CN109065476A - 真空键合装置 - Google Patents
真空键合装置 Download PDFInfo
- Publication number
- CN109065476A CN109065476A CN201810831878.8A CN201810831878A CN109065476A CN 109065476 A CN109065476 A CN 109065476A CN 201810831878 A CN201810831878 A CN 201810831878A CN 109065476 A CN109065476 A CN 109065476A
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- chamber
- bonding
- vacuum
- platen
- bonding device
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Pressure Welding/Diffusion-Bonding (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201810831878.8A CN109065476B (zh) | 2018-07-26 | 2018-07-26 | 真空键合装置 |
Applications Claiming Priority (1)
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CN201810831878.8A CN109065476B (zh) | 2018-07-26 | 2018-07-26 | 真空键合装置 |
Publications (2)
Publication Number | Publication Date |
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CN109065476A true CN109065476A (zh) | 2018-12-21 |
CN109065476B CN109065476B (zh) | 2023-08-22 |
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CN201810831878.8A Active CN109065476B (zh) | 2018-07-26 | 2018-07-26 | 真空键合装置 |
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CN (1) | CN109065476B (zh) |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5876082A (en) * | 1996-02-15 | 1999-03-02 | Singulus Technologies Gmbh | Device for gripping and holding substrates |
JP2004136334A (ja) * | 2002-10-18 | 2004-05-13 | Dainippon Printing Co Ltd | 真空熱プレス装置 |
US20050089597A1 (en) * | 2002-05-30 | 2005-04-28 | Hidetoshi Ito | Heating-type vacuum press device |
CN101090082A (zh) * | 2006-06-15 | 2007-12-19 | 中国科学院半导体研究所 | 多功能半导体晶片键合装置 |
CN101531063A (zh) * | 2009-04-28 | 2009-09-16 | 南通市神马电力科技有限公司 | 一种拉挤模具的抽真空装置 |
CN102082078A (zh) * | 2010-10-22 | 2011-06-01 | 上海技美电子科技有限公司 | 适于为超薄晶圆贴膜的贴膜方法及贴膜装置 |
CN102456590A (zh) * | 2010-10-18 | 2012-05-16 | 东京毅力科创株式会社 | 接合装置及接合方法 |
CN108193190A (zh) * | 2017-12-28 | 2018-06-22 | 深圳市华星光电半导体显示技术有限公司 | 一种真空装置 |
CN208460718U (zh) * | 2018-07-26 | 2019-02-01 | 成都锐杰微科技有限公司 | 真空键合装置 |
-
2018
- 2018-07-26 CN CN201810831878.8A patent/CN109065476B/zh active Active
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5876082A (en) * | 1996-02-15 | 1999-03-02 | Singulus Technologies Gmbh | Device for gripping and holding substrates |
US20050089597A1 (en) * | 2002-05-30 | 2005-04-28 | Hidetoshi Ito | Heating-type vacuum press device |
JP2004136334A (ja) * | 2002-10-18 | 2004-05-13 | Dainippon Printing Co Ltd | 真空熱プレス装置 |
CN101090082A (zh) * | 2006-06-15 | 2007-12-19 | 中国科学院半导体研究所 | 多功能半导体晶片键合装置 |
CN101531063A (zh) * | 2009-04-28 | 2009-09-16 | 南通市神马电力科技有限公司 | 一种拉挤模具的抽真空装置 |
CN102456590A (zh) * | 2010-10-18 | 2012-05-16 | 东京毅力科创株式会社 | 接合装置及接合方法 |
CN102082078A (zh) * | 2010-10-22 | 2011-06-01 | 上海技美电子科技有限公司 | 适于为超薄晶圆贴膜的贴膜方法及贴膜装置 |
CN108193190A (zh) * | 2017-12-28 | 2018-06-22 | 深圳市华星光电半导体显示技术有限公司 | 一种真空装置 |
CN208460718U (zh) * | 2018-07-26 | 2019-02-01 | 成都锐杰微科技有限公司 | 真空键合装置 |
Non-Patent Citations (1)
Title |
---|
马可;辛舟;阎峰云;: "制备铝基复合基板真空室的结构设计", 真空与低温, no. 03, pages 63 - 66 * |
Also Published As
Publication number | Publication date |
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CN109065476B (zh) | 2023-08-22 |
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Address after: 226000 No. 9 Siyuan Road, Chongchuan District, Nantong City, Jiangsu Province Applicant after: NANTONG University Applicant after: Suzhou Ruijie Micro Technology Group Co.,Ltd. Address before: 226000 No. 9 Siyuan Road, Chongchuan District, Nantong City, Jiangsu Province Applicant before: NANTONG University Applicant before: CHENGDU U-PKG TECHNOLOGY Co.,Ltd. |
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Effective date of registration: 20221116 Address after: Room Z101, Building 1, No. 78, Jinshan East Road, Suzhou Hi tech Zone, Jiangsu 215129 Applicant after: Suzhou Ruijie Micro Technology Group Co.,Ltd. Address before: 226000 No. 9 Siyuan Road, Chongchuan District, Nantong City, Jiangsu Province Applicant before: NANTONG University Applicant before: Suzhou Ruijie Micro Technology Group Co.,Ltd. |
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