CN109211804A - A kind of production method and device of self-assembly structure - Google Patents

A kind of production method and device of self-assembly structure Download PDF

Info

Publication number
CN109211804A
CN109211804A CN201811126741.9A CN201811126741A CN109211804A CN 109211804 A CN109211804 A CN 109211804A CN 201811126741 A CN201811126741 A CN 201811126741A CN 109211804 A CN109211804 A CN 109211804A
Authority
CN
China
Prior art keywords
substrate
region
assembly
self
flexible formwork
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201811126741.9A
Other languages
Chinese (zh)
Inventor
王艳艳
王爽
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tianjin University
Original Assignee
Tianjin University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tianjin University filed Critical Tianjin University
Priority to CN201811126741.9A priority Critical patent/CN109211804A/en
Publication of CN109211804A publication Critical patent/CN109211804A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N2021/258Surface plasmon spectroscopy, e.g. micro- or nanoparticles in suspension

Abstract

The embodiment of the invention discloses the production methods and device of a kind of self-assembly structure, comprising: A, obtains a substrate for being provided with hydrophilic region and hydrophobic region;B, colloidal nanoparticle solution is dropped in the substrate, so that nanoparticle forms self-assembled structures in the hydrophilic region.By upper, the application may be implemented to be precisely controlled self-assembly position, and simple to operation.

Description

A kind of production method and device of self-assembly structure
Technical field
The present invention relates to field of nanometer material technology, and in particular to a kind of production method and dress of self-assembly microarray It sets.
Background technique
Nanoparticle (such as gold nanorods) is adsorbed on the substance meeting at its interface to the absorption quite sensitive of small molecule around The variation for causing its surface plasma resonance frequency is embodied in the change of the optical signals such as light absorption and Surface enhanced Raman spectroscopy Change, therefore the unmarked highly sensitive inspection to molecule may be implemented using nanoparticle as a kind of sensing element building sensor It surveys, has played important function in small molecule detection field.Small molecule is detected there are mainly two types of in the way of by nanoparticle, it is a kind of It is to be detected under solution environmental, one is nanoparticle is assembled on interface to detect.It is detected under solution environmental Directly completed using colloidal nanoparticles, it is convenient and easy without doing more processing to nanoparticle, but received in solution state Rice corpuscles is easy to be influenced by outside environmental elements and coagulation occurs, and can not be widely used in Molecular Detection.
By nanoparticle be assembled on interface carry out Molecular Detection it is possible to prevente effectively from nanoparticle coagulation bring influence, It is solvent evaporated method that nanoparticle is fixed on to the method for being easiest to implement on interface at present, and solvent evaporated method is to receive colloid Rice corpuscles solution drips in solid substrate, and as solvent evaporates, nanoparticle, which stays in, completes self assembly in substrate.But it utilizes molten Nanoparticle is assembled in substrate the assembled position that can not be precisely controlled nanoparticle by agent evaporation.
Therefore, the production method and device of a kind of self-assembly structure are needed, at present to realize to nanoparticle The accurate control of self assembly position.
Summary of the invention
In view of this, the main purpose of the present invention is to provide a kind of production method of self-assembly structure and Device, to realize the accurate control to self-assembly position.
The present invention provides a kind of production method of self-assembly structure, comprising:
A, the substrate that a surface is provided with hydrophilic region and hydrophobic region is obtained;
B, colloidal nanoparticle solution is dropped in the substrate, so that nanoparticle is formed in the hydrophilic region from group Assembling structure.
By upper, nanoparticle is evaporated self assembly in the hydrophilic region, forms self-assembled structures, may be implemented to receiving The accurate control of rice corpuscles self assembly position.
Preferably, the step A, comprising:
A1, the hydrophobic Flexible formwork assembly that a bottom is plane is obtained;
A2, recess or hollowed out area are etched with by Soft lithograph technology in the Flexible formwork assembly bottom;
It A3, using a hydrophilic upper surface is planar solid material as substrate, and by the upper surface of the substrate and described After the lower surface of Flexible formwork assembly passes through plasma cleaning, the bottom of the Flexible formwork assembly is bonded with the upper surface of the substrate;
A4, the Flexible formwork assembly and the substrate after fitting are separated so that the upper surface of the substrate formed it is hydrophilic Region and hydrophobic region.
By upper, interfacial wettability modification is carried out to upper surface of substrate through the above steps, to obtain surface Substrate with hydrophilic region and hydrophobic region, and the process is simple and convenient.And template bottom can be with by the processing of Soft lithograph Obtain recess or the hollowed out area of the very small dimensions such as micron, nanometer be micro-.The corresponding region is hydrophilic region in substrate, namely The self assembly region of nanoparticle advantageously allows nanoparticle self assembly in the region of the very small dimensions such as micron, micro-nano. Above-mentioned substrate can be glass, be also possible to other solid materials.
Preferably, the recess of the Flexible formwork assembly bottom or hollowed out area are as follows:
The single region being arranged according to specified size;
The multiple area arrays of the same size being arranged according to specified size;Or
The multiple area arrays of different sizes being arranged according to specified size.
By upper, the shape in region can be any shape, such as round, and rectangular, diamond shape etc. is also possible to single region Either area array.Size also can according to need setting.
Preferably, the step B further include:
According to the micro-nano self-assembled structures of required acquisition, regulate and control the temperature of the environment in the self-assembly region And the concentration of humidity and the nano-particle solution.
Temperature and humidity and the nanoparticle by upper, by the environment in the regulation self-assembly region The concentration of sub- solution, the micro-nano self-assembled structures of available required different shape.
The application also provides a kind of producing device of self-assembly structure, comprising:
One surface has the substrate of hydrophilic region and hydrophobic region;
One drops to colloidal nanoparticle solution the structure in the substrate.
By upper, by above-mentioned apparatus, nanoparticle forms self-assembled structures in the hydrophilic region, may be implemented to nanometer The accurate control of particle self assembly position.
Preferably, the producing device, the surface have the production component packet of the substrate of hydrophilic region and hydrophobic region It includes:
One bottom is the hydrophobic Flexible formwork assembly of plane;Wherein, the Flexible formwork assembly bottom etching has recess or hollow out Region;
One upper surface is the hydrophilic substrate of planar solid material;
One plasma surface processing instrument, for passing through the lower surface of the upper surface of the substrate and the Flexible formwork assembly Ion Cleaning so that the bottom of the Flexible formwork assembly be temporarily bonded with the upper surface of the substrate and when the two is separated with So that the surface of the substrate has hydrophilic region and hydrophobic region.
By upper, by above structure, when substrate and Flexible formwork assembly fit together, recess or hollowed out area in template with Substrate does not contact, and after separating (tear template after), can remain mould material with without recess or the substrate contacted without hollowed out area The nano-level thin-membrane of formation, this film is hydrophobic, therefore hydrophobic region and hydrophilic region are produced in substrate, and simple Fast.And recess or vacancy section of the template bottom by the very small dimensions such as the available micron of processing of Soft lithograph, nanometer be micro- Domain.The corresponding region is the self assembly region of hydrophilic region namely nanoparticle in substrate, advantageously allows nanoparticle and exists Self assembly in micron, the region of very small dimensions such as nanometer is micro-.
Preferably, the recess of the Flexible formwork assembly bottom or hollowed out area are as follows:
The single region being arranged according to specified size;
The multiple area arrays of the same size being arranged according to specified size;Or
The multiple area arrays of different sizes being arranged according to specified size.
By upper, the shape in region can be any shape, such as round, and rectangular, diamond shape etc. is also possible to single region Either area array.Size also can according to need setting.
Preferably, when the area array is the array being made of border circular areas, the diameter of the border circular areas is extremely Few includes but is not limited to following first, 10 μm, 15 μm, 20 μm or 25 μm.
By upper, the size of the diameter of border circular areas is not limited to above-mentioned diameter, needs others to size according to specific The adjustment done is ok, all within the scope of protection of this application.
Preferably, the producing device, further includes:
Temperature humidity adjuster, the temperature and humidity of the environment in the self assembly region for regulating and controlling the nanoparticle.
Temperature and humidity and the nanoparticle by upper, by the environment in the regulation self-assembly region The concentration of sub- solution, the micro-nano self-assembled structures of available required different shape.
Preferably, the Flexible formwork assembly is by polydimethylsiloxane or polymetylmethacrylate material system At Flexible formwork assembly.
By upper, soft etching processing, this Shen is may be implemented in polydimethylsiloxane or polymetylmethacrylate Flexible formwork assembly please can also be any template material for being able to carry out soft etching processing.
In conclusion the production method and producing device of the self-assembly structure of the application may be implemented to nanometer The accurate control of particle self assembly position, and the self-assembly structure of uniform required size can be generated, and The self-assembly structure of microsize can be generated.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is this hair Bright some embodiments for those of ordinary skill in the art without any creative labor, can be with It obtains other drawings based on these drawings.
Fig. 1 is a kind of flow diagram of the production method of self-assembly structure of the embodiment of the present invention;
Fig. 2 is colloidal nanoparticle solution is dropped to surface being provided with hydrophilic region and hydrophobic region for the embodiment of the present invention Substrate schematic diagram;
Fig. 3 is that the nanoparticle of the embodiment of the present invention (is provided with hydrophilic region and dredges after interfacial wettability modification Water area) planar substrates over-assemble complete schematic diagram;
Fig. 4 is a kind of structural schematic diagram of the producing device of self-assembly structure of the embodiment of the present invention;
Fig. 5 is the structural schematic diagram of the Flexible formwork assembly of the embodiment of the present invention;
Fig. 6 is the structural schematic diagram of the embodiment of the present invention.
Specific embodiment
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention In attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is A part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, those of ordinary skill in the art Every other embodiment obtained without creative efforts belongs to the section that the present invention protects.
Embodiment one
As shown in Figure 1, the present invention provides a kind of production method of self-assembly structure, comprising:
S101 obtains the substrate that a surface is provided with hydrophilic region and hydrophobic region;
S1011 obtains the hydrophobic Flexible formwork assembly that a bottom is plane;Wherein, the Flexible formwork assembly can be by poly- two Template made of methylsiloxane PDMS or polymetylmethacrylate material.The Flexible formwork assembly of the application can also be energy Enough carry out any template material of soft etching processing.
S1012 obtains the Flexible formwork assembly that a bottom is etched with recess or hollowed out area by Soft lithograph technology.Specifically :
S1012.1 obtains the silicon template that there is micro-structure on a surface;The wafer that silicon template is 4 inches, by photoetching and etching Technique obtains micro-structure in its surface etch;Wherein the micro-structure may is that the single region being arranged according to specified size; The multiple area arrays of the same size being arranged according to specified size;Or according to the multiple of different sizes of specified size setting Area array.The shape in region can be any shape, such as round, rectangular, diamond shape etc., be also possible to single region or It is area array.Size also can according to need setting.
S1012.2 transfers to obtain the Flexible formwork assembly by the silicon template.Wherein, the bottom of the Flexible formwork assembly Recess or hollowed out area are complementary with the micro-structure in silicon template, i.e., the structure in silicon template is protrusion, then on Flexible formwork assembly Structure is recess;Structure in silicon template is recess, then the structure on Flexible formwork assembly is protrusion, and specific structure can be with are as follows: according to The single region of specified size setting;The multiple area arrays of the same size being arranged according to specified size;Or according to finger Multiple area arrays of different sizes of scale cun setting.The shape in region can be any shape, such as round, rectangular, water chestnut Shape etc. is also possible to single region either area array.Size also can according to need setting.
One hydrophilic upper surface is planar solid material as substrate by S1013, and by the upper surface of the substrate and institute The lower surface of Flexible formwork assembly is stated by the way that after plasma cleaning, the bottom of the template is bonded with the upper surface of the substrate.
S1014, by after fitting the Flexible formwork assembly and the substrate separate (tearing Flexible formwork assembly) so that the substrate Upper surface form hydrophilic region and hydrophobic region.
Interfacial wettability modification is carried out to upper surface of substrate through the above steps, so that obtaining surface has parent The substrate of water area and hydrophobic region, and the process is simple and convenient.And template bottom is available micro- by the processing of Soft lithograph Rice, the recess for the very small dimensions such as nanometer is micro- or hollowed out area.The corresponding region is hydrophilic region namely nanoparticle in substrate The self assembly region of son, advantageously allows nanoparticle self assembly in the region of the very small dimensions such as micron, micro-nano.
S102 drops to colloidal nanoparticle solution in the substrate, according to the micro-nano self-assembled structures of required acquisition, Regulate and control the temperature and humidity of the environment in the self-assembly region and the concentration of the nano-particle solution, so that Nanoparticle forms self-assembled structures in the hydrophilic region.
After colloidal nanoparticle solution is dropped in the substrate, nanoparticle forms self assembly in the hydrophilic region The accurate control to self-assembly position may be implemented in structure.And by regulating and controlling the self-assembly region Environment temperature and humidity and the nano-particle solution concentration, required for available it is different it is micro-nano from Package assembly.
Specifically, as shown in Fig. 2, being provided with hydrophilic region and hydrophobic region for colloidal nanoparticle solution is dropped to surface Substrate schematic diagram;Wherein, 21 nanoparticle is indicated;22 indicate substrate;23 indicate hydrophilic region;24 indicate hydrophobic region. (nanoparticle uses gold nanorods in the present embodiment, is a kind of nanocrystal, has axially and radially two dimensions, It is gold nanorods used in this specific embodiment, but is not limited to gold nanorods, any nanoparticle is all of the invention Within protection scope)
As shown in figure 3, (being provided with hydrophilic region and hydrophobic region) after interfacial wettability modification for nanoparticle Planar substrates over-assemble complete schematic diagram.Wherein, the self-assembled structures of 31 expression nanoparticles;32 indicate substrate.
In conclusion the production method and producing device of the self-assembly structure of the application may be implemented to nanometer The accurate control of particle (such as gold nanorods) self assembly position, and the nanoparticle of uniform required size can be generated Self-assembled structures, and the self-assembly structure of microsize can be generated.
Embodiment two
As shown in figure 4, the application also provides a kind of producing device of self-assembly structure, comprising:
One surface has the substrate 41 of hydrophilic region and hydrophobic region;
Structure that colloidal nanoparticle solution drops in the substrate (can be dropper or liquid-transfering gun, in figure not by one It shows).
By above-mentioned apparatus, nanoparticle forms self-assembled structures in the hydrophilic region, may be implemented to nanoparticle The accurate control of self assembly position.
The producing device of the application, the surface have the production component packet of the substrate of hydrophilic region and hydrophobic region It includes:
As shown in figure 5, a bottom is the hydrophobic Flexible formwork assembly 51 of plane;Wherein, the template bottom etching has recess Or hollowed out area 52;Wherein, the recess of the template bottom or hollowed out area are as follows: according to the single of specified size setting Region;The multiple area arrays of the same size being arranged according to specified size;Or the multiple sizes being arranged according to specified size Different area arrays.The shape in region can be any shape, such as round, and rectangular, diamond shape etc. is also possible to single area Domain either area array.Size also can according to need setting.Wherein, as shown in figure 5, wherein when the area array is served as reasons When the array of border circular areas composition, the diameter of the border circular areas be include, but is not limited to it is following first, 10 μm, 15 μm, 20 μm or 25 μm.Wherein, the size of the diameter of border circular areas is not limited to above-mentioned diameter, needs others right according to specific The adjustment that size is done is ok, all within the scope of protection of this application.
Realization of the region of the diameter most beneficial for self-assembly.Wherein, the Flexible formwork assembly is by poly- diformazan Template made of radical siloxane PDMS or polymetylmethacrylate material.The Flexible formwork assembly of the application can also be can Carry out any template material of soft etching processing.
As shown in fig. 6, a upper surface is the hydrophilic substrate 61 of planar solid material;
One plasma surface processing instrument (not shown), for the upper surface of the substrate to be passed through plasma cleaning, So that the bottom of the template is temporarily bonded and when the two separates so that the substrate with the upper surface of the substrate Surface has hydrophilic region and hydrophobic region.
By above structure, available surface has the substrate of hydrophilic region and hydrophobic region, and method is simply, just It is prompt.And recess or hollowed out area of the template bottom by the very small dimensions such as the available micron of processing of Soft lithograph, nanometer be micro-. The corresponding region is the self assembly region of hydrophilic region namely nanoparticle in substrate, advantageously allows nanoparticle micro- Self assembly in rice, the region of very small dimensions such as nanometer is micro-.
Wherein, the producing device, further includes:
Temperature humidity adjuster, the temperature and humidity of the environment in the self assembly region for regulating and controlling the nanoparticle.It is logical Cross the temperature and humidity of the environment in the self-assembly region and the concentration of the nano-particle solution, it can To obtain required different micro-nano self-assembled structures.
In conclusion the production method and producing device of the self-assembly structure of the application may be implemented to nanometer The accurate control of particle self assembly position, and the self-assembly structure of uniform required size can be generated, and The self-assembly structure of microsize can be generated.Self-assembly microarray produced by the present invention increases on surface Strong Raman scattering, electrical testing, cell directional adherent growth and bio-sensing etc. have high application value.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention Within mind and principle, any modification, equivalent replacement, improvement and so on be should all be included in the protection scope of the present invention.

Claims (10)

1. a kind of production method of self-assembly structure characterized by comprising
A, a substrate for being provided with hydrophilic region and hydrophobic region is obtained;
B, colloidal nanoparticle solution is dropped in the substrate, so that nanoparticle forms self assembly knot in the hydrophilic region Structure.
2. manufacturing method according to claim 1, which is characterized in that the step A, comprising:
A1, the hydrophobic Flexible formwork assembly that a bottom is plane is obtained;
A2, recess or hollowed out area are etched with by Soft lithograph technology in the Flexible formwork assembly bottom;
It A3, using a hydrophilic upper surface is planar solid material as substrate, and by the upper surface of the substrate and the flexibility After the lower surface of template passes through plasma cleaning, the bottom of the Flexible formwork assembly is bonded with the upper surface of the substrate;
A4, the Flexible formwork assembly and the substrate after fitting are separated, so that the upper surface of the substrate forms hydrophilic region And hydrophobic region.
3. production method according to claim 2, which is characterized in that the recess of the Flexible formwork assembly bottom or vacancy section Domain are as follows:
The single region being arranged according to specified size;
The multiple area arrays of the same size being arranged according to specified size;Or
The multiple area arrays of different sizes being arranged according to specified size.
4. manufacturing method according to claim 1, which is characterized in that the step B further include:
According to the micro-nano self-assembled structures of required acquisition, regulate and control the temperature of the environment in the self-assembly region and wet The concentration of degree and the nano-particle solution.
5. a kind of producing device of self-assembly structure characterized by comprising
One surface has the substrate of hydrophilic region and hydrophobic region;
One drops to colloidal nanoparticle solution the structure in the substrate.
6. producing device according to claim 5, which is characterized in that the surface has hydrophilic region and hydrophobic region The production component of substrate includes:
One bottom is the hydrophobic Flexible formwork assembly of plane;Wherein, the Flexible formwork assembly bottom is etched with recessed by soft etching technology Sunken or hollowed out area;
One upper surface is the hydrophilic substrate of planar solid material;
One plasma surface processing instrument, for the lower surface of the upper surface of the substrate and the Flexible formwork assembly to be passed through plasma Cleaning so that the bottom of the Flexible formwork assembly be temporarily bonded with the upper surface of the substrate and when the two separates so that The surface of the substrate has hydrophilic region and hydrophobic region.
7. producing device according to claim 6, which is characterized in that the recess of the Flexible formwork assembly bottom or vacancy section Domain are as follows:
The single region being arranged according to specified size;
The multiple area arrays of the same size being arranged according to specified size;Or
The multiple area arrays of different sizes being arranged according to specified size.
8. producing device according to claim 7, which is characterized in that when the area array is made of border circular areas When array, the diameter of the border circular areas is following first, 10 μm, 15 μm, 20 μm or 25 μm to include, but is not limited to.
9. producing device according to claim 5, which is characterized in that further include:
Temperature humidity adjuster, the temperature and humidity of the environment in the self assembly region for regulating and controlling the nanoparticle.
10. producing device according to claim 6, which is characterized in that the Flexible formwork assembly is by dimethyl silicone polymer Flexible formwork assembly made of PDMS or polymetylmethacrylate material.
CN201811126741.9A 2018-09-26 2018-09-26 A kind of production method and device of self-assembly structure Pending CN109211804A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201811126741.9A CN109211804A (en) 2018-09-26 2018-09-26 A kind of production method and device of self-assembly structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201811126741.9A CN109211804A (en) 2018-09-26 2018-09-26 A kind of production method and device of self-assembly structure

Publications (1)

Publication Number Publication Date
CN109211804A true CN109211804A (en) 2019-01-15

Family

ID=64981749

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201811126741.9A Pending CN109211804A (en) 2018-09-26 2018-09-26 A kind of production method and device of self-assembly structure

Country Status (1)

Country Link
CN (1) CN109211804A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112442101A (en) * 2019-09-05 2021-03-05 华为技术有限公司 Method and apparatus for synthesizing oligonucleotide
CN113189680A (en) * 2021-04-28 2021-07-30 太原理工大学 Three-dimensionally arranged nanoparticle film array structure and preparation method and application thereof
CN114471397A (en) * 2021-12-22 2022-05-13 天津大学 Nucleic acid synthesis-oriented microreactor array chip and preparation method thereof

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN209513602U (en) * 2018-09-26 2019-10-18 天津大学 A kind of producing device of self-assembly structure

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN209513602U (en) * 2018-09-26 2019-10-18 天津大学 A kind of producing device of self-assembly structure

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
SHUANG WANG ET AL: "Precisely Lateral Alignment of Gold Nanorods Array via Hydrophilic-Hydrophobic Pattern" *

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112442101A (en) * 2019-09-05 2021-03-05 华为技术有限公司 Method and apparatus for synthesizing oligonucleotide
CN113189680A (en) * 2021-04-28 2021-07-30 太原理工大学 Three-dimensionally arranged nanoparticle film array structure and preparation method and application thereof
CN114471397A (en) * 2021-12-22 2022-05-13 天津大学 Nucleic acid synthesis-oriented microreactor array chip and preparation method thereof
CN114471397B (en) * 2021-12-22 2024-04-02 天津大学 Micro-reactor array chip for nucleic acid synthesis and preparation method thereof

Similar Documents

Publication Publication Date Title
Jönsson-Niedziółka et al. EWOD driven cleaning of bioparticles on hydrophobic and superhydrophobic surfaces
KR102027995B1 (en) Method for producing and aligning nanowires and applications of such a method
CN109211804A (en) A kind of production method and device of self-assembly structure
US8557567B2 (en) Method for fabricating nanogap and nanogap sensor
KR102500117B1 (en) Patterining of nanocomposite colloids comprising plasmon nanoparticles and hydrogel nanoparticles, and Patterned hybrid nanostructures which can reversibly modulate optical signal and surface enhanced Raman scattering(SERS) signals
JP2008258594A (en) Method of manufacturing carbon nanotube field-effect transistor, and biosensor device
CN209513602U (en) A kind of producing device of self-assembly structure
CN102242053B (en) Biochip with polymer three-dimensional nanostructure
CN109626322B (en) Simple preparation method and SERS application of nano-tip-cone-shaped polymer array
WO2016019836A1 (en) Sensing apparatus
WO2017104398A1 (en) Biomolecule measurement apparatus
JP2007271609A (en) Biosensor
Mark et al. The Next Generation of Colloidal Probes: A Universal Approach for Soft and Ultra‐Small Particles
TWI752461B (en) Nanosensor chip with compound nanopores
CN109761191A (en) A kind of nano-wire array preparation method
US20090142825A1 (en) Composite detection devices having in-line desalting and methods of making the same
CN109231151A (en) A kind of device and application for making self-assembly structure
US7880318B1 (en) Sensing system and method of making the same
CN208932976U (en) It is a kind of for making the device of self-assembly structure
CN113960011B (en) Detection method for local biochemical environment of regulated cell based on Raman spectrum
KR102186264B1 (en) Open microfluidic channel integrated biosensor and manufacturing method the same
Adam et al. Novel in-house fabrication of nano lab-on-chip devices
RU2481590C2 (en) Manufacturing method of colloidal probe for atomic-force microscope
Hemmilä et al. Integration of microfluidic sample delivery system on silicon nanowire-based biosensor
KR101759894B1 (en) Lab-on-a-chip and a method of fabricating thereof

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
WD01 Invention patent application deemed withdrawn after publication
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20190115