CN109230317B - A transport cabin for semiconductor substrate storage transportation - Google Patents
A transport cabin for semiconductor substrate storage transportation Download PDFInfo
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- CN109230317B CN109230317B CN201811119002.7A CN201811119002A CN109230317B CN 109230317 B CN109230317 B CN 109230317B CN 201811119002 A CN201811119002 A CN 201811119002A CN 109230317 B CN109230317 B CN 109230317B
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- cabin body
- pressure sensor
- rotating turret
- detection device
- rotating frame
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G35/00—Mechanical conveyors not otherwise provided for
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
- B65G43/08—Control devices operated by article or material being fed, conveyed or discharged
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2203/00—Indexing code relating to control or detection of the articles or the load carriers during conveying
- B65G2203/04—Detection means
- B65G2203/042—Sensors
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
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Abstract
The invention discloses a transfer cabin for storage and transportation of semiconductor substrates, which is characterized by comprising a cabin body with an opening at the upper end, wherein placing devices which are matched with each other are symmetrically and respectively arranged on two narrow side surfaces in the cabin body, at least one layer of the placing devices is uniformly arranged in the cabin body in the vertical direction, the opening at the upper end of the cabin body is provided with an air curtain sealing device, the outer side of the cabin body is provided with a controller and an external power supply port, the placing devices are provided with a first detection device, the opening at the upper end of the cabin body is provided with a second detection device, the first detection device and the second detection device are both electrically connected with the input end of the controller, and the output end of the controller is electrically connected with the placing devices and the control end. The invention can reduce particle pollution in the substrate transferring process and improve the substrate transferring efficiency.
Description
Technical Field
The invention relates to the technical field of semiconductor production, in particular to a transfer cabin for semiconductor substrate storage and transportation.
Background
Present semiconductor manufacturing factory, in semiconductor substrate transportation process, through setting up the conveyer belt, and set up the rack on the conveyer belt, then stand semiconductor substrate on the rack, shift to workshop on next step through the conveyer belt, but present rack is mostly the individual layer, make every rack can only place a slice semiconductor substrate, it is underneath to have caused conveyer belt substrate transport efficiency, and the rack is mostly the open-type, in the semiconductor field, need guarantee the purity on base plate surface, avoid the base plate standard to adhere to tiny granule, cause particle pollution to the base plate, make the rack of open-type easily improve base plate surface particle pollution and ask the situation at the in-process of transporting the base plate.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide a transfer cabin for semiconductor substrate storage and transportation, which can reduce particle pollution in the substrate transfer process and improve the substrate transfer efficiency.
In order to achieve the purpose, the invention provides the following technical scheme: the utility model provides a transport cabin for semiconductor substrate stores transportation, includes the upper end open-ended cabin body, it is the symmetry respectively to be provided with the placer of mutually supporting on the internal two narrow sides in cabin, the vertical direction evenly is provided with at least one deck about placer is in the cabin body, the upper end opening part of the cabin body is provided with wind curtain sealing device, the external side of cabin is provided with controller and external power supply port, the last first detection device that is provided with of placer, the upper end opening part of the cabin body is provided with the second detection device, the input of the equal electric connection controller of first detection device and second detection device, the output electric connection placer of controller and the control end of wind curtain sealing device, external commercial power is connected to the input of external power supply port, and the output of external power supply port is connected controller, placer respectively, The air curtain sealing device, the first detection device and the second detection device.
By adopting the technical scheme, the controller, the placing device, the air curtain sealing device, the first detection device and the second detection device are electrically connected to operate, when the cabin body is positioned in the first processing workshop, the base plate is stored in the cabin body, when the base plate is mechanically grabbed and moved to the opening of the cabin body, the second detection device detects the position information of the base plate, the controller controls the air curtain sealing device to stop operating, the base plate is moved into the cabin body through the opening of the cabin body, when the placing devices in the cabin body are in multiple layers, the first detection device on the placing device on the next layer is used for detecting whether the base plate is arranged on the placing device on the layer, so that the placing device of the controller is opened or closed, when the placing device on the next layer is used for placing the base plate, the controller controls the placing device on the previous layer to be opened, the base plate is convenient to move downwards in the cabin body to the placing device, the placement device of the previous layer is closed and the substrate is placed on the placement device of this layer.
The invention is further configured to: the placing device comprises a mounting seat, a first rotating frame, a second rotating frame and a miniature electric cylinder, two through grooves are symmetrically formed in the mounting seat, the first rotating frame is rotatably installed in one through groove, the second rotating frame is rotatably installed in the other through groove, the miniature electric cylinder is arranged between one end of the first rotating frame and one end of the second rotating frame facing to the outer side of the cabin, one end of a telescopic rod of the miniature electric cylinder is rotatably connected with the first rotating frame, and one end of a cylinder body of the miniature electric cylinder facing to the second rotating frame is provided with a connecting rod which is rotatably connected with the second rotating frame.
Through adopting above-mentioned technical scheme, operation through the miniature electronic jar of controller control, make miniature electronic jar can do the extension and shorten the operation, after miniature electronic jar extension, can drive first rotating turret and second rotating turret and move on the mount pad in step, make first rotating turret and second rotating turret be parallel arrangement, and it also does the same operation to correspond complex opposite side placer, make things convenient for the base plate to place on the rotating turret after mutually supporting, shorten the back at miniature electronic jar, can drive first rotating turret and second rotating turret and rotate on the mount pad in step, and form eight word structure, it also does the same operation to correspond complex opposite side placer simultaneously, make and form great space between the rotating turret of mutually supporting, make things convenient for the base plate to wear to establish the rotating turret of this department, arrange in on the lower floor's placer of mutually supporting.
The invention is further configured to: first detection device includes pressure sensor and first infrared geminate transistors sensor, the transmitting terminal of first infrared geminate transistors sensor sets up on a mount pad, and the receiving terminal setting of first infrared geminate transistors sensor corresponds on another mount pad of complex with above-mentioned mount pad, and the level setting is paird between the transmitting terminal of first infrared geminate transistors and the receiving terminal, pressure sensor is provided with two, and two pressure sensor set up respectively on first rotating turret and the second rotating turret to corresponding, and pressure sensor is located first rotating turret towards one end upper surface edge in the cabin body, and pressure sensor on the second rotating turret and the same setting of pressure sensor on the first rotating turret, the signal output part of first infrared geminate transistors and the input of pressure sensor's signal output part all connection director.
Through adopting above-mentioned technical scheme, produce position detection signal and input the controller when the base plate moves the first infrared geminate transistor sensor department of last layer, then detect the pressure sensor information of next layer through the controller, when pressure sensor of next layer is idle state, the miniature electronic jar of last layer of controller control shortens, make the placer of last layer open, make things convenient for the placer of base plate through this department, after the controller detects the pressure sensor of next layer for placing the base plate, the miniature electronic jar of controller control is in the extension state, the placer of this department can be placed to the base plate on.
The invention is further configured to: the air curtain sealing device comprises an air supply mechanism and an air suction mechanism which are matched with each other, wherein the air supply mechanism is arranged on one side of an upper end opening of the cabin body, the air suction mechanism is arranged on the other side of the upper end opening of the cabin body, the air supply mechanism and the air suction mechanism are arranged in opposite matching mode, and a sealed air curtain is formed at the upper end opening of the cabin body between the air supply mechanism and the air suction mechanism.
Through adopting above-mentioned technical scheme, air supply mechanism produces even plane air current, moves to the mechanism that induced drafts, and the mechanism that induced drafts absorbs the air current, when air supply mechanism and the mechanism that induced drafts last the operation for form even wind curtain wall between air supply mechanism and the mechanism that induced drafts, it is sealed to carry out the wind curtain to the opening of the cabin body, carries out the wind curtain with external environment and the internal portion of cabin and keeps apart, avoids that outside small particle gets into the cabin internal, causes particle pollution to the internal base plate in cabin.
The invention is further configured to: air supply mechanism includes air curtain machine, filter, bar air outlet, the filter sets up on the air intake of air curtain machine, the bar air outlet sets up in the upper end opening one side of the cabin body, and the length of bar air outlet is the same with the upper end open-ended one side length of the cabin body, and the air outlet and the bar air outlet intercommunication of air curtain machine, the output of external power port is connected to the power end of air curtain machine, and the output of the control end connection director of air curtain machine.
Through adopting above-mentioned technical scheme, the air of external environment passes through the filter filtration back, gets into the air curtain machine and forms even air current, blows out the even air current that forms and be used for forming sealed air curtain through the bar air outlet, through the setting of filter, and the air current loss appears when can reducing the production of granule in the air curtain and air curtain air current and be located cabin body opening part, causes the granule to enter the internal condition in cabin.
The invention is further configured to: the air suction mechanism comprises a strip-shaped air suction opening, a suction fan and a buffer bag, wherein the strip-shaped air suction opening is arranged on one side of an upper end opening of the cabin body corresponding to the strip-shaped air outlet, the air suction opening of the suction fan is communicated with the strip-shaped air suction opening, an outlet of the suction fan is connected with the buffer bag, a power supply end of the suction fan is connected with an output end of an external power supply port, and a control end of the suction fan is connected with an output end of the controller.
Through adopting above-mentioned technical scheme, the air curtain air current loops through the bar inlet scoop, the suction fan, the buffer bag, the setting of bar inlet scoop can be collected the air curtain air current, it can maintain the plane shape of air curtain air current, the function setting of breathing in through the suction fan, can avoid the condition of air curtain air current in the weakening of inlet scoop department, through the setting of buffer bag, can carry out the weakening operation to the air that the suction fan blew off, avoid forming strong air current and cause unnecessary influence to workshop environment.
The invention is further configured to: the second detection device is a second infrared geminate transistor sensor, the transmitting end of the second infrared geminate transistor sensor is arranged on the upper side surface of the bar-shaped air outlet, the receiving end of the second infrared geminate transistor sensor is arranged on the upper side surface of the bar-shaped air suction opening, and the transmitting end and the receiving end of the second infrared geminate transistor are horizontally matched.
By adopting the technical scheme, when the base plate is positioned on the upper part of the opening of the cabin body, the second infrared geminate transistor sensor detects position information, and the controller can control the suction fan and the air curtain to stop running.
The invention is further configured to: and an ultra-soft rubber pad is arranged on the upper surface of the detection mechanism of the pressure sensor.
Through adopting above-mentioned technical scheme, when super gentle type rubber pad is placed to the base plate, can avoid base plate and placer's contact, cause the condition that wearing and tearing appear in the base plate.
The invention is further configured to: the section that leads to the groove be the lightning form notch setting after vertical groove and chute combine, through the flexible operation of miniature electronic jar between first rotating turret and the second rotating turret for be parallel symmetry setting or eight characters symmetry setting on leading to the groove between first rotating turret and the second rotating turret.
Through adopting above-mentioned technical scheme, the rotating turret rotates on the mount pad, can be between the rotating turret when parallel state, through the rotation of the spacing rotating turret in boundary of vertical groove, when being the splayed state between the rotating turret, the spacing rotating turret in hypotenuse boundary through the chute rotates.
The invention is further configured to: the external power supply port is a sliding connecting sheet, a conductor rail connected with commercial power is installed on the external conveyor belt frame body, and the sliding connecting sheet is abutted to the surface of the conductor rail.
By adopting the technical scheme, when the cabin body moves, the conducting wire damage conditions caused by external conducting wires and long-time use of the conducting wires connected with the cabin body can be reduced by matching the conducting rail with the connecting sheet.
The invention has the following advantages: the cabin body is matched with the multilayer placing devices to be installed, so that the cabin body can be internally provided with and store a plurality of layers of semiconductor substrates, the conveying efficiency of the disposable substrates is improved, the connection between the cabin body and the external environment can be isolated through the arrangement of the air curtain sealing device, the condition that particles in the environment enter the cabin body in the conveying process to cause particle pollution to the surfaces of the substrates is avoided, after at least two layers of placing devices are arranged in the cabin body, the multilayer placing devices can be subjected to substrate placing detection through the arrangement of the first detection device, when the lower layer placing device is used for placing the substrates, the controller can control the upper layer placing device to be an opening device, the semiconductor substrates can be conveniently moved downwards in the cabin body to the lower layer placing device, through the arrangement of the second detection device, when the manipulator controller can control the air curtain machine and the suction fan to stop working when the manipulator is detected to be close to the opening, the situation that the air flow at the opening of the cabin body flows fast to cause the movement of fine particles to scratch or attach the particles to the substrate passing in and out of the opening of the cabin body is avoided.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a block diagram of the system of the present invention;
FIG. 3 is a front perspective view of the present invention;
FIG. 4 is a top view of the present invention;
fig. 5 is a perspective view and a structural representation of the placement device of the present invention (the dashed circle is a schematic diagram of the substrate).
In the figure: 1. a cabin body; 2. a controller; 3. an external power supply port; 4. a mounting seat; 5. a first rotating frame; 6. a second rotating frame; 7. a miniature electric cylinder; 8. a through groove; 9. a connecting rod; 10. a pressure sensor; 11. a first infrared pair tube sensor; 12. an air curtain machine; 13. a filter; 14. a strip-shaped air outlet; 15. a strip-shaped air suction opening; 16. a suction fan; 17. a buffer bag; 18. a second infrared pair tube sensor; 19. an ultra-soft rubber pad; 20. and a conductive rail.
Detailed Description
Referring to fig. 1 to 5, the transfer cabin for semiconductor substrate storage and transportation of this embodiment includes a cabin body 1 with an upper end opening, two narrow side surfaces in the cabin body 1 are symmetrically provided with placing devices which are matched with each other, the placing devices are uniformly arranged in the cabin body 1 in an up-down vertical direction and at least one layer (when the placing devices are provided with multiple layers, only a pressure sensor 10 is arranged on the placing device at the bottommost layer, the arrangement of infrared pair tube sensors and a micro electric cylinder 7 is reduced, and the rotating frames are always in a parallel closed state), an air curtain sealing device is arranged at the upper end opening of the cabin body 1, a controller 2 (the controller is in communication connection with a workshop external control server, and the external control server can receive controller information on the cabin body and accurately control a manipulator for grabbing substrates) and an external power supply port 3, the utility model discloses a cabin, including placer, the last first detection device that is provided with of placer, the upper end opening part of the cabin body 1 is provided with the second detection device, the equal electric connection controller 2's of first detection device and second detection device input, the control end of controller 2's output electric connection placer and air curtain sealing device, outside commercial power is connected to external power port 3's input, and controller 2, placer, air curtain sealing device, first detection device and second detection device's power end is connected respectively to external power port 3's output.
The placing device comprises a mounting seat 4, a first rotating frame 5, a second rotating frame 6 and a miniature electric cylinder 7, two through grooves 8 are symmetrically formed in the mounting seat 4, the first rotating frame 5 is rotatably installed in one through groove 8, the second rotating frame 6 is rotatably installed in the other through groove 8, the miniature electric cylinder 7 is arranged between one end of the first rotating frame 5 and the one end of the second rotating frame 6 facing to the cabin body 1 outside, one end of a telescopic rod of the miniature electric cylinder 7 is rotatably connected with the first rotating frame 5, one end of a cylinder body of the miniature electric cylinder 7 facing to the second rotating frame 6 is provided with a connecting rod 9, and the connecting rod 9 is rotatably connected with the second rotating frame 6.
The first detection device comprises a pressure sensor 10 and a first infrared pair tube sensor 11, the transmitting end of the first infrared pair tube sensor 11 is arranged on one mounting seat 4, the receiving end of the first infrared pair tube sensor 11 is arranged on the other mounting seat 4 correspondingly matched with the mounting seat 4, the transmitting end and the receiving end of the first infrared pair tube are horizontally paired, the number of the pressure sensors 10 is two, the two pressure sensors 10 are respectively arranged on the corresponding first rotating frame 5 and the corresponding second rotating frame 6, and pressure sensor 10 is located first rotating turret 5 towards the one end upper surface edge in the cabin body 1, and pressure sensor 10 on the second rotating turret 6 is the same with pressure sensor 10 on the first rotating turret 5 and sets up, and the signal output part of first infrared geminate transistor and the signal output part of pressure sensor 10 all connect the input of controller 2.
The air curtain sealing device comprises an air supply mechanism and a suction fan 16 which are matched with each other, the air supply mechanism is arranged on one side of an upper end opening of the cabin body 1, the suction fan 16 is arranged on the other side of the upper end opening of the cabin body 1, the air supply mechanism and the suction fan 16 are arranged in opposite matching mode, and a sealed air curtain is formed at the upper end opening of the cabin body 1 between the air supply mechanism and the suction fan 16.
Air supply mechanism includes air curtain machine 12, filter 13, bar air outlet 14, filter 13 sets up on the air intake of air curtain machine 12, bar air outlet 14 sets up in the upper end opening one side of the cabin body 1, and the length of bar air outlet 14 is the same with the upper end open-ended one side length of the cabin body 1, and the air outlet and the bar air outlet 14 intercommunication of air curtain machine 12, the output of external power port 3 is connected to the power end of air curtain machine 12, and the output of controller 2 is connected to the control end of air curtain machine 12.
The suction fan 16 structure includes bar inlet scoop 15, suction fan 16 and buffer bag 17, bar inlet scoop 15 sets up the one side that corresponds bar air outlet 14 on the upper end opening of cabin body 1, the inlet scoop intercommunication bar inlet scoop 15 of suction fan 16, the exit linkage buffer bag 17 of suction fan 16, the output of external power source port 3 is connected to the power end of suction fan 16, and the output of controller 2 is connected to the control end of suction fan 16.
The second detection device is a second infrared geminate transistor sensor 18, the transmitting end of the second infrared geminate transistor sensor 18 is arranged on the upper side surface of the strip-shaped air outlet 14, the receiving end of the second infrared geminate transistor sensor 18 is arranged on the upper side surface of the strip-shaped air suction opening 15, and the transmitting end and the receiving end of the second infrared geminate transistor are horizontally matched.
The upper surface of the detection mechanism of the pressure sensor 10 is provided with an ultra-flexible rubber pad 19.
The section that leads to groove 8 is the lightning form notch setting after vertical groove and chute combine, through the flexible operation of miniature electronic jar 7 between first rotating turret 5 and the second rotating turret 6 for be parallel symmetry setting or eight characters symmetry setting on leading to groove 8 between first rotating turret 5 and the second rotating turret 6.
The external power supply port 3 is a sliding connecting piece, a conductor rail 20 connected with commercial power is installed on the external conveyor belt frame body, the sliding connecting piece props against the surface of the conductor rail 20, and the electric connection mode is similar to a contact connection mode of an electric car.
By adopting the technical scheme, the cabin body 1 can be used for placing and storing multiple layers of semiconductor substrates by matching and installing the cabin body 1 and the multiple layers of placing devices, so that the conveying efficiency of the disposable substrates is improved, the connection between the cabin body 1 and the external environment can be isolated by arranging the air curtain sealing device, the condition that particles in the environment enter the cabin body 1 to cause particle pollution to the surfaces of the substrates in the conveying process is avoided, after at least two layers of placing devices are arranged in the cabin body 1, the substrates can be placed and detected on the multiple layers of placing devices by arranging the first detecting device, when the substrates are placed on the lower layer of placing devices, the controller 2 can control the upper layer of placing devices to be an opening device, so that the semiconductor substrates can be conveniently moved downwards to the lower layer of placing devices in the cabin body 1, and when the mechanical hand is detected to be close to the opening of the cabin body 1 by arranging the second, the controller 2 can control the air curtain machine 12 and the suction fan 16 to stop working, so as to avoid the situation that the movement of fine particles causes particle scratch or particle attachment to the substrate passing in and out of the opening of the cabin body 1 due to the rapid flowing of air flow at the opening of the cabin body 1.
The above description is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above embodiments, and all technical solutions belonging to the idea of the present invention belong to the protection scope of the present invention. It should be noted that modifications and embellishments within the scope of the invention may occur to those skilled in the art without departing from the principle of the invention, and are considered to be within the scope of the invention.
Claims (4)
1. A transfer module for storage and transportation of semiconductor substrates, comprising: the device comprises a cabin body with an opening at the upper end, wherein two narrow side surfaces in the cabin body are symmetrically and respectively provided with placement devices which are matched with each other, the placement devices are uniformly arranged in the cabin body in the vertical direction, at least one layer is vertically arranged in the vertical direction, an air curtain sealing device is arranged at the opening at the upper end of the cabin body, a controller and an external power supply port are arranged at the outer side of the cabin body, a first detection device is arranged on the placement devices, a second detection device is arranged at the opening at the upper end of the cabin body, the first detection device and the second detection device are both electrically connected with the input end of the controller, the output end of the controller is electrically connected with the placement device and the control end of the air curtain sealing device, the input end of the external power supply port is connected with external commercial power, and the output end of the external power supply port is respectively connected with the power, the placing device comprises a mounting seat, a first rotating frame, a second rotating frame and a miniature electric cylinder, two through grooves are symmetrically formed in the mounting seat, the first rotating frame is rotatably installed in one through groove, the second rotating frame is rotatably installed in the other through groove, the miniature electric cylinder is arranged between one end of the first rotating frame and one end of the second rotating frame facing to the outer side of the cabin, one end of a telescopic rod of the miniature electric cylinder is rotatably connected with the first rotating frame, and one end of a cylinder body of the miniature electric cylinder facing to the second rotating frame is provided with a connecting rod which is rotatably connected with the second rotating frame.
2. A transport pod for storage and transportation of semiconductor substrates as recited in claim 1, wherein: first detection device includes pressure sensor and first infrared geminate transistors sensor, the transmitting terminal of first infrared geminate transistors sensor sets up on a mount pad, and the receiving terminal setting of first infrared geminate transistors sensor corresponds on another mount pad of complex with above-mentioned mount pad, and the level setting is paird between the transmitting terminal of first infrared geminate transistors and the receiving terminal, pressure sensor is provided with two, and two pressure sensor set up respectively on first rotating turret and the second rotating turret to corresponding, and pressure sensor is located first rotating turret towards one end upper surface edge in the cabin body, and pressure sensor on the second rotating turret and the same setting of pressure sensor on the first rotating turret, the signal output part of first infrared geminate transistors and the input of pressure sensor's signal output part all connection director.
3. A transport pod for storage and transportation of semiconductor substrates as recited in claim 2, wherein: and an ultra-soft rubber pad is arranged on the upper surface of the detection mechanism of the pressure sensor.
4. A transport pod for storage and transportation of semiconductor substrates as recited in claim 1, wherein: the section that leads to the groove be the lightning form notch setting after vertical groove and chute combine, through the flexible operation of miniature electronic jar between first rotating turret and the second rotating turret for be parallel symmetry setting or eight characters symmetry setting on leading to the groove between first rotating turret and the second rotating turret.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811119002.7A CN109230317B (en) | 2018-09-25 | 2018-09-25 | A transport cabin for semiconductor substrate storage transportation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811119002.7A CN109230317B (en) | 2018-09-25 | 2018-09-25 | A transport cabin for semiconductor substrate storage transportation |
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| CN109230317A CN109230317A (en) | 2019-01-18 |
| CN109230317B true CN109230317B (en) | 2020-12-25 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201811119002.7A Active CN109230317B (en) | 2018-09-25 | 2018-09-25 | A transport cabin for semiconductor substrate storage transportation |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110697252B (en) * | 2019-10-11 | 2021-09-14 | 杭州翔毅科技有限公司 | Storage and transportation device for semiconductor wafers and using method thereof |
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| CN102543803A (en) * | 2011-08-04 | 2012-07-04 | 上海华力微电子有限公司 | Novel film magazine with opening front end |
| CN103693343A (en) * | 2014-01-02 | 2014-04-02 | 北京七星华创电子股份有限公司 | Multi-tiered storage stand device |
| CN205668812U (en) * | 2016-05-31 | 2016-11-02 | 安吉正源塑木装饰材料有限公司 | A kind of storage device for elevating hopper being carried out feeding |
| CN207030507U (en) * | 2017-06-12 | 2018-02-23 | 江苏中兴环保股份有限公司 | A kind of discharging feed bin sealing structure for preventing that dust disperses during grab bucket discharging |
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2018
- 2018-09-25 CN CN201811119002.7A patent/CN109230317B/en active Active
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6265843A (en) * | 1985-09-12 | 1987-03-25 | Denkoo:Kk | Board material take-out apparatus |
| CN1968872A (en) * | 2004-04-18 | 2007-05-23 | 安堤格里斯公司 | Substrate container with fluid-sealing flow passageway |
| CN102543803A (en) * | 2011-08-04 | 2012-07-04 | 上海华力微电子有限公司 | Novel film magazine with opening front end |
| CN103693343A (en) * | 2014-01-02 | 2014-04-02 | 北京七星华创电子股份有限公司 | Multi-tiered storage stand device |
| CN205668812U (en) * | 2016-05-31 | 2016-11-02 | 安吉正源塑木装饰材料有限公司 | A kind of storage device for elevating hopper being carried out feeding |
| CN207030507U (en) * | 2017-06-12 | 2018-02-23 | 江苏中兴环保股份有限公司 | A kind of discharging feed bin sealing structure for preventing that dust disperses during grab bucket discharging |
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|---|---|
| CN109230317A (en) | 2019-01-18 |
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