CN109143858A - A kind of Rigid-flexible Coupled Motion platform courses method based on perturbed force measurement compensation - Google Patents
A kind of Rigid-flexible Coupled Motion platform courses method based on perturbed force measurement compensation Download PDFInfo
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Abstract
The present invention discloses a kind of Rigid-flexible Coupled Motion platform courses method based on perturbed force measurement compensation, first using the speed of platform rigid body and displacement as feed back, the driving unit of platform rigid body is actuator, establish the closed-loop control system of platform rigid body, then the speed of detection framework rigid body and displacement and respectively with the speed of platform rigid body and displacement work it is poor, obtain speed difference and displacement difference between the two, then by obtained speed difference and displacement difference respectively multiplied by the damping of flexible hinge and rigidity, the flexible hinge is obtained to the perturbed force of platform rigid body, obtained perturbed force is finally converted into equivalent control amount divided by the transmission function of control amount to driving force, multiplied by a proportional gain compensation into the control amount of platform rigid body, it is changed into undisturbed rigid body platform control system.Compared with the prior art, technical solution of the present invention without switching control and reduces control complexity, final to realize high speed and precision movement.
Description
Technical field
It is the present invention relates to high speed and precision movement control technology field, in particular to a kind of based on the rigid of perturbed force measurement compensation
Soft coupled motions platform courses method.
Background technique
In high speed and precision motion control field, based on the motion platform of mechanical guide, there are frictional deads, therefore control essence
Degree can only achieve micron level.And in the occasion of higher precision control, it needs using modes such as air bearing, magnetic suspension or hydrostatic slideways
It even is eliminated frictional influence to reduce, however uses the scheme higher cost of above-mentioned technology, and the environmental requirement used is higher
And the electronic manufacturing technology field having a large capacity and a wide range is not suitable for it.
Moore's Law present in electronics manufacturing, i.e., when price does not change, open ended component on integrated circuit
Number will be doubled every about 18~24 months, and performance will also promote one times, the in this way precision and speed for encapsulation equipment
Degree proposes more stringent requirement.Traditional Friction Compensation scheme and control method are difficult to meet growing high speed essence
Close motion control demand.To solve the above problems, field technology personnel, which have been working hard searching, can overcome friction and disturbance
Control program, wherein linear active disturbance rejection control algolithm (LADRC) is a kind of effective ways of disturbance cancelling, and this method is by by mould
Type error and external disturbance carry out unified consideration, in this way can disturbance suppression to a certain extent, but have Scientific Research Workers logical
Cross in electrical servo system application LADRC is tested and analyzed and find, LADRC can not be suitable for high bandwidth require and by
The control object of strong nonlinearity (dead zone etc.) caused by rubbing.At the same time, first technology using friction free flexible hinge with
Mechanical guide platform combines the compensation to realize frictional dead, but not due to the control law of high-speed motion and compensation process
Unanimously, models switching control is needed, but models switching controls so that entire control process becomes complicated and cumbersome.
Summary of the invention
The main object of the present invention is to propose a kind of Rigid-flexible Coupled Motion platform courses side based on perturbed force measurement compensation
Method, it is intended to it realizes without switching control and reduces control complexity, it is final to realize high speed and precision movement.
To achieve the above object, a kind of Rigid-flexible Coupled Motion platform control based on perturbed force measurement compensation proposed by the present invention
Method processed, specifically includes the following steps:
S1: by modeling and testing, spring rates of flexure hinges and damping are obtained；
S2: using the speed of platform rigid body and displacement as feedback, the driving unit of the platform rigid body is actuator, is established
The closed-loop control system of the platform rigid body；
S3: the speed of detection framework rigid body and displacement are simultaneously poor with the speed of the platform rigid body and displacement work respectively, obtain
Speed difference and displacement difference between the two；
S4: by the obtained speed difference of the S3 and displacement difference respectively multiplied by the damping of flexible hinge and rigidity, it is soft to obtain this
Perturbed force of the property hinge to the platform rigid body；
S5: the perturbed force that the S4 is obtained is converted into equivalent control divided by the transmission function of control amount to driving force
Amount is changed into undisturbed rigid body platform courses multiplied by a proportional gain compensation into the control amount of the platform rigid body
System.
Preferably, the control object of the control method is Coupled Rigid-flexible platform, and the Coupled Rigid-flexible platform includes described
The frame rigid body that is installed on mechanical guide and the platform rigid body on the frame rigid body is connected to by flexible hinge.
Preferably, the frame rigid body and the platform rigid body are separately installed with velocity of displacement detection unit.
Preferably, the platform rigid body installs driving unit.
Preferably, the frame rigid body installs driving unit, is with the speed and displacement of the frame rigid body in the S2
It feeds back, the driving unit on the frame rigid body is actuator and the closed-loop control system for establishing the frame rigid body.
Preferably, with the control system of the control method by control object, velocity of displacement detection unit, driving unit
And controller composition.
Preferably, the proportional gain of the S5 is for adjusting measurement error, is 1 when the proportional gain is error free.
Preferably, information needed is obtained by measurement in the control method, passes through mould if it can not obtain by measurement
Type is calculated.
Technical solution of the present invention has the advantage that compared with the prior art
The disturbance of mechanical guide frictional force is changed into flexibility by design of the technical solution of the present invention based on Coupled Rigid-flexible platform
The dynamic deformation of hinge, the compensation control of the flexible hinge elastic force of technical solution and damping force, keeps platform rigid through the invention
Body is equivalent to a friction free ideal platform, and high speed and precision movement may be implemented in this way, without switching control and reduce control
Complexity processed.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of invention for those of ordinary skill in the art without creative efforts, can be with
The structure shown according to these attached drawings obtains other attached drawings.
Fig. 1 is the working principle diagram of the single driving motion control of the embodiment of the present invention 1；
Fig. 2 is the working principle diagram of 2 double drive motion control of the embodiment of the present invention；
Fig. 3 is the position tracking error curve diagram of PID approach and ADRC method in the embodiment of the present invention 3；
Fig. 4 is that the stiffness variation of PID approach in the embodiment of the present invention 3 influences result figure to tracking error；
Fig. 5 is that the stiffness variation of ADRC method in the embodiment of the present invention 3 influences result figure to tracking error.
The embodiments will be further described with reference to the accompanying drawings for the realization, the function and the advantages of the object of the present invention.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiment is only a part of the embodiments of the present invention, instead of all the embodiments.Base
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts it is all its
His embodiment, shall fall within the protection scope of the present invention.
It is to be appreciated that if relating to directionality instruction (such as up, down, left, right, before and after ...) in the embodiment of the present invention,
Then directionality instruction be only used for explain under a certain particular pose (as shown in the picture) between each component relative positional relationship,
Motion conditions etc., if the particular pose changes, directionality instruction is also correspondingly changed correspondingly.
In addition, being somebody's turn to do " first ", " second " etc. if relating to the description of " first ", " second " etc. in the embodiment of the present invention
Description be used for description purposes only, be not understood to indicate or imply its relative importance or implicitly indicate indicated skill
The quantity of art feature." first " is defined as a result, the feature of " second " can explicitly or implicitly include at least one spy
Sign.It in addition, the technical solution between each embodiment can be combined with each other, but must be with those of ordinary skill in the art's energy
It is enough realize based on, will be understood that the knot of this technical solution when conflicting or cannot achieve when occurs in the combination of technical solution
Conjunction is not present, also not the present invention claims protection scope within.
The present invention proposes a kind of Rigid-flexible Coupled Motion platform courses method based on perturbed force measurement compensation.
The control object of Rigid-flexible Coupled Motion platform courses method proposed by the present invention based on perturbed force measurement compensation is
Coupled Rigid-flexible platform includes mainly frame rigid body and platform rigid body, and wherein frame rigid body is mounted on mechanical guide, platform rigid body
Then it is mounted on frame rigid body by flexible hinge.
Wherein frame rigid body and platform rigid body are separately installed with velocity of displacement detection unit, and driving is equipped on platform rigid body
Unit, frame rigid body can choose to install driving unit.And entire control system is single by control object, velocity of displacement detection unit, driving
Member and controller composition.
Rigid-flexible Coupled Motion platform courses method based on perturbed force measurement compensation of the invention, specifically includes following control
Step:
S1: by modeling and testing, spring rates of flexure hinges and damping are obtained；
S2: using the speed of platform rigid body and displacement as feedback, the driving unit of platform rigid body is actuator, establishes platform
The closed-loop control system of rigid body；
Both S3: the speed of detection framework rigid body and displacement are simultaneously poor with the speed of platform rigid body and displacement work respectively, obtain
Between speed difference and displacement difference；
S4: it by the obtained speed difference of above-mentioned steps S3 and displacement difference respectively multiplied by the damping of flexible hinge and rigidity, obtains
Perturbed force of the flexible hinge to platform rigid body；
S5: the perturbed force that above-mentioned steps S4 is obtained is converted into equivalent control divided by the transmission function of control amount to driving force
Amount processed is changed into undisturbed rigid body platform courses system multiplied by a proportional gain compensation into the control amount of platform rigid body
System.
In technical solution of the present invention, if frame rigid body also installs driving unit, with the speed of frame rigid body in above-mentioned steps S2
It spends and is displaced the driving unit to feed back, on frame rigid body as actuator and establishes the closed-loop control system of frame rigid body, in this way
The speed of platform can be improved and reduce the disturbance of flexible hinge.
Wherein the proportional gain of the above-mentioned steps S5 in technical solution of the present invention is for adjusting measurement error, proportional gain without
It is 1 when error.Information needed passes through measurement as far as possible and obtains in above-mentioned control method, passes through mould if it can not obtain by measurement
Type is calculated.
Rigid-flexible Coupled Motion platform courses method of the technical solution of the present invention based on perturbed force measurement compensation is by mechanical guide
The disturbance of frictional force is changed into the dynamic deformation of flexible hinge, is controlled, is made by the compensation of flexible hinge elastic force and damping force
Platform rigid body is equivalent to a friction free ideal platform to realize the movement of high speed and precision and without switching over control.
Embodiment 1
In embodiments of the present invention, Coupled Rigid-flexible platform mainly includes mechanical guide, frame rigid body, flexible hinge, platform
Rigid body composition, sets XM,XmThe respectively displacement of frame rigid body and platform rigid body,Respectively frame rigid body and platform are rigid
The speed of body, M, m are respectively the quality of frame rigid body and platform rigid body, and k, c are respectively the rigidity and damping of flexible hinge, FM,Fm
Respectively driving unit acts on the driving force on frame rigid body and platform rigid body, fμBetween frame rigid body and mechanical guide
Frictional force.
The Rigid-flexible Coupled Motion platform courses method based on perturbed force measurement compensation of the present embodiment is single driving movement control
It makes, wherein platform rigid motion mechanical response equation are as follows:
Frame rigid motion mechanical response equation are as follows:
The stress of flexible hinge are as follows:
After carrying out disturbance compensation, the dynamic response equation of platform rigid body are as follows:
Flexible hinge force bearing formulae (3) is substituting to the dynamic response equation of platform rigidity, i.e. formula (4), is put down
The equivalent power response equation of platform rigid body are as follows:
In the present embodiment, the equivalent power response equation for the platform rigid body that formula (5) obtains is flat for friction free ideal
Platform, in the present embodiment, frame rigid body are to overcome fricting movement, the disturbance of friction under the active force Δ f effect of flexible hinge
Cause the variation of framework platform acceleration and the deformation of flexible hinge, therefore the present embodiment will be unable to the friction force-disturbance turn of measurement
It is changed to the flexible hinge effect that can be measured.
Embodiment 2
In embodiments of the present invention, Coupled Rigid-flexible platform mainly includes mechanical guide, frame rigid body, flexible hinge, platform
Rigid body composition, sets XM,XmThe respectively displacement of frame rigid body and platform rigid body,Respectively frame rigid body and platform are rigid
The speed of body, M, m are respectively the quality of frame rigid body and platform rigid body, and k, c are respectively the rigidity and damping of flexible hinge, FM,Fm
Respectively driving unit acts on the driving force on frame rigid body and platform rigid body, fμBetween frame rigid body and mechanical guide
Frictional force.
The Rigid-flexible Coupled Motion platform courses method based on perturbed force measurement compensation of the present embodiment is double drive movement control
It makes, wherein platform rigid motion mechanical response equation are as follows:
Frame rigid motion mechanical response equation are as follows:
Wherein FMFor the moving target and frame rigid body speed offset deviation of platform rigid body, and calculated according to control law
It arrives.
The stress of flexible hinge are as follows:
After carrying out disturbance compensation, the dynamic response equation of platform rigid body are as follows:
Flexible hinge force bearing formulae (8) is substituting to the dynamic response equation of platform rigidity, i.e. formula (9), is put down
The equivalent power response equation of platform rigid body are as follows:
For the present embodiment using double drive project of motion control, the driving force on frame rigid body generates frame rigid body
Movement, it can be achieved that the movement of higher speed after the driving force superposition of the two.In addition, the movement of frame rigid body is so that rigid with platform
Speed displacement deviation between body becomes smaller, and the dynamic deformation disturbance of flexible hinge can be effectively reduced, so that performance is more preferable.
Embodiment 3
The platform parameters of the present embodiment are as follows:
| Product platform quality m | 2kg |
| Frame mass M | 2kg |
| Coefficient of friction | 0.2 |
| Spring rates of flexure hinges k | 2000N/mm |
| Flexible hinge damps c | 100N/mm/s |
| The Kp of optimization | 35702280.82 |
| The Ki of optimization | 7172.72 |
| The Kd of optimization | 349977.10 |
Referring to fig. 2 to Fig. 4, when using traditional PID approach and using the ADRC method of spring damping force compensating, position tracking
Error curve compares as shown in Fig. 2, worst error drops to 9e-9, reduction an order of magnitude from 9e-8.
When using PID control, if model parameter is changed, tracking error is with variation, as shown in figure 3, however adopting
With Active Disturbance Rejection Control (ADRC) method of the technical solution of the present invention of spring damping force compensating, tracking error hardly follows model change
Change and changes, it is shown that good Immunity Performance, as shown in Figure 4.
The above description is only a preferred embodiment of the present invention, is not intended to limit the scope of the invention, all at this
Under the design of invention, using equivalent structure transformation made by description of the invention and accompanying drawing content, or directly/it is used in it indirectly
He is included in scope of patent protection of the invention relevant technical field.
Claims (8)
1. it is a kind of based on perturbed force measurement compensation Rigid-flexible Coupled Motion platform courses method, which is characterized in that specifically include with
Lower step:
S1: by modeling or testing, spring rates of flexure hinges and damping are obtained；
S2: using the speed of platform rigid body and displacement as feedback, the driving unit of the platform rigid body is actuator, described in foundation
The closed-loop control system of platform rigid body；
Both S3: the speed of detection framework rigid body and displacement are simultaneously poor with the speed of the platform rigid body and displacement work respectively, obtain
Between speed difference and displacement difference；
S4: by the obtained speed difference of the S3 and displacement difference respectively multiplied by the damping of flexible hinge and rigidity, the flexible hinge is obtained
Perturbed force of the chain to the platform rigid body；
S5: being converted to equivalent control amount divided by the transmission function of control amount to driving force for the perturbed force that the S4 is obtained, then
Multiplied by a proportional gain compensation into the control amount of the platform rigid body, it is changed into undisturbed rigid body platform control system.
2. control method as described in claim 1, which is characterized in that the control object of the control method is flat for Coupled Rigid-flexible
Platform, the Coupled Rigid-flexible platform include the frame rigid body being installed on mechanical guide and are connected to institute by flexible hinge
State the platform rigid body on frame rigid body.
3. control method as claimed in claim 2, which is characterized in that the frame rigid body and the platform rigid body are installed respectively
There is velocity of displacement detection unit.
4. control method as claimed in claim 3, which is characterized in that the platform rigid body installs driving unit.
5. control method as claimed in claim 3, which is characterized in that the frame rigid body installs driving unit, in the S2
It is feedback with the speed of the frame rigid body and displacement, the driving unit on the frame rigid body is actuator and establishes the frame
The closed-loop control system of frame rigid body.
6. control method as described in claim 4 or 5, which is characterized in that with the control system of the control method by controlling
Object, velocity of displacement detection unit, driving unit and controller composition processed.
7. control method as described in claim 1, which is characterized in that the proportional gain of the S5 is used to adjust measurement error,
It is 1 when the proportional gain is error free.
8. control method as described in claim 1, which is characterized in that information needed is by measuring in the control method
It arrives, is calculated if it can not be obtained by measurement by model.
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| CN110941181A (en) * | 2019-08-29 | 2020-03-31 | 广东工业大学 | Rigid-flexible coupling motion platform control method for piezoelectric ceramic connection |
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| CN118092350A (en) * | 2024-02-29 | 2024-05-28 | 苏州矽行半导体技术有限公司 | Flexible vibration feedback control method based on overdrive and wafer detection equipment |
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| CN118092350A (en) * | 2024-02-29 | 2024-05-28 | 苏州矽行半导体技术有限公司 | Flexible vibration feedback control method based on overdrive and wafer detection equipment |
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