side in the cabin intracorporal two
Device is set, the apparatus for placing presents lower vertical direction in cabin and is evenly arranged at least one layer, and the upper end of the cabin is opened
Air curtain sealing device is provided at mouthful, is provided with controller and external power supply port on the outside of the cabin, on the apparatus for placing
Be provided with the first detection device, be provided with second detection device at the upper end opening of the cabin, first detection device and
Second detection device is electrically connected the input terminal of controller, and the output end of the controller is electrically connected apparatus for placing and air curtain
The control terminal of sealing device, the input terminal of the external power supply port connect external alternating current, the output end point of external power supply port
Not Lian Jie controller, apparatus for placing, air curtain sealing device, the first detection device and second detection device power end.
By using above-mentioned technical proposal, controller, apparatus for placing, air curtain sealing device, the first detection device and second
Detection device connects electricity operation, and when cabin is located at the first processing workshop, substrate is stored into cabin, in substrate by mechanically grabbing
When taking the opening for being moved to cabin, second detection device detects substrate position information, and controller controls air curtain sealing device
Out of service, substrate is moved in cabin by cabin opening, when in cabin, intracorporal apparatus for placing is multilayer, is put by next layer
It sets the first detection device on device and detects on the apparatus for placing of this layer whether have substrate, so that the opening of controller apparatus for placing
Or closure, when next layer of apparatus for placing is to place substrate, controller controls upper one layer of apparatus for placing and opens, and facilitates substrate in cabin
It is moved down on next layer of apparatus for placing in vivo, after next layer of apparatus for placing is placed with substrate, upper one layer of apparatus for placing is closed
It closes, substrate is placed on the apparatus for placing of this layer.
The present invention is further arranged to: the apparatus for placing includes mounting base, the first rotating turret, the second rotating turret and miniature
Electric cylinder, is symmetrical set that there are two through slots in the mounting base, and first rotating turret is rotatably installed in a through slot, described
Second rotating turret is rotatably installed in another through slot, and first rotating turret and the second rotating turret are towards towards one on the outside of cabin
Miniature electric cylinder is set between end, is rotatablely connected between telescopic rod one end and the first rotating turret of the miniature electric cylinder, it is described
One end of the cylinder body of miniature electric cylinder towards the second rotating turret is provided with connecting rod, and the connecting rod and the rotation of the second rotating turret connect
It connects.
By using above-mentioned technical proposal, the operation of miniature electric cylinder is controlled by controller, enables miniature electric cylinder
It enough does elongation and shortens operation, after the elongation of miniature electric cylinder, be able to drive the first rotating turret and the synchronization of the second rotating turret is being pacified
It is run on dress seat, so that the first rotating turret is set in parallel with the second rotating turret, and the other side apparatus for placing of corresponding matching
Identical operation is done, so that substrate is facilitated to can be placed on the rotating turret after cooperating, it, can after the shortening of miniature electric cylinder
It drives the first rotating turret and the synchronization of the second rotating turret to rotate in mounting base, and forms Figure of eight structure, while corresponding matching is another
Side apparatus for placing also does identical operation, so that forming larger space between mutually matched rotating turret, facilitates substrate that can wear
If crossing the rotating turret at this, it is placed on the mutually matched apparatus for placing of lower layer.
The present invention is further arranged to: first detection device includes pressure sensor and the first infrared tube sensing
The transmitting terminal of device, the first infrared tube sensor is arranged in a mounting base, the receiving end of the first infrared tube sensor
Be arranged in in another mounting base of above-mentioned mounting base corresponding matching, it is horizontal between the transmitting terminal and receiving end of the first infrared tube
Setting pairing, there are two the pressure sensor settings, and two pressure sensors are separately positioned on to corresponding first rotating turret
On the second rotating turret, and pressure sensor is located at the first rotating turret towards at the intracorporal one end top surface edge in cabin, and second turn
Pressure sensor setting identical as the pressure sensor on the first rotating turret in moving frame, the signal output end of the first infrared tube
The input terminal of controller is all connected with the signal output end of pressure sensor.
By using above-mentioned technical proposal, position is generated when substrate is moved at upper one layer of the first infrared tube sensor
It sets detection signal and is input to controller, next layer of pressure sensor information is then detected by controller, in next stressor layer
When sensor is light condition, the miniature electric cylinder that controller controls one layer shortens, so that upper one layer of apparatus for placing is opened,
Substrate is facilitated to pass through the apparatus for placing at this, after controller detects next layer of pressure sensor to be placed with substrate, control
Device control miniature electric cylinder processed is in elongation state, and substrate can be placed on the apparatus for placing at this.
The present invention is further arranged to: the air curtain sealing device includes mutually matched wind pushing mechanism and air suction mechanism,
The upper end opening side of cabin is arranged in the wind pushing mechanism, and the upper end opening other side of cabin is arranged in air suction mechanism, air-supply
Mechanism and air suction mechanism are equipped in opposite direction, are formed at the upper end opening of cabin and are formed between wind pushing mechanism and air suction mechanism
Seal air curtain.
By using above-mentioned technical proposal, wind pushing mechanism generates uniform plane air-flow, is moved to air suction mechanism, suction ventilator
Structure absorbs air-flow, in wind pushing mechanism and air suction mechanism continuous service, so that shape between wind pushing mechanism and air suction mechanism
At uniform air curtain wall, air curtain sealing is carried out to the opening of cabin, external environment is isolated with progress air curtain inside cabin, is avoided
External fines enter in cabin, cause particle contamination to the intracorporal substrate in cabin.
The present invention is further arranged to: the wind pushing mechanism includes air curtain, filter, bar shaped air outlet, the filtering
Device is arranged on the air inlet of air curtain, and the upper end opening side of cabin, and bar shaped air outlet is arranged in the bar shaped air outlet
Length it is identical as a side length of the upper end opening of cabin, the air outlet of air curtain is connected to bar shaped air outlet, the air curtain
The output end of the power end connection external power supply port of machine, the output end of the control terminal connection controller of air curtain.
By using above-mentioned technical proposal, after the air of external environment is filtered by filter, formed into air curtain
Even air-flow, blown out by bar shaped air outlet to be formed be used to form sealing air curtain uniform air flow can by the setting of filter
It reduces when the generation of particle and air curtain air-flow are located at cabin opening in air curtain and air-flow loss occurs, particle is caused to enter in cabin
The case where.
The present invention is further arranged to: the air suction mechanism includes bar shaped air inlet, suction ventilator and bumping bag, the bar shaped
The side that bar shaped air outlet is corresponded in the upper end opening of cabin is arranged in air inlet, and the air inlet connection bar shaped of the suction ventilator is inhaled
Air port, the outlet of suction ventilator connect bumping bag, the output end of the power end connection external power supply port of the suction ventilator, suction ventilator
Control terminal connection controller output end.
By using above-mentioned technical proposal, air curtain air-flow is passed sequentially through through bar shaped air inlet, suction ventilator, bumping bag, item
The setting of shape air inlet can be collected air curtain air-flow, can maintain, pass through to the flat shape of air curtain air-flow
The air suction function of suction ventilator is arranged, and can be avoided the case where air curtain air-flow weakens at air inlet, passes through the setting of bumping bag, energy
It is enough that reduction operation is carried out to the air that suction ventilator is blown out, it avoids the formation of air blast and unnecessary influence is caused on workshop condition.
The present invention is further arranged to: the second detection device is the second infrared tube sensor, the second infrared tube
The transmitting terminal of sensor is arranged on the uper side surface of bar shaped air outlet, and the receiving end of the second infrared tube sensor is arranged in item
On the uper side surface of shape air inlet, transmitting terminal and the receiving end level of the second infrared tube are equipped with.
By using above-mentioned technical proposal, when substrate is located at cabin upper opening portion, the detection of the second infrared tube sensor
To location information, controller can control suction ventilator and air curtain is out of service.
The present invention is further arranged to: the testing agency upper surface of the pressure sensor is provided with super soft type rubber pad.
By using above-mentioned technical proposal, when substrate is placed on super soft type rubber pad, it can be avoided substrate and place
The contact of device, the case where causing substrate to wear.
The present invention is further arranged to: the lightning shape notch after the section of the through slot is combined in vertical slots and skewed slot is set
It sets, by the stretching operation of miniature electric cylinder between first rotating turret and the second rotating turret, so that the first rotating turret and the
It is symmetrical arranged on through slot in Parallel Symmetric setting or eight words between two rotating turrets.
By using above-mentioned technical proposal, rotating turret rotates in mounting base, can be in parastate between rotating turret
When, by the rotation of the boundary rotation-limited frame of vertical slots, when between rotating turret in eight word states, pass through the bevel edge side of skewed slot
The rotation of boundary position rotating turret.
The present invention is further arranged to: the external power supply port is slidingtype connection sheet, is pacified on outer conveyor belt frame body
Conductor rail equipped with connection alternating current, slidingtype connection sheet contact at conductive track surface.
, by the cooperation of conductor rail and connection sheet, it can reduce and lead when cabin is mobile by using above-mentioned technical proposal
Line connect the harness damage situation caused by conducting wire is external and long-time use occurred with cabin.
The present invention has an advantage that being coupled by cabin and multilayer apparatus for placing, so that can put in cabin
Storage multi-lager semiconductor substrate is set, so that improving disposable substrate transfer efficiency can by the setting of air curtain sealing device
Contacting between isolation cabin and external environment avoids the particle in transmission process in environment and enters in cabin to substrate surface
The case where causing particle contamination passes through the setting of the first detection device, energy after being provided at least two layers of apparatus for placing in cabin
Enough to carry out substrate placement detection to multilayer apparatus for placing, when lower layer's apparatus for placing is to be placed with substrate, controller can be controlled
Upper layer apparatus for placing is device for opening, and semiconductor substrate is facilitated to be displaced downwardly on lower layer's apparatus for placing in cabin, passes through the second inspection
The setting for surveying device, when having detected manipulator close to cabin opening, controller can control air curtain and suction ventilator stops
Work, avoids cabin opening from air-flow occur and quickly flows, and causes the movement of fine particle to the substrate of disengaging cabin opening
The case where causing particle scuffing or particle to adhere to.
Detailed description of the invention
Fig. 1 is the structural diagram of the present invention；
Fig. 2 is system block diagram of the invention；
Fig. 3 is main perspective view of the invention；
Fig. 4 is top view of the invention；
Fig. 5 is perspective view and structure demonstration graph at apparatus for placing of the invention (dashed circle is substrate schematic diagram).
In figure: 1, cabin；2, controller；3, external power supply port；4, mounting base；5, the first rotating turret；6, the second rotation
Frame；7, miniature electric cylinder；8, through slot；9, connecting rod；10, pressure sensor；11, the first infrared tube sensor；12, air curtain
Machine；13, filter；14, bar shaped air outlet；15, bar shaped air inlet；16, suction ventilator；17, bumping bag；18, the second infrared tube
Sensor；19, super soft type rubber pad；20, conductor rail.
Specific embodiment
Shown in 5, a kind of transhipment cabin for semiconductor substrate storage transport of the present embodiment, including upper end
The cabin 1 of opening, it is described to put in being symmetrically respectively arranged with mutually matched apparatus for placing on two narrow sides in the cabin 1
Set device presented in cabin 1 lower vertical direction be evenly arranged with it is at least one layer of (when apparatus for placing is provided with multilayer, the bottom
Apparatus for placing on pressure sensor 10 is only installed, reduce the setting of infrared tube sensor and miniature electric cylinder 7, rotating turret it
Between be always in parallel closed state), be provided with air curtain sealing device at the upper end opening of the cabin 1, set on the outside of the cabin 1
It is equipped with communication connection between controller 2(controller and workshop external control server, external control server can receive cabin
On controller information, and the manipulator for crawl substrate is accurately manipulated) and external power supply port 3, the placement
It is provided with the first detection device on device, second detection device, first detection are provided at the upper end opening of the cabin 1
Device and second detection device are electrically connected the input terminal of controller 2, and the output end of the controller 2, which is electrically connected, places dress
The control terminal with air curtain sealing device is set, the input terminal of the external power supply port 3 connects external alternating current, external power supply port 3
Output end be separately connected controller 2, apparatus for placing, air curtain sealing device, the first detection device and second detection device electricity
Source.
The apparatus for placing includes mounting base 4, the first rotating turret 5, the second rotating turret 6 and miniature electric cylinder 7, the installation
It is symmetrical set on seat 4 there are two through slot 8, first rotating turret 5 is rotatably installed in a through slot 8, second rotating turret 6
It is rotatably installed in another through slot 8, first rotating turret 5 and the second rotating turret 6 are towards between one end towards 1 outside of cabin
Miniature electric cylinder 7 is set, is rotatablely connected between telescopic rod one end of the miniature electric cylinder 7 and the first rotating turret 5, it is described miniature
One end of the cylinder body of electric cylinder 7 towards the second rotating turret 6 is provided with connecting rod 9, and the connecting rod 9 and the second rotating turret 6 rotate
Connection.
First detection device includes pressure sensor 10 and the first infrared tube sensor 11, and described first is infrared right
The transmitting terminal of tube sensor 11 is arranged in a mounting base 4, the receiving end setting of the first infrared tube sensor 11 with it is above-mentioned
In another mounting base 4 of 4 corresponding matching of mounting base, pairing is horizontally disposed between the transmitting terminal and receiving end of the first infrared tube,
There are two the pressure sensor 10 settings, and two pressure sensors 10 are separately positioned on to corresponding first rotating turret 5 and the
On two rotating turrets 6, and pressure sensor 10 is located at the first rotating turret 5 towards at one end top surface edge in cabin 1, and second turn
The setting identical as the pressure sensor 10 on the first rotating turret 5 of pressure sensor 10 in moving frame 6, the signal of the first infrared tube
The signal output end of output end and pressure sensor 10 is all connected with the input terminal of controller 2.
The air curtain sealing device includes 16 structure of mutually matched wind pushing mechanism and suction ventilator, and the wind pushing mechanism setting exists
The upper end opening other side of cabin 1, wind pushing mechanism and suction ventilator 16 is arranged in the upper end opening side of cabin 1,16 structure of suction ventilator
Structure is equipped in opposite direction, is formed at the upper end opening of cabin 1 between 16 structure of wind pushing mechanism and suction ventilator and is formed sealing air curtain.
The wind pushing mechanism includes air curtain 12, filter 13, bar shaped air outlet 14, and the filter 13 is arranged in air curtain
On the air inlet of machine 12, the upper end opening side of cabin 1, and the length of bar shaped air outlet 14 is arranged in the bar shaped air outlet 14
Identical as a side length of the upper end opening of cabin 1, the air outlet of air curtain 12 is connected to bar shaped air outlet 14, the air curtain
The output end of 12 power end connection external power supply port 3, the output end of the control terminal connection controller 2 of air curtain 12.
16 structure of suction ventilator includes bar shaped air inlet 15, suction ventilator 16 and bumping bag 17, and the bar shaped air inlet 15 is set
The side that bar shaped air outlet 14 is corresponded in the upper end opening of cabin 1 is set, the air inlet of the suction ventilator 16 is connected to bar shaped air draught
Mouth 15, the outlet of suction ventilator 16 connect bumping bag 17, the output of the power end connection external power supply port 3 of the suction ventilator 16
End, the output end of the control terminal connection controller 2 of suction ventilator 16.
The second detection device is the second infrared tube sensor 18, and the transmitting terminal of the second infrared tube sensor 18 is set
It sets on the uper side surface of bar shaped air outlet 14, bar shaped air inlet 15 is arranged in the receiving end of the second infrared tube sensor 18
On uper side surface, transmitting terminal and the receiving end level of the second infrared tube are equipped with.
The testing agency upper surface of the pressure sensor 10 is provided with super soft type rubber pad 19.
Lightning shape notch after the section of the through slot 8 is combined in vertical slots and skewed slot is arranged, 5 He of the first rotating turret
Pass through the stretching operation of miniature electric cylinder 7 between second rotating turret 6, so that logical between the first rotating turret 5 and the second rotating turret 6
It is symmetrical arranged on slot 8 in Parallel Symmetric setting or eight words.
The external power supply port 3 is slidingtype connection sheet, and the conduction of connection alternating current is equipped on outer conveyor belt frame body
Rail 20, slidingtype connection sheet contact at 20 surface of conductor rail, and above-mentioned electric connection mode is similar to the contact connectio mode of electric car.
By using above-mentioned technical proposal, by being coupled for cabin 1 and multilayer apparatus for placing, so that energy in cabin 1
It is enough to place storage multi-lager semiconductor substrate, so that improve disposable substrate transfer efficiency, by the setting of air curtain sealing device,
Contacting between cabin 1 and external environment can be isolated, avoid the particle in transmission process in environment and enter in cabin 1 to base
Plate surface causes the case where particle contamination, after at least two layers of apparatus for placing is provided in cabin 1, passes through the first detection device
Setting can carry out substrate to multilayer apparatus for placing and place detection, when lower layer's apparatus for placing is to be placed with substrate, controller 2
It is device for opening that upper layer apparatus for placing, which can be controlled, and semiconductor substrate is facilitated to be displaced downwardly on lower layer's apparatus for placing in cabin 1, is led to
The setting for crossing second detection device, when having detected manipulator close to 1 opening of cabin, controller 2 can control air curtain 12
It stops working with suction ventilator 16, avoids 1 opening of cabin from air-flow occur and quickly flow, cause the movement of fine particle to disengaging cabin
The case where substrate of 1 opening of body causes particle scuffing or particle to adhere to.
The above is only a preferred embodiment of the present invention, protection scope of the present invention is not limited merely to above-mentioned implementation
Example, all technical solutions belonged under thinking of the present invention all belong to the scope of protection of the present invention.It should be pointed out that for the art
Those of ordinary skill for, several improvements and modifications without departing from the principles of the present invention, these improvements and modifications
It should be regarded as protection scope of the present invention.
Claims (10)
1. a kind of transhipment cabin for semiconductor substrate storage transport, it is characterised in that: the cabin including upper end opening, the cabin
In mutually matched apparatus for placing is symmetrically respectively arranged on intracorporal two narrow side, the apparatus for placing is in cabin in up and down
Vertical direction is evenly arranged at least one layer, is provided with air curtain sealing device at the upper end opening of the cabin, outside the cabin
Side is provided with controller and external power supply port, and the first detection device, the upper end of the cabin are provided on the apparatus for placing
Opening is provided with second detection device, and first detection device and second detection device are electrically connected the input of controller
End, the output end of the controller are electrically connected the control terminal of apparatus for placing and air curtain sealing device, the external power supply port
Input terminal connect external alternating current, the output end of external power supply port is separately connected controller, apparatus for placing, air curtain sealing dress
It sets, the power end of the first detection device and second detection device.
2. a kind of transhipment cabin for semiconductor substrate storage transport according to claim 1, it is characterised in that: described to put
Setting device includes mounting base, the first rotating turret, the second rotating turret and miniature electric cylinder, has been symmetrical set two in the mounting base
A through slot, first rotating turret are rotatably installed in a through slot, and second rotating turret is rotatably installed in another through slot, institute
The first rotating turret and the second rotating turret direction are stated towards setting miniature electric cylinder, the miniature electric between one end on the outside of cabin
It is rotatablely connected between telescopic rod one end and the first rotating turret of cylinder, the one of cylinder body the second rotating turret of direction of the miniature electric cylinder
End is provided with connecting rod, and the connecting rod and the second rotating turret are rotatablely connected.
3. a kind of transhipment cabin for semiconductor substrate storage transport according to claim 2, it is characterised in that: described the
One detection device includes pressure sensor and the first infrared tube sensor, and the transmitting terminal of the first infrared tube sensor is set
It sets in a mounting base, another installation with above-mentioned mounting base corresponding matching is arranged in the receiving end of the first infrared tube sensor
On seat, pairing is horizontally disposed between the transmitting terminal and receiving end of the first infrared tube, there are two the pressure sensor settings, and two
A pressure sensor is separately positioned on on corresponding first rotating turret and the second rotating turret, and pressure sensor is located at first turn
Moving frame is towards the pressure on pressure sensor and the first rotating turret at the intracorporal one end top surface edge in cabin, on the second rotating turret
The identical setting of sensor, the signal output end of the first infrared tube and the signal output end of pressure sensor are all connected with controller
Input terminal.
4. a kind of transhipment cabin for semiconductor substrate storage transport according to claim 1, it is characterised in that: the wind
Curtain sealing device includes mutually matched wind pushing mechanism and air suction mechanism, and the upper end opening one of cabin is arranged in the wind pushing mechanism
The upper end opening other side of cabin is arranged in side, air suction mechanism, and wind pushing mechanism and air suction mechanism are equipped in opposite direction, pressure fan
It is formed between structure and air suction mechanism at the upper end opening of cabin and forms sealing air curtain.
5. a kind of transhipment cabin for semiconductor substrate storage transport according to claim 4, it is characterised in that: described to send
Blower structure includes air curtain, filter, bar shaped air outlet, and the filter is arranged on the air inlet of air curtain, the bar shaped
The upper end opening side of cabin, and a side length phase of the length of bar shaped air outlet and the upper end opening of cabin is arranged in air outlet
Together, the air outlet of air curtain is connected to bar shaped air outlet, the output end of the power end connection external power supply port of the air curtain,
The output end of the control terminal connection controller of air curtain.
6. a kind of transhipment cabin for semiconductor substrate storage transport according to claim 5, it is characterised in that: the suction
Blower structure includes bar shaped air inlet, suction ventilator and bumping bag, and the bar shaped air inlet is arranged in the upper end opening of cabin corresponding
The side of bar shaped air outlet, the air inlet of the suction ventilator are connected to bar shaped air inlet, and the outlet of suction ventilator connects bumping bag, described
The output end of the power end connection external power supply port of suction ventilator, the output end of the control terminal connection controller of suction ventilator.
7. a kind of transhipment cabin for semiconductor substrate storage transport according to claim 6, it is characterised in that: described the
Two detection devices are the second infrared tube sensor, and the upper of bar shaped air outlet is arranged in the transmitting terminal of the second infrared tube sensor
On side surface, the receiving end of the second infrared tube sensor is arranged on the uper side surface of bar shaped air inlet, the second infrared tube
Transmitting terminal be equipped with receiving end level.
8. a kind of transhipment cabin for semiconductor substrate storage transport according to claim 3, it is characterised in that: the pressure
The testing agency upper surface of force snesor is provided with super soft type rubber pad.
9. a kind of transhipment cabin for semiconductor substrate storage transport according to claim 2, it is characterised in that: described
Lightning shape notch after the section of through slot is combined in vertical slots and skewed slot is arranged, between first rotating turret and the second rotating turret
By the stretching operation of miniature electric cylinder, so that being arranged on through slot in Parallel Symmetric between the first rotating turret and the second rotating turret
Or eight word be symmetrical arranged.
10. a kind of transhipment cabin for semiconductor substrate storage transport according to claim 1, it is characterised in that: described
External power supply port is slidingtype connection sheet, and the conductor rail of connection alternating current, slidingtype connection are equipped on outer conveyor belt frame body
Piece contacts at conductive track surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811119002.7A CN109230317B (en) | 2018-09-25 | 2018-09-25 | A transport cabin for semiconductor substrate storage transportation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811119002.7A CN109230317B (en) | 2018-09-25 | 2018-09-25 | A transport cabin for semiconductor substrate storage transportation |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109230317A true CN109230317A (en) | 2019-01-18 |
| CN109230317B CN109230317B (en) | 2020-12-25 |
Family
ID=65056967
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811119002.7A Active CN109230317B (en) | 2018-09-25 | 2018-09-25 | A transport cabin for semiconductor substrate storage transportation |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109230317B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110697252A (en) * | 2019-10-11 | 2020-01-17 | 王华珍 | Storage and transportation device for semiconductor wafers and using method thereof |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6265843A (en) * | 1985-09-12 | 1987-03-25 | Denkoo:Kk | Board material take-out apparatus |
| CN1968872A (en) * | 2004-04-18 | 2007-05-23 | 安堤格里斯公司 | Substrate container with fluid-sealing flow passageway |
| CN102543803A (en) * | 2011-08-04 | 2012-07-04 | 上海华力微电子有限公司 | Novel film magazine with opening front end |
| CN103693343A (en) * | 2014-01-02 | 2014-04-02 | 北京七星华创电子股份有限公司 | Multi-tiered storage stand device |
| CN205668812U (en) * | 2016-05-31 | 2016-11-02 | 安吉正源塑木装饰材料有限公司 | A kind of storage device for elevating hopper being carried out feeding |
| CN207030507U (en) * | 2017-06-12 | 2018-02-23 | 江苏中兴环保股份有限公司 | A kind of discharging feed bin sealing structure for preventing that dust disperses during grab bucket discharging |
-
2018
- 2018-09-25 CN CN201811119002.7A patent/CN109230317B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6265843A (en) * | 1985-09-12 | 1987-03-25 | Denkoo:Kk | Board material take-out apparatus |
| CN1968872A (en) * | 2004-04-18 | 2007-05-23 | 安堤格里斯公司 | Substrate container with fluid-sealing flow passageway |
| CN102543803A (en) * | 2011-08-04 | 2012-07-04 | 上海华力微电子有限公司 | Novel film magazine with opening front end |
| CN103693343A (en) * | 2014-01-02 | 2014-04-02 | 北京七星华创电子股份有限公司 | Multi-tiered storage stand device |
| CN205668812U (en) * | 2016-05-31 | 2016-11-02 | 安吉正源塑木装饰材料有限公司 | A kind of storage device for elevating hopper being carried out feeding |
| CN207030507U (en) * | 2017-06-12 | 2018-02-23 | 江苏中兴环保股份有限公司 | A kind of discharging feed bin sealing structure for preventing that dust disperses during grab bucket discharging |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110697252A (en) * | 2019-10-11 | 2020-01-17 | 王华珍 | Storage and transportation device for semiconductor wafers and using method thereof |
| CN110697252B (en) * | 2019-10-11 | 2021-09-14 | 杭州翔毅科技有限公司 | Storage and transportation device for semiconductor wafers and using method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109230317B (en) | 2020-12-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN113731833B (en) | Automatic material flattening equipment that receives of lead frame | |
| JP4093376B2 (en) | Suction integrated SMIF system | |
| CN112224879A (en) | Lamp bead assembly conveying and transferring mechanism capable of achieving visual detection | |
| CN106087015A (en) | A kind of electroplating device automatic board descending machine | |
| WO2016068491A1 (en) | Device for transferring cell jig of tabbing device | |
| CN206742271U (en) | A kind of sorting system of solar silicon wafers | |
| CN205952959U (en) | Automatic turnover mechanism | |
| JP2010512292A (en) | Environmental isolation system for flat panel displays | |
| CN206711882U (en) | A kind of grasping mechanism of solar silicon wafers | |
| CN108344915A (en) | A kind of end cap assembled power supply universal test device | |
| CN206521246U (en) | Vacuum cup aluminium rolls up carrier | |
| CN106992128A (en) | A kind of surface defect detection apparatus of solar silicon wafers | |
| CN109230317A (en) | A kind of transhipment cabin for semiconductor substrate storage transport | |
| CN105416668A (en) | Product operation system | |
| CN103017540A (en) | Automatic crucible dumping and cleaning system for electronic kilns | |
| CN109759344A (en) | A kind of x-ray detection device detecting battery positive/negative plate degree of registration | |
| CN111252544B (en) | Special industrial robot for carrying warehouse goods | |
| CN106971957A (en) | A kind of surface defect screening installation of solar silicon wafers | |
| CN105692204A (en) | Pneumatic pipeline conveying system and method | |
| CN208844174U (en) | A kind of vacuum coating equipment coating operation platform improvement structure | |
| CN209321935U (en) | A kind of detection machine automatic loading and unloading device | |
| CN105347038B (en) | Centralized control pipe transmission system and its transmission method | |
| CN109455513A (en) | A kind of detection machine automatic loading and unloading device | |
| CN209239051U (en) | A kind of metal powder injection molding product after-treatment device | |
| CN109841706A (en) | Solar silicon wafers tear piece laminating method and imbrication general assembly line open |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| TA01 | Transfer of patent application right | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20201111 Address after: 221000 LOFTC Building of Hanyuan Avenue West Green Business City, Yunlong District, Xuzhou City, Jiangsu Province Applicant after: XUZHOU XINNANHU TECHNOLOGY Co.,Ltd. Address before: Eight groups of 448000 forest town of Qinglong village Jingmen city Hubei province Duodao district group Applicant before: Liu Linqin |
|
| TA01 | Transfer of patent application right | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20201130 Address after: 518172 building 401, 501, No.1, No.1, No.1, No.1, No.1, No.4, NO.201, No.301, No.5, No.501, 601, No.12, No.4, no.101-501, No.5, no.101-301, No.5 building, No.4 building, No.401 and No.501, No.12 building, Baoan community, Yuanshan Street Applicant after: Yibai Technology (Shenzhen) Co.,Ltd. Address before: 221000 LOFTC Building of Hanyuan Avenue West Green Business City, Yunlong District, Xuzhou City, Jiangsu Province Applicant before: XUZHOU XINNANHU TECHNOLOGY Co.,Ltd. |
|
| GR01 | Patent grant | ||
| GR01 | Patent grant |