CN109186641B - Method for manufacturing optical fiber sensor and optical fiber sensor - Google Patents
Method for manufacturing optical fiber sensor and optical fiber sensor Download PDFInfo
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- CN109186641B CN109186641B CN201810865379.0A CN201810865379A CN109186641B CN 109186641 B CN109186641 B CN 109186641B CN 201810865379 A CN201810865379 A CN 201810865379A CN 109186641 B CN109186641 B CN 109186641B
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- 239000013307 optical fiber Substances 0.000 title claims abstract description 105
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 21
- 238000000034 method Methods 0.000 title claims abstract description 18
- 239000000758 substrate Substances 0.000 claims abstract description 16
- 238000005411 Van der Waals force Methods 0.000 claims abstract description 10
- 239000000463 material Substances 0.000 claims description 19
- 239000008188 pellet Substances 0.000 claims description 16
- 239000002861 polymer material Substances 0.000 claims description 14
- 239000004065 semiconductor Substances 0.000 claims description 14
- 239000000835 fiber Substances 0.000 claims description 12
- 238000013519 translation Methods 0.000 claims description 4
- 230000035945 sensitivity Effects 0.000 abstract description 8
- 230000003595 spectral effect Effects 0.000 description 9
- 230000005540 biological transmission Effects 0.000 description 8
- 239000002121 nanofiber Substances 0.000 description 7
- 238000001228 spectrum Methods 0.000 description 7
- 229920000642 polymer Polymers 0.000 description 5
- 239000012530 fluid Substances 0.000 description 4
- 239000002086 nanomaterial Substances 0.000 description 4
- 238000004891 communication Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 239000011324 bead Substances 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000000670 limiting effect Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/268—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light using optical fibres
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- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The invention introduces a method for manufacturing an optical fiber sensor and the optical fiber sensor, wherein the method comprises the following steps: tapering a substrate optical fiber into a micro-nano optical fiber, and knotting the micro-nano optical fiber to form a micro-ring resonant cavity; and adsorbing the resonant cavity generating the whispering gallery mode on the micro-ring resonant cavity by Van der Waals force to form the optical fiber sensor. The invention can manufacture the optical fiber sensor with small size, ultrahigh sensitivity and resolution, and has greatly improved performance compared with the common double-parameter sensor.
Description
Technical Field
The invention relates to the technical field of optical fiber sensing, in particular to a method for manufacturing an optical fiber sensor and the optical fiber sensor.
Background
The dual-parameter sensor in the optical fiber sensor in the prior art has the defects of large volume, low sensitivity and low resolution. Therefore, how to manufacture a light sensor with high sensitivity and high resolution is an urgent technical problem to be solved.
Disclosure of Invention
The main objective of the embodiments of the present invention is to provide a method for manufacturing an optical fiber sensor and an optical fiber sensor, which can manufacture an optical fiber sensor with a small size, and ultra-high sensitivity and resolution, and the performance of the optical fiber sensor is greatly improved compared with a general dual-parameter sensor.
To achieve the above object, an embodiment of the present invention provides a method of manufacturing an optical fiber sensor, the method including:
tapering a substrate optical fiber into a micro-nano optical fiber, and knotting the micro-nano optical fiber to form a micro-ring resonant cavity;
and adsorbing the resonant cavity generating the whispering gallery mode on the micro-ring resonant cavity by Van der Waals force to form the optical fiber sensor.
Optionally, the diameter of the micro-nano optical fiber is in a sub-wavelength order.
Optionally, tapering the substrate fiber to a micro-nano fiber, and knotting the micro-nano fiber to form a micro-ring resonant cavity, further comprising:
and reducing the micro-ring resonant cavity to the diameter of 100-1000 microns by an electric translation stage device.
Optionally, the resonant cavity generating the whispering gallery mode is: a pellet of semiconductor material, a disc of semiconductor material, a pellet of polymer material, or a disc of polymer material.
Optionally, the resonant cavity generating the whispering gallery modes has a diameter in a range of 1 micron to 100 microns.
In addition, to achieve the above object, an embodiment of the present invention further provides an optical fiber sensor, including: the device comprises a substrate optical fiber, a micro-nano optical fiber, a micro-ring resonant cavity and a resonant cavity for generating a whispering gallery mode;
the micro-nano optical fiber is formed by tapering one section of the substrate optical fiber;
the micro-ring resonant cavity is formed by knotting one section of the micro-nano optical fiber;
the resonant cavity generating the whispering gallery mode is adsorbed on the micro-ring resonant cavity by van der waals force.
Optionally, the diameter of the micro-nano optical fiber is in a sub-wavelength order.
Optionally, the diameter of the micro-ring resonant cavity is in a range from 100 micrometers to 1000 micrometers.
Optionally, the resonant cavity generating the whispering gallery mode is: a pellet of semiconductor material, a disc of semiconductor material, a pellet of polymer material, or a disc of polymer material.
Optionally, the resonant cavity generating the whispering gallery modes has a diameter in a range of 1 micron to 100 microns.
According to the method for manufacturing the optical fiber sensor and the optical fiber sensor, provided by the embodiment of the invention, the resonant cavities of two micro-nano structures are combined to form a new sensor structure. The two resonant cavities have different selectable material characteristics and different sensing characteristics, so that the dual-parameter sensor can be used for dual-parameter sensing. In addition, the diameters of the resonant cavity generating the whispering gallery mode and the micro-ring resonant cavity are different, and the free spectral ranges of the transmission modes in the resonant cavity generating the whispering gallery mode and the micro-ring resonant cavity are also different, and are reflected as two resonant frequencies on the spectrum. The diameter of the micro-ring resonant cavity is larger, so that the free spectral range of the corresponding resonant peak is smaller; the diameter of the whispering gallery mode is small, so that the free spectral range of the resonant peak of the resonant cavity generating the whispering gallery mode is large and corresponds to the envelope of the resonant peak of the micro-ring resonant cavity in the spectrum. The two resonance peaks have different causes and different sensing characteristics and can be used for double-parameter sensing.
Drawings
Fig. 1 is a flowchart of a method of manufacturing an optical fiber sensor according to a first embodiment of the present invention;
FIG. 2 is a flow chart of a method of manufacturing a fiber optic sensor according to a second embodiment of the present invention;
FIG. 3 is a schematic diagram of the structure of a third embodiment of the optical fiber sensor of the present invention;
fig. 4 is a schematic structural diagram of a temperature and refractive index testing system according to a fourth embodiment of the present invention.
Detailed Description
To further illustrate the technical means and effects of the embodiments of the present invention for achieving the intended purpose, the embodiments of the present invention will be described in detail below with reference to the accompanying drawings and preferred embodiments.
In a first embodiment of the present invention, a method for manufacturing an optical fiber sensor is provided, as shown in fig. 1, the method specifically includes the following steps:
step S101: tapering a substrate optical fiber into a micro-nano optical fiber, and knotting the micro-nano optical fiber to form a micro-ring resonant cavity.
Tapering is the process of heating the optical fiber at high temperature to melt the optical fiber while applying a drawing force to the optical fiber to make the optical fiber thin. The tapering is a common processing method in the art, and therefore, the description thereof is omitted here.
The micro-nano optical fiber has the advantages of sub-wavelength size, low loss, evanescent field transmission, strong optical field limitation, high nonlinear coefficient and the like, and is widely applied to the aspects of optical fiber communication, sensing, nonlinear optics and the like.
The micro-ring resonant cavity has the characteristics of small size, simple preparation, high quality factor and the like, and has wide application prospect in the fields of laser light sources and laser sensing.
Specifically, the diameter of the micro-nano optical fiber is in a sub-wavelength order.
Further, tapering the substrate optical fiber into a micro-nano optical fiber, and knotting the micro-nano optical fiber into a micro-ring resonant cavity, further comprising:
and reducing the micro-ring resonant cavity to the diameter of 100-1000 microns by an electric translation stage device.
Step S102: and adsorbing the resonant cavity generating the whispering gallery mode on the micro-ring resonant cavity by Van der Waals force to form the optical fiber sensor.
The whispering gallery mode is a mode which is transmitted in a spherical or disc-shaped resonant cavity, has no limit of an internal boundary compared with a ring cavity, has stronger constraint on an optical field based on the principle of total internal reflection, and can reach the quality factor of 109～1010And is often used for laser sensing and frequency comb generation, etc.
Specifically, the resonant cavity generating the whispering gallery mode is as follows: a pellet of semiconductor material, a disc of semiconductor material, a pellet of polymer material, or a disc of polymer material.
The resonant cavity producing the whispering gallery modes has a diameter in the range of 1 micron to 100 microns.
The micro-ring resonant cavity and the resonant cavity generating the whispering gallery mode in the embodiment of the invention have very high quality factors, have very high resolution when being applied to the sensing field, can detect more subtle changes, and have very high sensitivity due to the characteristic of evanescent wave transmission of the micro-nano scale sensor. The novel optical fiber sensor combining the two resonant cavities has the characteristics of small size, ultrahigh sensitivity and resolution, and can be used in the field of double-parameter sensing.
In a second embodiment of the present invention, a method for manufacturing an optical fiber sensor is provided, as shown in fig. 2, the method specifically includes the following steps:
step S201: tapering the substrate optical fiber into a micro-nano optical fiber.
The diameter of the micro-nano optical fiber is in the sub-wavelength level, so that the micro-nano optical fiber has a strong limiting effect on transmission wavelength, and can still keep low transmission loss through severe bending.
Step S202: and the micro-nano fiber is subjected to knotting treatment to obtain the micro-ring resonant cavity.
Step S203: the diameter of the micro-ring resonant cavity is reduced to hundreds of microns by an electric translation stage device.
It should be noted that the steps S201 to S203 are processes for preparing the micro-ring resonator, and the steps S201 to S203 should be performed under a cleaning condition, because the requirement of the micro-nano fiber on the surface smoothness is high, dust can cause high loss of the micro-nano fiber.
Step S204: and adsorbing the resonant cavity generating the whispering gallery mode on the micro-ring resonant cavity by Van der Waals force to form the optical fiber sensor.
Specifically, the resonant cavity generating the whispering gallery mode is: a pellet of semiconductor material, a disc of semiconductor material, a pellet of polymer material, or a disc of polymer material.
The diameter of the resonant cavity producing the whispering gallery modes is on the order of a few microns to tens of microns.
In the embodiment of the invention, resonant cavities of two micro-nano structures are combined to form a novel sensor structure. The two resonant cavities have different selectable material characteristics and different sensing characteristics, so that the dual-parameter sensor can be used for dual-parameter sensing. In addition, the diameters of the resonant cavity generating the whispering gallery mode and the micro-ring resonant cavity are different, and the free spectral ranges of the transmission modes in the resonant cavity generating the whispering gallery mode and the micro-ring resonant cavity are also different, and are reflected as two resonant frequencies on the spectrum. The diameter of the micro-ring resonant cavity is larger, so that the free spectral range of the corresponding resonant peak is smaller; the diameter of the whispering gallery mode is small, so that the free spectral range of the resonant peak of the resonant cavity generating the whispering gallery mode is large and corresponds to the envelope of the resonant peak of the micro-ring resonant cavity in the spectrum. The two resonance peaks have different causes and different sensing characteristics and can be used for double-parameter sensing.
A third embodiment of the present invention provides an optical fiber sensor, as shown in fig. 3, the optical fiber sensor specifically includes the following components: a substrate fiber 301, a micro-nano fiber 302, a micro-ring resonator 303, and a resonator 304 that produces whispering gallery modes.
The micro-nano optical fiber 302 is formed by tapering one section of the base optical fiber 301;
the micro-ring resonant cavity 30 is formed by knotting one section of the micro-nano optical fiber 302;
the cavity 304 generating the whispering gallery mode is adsorbed on the micro-ring cavity 303 by van der waals forces.
Specifically, the diameter of the micro-nano fiber 302 is in the sub-wavelength order.
The diameter of the micro-ring resonator 303 is in the range of 100 microns to 1000 microns.
The diameter of the resonant cavity 304 that produces the whispering gallery modes is in the range of 1 micron to 100 microns.
Further, the resonant cavity 304 that produces the whispering gallery mode is: a pellet of semiconductor material, a disc of semiconductor material, a pellet of polymer material, or a disc of polymer material.
The resonant cavities of the two micro-nano structures of the optical fiber sensor in the embodiment of the invention are resonant cavities with high quality factors, and the resonant cavities with high quality factors have the advantage of high resolution in sensing application. The two resonant cavities of the optical fiber sensor of the embodiment of the invention are both in micro-nano scale and have the characteristic of evanescent wave transmission, and the evanescent wave is very sensitive to factors which can cause refractive index change in surrounding media, so the sensor has higher sensitivity. In addition, the substrate optical fiber for manufacturing the micro-nano optical fiber can adopt a common communication optical fiber, the cost of raw materials is low, the substrate optical fiber and the existing optical fiber sensing system can be directly welded, the all-optical-fiber structure of the system cannot be damaged, and the coupling loss is low.
The fourth embodiment of the present invention proposes an application of an optical fiber sensor in temperature and refractive index sensing, and as shown in fig. 4, the optical fiber sensor is a temperature and refractive index testing system, which specifically includes the following components: a laser light source 401, an optical fiber sensor 402, a refractive index matching fluid 403, a high-low temperature box 404 and a spectrometer 405.
The optical fiber sensor 402 includes: a micro-ring resonant cavity and a resonant cavity generating a whispering gallery mode; the resonant cavity producing the whispering gallery mode is adsorbed on the micro-ring resonant cavity by van der waals forces.
Specifically, the micro-ring resonant cavity is formed by knotting micro-nano optical fibers, and the micro-nano optical fibers are formed by tapering the substrate optical fibers.
It should be noted that, in the embodiment of the present invention, the base fiber of the micro-ring resonator is a single-mode communication fiber. And tapering the substrate optical fiber to obtain a section of micro-nano optical fiber with the diameter of tens of microns and the tapered length of several centimeters. And knotting the micro-nano optical fiber to obtain a micro-ring resonant cavity with the diameter of hundreds of microns.
In the embodiment of the present invention, the resonant cavity generating the whispering gallery mode is a polymer pellet with high thermo-optic coefficient, and the diameter of the polymer pellet is about several micrometers. And adsorbing the polymer small ball on the micro-ring resonant cavity through Van der Waals force to form the optical fiber sensor.
As shown in fig. 4, a portion of the micro-ring resonator not coupled to the polymer bead is placed in a container containing a refractive index matching fluid, and the container containing the refractive index matching fluid and the optical fiber sensor are placed in a high-temperature and low-temperature chamber together. One end of the optical fiber sensor is connected with the laser light source, and the other end of the optical fiber sensor is connected with the spectrometer, so that laser spectrums under different refractive index matching fluids and temperatures are measured.
In the embodiment of the invention, the micro-ring resonant cavity is made of quartz material. The quartz material has a low thermo-optic coefficient and is insensitive to temperature, but the evanescent wave is sensitive to refractive index changes. The polymer ball with higher thermo-optic coefficient is sensitive to temperature change, and the temperature and refractive index sensitivities of the optical fiber sensor can be respectively calculated according to the drifting conditions of the two resonance peaks.
According to the method for manufacturing the optical fiber sensor and the optical fiber sensor, which are introduced in the embodiment of the invention, the resonant cavities of two micro-nano structures are combined to form a new sensor structure. The two resonant cavities have different selectable material characteristics and different sensing characteristics, so that the dual-parameter sensor can be used for dual-parameter sensing. In addition, the diameters of the resonant cavity generating the whispering gallery mode and the micro-ring resonant cavity are different, and the free spectral ranges of the transmission modes in the resonant cavity generating the whispering gallery mode and the micro-ring resonant cavity are also different, and are reflected as two resonant frequencies on the spectrum. The diameter of the micro-ring resonant cavity is larger, so that the free spectral range of the corresponding resonant peak is smaller; the diameter of the whispering gallery mode is small, so that the free spectral range of the resonant peak of the resonant cavity generating the whispering gallery mode is large and corresponds to the envelope of the resonant peak of the micro-ring resonant cavity in the spectrum. The two resonance peaks have different causes and different sensing characteristics and can be used for double-parameter sensing.
While the embodiments of the present invention have been described in terms of specific embodiments, it is to be understood that both the foregoing general description and the following detailed description are intended to provide further explanation and understanding of the invention as claimed.
Claims (10)
1. A method of manufacturing a fiber optic sensor, the method comprising:
tapering a substrate optical fiber into a micro-nano optical fiber, and knotting the micro-nano optical fiber to form a micro-ring resonant cavity;
and adsorbing the resonant cavity generating the whispering gallery mode on the micro-ring resonant cavity by Van der Waals force to form the optical fiber sensor.
2. The method for manufacturing the optical fiber sensor according to claim 1, wherein the diameter of the micro-nano optical fiber is in the sub-wavelength order.
3. The method for manufacturing the optical fiber sensor according to claim 1, wherein tapering the base optical fiber into the micro-nano optical fiber and knotting the micro-nano optical fiber into the micro-ring resonator further comprises:
and reducing the micro-ring resonant cavity to the diameter of 100-1000 microns by an electric translation stage device.
4. The method of manufacturing a fiber sensor of claim 1, wherein the resonant cavity that produces whispering gallery modes is: a pellet of semiconductor material, a disc of semiconductor material, a pellet of polymer material, or a disc of polymer material.
5. The method of manufacturing a fiber sensor of claim 1, wherein the diameter of the whispering gallery mode generating resonant cavity is in the range of 1 micron to 100 microns.
6. A fiber optic sensor, comprising: the device comprises a substrate optical fiber, a micro-nano optical fiber, a micro-ring resonant cavity and a resonant cavity for generating a whispering gallery mode;
the micro-nano optical fiber is formed by tapering one section of the substrate optical fiber;
the micro-ring resonant cavity is formed by knotting one section of the micro-nano optical fiber;
the resonant cavity generating the whispering gallery mode is adsorbed on the micro-ring resonant cavity by van der waals force.
7. The optical fiber sensor according to claim 6, wherein the diameter of the micro-nano optical fiber is in the sub-wavelength order.
8. The fiber sensor of claim 6, wherein the microring resonator has a diameter in the range of 100 microns to 1000 microns.
9. The fiber sensor of claim 6, wherein the resonant cavity that produces whispering gallery modes is: a pellet of semiconductor material, a disc of semiconductor material, a pellet of polymer material, or a disc of polymer material.
10. The fiber sensor of claim 6, wherein the resonant cavity producing the whispering gallery modes has a diameter in the range of 1 micron to 100 microns.
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