CN105785287B - A kind of ultra-sensitivity magnetic field sensor based on optical microcavity - Google Patents
A kind of ultra-sensitivity magnetic field sensor based on optical microcavity Download PDFInfo
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- CN105785287B CN105785287B CN201610270459.2A CN201610270459A CN105785287B CN 105785287 B CN105785287 B CN 105785287B CN 201610270459 A CN201610270459 A CN 201610270459A CN 105785287 B CN105785287 B CN 105785287B
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- 230000003287 optical effect Effects 0.000 title claims abstract description 47
- 239000002121 nanofiber Substances 0.000 claims abstract description 54
- 239000011553 magnetic fluid Substances 0.000 claims abstract description 34
- 238000001228 spectrum Methods 0.000 claims abstract description 19
- 238000007711 solidification Methods 0.000 claims description 17
- 230000008023 solidification Effects 0.000 claims description 17
- 239000003292 glue Substances 0.000 claims description 14
- 239000000835 fiber Substances 0.000 claims description 6
- 238000005457 optimization Methods 0.000 claims description 2
- 238000010183 spectrum analysis Methods 0.000 claims description 2
- 230000035945 sensitivity Effects 0.000 abstract description 8
- 230000008901 benefit Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 239000007788 liquid Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000001723 curing Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 241000144295 Eurytrema Species 0.000 description 1
- 238000003848 UV Light-Curing Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005307 ferromagnetism Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000000565 sealant Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/032—Measuring direction or magnitude of magnetic fields or magnetic flux using magneto-optic devices, e.g. Faraday or Cotton-Mouton effect
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/0052—Manufacturing aspects; Manufacturing of single devices, i.e. of semiconductor magnetic sensor chips
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- Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Power Engineering (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Abstract
The present invention provides a kind of ultra-sensitivity magnetic field sensor based on optical microcavity.Optical microcavity is formed by fixed micro-nano fiber, micro-pipe and the magnetic fluid being packaged together, micro-nano fiber was around micro-pipe outer wall one week, micro-pipe inner hollow is packaged with magnetic fluid, micro-nano fiber input, outlet are separately connected wide spectrum light source and spectroanalysis instrument, and micro-nano fiber is wrapped in the circle of micro-pipe outer wall one and juxtaposition forms overlay region；Electromagnetic wave is issued by wide spectrum light source, is transmitted to optical microcavity through micro-nano fiber, then export to spectroanalysis instrument through micro-nano fiber.It is provided in the present invention and micro-nano fiber is surrounded into the structure that micro-pipe one is enclosed, contact of the electromagnetic wave with magnetic fluid is considerably increased, to make it have higher sensitivity.
Description
Technical field
The present invention relates to a kind of ultra-sensitivity magnetic field sensor based on optical microcavity has high sensitivity.
Background technique
Optical microcavity is a kind of important photonic device, has the advantages that high quality factor and small mode volume, in base
Plinth and application field receive significant attention, such as Eurytrema coelomatium, nonlinear optics, extremely low threshold value micro-cavity laser, height
Sensor etc..Optical micro-cavity sensors with Echo Wall mode of resonance are small in size, high sensitivity, detection limit are low,
And markless detection can be realized to biochemical molecule, detection confidence is high, has very much practical value.
Magnetic fluid is that the ferromagnetism particle for superscribing surfactant is dispersed in one formed in Suitable carrier liquids
Kind stable colloidal solutions.As a kind of new functional material, magnetic fluid has many unique magneto-optical properties, such as tunable refractive index
Characteristic, thermal lensing effect, Faraday effect, birefringence effect, magnetostrictive effect etc..These properties of magnetic fluid are opened
Hair is applied in many optical devices, such as optical filtering, adjustable optical switch, magneto-optic modulator etc..Among many properties,
Tunable refractive index characteristic is most widely used, more next using the optical device of this characteristic production and the sensing solutions of realization
It is more.
If the highly sensitive characteristic of echo wall mode optical micro-cavity mutually tied with the tunable refractive index characteristic of magnetic fluid
It closes, then highly sensitive magnetic field sensing can be realized.Its basic principle is as follows: optical microcavity is placed under magnetic field to be measured, outside
Under the action of adding magnetic field, the refractive index of magnetic fluid changes, that is, realizes the tuning as filter of whole device, finally
Cause the resonance wavelength of output optical signal to change, the letter in magnetic field to be measured can be detected by demodulating to output signal
Breath.
Summary of the invention
The present invention problem not high for current magnetic field sensor sensitivity, proposes a kind of having based on optical microcavity
The magnetic field sensor of high sensitivity.
The technical solution adopted by the invention is as follows:
The present invention includes fixing the micro-nano fiber, micro-pipe and the magnetic fluid that are packaged together and the optical microcavity formed, optics
Magnetic field signal is converted optical signal by microcavity, and micro-nano fiber is wrapped in the outer wall of micro-pipe, and draws both ends respectively as input terminal
And output end, the inner hollow of micro-pipe are packaged with magnetic fluid, the input terminal and output end of micro-nano fiber are separately connected wide spectrum light source
And spectroanalysis instrument, micro-nano fiber are wrapped in micro-pipe outer wall and form overlay region, the micro-nano fiber that overlay region is located above is defeated
Enter section, the underlying micro-nano fiber in overlay region is deferent segment, and input section and deferent segment form overlay region；Electromagnetic wave is by wide spectrum optical
Source issues, and is transmitted to overlay region by micro-nano fiber, electromagnetic wave a part in input section couples directly to deferent segment, another portion
Divide and continue to propagate along micro-nano fiber, reaches deferent segment, superimposed electromagnetic wave final output to light again after resonant cavity interior resonance
Spectrum analysis instrument.
One circle of the micro-nano fiber is wrapped in the outer wall of micro-pipe, and there are juxtapositions for the input terminal and output end of a circle
The part of micro-pipe outer wall is wound, and is close to arrange up and down as overlay region, the input terminal of overlay region and the micro-nano fiber of output end.
The micro-pipe is tube structure, and magnetic fluid is filled in cylinder, not any between micro-pipe tube wall and magnetic fluid
Bubble or gap.
Micro-nano fiber, micro-pipe and the magnetic fluid outside is wrapped up by solidification glue and being solidified, and solidification glue refractive index compares institute
The refractive index for stating micro-nano fiber fibre core is small.By in the encapsulation technology of overlay region and the fully enclosed fixation of micro-pipe, curing method is not only
It is limited to UV curing method.
The micro-nano fiber cross section is circle, and diameter is in micron dimension；The cross section of micro-pipe is annular, pipe thickness
In micron dimension.
The overlapping section length is obtained according to the parameter optimization of optical source wavelength, micro-pipe tube wall and magnetic fluid.
Further, the principle of optical microcavity are as follows:
(1) optical microcavity of the Whispering-gallery-mode is a filter, and the electromagnetic wave that wavelength is met certain condition more holds
Easily with this configuration and continue to travel in spectroanalysis instrument, forms corresponding frequency spectrum；
(2) refractive index of the magnetic fluid filled in optical microcavity is related with extraneous magnetic field size, since electromagnetic wave is by coupling
It closes in optical microcavity, can be occurred with the change of magnetic fluid refractive index by the frequency spectrum of the electromagnetic wave of microcavity one-to-one
Certain offset occurs relative to original frequency spectrum (magnetic field is not added) for variation, and then, Magnetic Field has just been integrated into electromagnetism
In the frequency spectrum of wave, by observing frequency spectrum, the size in added magnetic field just can be extrapolated.
After a week tightly around micro-pipe, the length of the overlay region of micro-nano fiber is set as some particular value to micro-nano fiber, thus
Keep the couple state of electromagnetic wave best.Since this is the device of very small (micron dimension) precision, any spot or ash
Dirt can all damage its function, therefore, which is totally immersed in also uncured liquid curing glue, is then shone with ultraviolet light
Penetrating makes to solidify adhesive curing, to prevent it contaminated or corrode, while also its relative position can be made to be kept fixed.
Therefore, the refractive index of magnetic fluid and solidification glue must be smaller than the refractive index of the fibre core of micro-nano fiber, to make electromagnetic wave
It is limited in micro-nano fiber and propagates without becoming separated in flight.
The invention has the benefit that
The present invention combines the filtering property of optical microcavity with the tunable refractive index characteristic of magnetic fluid, takes full advantage of light
The advantage of the high quality factor of microcavity and the highfield sensibility of magnetic fluid is learned, and is used micro-nano fiber around optical microcavity
One week and the overlapping specific special construction of section length, so as to produce the magnetic field sensor with high sensitivity.
Detailed description of the invention
Fig. 1 is integral module block diagram of the invention.
Fig. 2 is the structural schematic diagram of optical microcavity in the present invention (before wrapping solidification glue).
Fig. 3 is the structural schematic diagram of optical microcavity in the present invention (after wrapping solidification glue).
In figure, 1. wide spectrum light sources, 2. micro-nano fibers, 3. overlay regions, 4. micro-pipes, 5. magnetic fluids, 6. solidification glues, 7. spectrum point
Analyzer, 8. input sections, 9. deferent segments.
Specific embodiment
Present invention will be further explained below with reference to the attached drawings and examples.
As shown in Figure 1, the present invention includes three modules: wide spectrum light source 1, optical microcavity and spectroanalysis instrument 7, wide spectrum light source
1 delivery outlet micro-nano fiber 2 is connected to optical microcavity, and optical microcavity is used to convert optical signal for magnetic field signal, then again
It is connected to the input port of spectroanalysis instrument 7.
As shown in Fig. 2, optical microcavity includes fixed micro-nano fiber 2, micro-pipe 4 and the magnetic fluid 5 being packaged together, micro-nano light
Fibre 2 is wrapped in the outer wall of micro-pipe 4, and draws both ends respectively as input terminal and output end, and the inner hollow of micro-pipe 4 is packaged with magnetic
Fluid 5, the input terminal and output end of micro-nano fiber 2 are separately connected wide spectrum light source 1 and spectroanalysis instrument 7, and micro-nano fiber 2 is wrapped in
4 outer wall of micro-pipe simultaneously forms overlay region 3, and the micro-nano fiber 2 that overlay region 3 is located above is input section 8, and overlay region 3 is underlying
Micro-nano fiber 2 is deferent segment 9.
The wide range light of electromagnetic wave is issued by wide spectrum light source 1, overlay region 3 is transmitted to by micro-nano fiber 2, in input section 8
Electromagnetic wave a part couple directly to deferent segment 9, another part continues to propagate along micro-nano fiber 2, after resonant cavity interior resonance
Deferent segment 9, superimposed electromagnetic wave final output to spectroanalysis instrument 7 are reached again.
One circle of micro-nano fiber 2 is wrapped in the outer wall of micro-pipe 4, and there are overlap wrapping micro-pipes for the input terminal and output end of a circle
The part of 4 outer walls, and it is close to arrangement as overlay region 3, the input terminal of overlay region 3 and about 2 micro-nano fiber of output end.
Micro-pipe 4 is tube structure, and magnetic fluid 5 is filled in cylinder, does not have any gas between 4 tube wall of micro-pipe and magnetic fluid 5
Bubble or gap；The cross section of micro-pipe 4 is annular, and the outer diameter of micro-pipe 4 is available but is not limited only to 120um, and wall thickness is available but not only limits
In 4um.2 cross section of micro-nano fiber is circle, and diameter is available but is not limited only to 300nm.
By the package solidification of solidification glue 6 outside micro-nano fiber 2, micro-pipe 4 and magnetic fluid 5, it is liquid that solidification glue 6, which solidifies preceding,
It is solid-state after solidification, and 6 refractive index of solidification glue is smaller than the refractive index of 2 fibre core of micro-nano fiber.
Specific implementation process of the invention is as follows:
Optical microcavity is first constructed in the following ways: sucking magnetic fluid 4 with test tube in micro-pipe 3, magnetic fluid 4 is full of at this time
By micro-nano fiber 2 tightly around micro-pipe 3 one weeks, and there is part micro-nano with sealant by 3 sealing two ends of micro-pipe in 3 inner cavity of micro-pipe
2 overlap wrapping of optical fiber forms overlay region 3, as shown in Figure 2.Then the solidification glue 5 of defencive function has been covered on above structure surface,
Entire above structure is immersed in the solidification glue 5 of liquid, then makes its solidification with ultraviolet light irradiation, is obtained as shown in Figure 3.
Optical microcavity is placed in magnetic field to be measured, and the wide range electromagnetic wave of the stable and uniform generated by wide spectrum light source is via micro-nano light
Fibre travels in optical microcavity, and extraneous Magnetic Field can be integrated into the electromagnetic wave by the device by optical microcavity, then
The electromagnetic wave of process processing is continued on through to be traveled in spectroanalysis instrument by micro-nano fiber, passes through the electricity in analysis spectroanalysis instrument
Magnetic wave frequency spectrum can obtain corresponding magnetic field size.Through experimental analysis, the sensitivity of the magnetic field sensor can be of about 800nm/
RIU。
It can be seen that the present invention will take full advantage of the highfield sensibility of the high quality factor and magnetic fluid of optical microcavity
Advantage, using the specific special construction, the magnetic field sensor of formation has high sensitivity, has prominent significant
Technical effect.
Claims (5)
1. a kind of ultra-sensitivity magnetic field sensor based on optical microcavity, it is characterised in that: be packaged together including fixation micro-
Nano fiber (2), micro-pipe (4) and magnetic fluid (5) and the optical microcavity formed, magnetic field signal converts optical signal by optical microcavity,
Micro-nano fiber (2) is wrapped in the outer wall of micro-pipe (4), and draws both ends respectively as input terminal and output end, the inside of micro-pipe (4)
Hollow package has magnetic fluid (5), and the input terminal and output end of micro-nano fiber (2) are separately connected wide spectrum light source (1) and spectrum analysis
Instrument (7), micro-nano fiber (2) are wrapped in micro-pipe (4) outer wall and are formed overlay region (3), the micro-nano fiber being located above overlay region (3)
It (2) is input section (8) to be located at the micro-nano fiber (2) below overlay region (3) for deferent segment (9)；Electromagnetic wave is by wide spectrum light source (1)
Issue, be transmitted to overlay region (3) by micro-nano fiber (2), electromagnetic wave a part in input section (8) along micro-nano fiber (2) after
It resumes and leads, a part couples directly to deferent segment (9), the electromagnetic wave final output being formed by stacking to spectroanalysis instrument (7)；
One circle of the micro-nano fiber (2) is wrapped in the outer wall of micro-pipe (4), and the input terminal and output end of a circle are twined in the presence of overlapping
Around the part of micro-pipe (4) outer wall, and as overlay region (3), on the input terminal of overlay region (3) and the micro-nano fiber (2) of output end
Lower abutting arrangement.
2. a kind of ultra-sensitivity magnetic field sensor based on optical microcavity according to claim 1, it is characterised in that: described
Micro-pipe (4) be tube structure, magnetic fluid (5) is filled in cylinder, not any between micro-pipe (4) tube wall and magnetic fluid (5)
Bubble or gap.
3. a kind of ultra-sensitivity magnetic field sensor based on optical microcavity according to claim 1, it is characterised in that: described
Micro-nano fiber (2), outside micro-pipe (4) and magnetic fluid (5) by the solidification of solidification glue (6) package, and solidification glue (6) refractive index ratio
The refractive index of micro-nano fiber (2) fibre core is small.
4. a kind of ultra-sensitivity magnetic field sensor based on optical microcavity according to claim 1, it is characterised in that: described
Micro-nano fiber (2) cross section be circle, diameter is in micron dimension；The cross section of micro-pipe (4) is annular, and pipe thickness is in micron
Magnitude.
5. a kind of ultra-sensitivity magnetic field sensor based on optical microcavity according to claim 1, it is characterised in that: described
Overlay region (3) length according to the parameter optimization of optical source wavelength, micro-pipe (4) tube wall and magnetic fluid (5) obtain.
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| CN109085680B (en) * | 2018-08-14 | 2019-12-31 | 浙江大学 | Micro-nano optical fiber packaging method based on mechanical tapering |
| CN109342789A (en) * | 2018-10-18 | 2019-02-15 | 西安电子科技大学 | A kind of all-fiber current sensor and preparation method thereof |
| CN109884558B (en) * | 2019-02-20 | 2021-07-20 | 江苏大学 | Magnetic field sensor based on photonic crystal flat micro-cavity |
| CN112924908B (en) * | 2021-01-26 | 2021-11-09 | 北京邮电大学 | Magnetic field gradient detection method based on magneto-optical effect in optical microcavity |
| CN112924907B (en) * | 2021-01-26 | 2021-11-09 | 北京邮电大学 | High-sensitivity three-dimensional magnetic field detection method using optical microcavity |
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| DE10054810C2 (en) * | 2000-11-04 | 2002-10-24 | Moeller Gmbh | Magnetic field sensor based on the magneto-optical effect |
| CN100437174C (en) * | 2007-07-30 | 2008-11-26 | 浙江大学 | Metallic rod supported micro optical fiber circular optical resonance cavity |
| CN101598607A (en) * | 2009-07-03 | 2009-12-09 | 电子科技大学 | A kind of high sensitivity temperature sensor |
| CN101957478B (en) * | 2010-07-27 | 2012-05-09 | 中北大学 | Packaging structure and method for optical microcavity coupling system |
| CN103076575A (en) * | 2012-10-18 | 2013-05-01 | 中国计量学院 | Magnetic field sensor based on magnetic fluid poured polarization-maintaining photonic crystal fiber |
| CN103278782B (en) * | 2013-05-17 | 2016-07-06 | 天津理工大学 | A kind of magnetic field sensor based on magnetic fluid and micro-nano optical fiber evanescent field |
| CN104020424A (en) * | 2014-05-28 | 2014-09-03 | 江苏金迪电子科技有限公司 | All-fiber magnetic field sensor |
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