CN109186641A - A kind of method and fibre optical sensor manufacturing fibre optical sensor - Google Patents
A kind of method and fibre optical sensor manufacturing fibre optical sensor Download PDFInfo
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- CN109186641A CN109186641A CN201810865379.0A CN201810865379A CN109186641A CN 109186641 A CN109186641 A CN 109186641A CN 201810865379 A CN201810865379 A CN 201810865379A CN 109186641 A CN109186641 A CN 109186641A
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- 239000000835 fiber Substances 0.000 title claims abstract description 51
- 230000003287 optical effect Effects 0.000 title claims abstract description 48
- 238000000034 method Methods 0.000 title claims abstract description 23
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 19
- 239000002121 nanofiber Substances 0.000 claims abstract description 40
- 239000013307 optical fiber Substances 0.000 claims abstract description 28
- 239000000758 substrate Substances 0.000 claims abstract description 18
- 238000005411 Van der Waals force Methods 0.000 claims abstract description 10
- 239000000463 material Substances 0.000 claims description 20
- 239000011324 bead Substances 0.000 claims description 14
- 239000004065 semiconductor Substances 0.000 claims description 14
- 239000002861 polymer material Substances 0.000 claims description 13
- 238000012545 processing Methods 0.000 claims description 5
- 238000013519 translation Methods 0.000 claims description 4
- 238000012681 fiber drawing Methods 0.000 claims 1
- 230000009977 dual effect Effects 0.000 abstract description 8
- 238000005070 sampling Methods 0.000 abstract description 8
- 206010020751 Hypersensitivity Diseases 0.000 abstract description 3
- 208000026935 allergic disease Diseases 0.000 abstract description 3
- 230000009610 hypersensitivity Effects 0.000 abstract description 3
- 230000003595 spectral effect Effects 0.000 description 8
- 230000005540 biological transmission Effects 0.000 description 7
- 238000001228 spectrum Methods 0.000 description 6
- 229920000642 polymer Polymers 0.000 description 5
- 239000012530 fluid Substances 0.000 description 4
- 239000002086 nanomaterial Substances 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000004891 communication Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 241000208340 Araliaceae Species 0.000 description 1
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 1
- 235000003140 Panax quinquefolius Nutrition 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 235000008434 ginseng Nutrition 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000001953 sensory effect Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/268—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light using optical fibres
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Abstract
Invention describes a kind of methods and fibre optical sensor for manufacturing fibre optical sensor, this method comprises: bore the drawing of substrate optical fiber for micro-nano fiber, and the micro-nano fiber are knotted and is handled as micro-ring resonant cavity；The resonant cavity for generating Whispering-gallery-mode is adsorbed on the micro-ring resonant cavity by Van der Waals force, forms fibre optical sensor.The present invention can produce a kind of size it is small and with hypersensitivity and resolution ratio fibre optical sensor, compare general dual sampling device, have a distinct increment in performance.
Description
Technical field
The present invention relates to technical field of optical fiber sensing more particularly to a kind of method for manufacturing fibre optical sensor and optical fiber to pass
Sensor.
Background technique
That there are volumes is larger for double ginseng sensors in fibre optical sensor in the prior art, sensitivity is low, resolution ratio is low
Disadvantage.Therefore, the technical issues of how to produce the light sensor of a kind of high sensitivity and high resolution becomes urgent need to resolve.
Summary of the invention
The main purpose of the embodiment of the present invention is to propose a kind of method and fibre optical sensor for manufacturing fibre optical sensor,
It can produce that a kind of size is small and fibre optical sensor with hypersensitivity and resolution ratio, be passed compared to general double parameters
Sensor has a distinct increment in performance.
To achieve the above object, the embodiment of the invention provides a kind of method for manufacturing fibre optical sensor, the method packets
It includes:
The drawing of substrate optical fiber bore as micro-nano fiber, and the micro-nano fiber is knotted and is handled as micro-ring resonant cavity；
The resonant cavity for generating Whispering-gallery-mode is adsorbed on the micro-ring resonant cavity by Van der Waals force, optical fiber is formed and passes
Sensor.
Optionally, the diameter of the micro-nano fiber is sub-wavelength magnitude.
Optionally, described that the drawing of substrate optical fiber bore as micro-nano fiber, and the micro-nano fiber knotted handle for micro-loop it is humorous
Shake chamber, further includes:
The micro-ring resonant cavity is contracted to range of the diameter at 100 microns to 1000 microns by motorized precision translation stage device
It is interior.
Optionally, the resonant cavity for generating Whispering-gallery-mode are as follows: the circle of the bead of semiconductor material, semiconductor material
The disk of disk, the bead of polymer material or polymer material.
Optionally, the diameter of the resonant cavity for generating Whispering-gallery-mode is in the range of 1 micron to 100 microns.
In addition, to achieve the above object, the embodiment of the present invention also proposes a kind of fibre optical sensor, comprising: substrate optical fiber, micro-
Nano fiber, micro-ring resonant cavity and the resonant cavity for generating Whispering-gallery-mode；
Wherein, the micro-nano fiber be one section in the substrate optical fiber through draw taper at；
The micro-ring resonant cavity is that one section in the micro-nano fiber is knotted what processing was constituted；
The resonant cavity for generating Whispering-gallery-mode is adsorbed on the micro-ring resonant cavity by Van der Waals force.
Optionally, the diameter of the micro-nano fiber is sub-wavelength magnitude.
Optionally, the diameter of the micro-ring resonant cavity is in the range of 100 microns to 1000 microns.
Optionally, the resonant cavity for generating Whispering-gallery-mode are as follows: the circle of the bead of semiconductor material, semiconductor material
The disk of disk, the bead of polymer material or polymer material.
Optionally, the diameter of the resonant cavity for generating Whispering-gallery-mode is in the range of 1 micron to 100 microns.
The method and fibre optical sensor for the manufacture fibre optical sensor that the embodiment of the present invention proposes, by two kinds of micro-nano structures
Resonant cavity is bonded a kind of new sensor structure.Since the selectable material property of two kinds of resonant cavities is different, sensing is special
Property is also different, can be used for dual sampling.In addition, the resonant cavity for generating Whispering-gallery-mode is different with the diameter of micro-ring resonant cavity,
The Free Spectral Range of the intracavitary transmission mode of the resonant cavity and micro-ring resonant of generation Whispering-gallery-mode is also different, spectrally instead
It reflects for two kinds of resonance frequencies.Since the diameter of micro-ring resonant cavity is bigger, so the Free Spectral Range of corresponding resonance peak is smaller；By
In generate Whispering-gallery-mode diameter it is smaller, so generate Whispering-gallery-mode resonant cavity resonance peak Free Spectral Range compared with
Greatly, the envelope of the resonance peak of micro-ring resonant cavity in spectrum is corresponded to.The origin cause of formation of two kinds of resonance peaks is different, and sensing characteristics are different, can use
In dual sampling.
Detailed description of the invention
Fig. 1 is the flow chart of the method for the manufacture fibre optical sensor of first embodiment of the invention；
Fig. 2 is the flow chart of the method for the manufacture fibre optical sensor of second embodiment of the invention；
Fig. 3 is the composed structure schematic diagram of the fibre optical sensor of third embodiment of the invention；
Fig. 4 is the composed structure schematic diagram of the temperature of fourth embodiment of the invention, the test macro of refractive index.
Specific embodiment
Further to illustrate that the embodiment of the present invention is the technical means and efficacy reaching predetermined purpose and being taken, tie below
Attached drawing and preferred embodiment are closed, the embodiment of the present invention is described in detail as rear.
First embodiment of the invention proposes a kind of method for manufacturing fibre optical sensor, as shown in Figure 1, the method has
Body the following steps are included:
Step S101: the drawing of substrate optical fiber bore as micro-nano fiber, and the micro-nano fiber is knotted and is handled as micro-ring resonant
Chamber.
Drawing cone is with high-temperature heating optical fiber so that fiber fuse, while applying drawing force to optical fiber, so that optical fiber attenuates.It draws
Cone is the common processing method of this field, therefore details are not described herein again.
The advantages that micro-nano fiber is with sub-wavelength dimensions, low-loss, evanscent field transmission, strong laser field limitation, high nonlinear coefficient,
Fiber optic communication, sensing, in terms of be widely used.
Micro-ring resonant cavity has the characteristics that size is small, preparation is simple, quality factor are high and leads in laser light source and laser sensing
There is very broad application prospect in domain.
Specifically, the diameter of the micro-nano fiber is sub-wavelength magnitude.
Further, described that the drawing of substrate optical fiber bore as micro-nano fiber, and the micro-nano fiber is knotted and is handled as micro-loop
Resonant cavity, further includes:
The micro-ring resonant cavity is contracted to range of the diameter at 100 microns to 1000 microns by motorized precision translation stage device
It is interior.
The resonant cavity for generating Whispering-gallery-mode: being adsorbed on the micro-ring resonant cavity by step S102 by Van der Waals force,
Form fibre optical sensor.
Whispering-gallery-mode is a kind of mode transmitted in spherical or disc resonant cavity, compared with annular chamber, the Echo Wall
Mode does not have the limitation of inner boundary, is based on total internal reflection principle, stronger to the constraint of light field, the quality factor of chamber can achieve
109~1010, be commonly used for laser sensing and generate frequency comb etc..
Specifically, the resonant cavity for generating Whispering-gallery-mode are as follows: the circle of the bead of semiconductor material, semiconductor material
The disk of disk, the bead of polymer material or polymer material.
The diameter of the resonant cavity for generating Whispering-gallery-mode is in the range of 1 micron to 100 microns.
The resonant cavity of micro-ring resonant cavity and generation Whispering-gallery-mode in embodiments of the present invention all has very high quality
Factor all has very high resolution ratio applied to sensory field, can detect subtleer variation, and the biography of micro/nano-scale
Sensor due to evanescent wave transmit the characteristics of have again it is very highly sensitive.The novel optical fiber sensor that two kinds of resonant cavities combine has ruler
It is very little small, the characteristics of hypersensitivity and resolution ratio, it can be used for dual sampling field.
Second embodiment of the invention proposes a kind of method for manufacturing fibre optical sensor, as shown in Fig. 2, the method has
Body the following steps are included:
Step S201: the drawing of substrate optical fiber is bored as micro-nano fiber.
Wherein, micro-nano fiber diameter is in sub-wavelength magnitude, to transmission wave with stronger restriction effect, by violent curved
Qu Yiran can keep lower transmission loss.
Step S202: micro-nano fiber handles to obtain micro-ring resonant cavity by knotting.
Step S203: the diameter of micro-ring resonant cavity is contracted to by hundred micron dimensions by motorized precision translation stage device.
It should be noted that above-mentioned steps S201 to step S203 is the process for preparing micro-ring resonant cavity, and above-mentioned steps
S201 to step S203 should be carried out in purification condition, because micro-nano fiber, to the more demanding of surface smoothness, dust can be made
At the higher loss of micro-nano fiber.
The resonant cavity for generating Whispering-gallery-mode: being adsorbed on micro-ring resonant cavity by step S204 by Van der Waals force, is formed
Fibre optical sensor.
Specifically, generating the resonant cavity of Whispering-gallery-mode are as follows: the disk, poly- of the bead of semiconductor material, semiconductor material
Close the bead of object material or the disk of polymer material.
The diameter of the resonant cavity of Whispering-gallery-mode is generated at several microns to tens micron dimensions.
In embodiments of the present invention, the resonant cavity of two kinds of micro-nano structures is bonded a kind of new sensor structure.By
Different in the selectable material property of two kinds of resonant cavities, sensing characteristics are also different, can be used for dual sampling.In addition, generating
The resonant cavity of Whispering-gallery-mode is different with the diameter of micro-ring resonant cavity, and resonant cavity and the micro-ring resonant for generating Whispering-gallery-mode are intracavitary
Transmission mode Free Spectral Range it is also different, be spectrally reflected as two kinds of resonance frequencies.It is straight due to micro-ring resonant cavity
Diameter is bigger, so the Free Spectral Range of corresponding resonance peak is smaller；Since the diameter for generating Whispering-gallery-mode is smaller, so generating
The Free Spectral Range of the resonance peak of the resonant cavity of Whispering-gallery-mode is larger, the packet of the resonance peak of micro-ring resonant cavity in corresponding spectrum
Network.The origin cause of formation of two kinds of resonance peaks is different, and sensing characteristics are different, can be used for dual sampling.
Third embodiment of the invention proposes a kind of fibre optical sensor, as shown in figure 3, the Fibre Optical Sensor implement body packet
Include consisting of part: substrate optical fiber 301, micro-nano fiber 302, micro-ring resonant cavity 303 and the resonant cavity for generating Whispering-gallery-mode
304。
Wherein, micro-nano fiber 302 be one section in substrate optical fiber 301 drawn taper at；
Micro-ring resonant cavity 30 is that one section of processing that knotted in micro-nano fiber 302 is constituted；
The resonant cavity 304 for generating Whispering-gallery-mode is adsorbed on micro-ring resonant cavity 303 by Van der Waals force.
Specifically, the diameter of micro-nano fiber 302 is sub-wavelength magnitude.
The diameter of micro-ring resonant cavity 303 is in the range of 100 microns to 1000 microns.
The diameter of the resonant cavity 304 of Whispering-gallery-mode is generated in the range of 1 micron to 100 microns.
Further, the resonant cavity 304 of Whispering-gallery-mode is generated are as follows: the circle of the bead of semiconductor material, semiconductor material
The disk of disk, the bead of polymer material or polymer material.
The resonant cavity of two micro-nano structures of the fibre optical sensor in the embodiment of the present invention all has high quality factor
The resonant cavity of resonant cavity, high quality factor has the advantages that high-resolution in Application in Sensing.Due to constituting the embodiment of the present invention
Fibre optical sensor two kinds of resonant cavities size all in micro/nano-scale, the characteristic with evanescent wave transmission, evanescent wave is for week
Enclosing in medium can cause the factor of variations in refractive index very sensitive, therefore the sensitivity with higher of this sensor.In addition, with
In production micro-nano fiber substrate optical fiber can use common optical fiber communication, the cost of raw material is cheap, and with existing light
The mode of welding can be directly used in fiber sensor system, will not destroy all optical fibre structure of system, and coupling loss is low.
Fourth embodiment of the invention proposes application of the fibre optical sensor in terms of temperature, refractive index sensing, such as Fig. 4 institute
Show, be a temperature, the test macro of refractive index, which specifically includes consisting of part: laser light source 401, optical fiber pass
Sensor 402, index-matching fluid 403, high-low temperature chamber 404, spectrometer 405.
Wherein, fibre optical sensor 402 includes: micro-ring resonant cavity and the resonant cavity for generating Whispering-gallery-mode；Generate the Echo Wall
The resonant cavity of mode is adsorbed on micro-ring resonant cavity by Van der Waals force.
Specifically, micro-ring resonant cavity is by constituting the micro-nano fiber processing that knots, micro-nano fiber is by by substrate
Optical fiber draw taper at.
It should be noted that in embodiments of the present invention, the substrate optical fiber of micro-ring resonant cavity is using Single mode communication light
It is fine.The micro-nano fiber that substrate optical fiber obtains more than ten microns of one section of diameter after drawing cone, draws several centimetres of length of cone.Micro-nano fiber is beaten
A diameter is obtained in the micro-ring resonant cavity of hundred micron dimensions after knot processing.
In embodiments of the present invention, the resonant cavity for generating Whispering-gallery-mode is the high polymer globules of a thermo-optical coeffecient,
And the diameter of the polymer globules is in several microns.The polymer globules are adsorbed on the micro-loop by Van der Waals force
On resonant cavity, fibre optical sensor is formd.
As shown in figure 4, by being placed in one without the part that couples with the polymer globules on the micro-ring resonant cavity
In a container for filling index-matching fluid, and the container for filling index-matching fluid is put into height together with fibre optical sensor
In incubator.One end of fibre optical sensor is connect with laser light source, the other end of fibre optical sensor is connect with spectrometer, to measure
Laser spectrum of the different refractivity matching fluid at a temperature of.
In embodiments of the present invention, micro-ring resonant cavity is using quartz material.The thermo-optical coeffecient of quartz material is lower, right
Temperature-insensitive, but the variation of evanescent wave refractive index is sensitive.The higher polymer globules of thermo-optical coeffecient are sensitive to temperature change, root
According to the drift situation of two kinds of resonance peaks, the sensitivity of the temperature and refractive index of fibre optical sensor can be calculated separately.
The method and fibre optical sensor for the manufacture fibre optical sensor introduced in the embodiment of the present invention, by two kinds of micro-nano structures
Resonant cavity be bonded a kind of new sensor structure.Since the selectable material property of two kinds of resonant cavities is different, sensing
Characteristic is also different, can be used for dual sampling.In addition, generate Whispering-gallery-mode resonant cavity and micro-ring resonant cavity diameter not
Together, the Free Spectral Range of the resonant cavity and the intracavitary transmission mode of micro-ring resonant that generate Whispering-gallery-mode is also different, in spectrum
On be reflected as two kinds of resonance frequencies.Since the diameter of micro-ring resonant cavity is bigger, thus the Free Spectral Range of corresponding resonance peak compared with
It is small；Since the diameter for generating Whispering-gallery-mode is smaller, so generating the free spectrum of the resonance peak of the resonant cavity of Whispering-gallery-mode
Range is larger, the envelope of the resonance peak of micro-ring resonant cavity in corresponding spectrum.The origin cause of formation of two kinds of resonance peaks is different, and sensing characteristics are not
Together, it can be used for dual sampling.
It should be able to be the technology reaching predetermined purpose and being taken to the embodiment of the present invention by the explanation of specific embodiment
Means and effect are able to more deeply and specifically understand, however appended diagram is only to provide reference and description and is used, and not uses
To be limited to the embodiment of the present invention.
Claims (10)
1. a kind of method for manufacturing fibre optical sensor, which is characterized in that the described method includes:
The drawing of substrate optical fiber bore as micro-nano fiber, and the micro-nano fiber is knotted and is handled as micro-ring resonant cavity；
The resonant cavity for generating Whispering-gallery-mode is adsorbed on the micro-ring resonant cavity by Van der Waals force, forms Fibre Optical Sensor
Device.
2. the method for manufacture fibre optical sensor according to claim 1, which is characterized in that the diameter of the micro-nano fiber is
Sub-wavelength magnitude.
3. the method for manufacture fibre optical sensor according to claim 1, which is characterized in that described to be by substrate optical fiber drawing cone
Micro-nano fiber, and micro-nano fiber knotting is handled as micro-ring resonant cavity, further includes:
The micro-ring resonant cavity is contracted to diameter in the range of 100 microns to 1000 microns by motorized precision translation stage device.
4. the method for manufacture fibre optical sensor according to claim 1, which is characterized in that the generation Whispering-gallery-mode
Resonant cavity are as follows: the bead of semiconductor material, the disk of semiconductor material, the bead of polymer material or the circle of polymer material
Disk.
5. the method for manufacture fibre optical sensor according to claim 1, which is characterized in that the generation Whispering-gallery-mode
The diameter of resonant cavity is in the range of 1 micron to 100 microns.
6. a kind of fibre optical sensor characterized by comprising substrate optical fiber, micro-nano fiber, micro-ring resonant cavity and the generation Echo Wall
The resonant cavity of mode；
Wherein, the micro-nano fiber be one section in the substrate optical fiber through draw taper at；
The micro-ring resonant cavity is that one section in the micro-nano fiber is knotted what processing was constituted；
The resonant cavity for generating Whispering-gallery-mode is adsorbed on the micro-ring resonant cavity by Van der Waals force.
7. fibre optical sensor according to claim 6, which is characterized in that the diameter of the micro-nano fiber is sub-wavelength amount
Grade.
8. fibre optical sensor according to claim 6, which is characterized in that the diameter of the micro-ring resonant cavity is at 100 microns
To in the range of 1000 microns.
9. fibre optical sensor according to claim 6, which is characterized in that the resonant cavity for generating Whispering-gallery-mode are as follows:
The bead of semiconductor material, the disk of semiconductor material, the bead of polymer material or the disk of polymer material.
10. fibre optical sensor according to claim 6, which is characterized in that the resonant cavity for generating Whispering-gallery-mode
Diameter is in the range of 1 micron to 100 microns.
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| CN201810865379.0A CN109186641B (en) | 2018-08-01 | 2018-08-01 | Method for manufacturing optical fiber sensor and optical fiber sensor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810865379.0A CN109186641B (en) | 2018-08-01 | 2018-08-01 | Method for manufacturing optical fiber sensor and optical fiber sensor |
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| CN109186641B CN109186641B (en) | 2022-03-11 |
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