CN109065490B - Automatic carrying equipment for feeding of semiconductor substrate - Google Patents
Automatic carrying equipment for feeding of semiconductor substrate Download PDFInfo
- Publication number
- CN109065490B CN109065490B CN201810941335.1A CN201810941335A CN109065490B CN 109065490 B CN109065490 B CN 109065490B CN 201810941335 A CN201810941335 A CN 201810941335A CN 109065490 B CN109065490 B CN 109065490B
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- China
- Prior art keywords
- sucker
- spring
- fixedly connected
- connecting piece
- semiconductor substrate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67796—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations with angular orientation of workpieces
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention discloses automatic carrying equipment for feeding a semiconductor substrate, which comprises a stand column, wherein a cross rod is arranged on one side of the stand column, a first spring is arranged on one side of the cross rod, one end of the first spring is fixedly connected with the cross rod, a balance plate is arranged on the other end of the first spring, a fixed block is arranged on one side of the balance plate, a sucker is arranged on one side of the fixed block, second springs are arranged on two sides of the sucker, one end of each second spring is fixedly connected with the corresponding sucker, and the other end of each second spring is fixedly connected with the corresponding balance plate. According to the invention, the second spring is arranged on one side of the sucker, the electric telescopic rod is extended, meanwhile, the stepping motor works to drive the gear disc to rotate, the gear disc rotates to drive the connecting piece to rotate, the connecting piece rotates to drive the stand column to move towards one side, when the sucker on one side of the stand column contacts the substrate, the sucker moves towards one side to drive the second spring to compress due to the existence of mutual acting force, and the surface of the sucker is tightly attached to the surface of the substrate due to the recovery deformation of the second spring.
Description
Technical Field
The invention relates to the technical field of automatic conveying, in particular to automatic conveying equipment for feeding a semiconductor substrate.
Background
At present, the dependence of the semiconductor equipment in China on the beauty is high, the friction upgrading can destroy the fair competitive environment of the market, the development of the electronic industry in China is not facilitated, meanwhile, the development opportunity is brought to the semiconductor equipment industry in China, but the existing production equipment can not firmly suck the substrate due to the fact that the sucker can not firmly suck the substrate because of the placing angle deviation of the semiconductor substrate in the transportation process of the semiconductor substrate, and the substrate is easily damaged.
Therefore, it is necessary to provide an automatic handling apparatus for feeding semiconductor substrates to solve the above problems.
Disclosure of Invention
The invention aims to provide automatic conveying equipment for feeding a semiconductor substrate, which adapts to the placing angle of the substrate by utilizing the variable angle of a sucker, ensures that the surface of the sucker is tightly attached to the surface of the substrate by utilizing the recovery deformation of a second spring, and ensures that air in the sucker is pumped out through an air pipe by the working of an air pump, so that the substrate is sucked by the sucker, and the problems in the background art are solved.
In order to achieve the purpose, the invention provides the following technical scheme: an automatic carrying device for feeding semiconductor substrates comprises a vertical column, wherein a cross rod is arranged on one side of the vertical column, a first spring is arranged on one side of the cross rod, one end of the first spring is fixedly connected with the cross rod, a balance plate is arranged on the other end of the first spring, a fixed block is arranged on one side of the balance plate, a sucker is arranged on one side of the fixed block, second springs are arranged on two sides of the sucker, one end of each second spring is fixedly connected with the sucker, the other end of each second spring is fixedly connected with the balance plate, an air pipe is arranged on one side of the sucker, a connecting piece is arranged on one side of the vertical column, one end of the connecting piece is fixedly connected with the vertical column, a gear plate is arranged on the other end of the connecting piece, a stepping motor is arranged on one side of the gear plate, the output end of the stepping motor is matched with the gear plate, an electric telescopic rod is arranged on one side of the connecting piece, one end of the electric telescopic rod is hinged with the vertical column, the bottom end of the electric telescopic rod is hinged with the connecting piece.
Preferably, the cross section of one end of the fixing block is hemispherical, a groove is formed in one side of the sucker, and the groove is matched with one end of the fixing block.
Preferably, the first spring is internally provided with a telescopic sleeve, one end of the telescopic sleeve is fixedly connected with the cross rod, and the other end of the telescopic sleeve is fixedly connected with the balance plate.
Preferably, one end of the vent pipe is connected with a suction pump.
Preferably, the surface of the sucking disc is provided with a sealing gasket, and the sealing gasket is made of a rubber material.
Preferably, the number of the cross rods is set to be a plurality of, the cross rods are uniformly distributed on the surface of the stand column, and a base plate is arranged on one side of the sucking disc.
The invention has the technical effects and advantages that:
1. the second spring is arranged on one side of the sucker, the electric telescopic rod is extended, meanwhile, the stepping motor works to drive the gear disc to rotate, the gear disc rotates to drive the connecting piece to rotate, the connecting piece rotates to drive the stand column to move towards one side, when the sucker on one side of the stand column contacts the substrate, the sucker moves towards one side to drive the second spring to compress due to the existence of interaction force, the second spring recovers deformation to enable the surface of the sucker to be tightly attached to the surface of the substrate, the air in the sucker is pumped out through the air pipe by the work of the air pump, so that the substrate is sucked by the sucker, the problem that the sucker cannot suck the substrate due to the deviation of the placement angle of the substrate is favorably solved, and the working efficiency and the resource utilization rate are improved;
2. through setting up fixed block one end cross sectional shape to the hemisphere, sucking disc one side sets up the recess with hemisphere looks adaptation simultaneously, is favorable to improving sucking disc pivoted flexibility and directionality, and through being equipped with first spring, when the sucking disc contact base plate, first spring is compressed, and first spring resumes the power that deformation produced and the extrusion force that the stand motion produced and cushions, and favourable power is avoided sending the whole base plate and is extrudeed and lead to the base plate damaged condition.
Drawings
Fig. 1 is a side view of the present invention.
Fig. 2 is a top view of the present invention.
FIG. 3 is an enlarged view of portion A of FIG. 1 according to the present invention.
In the figure: the device comprises a vertical column 1, a cross rod 2, a first spring 3, a balance plate 4, a fixed block 5, a sucker 6, a second spring 7, an air pipe 8, a connecting piece 9, a gear plate 10, a stepping motor 11, an electric telescopic rod 12, a telescopic sleeve 13, a sealing gasket 14 and a base plate 15.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The invention provides automatic carrying equipment for feeding semiconductor substrates as shown in figures 1-3, which comprises an upright post 1, wherein a cross rod 2 is arranged on one side of the upright post 1, a first spring 3 is arranged on one side of the cross rod 2, one end of the first spring 3 is fixedly connected with the cross rod 2, the other end of the first spring 3 is provided with a balance plate 4, a fixed block 5 is arranged on one side of the balance plate 4, a sucker 6 is arranged on one side of the fixed block 5, second springs 7 are respectively arranged on two sides of the sucker 6, one end of each second spring 7 is fixedly connected with the sucker 6, the other end of each second spring 7 is fixedly connected with the balance plate 4, a vent pipe 8 is arranged on one side of the sucker 6, a connecting piece 9 is arranged on one side of the upright post 1, one end of the connecting piece 9 is fixedly connected with the upright post 1, the other end of the connecting piece 9 is provided with a gear plate 10, and one side of the gear plate 10 is provided with a stepping motor 11, 11 output and the toothed disc 10 looks adaptation of step motor, 9 one sides of connecting piece are equipped with electric telescopic handle 12, 12 one ends of electric telescopic handle are articulated with stand 1, 12 bottoms of electric telescopic handle are articulated with connecting piece 9.
Further, in the above technical solution, the cross section of one end of the fixed block 5 is hemispherical, a groove is provided on one side of the suction cup 6, and the groove is adapted to one end of the fixed block 5;
further, in the above technical solution, an extension sleeve 13 is arranged inside the first spring 3, one end of the extension sleeve 13 is fixedly connected with the cross bar 2, and the other end of the extension sleeve 13 is fixedly connected with the balance plate 4;
further, in the above technical solution, one end of the vent pipe 8 is connected with an air pump;
further, in the above technical solution, a sealing gasket 14 is arranged on the surface of the suction cup 6, the sealing gasket 14 is made of a rubber material, and the rubber material has good deformability;
further, in the above technical solution, the number of the cross bars 2 is set to be a plurality, the cross bars 2 are uniformly arranged on the surface of the column 1, and a substrate 15 is arranged on one side of the suction cup 6.
The working principle of the invention is as follows:
referring to the attached drawings 1-3 of the specification, an electric telescopic rod 12 is extended, meanwhile, a stepping motor 11 works to drive a gear disc 10 to rotate, the gear disc 10 rotates to drive a connecting piece 9 to rotate, the connecting piece 9 rotates to drive an upright post 1 to move towards one side, when a sucker 6 on one side of the upright post 1 contacts a substrate 15, due to the existence of interaction force, the sucker 6 moves towards one side to drive a second spring 7 to compress, the second spring 7 recovers deformation to enable the surface of the sucker 6 to be tightly attached to the surface of the substrate 15, and an air suction pump works to enable air inside the sucker 6 to be sucked through an air pipe 8, so that the substrate 15 is sucked by the sucker 6, the problem that the sucker 6 cannot suck the substrate 15 due to the deviation of the placing angle of the substrate 15 is solved, and the working efficiency and the resource utilization rate are improved;
referring to the attached drawing 3 of the specification, the cross section of one end of the fixing block 5 is hemispherical, and meanwhile, one side of the sucker 6 is provided with a groove matched with the hemisphere, so that the rotation flexibility and the rotation direction of the sucker 6 are favorably improved, the first spring 3 is compressed when the sucker 6 contacts the base plate 15, the force generated by the recovery deformation of the first spring 3 and the extrusion force generated by the movement of the upright post 1 are buffered, and the situation that the base plate 15 is damaged due to the extrusion of the whole base plate 15 is favorably avoided.
Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments or portions thereof without departing from the spirit and scope of the invention.
Claims (5)
1. An automatic handling equipment of semiconductor substrate feeding, includes stand (1), its characterized in that: the novel vertical column is characterized in that a cross rod (2) is arranged on one side of the vertical column (1), a first spring (3) is arranged on one side of the cross rod (2), one end of the first spring (3) is fixedly connected with the cross rod (2), a balance plate (4) is arranged on the other end of the first spring (3), a fixed block (5) is arranged on one side of the balance plate (4), a sucker (6) is arranged on one side of the fixed block (5), the cross section of one end of the fixed block (5) is hemispherical, a groove is formed in one side of the sucker (6), the groove is matched with one end of the fixed block (5), second springs (7) are arranged on two sides of the sucker (6), one end of each second spring (7) is fixedly connected with the sucker (6), the other end of each second spring (7) is fixedly connected with the balance plate (4), a vent pipe (8) is arranged on one side of the sucker (6), a connecting piece (9) is arranged on one side of the vertical column (1), connecting piece (9) one end and stand (1) fixed connection, connecting piece (9) other end is equipped with toothed disc (10), toothed disc (10) one side is equipped with step motor (11), step motor (11) output and toothed disc (10) looks adaptation, connecting piece (9) one side is equipped with electric telescopic handle (12), electric telescopic handle (12) one end is articulated with stand (1), electric telescopic handle (12) bottom is articulated with connecting piece (9).
2. The automated semiconductor substrate handling apparatus of claim 1, wherein: the first spring (3) is internally provided with a telescopic sleeve (13), one end of the telescopic sleeve (13) is fixedly connected with the cross rod (2), and the other end of the telescopic sleeve (13) is fixedly connected with the balance plate (4).
3. The automated semiconductor substrate handling apparatus of claim 1, wherein: one end of the vent pipe (8) is connected with an air pump.
4. The automated semiconductor substrate handling apparatus of claim 1, wherein: the surface of the sucker (6) is provided with a sealing gasket (14), and the sealing gasket (14) is made of rubber materials.
5. The automated semiconductor substrate handling apparatus of claim 1, wherein: the quantity of horizontal pole (2) sets up to a plurality ofly, and is a plurality of horizontal pole (2) evenly arrange on stand (1) surface, sucking disc (6) one side is equipped with base plate (15).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810941335.1A CN109065490B (en) | 2018-08-17 | 2018-08-17 | Automatic carrying equipment for feeding of semiconductor substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810941335.1A CN109065490B (en) | 2018-08-17 | 2018-08-17 | Automatic carrying equipment for feeding of semiconductor substrate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109065490A CN109065490A (en) | 2018-12-21 |
| CN109065490B true CN109065490B (en) | 2021-08-17 |
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ID=64687240
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810941335.1A Active CN109065490B (en) | 2018-08-17 | 2018-08-17 | Automatic carrying equipment for feeding of semiconductor substrate |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109065490B (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002026109A (en) * | 2000-07-05 | 2002-01-25 | Yokogawa Electric Corp | Pickup apparatus for handlers |
| CN101712155A (en) * | 2008-09-29 | 2010-05-26 | 优志旺电机株式会社 | Substrate conveying arm |
| CN107601045A (en) * | 2017-08-30 | 2018-01-19 | 柏伟伟 | A kind of sucker type glass plate lift transport device |
| CN207415731U (en) * | 2017-10-20 | 2018-05-29 | 宿迁富祥玻璃制品有限公司 | A kind of glass processing center fixing device of angle adjustable |
-
2018
- 2018-08-17 CN CN201810941335.1A patent/CN109065490B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002026109A (en) * | 2000-07-05 | 2002-01-25 | Yokogawa Electric Corp | Pickup apparatus for handlers |
| CN101712155A (en) * | 2008-09-29 | 2010-05-26 | 优志旺电机株式会社 | Substrate conveying arm |
| CN107601045A (en) * | 2017-08-30 | 2018-01-19 | 柏伟伟 | A kind of sucker type glass plate lift transport device |
| CN207415731U (en) * | 2017-10-20 | 2018-05-29 | 宿迁富祥玻璃制品有限公司 | A kind of glass processing center fixing device of angle adjustable |
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| Publication number | Publication date |
|---|---|
| CN109065490A (en) | 2018-12-21 |
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