CN109065490A - A kind of automatic transportation equipment of semiconductor substrate charging - Google Patents
A kind of automatic transportation equipment of semiconductor substrate charging Download PDFInfo
- Publication number
- CN109065490A CN109065490A CN201810941335.1A CN201810941335A CN109065490A CN 109065490 A CN109065490 A CN 109065490A CN 201810941335 A CN201810941335 A CN 201810941335A CN 109065490 A CN109065490 A CN 109065490A
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- China
- Prior art keywords
- spring
- sucker
- column
- fixedly connected
- cross bar
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67796—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations with angular orientation of workpieces
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention discloses a kind of automatic transportation equipments of semiconductor substrate charging, including column, the column side is equipped with cross bar, the cross bar side is equipped with the first spring, first spring one end is fixedly connected with cross bar, the first spring other end is equipped with balance plate, the balance plate side is equipped with fixed block, the fixed block side is equipped with sucker, the sucker two sides are equipped with second spring, described second spring one end is fixedly connected with sucker, and the second spring other end is fixedly connected with balance plate.The present invention is equipped with second spring by sucker side, extend electric telescopic rod, stepper motor work belt movable tooth wheel disc rotation simultaneously, toothed disc rotation band follower link rotates, connector rotation drives column to move toward side, when one side suction cup of column touches substrate, due to the presence of interaction force, sucker is moved toward side drives second spring compression, and second spring, which restores deformation, makes chuck surface be tightly attached to substrate surface.
Description
Technical field
The present invention relates to automatic transporting technical field, in particular to a kind of automatic transportation equipment of semiconductor substrate charging.
Background technique
Currently, China's semiconductor equipment is higher to U.S. dependency degree, friction upgrading can destroy market level playing field, unfavorable
In the development of domestic electronic industry, while this brings opportunity to develop to Chinese semiconductor equipment industry, but existing equipment exists
Often cause sucker that can not be sucked securely because of semiconductor substrate placed angle deviation in semiconductor substrate transportational process
Substrate, to be easy to cause substrate damage.
Therefore, the automatic transportation equipment for inventing a kind of semiconductor substrate charging is necessary to solve the above problems.
Summary of the invention
The purpose of the present invention is to provide a kind of automatic transportation equipments of semiconductor substrate charging, utilize sucker variable-angle
Adapt to the placed angle of substrate, restoring deformation using second spring makes chuck surface be tightly attached to substrate surface, is evacuated pump work
Detach suction cup interior air through snorkel, to make substrate be sucked by sucker, to solve mentioned above in the background art ask
Topic.
To achieve the above object, the invention provides the following technical scheme: a kind of automatic transporting of semiconductor substrate charging is set
Standby, including column, the column side is equipped with cross bar, and the cross bar side is equipped with the first spring, first spring one end with
Cross bar is fixedly connected, and the first spring other end is equipped with balance plate, and the balance plate side is equipped with fixed block, the fixed block
Side is equipped with sucker, and the sucker two sides are equipped with second spring, and described second spring one end is fixedly connected with sucker, and described the
The two spring other ends are fixedly connected with balance plate, and the sucker side is equipped with snorkel, and the column side is equipped with connector, institute
It states connector one end to be fixedly connected with column, the connector other end is equipped with toothed disc, and the toothed disc side is equipped with stepping
Motor, the stepper motor output end are adapted with toothed disc, and the connector side is equipped with electric telescopic rod, described electronic to stretch
Contracting bar one end and column are hinged, and the electric telescopic rod bottom end and connector are hinged.
Preferably, described fixed block one end cross-sectional shape is set as hemispherical, and the sucker side is equipped with groove, described
Groove is adapted with fixed block one end.
Preferably, first spring inner is equipped with telescopic sleeve, and described telescopic sleeve one end is fixedly connected with cross bar, institute
The telescopic sleeve other end is stated to be fixedly connected with balance plate.
Preferably, described snorkel one end is connected with aspiration pump.
Preferably, the chuck surface is equipped with gasket, and the gasket is made of rubber material.
Preferably, the quantity of the cross bar is set as multiple, and multiple cross bars are evenly spaced in leg surface, the suction
Disk side is equipped with substrate.
Technical effect and advantage of the invention:
1, second spring is equipped with by sucker side, extends electric telescopic rod, while stepper motor work belt movable tooth wheel disc rotates,
Toothed disc rotation band follower link rotates, and connector rotation drives column to move toward side, when one side suction cup of column touches base
When plate, due to the presence of interaction force, sucker is moved toward side drives second spring compression, and second spring, which restores deformation, to be made to inhale
Panel surface is tightly attached to substrate surface, and pumping pump work detaches suction cup interior air through snorkel, so that substrate be made to be inhaled by sucker
Firmly, the problem of advantageously accounting for substrate placed angle deviation and causing sucker that substrate cannot be sucked, to improve work efficiency
And resource utilization；
2, by setting hemispherical for fixed block one end cross-sectional shape, while the setting of sucker side is compatible with hemispherical
Groove is conducive to the flexibility and directionality that improve sucker rotation, by being equipped with the first spring, when sucker contacts substrate, the
One spring is compressed, and the first spring restores the extruding force that the power that deformation generates is generated with column movement and buffered, and is favorably tried hard to avoid
Exempt to send out full substrate to be squeezed and lead to substrate damage situation.
Detailed description of the invention
Fig. 1 is side view of the invention.
Fig. 2 is top view of the invention.
Fig. 3 is the portion A enlarged drawing in Fig. 1 of the present invention.
In figure: 1 column, 2 cross bars, 3 first springs, 4 balance plates, 5 fixed blocks, 6 suckers, 7 second springs, 8 snorkels, 9
Connector, 10 toothed discs, 11 stepper motors, 12 electric telescopic rods, 13 telescopic sleeves, 14 gaskets, 15 substrates.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
The present invention provides a kind of automatic transportation equipment of semiconductor substrate as shown in Figs. 1-3 charging, including column 1,
1 side of column is equipped with cross bar 2, and 2 side of cross bar is equipped with the first spring 3, and described first spring, 3 one end and cross bar 2 are solid
Fixed connection, 3 other end of the first spring are equipped with balance plate 4, and 4 side of balance plate is equipped with fixed block 5, the fixed block 5
Side is equipped with sucker 6, and 6 two sides of sucker are equipped with second spring 7, and described 7 one end of second spring is fixedly connected with sucker 6,
7 other end of second spring is fixedly connected with balance plate 4, and 6 side of sucker is equipped with snorkel 8, and 1 side of column is set
There is connector 9, described 9 one end of connector is fixedly connected with column 1, and 9 other end of connector is equipped with toothed disc 10, the tooth
10 side of wheel disc is equipped with stepper motor 11, and 11 output end of stepper motor is adapted with toothed disc 10,9 side of connector
Equipped with electric telescopic rod 12, described 12 one end of electric telescopic rod and column 1 are hinged, 12 bottom end of electric telescopic rod and connector
9 is hinged.
Further, in the above-mentioned technical solutions, 5 one end cross-sectional shape of fixed block is set as hemispherical, described
6 side of sucker is equipped with groove, and the groove is adapted with 5 one end of fixed block；
Further, in the above-mentioned technical solutions, telescopic sleeve 13, the telescopic sleeve 13 are equipped with inside first spring 3
One end is fixedly connected with cross bar 2, and 13 other end of telescopic sleeve is fixedly connected with balance plate 4；
Further, in the above-mentioned technical solutions, described 8 one end of snorkel is connected with aspiration pump；
Further, in the above-mentioned technical solutions, 6 surface of sucker is equipped with gasket 14, and the gasket 14 is by rubber material
Material is made, and rubber material has good deformability；
Further, in the above-mentioned technical solutions, the quantity of the cross bar 2 is set as multiple, multiple uniformly arrangements of cross bar 2
On 1 surface of column, 6 side of sucker is equipped with substrate 15.
Working principle of the present invention:
Referring to Figure of description 1-3, electric telescopic rod 12 is extended, while 11 work belt movable tooth wheel disc 10 of stepper motor rotates, tooth
The rotation band follower link 9 of wheel disc 10 rotates, and the rotation of connector 9 drives column 1 to move toward side, when 1 one side suction cup 6 of column contacts
When to substrate 15, due to the presence of interaction force, sucker 6 is moved toward side drives second spring 7 to compress, and second spring 7 is extensive
Complex deformation makes 6 surface of sucker be tightly attached to 15 surface of substrate, and pumping pump work detaches 6 inner air of sucker through snorkel 8, thus
Substrate 15 is sucked by sucker 6, advantageously accounts for 15 placed angle deviation of substrate and causes sucker 6 that asking for substrate 15 cannot be sucked
Topic, to improve work efficiency and resource utilization；
Referring to Figure of description 3, by setting hemispherical for 5 one end cross-sectional shape of fixed block, while 6 side of sucker is arranged
Groove compatible with hemispherical is conducive to improve flexibility and directionality that sucker 6 rotates, by being equipped with the first spring 3, when
When sucker 6 contacts substrate 15, the first spring 3 is compressed, and the first spring 3 restores what the power that deformation generates was generated with the movement of column 1
Extruding force is buffered, and is favorably tried hard to avoid and is exempted to send out full substrate 15 and be squeezed and lead to 15 damaged condition of substrate.
Finally, it should be noted that the foregoing is only a preferred embodiment of the present invention, it is not intended to restrict the invention,
Although the present invention is described in detail referring to the foregoing embodiments, for those skilled in the art, still may be used
To modify the technical solutions described in the foregoing embodiments or equivalent replacement of some of the technical features,
All within the spirits and principles of the present invention, any modification, equivalent replacement, improvement and so on should be included in of the invention
Within protection scope.
Claims (6)
1. a kind of automatic transportation equipment of semiconductor substrate charging, including column (1), it is characterised in that: column (1) side
Equipped with cross bar (2), cross bar (2) side is equipped with the first spring (3), described first spring (3) one end and cross bar (2) fixed company
It connects, the first spring (3) other end is equipped with balance plate (4), and balance plate (4) side is equipped with fixed block (5), the fixation
Block (5) side is equipped with sucker (6), and sucker (6) two sides are equipped with second spring (7), described second spring (7) one end and suction
Disk (6) is fixedly connected, and second spring (7) other end is fixedly connected with balance plate (4), and sucker (6) side is equipped with logical
Tracheae (8), column (1) side are equipped with connector (9), and described connector (9) one end is fixedly connected with column (1), described
Connector (9) other end is equipped with toothed disc (10), and toothed disc (10) side is equipped with stepper motor (11), the stepper motor
(11) output end is adapted with toothed disc (10), and connector (9) side is equipped with electric telescopic rod (12), the electric expansion
Hingedly, electric telescopic rod (12) bottom end and connector (9) are hinged for bar (12) one end and column (1).
2. a kind of automatic transportation equipment of semiconductor substrate charging according to claim 1, it is characterised in that: the fixation
Block (5) one end cross-sectional shape is set as hemispherical, and sucker (6) side is equipped with groove, the groove and fixed block (5) one
End is adapted.
3. a kind of automatic transportation equipment of semiconductor substrate charging according to claim 1, it is characterised in that: described first
Telescopic sleeve (13) are equipped with inside spring (3), described telescopic sleeve (13) one end is fixedly connected with cross bar (2), the telescopic
Pipe (13) other end is fixedly connected with balance plate (4).
4. a kind of automatic transportation equipment of semiconductor substrate charging according to claim 1, it is characterised in that: the ventilation
Pipe (8) one end is connected with aspiration pump.
5. a kind of automatic transportation equipment of semiconductor substrate charging according to claim 1, it is characterised in that: the sucker
(6) surface is equipped with gasket (14), and the gasket (14) is made of rubber material.
6. a kind of automatic transportation equipment of semiconductor substrate charging according to claim 1, it is characterised in that: the cross bar
(2) quantity is set as multiple, and multiple cross bars (2) are evenly spaced in column (1) surface, and sucker (6) side is equipped with
Substrate (15).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810941335.1A CN109065490B (en) | 2018-08-17 | 2018-08-17 | Automatic carrying equipment for feeding of semiconductor substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810941335.1A CN109065490B (en) | 2018-08-17 | 2018-08-17 | Automatic carrying equipment for feeding of semiconductor substrate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109065490A true CN109065490A (en) | 2018-12-21 |
| CN109065490B CN109065490B (en) | 2021-08-17 |
Family
ID=64687240
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810941335.1A Active CN109065490B (en) | 2018-08-17 | 2018-08-17 | Automatic carrying equipment for feeding of semiconductor substrate |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109065490B (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002026109A (en) * | 2000-07-05 | 2002-01-25 | Yokogawa Electric Corp | Pickup apparatus for handlers |
| CN101712155A (en) * | 2008-09-29 | 2010-05-26 | 优志旺电机株式会社 | Substrate conveying arm |
| CN107601045A (en) * | 2017-08-30 | 2018-01-19 | 柏伟伟 | A kind of sucker type glass plate lift transport device |
| CN207415731U (en) * | 2017-10-20 | 2018-05-29 | 宿迁富祥玻璃制品有限公司 | A kind of glass processing center fixing device of angle adjustable |
-
2018
- 2018-08-17 CN CN201810941335.1A patent/CN109065490B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002026109A (en) * | 2000-07-05 | 2002-01-25 | Yokogawa Electric Corp | Pickup apparatus for handlers |
| CN101712155A (en) * | 2008-09-29 | 2010-05-26 | 优志旺电机株式会社 | Substrate conveying arm |
| CN107601045A (en) * | 2017-08-30 | 2018-01-19 | 柏伟伟 | A kind of sucker type glass plate lift transport device |
| CN207415731U (en) * | 2017-10-20 | 2018-05-29 | 宿迁富祥玻璃制品有限公司 | A kind of glass processing center fixing device of angle adjustable |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109065490B (en) | 2021-08-17 |
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