CN109029285B - Hybrid measurement method integrating contact measurement and non-contact measurement - Google Patents

Hybrid measurement method integrating contact measurement and non-contact measurement Download PDF

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CN109029285B
CN109029285B CN201810734125.5A CN201810734125A CN109029285B CN 109029285 B CN109029285 B CN 109029285B CN 201810734125 A CN201810734125 A CN 201810734125A CN 109029285 B CN109029285 B CN 109029285B
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向兵飞
康晓军
周造文
黄晶
徐�明
刘春江
史小昆
霍彪
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Shanghai Aircraft Manufacturing Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness

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Abstract

The mixed measurement method of combining contact measurement and non-contact measurement, utilize the non-contact measurement method to measure the surface to be measured fast at first, get the preliminary non-contact measurement result, and then measure a plurality of contact measurement point Pi positions planned through the contact measurement method, on the basis of the preliminary non-contact measurement result, confirm the position of the contact measurement point Pi as the correction benchmark, revise the preliminary non-contact measurement result, get the secondary non-contact measurement result; calculating the difference between the position of the contact measurement point Pi and the secondary non-contact measurement result and a normal projection point Qi, dividing the obtained normal projection point Qi into grids on the primary non-contact measurement result, and obtaining all grid nodes; and finally, calculating the difference value of each grid node, moving each grid node along the normal Ni direction of the primary non-contact measurement result, and re-fitting into a new curved surface, thereby completing the measurement.

Description

Hybrid measurement method integrating contact measurement and non-contact measurement
Technical Field
The invention relates to the technical field of workpiece measurement, in particular to a hybrid measurement method integrating contact measurement and non-contact measurement.
Background
Measurement of workpieces is important in the processing of products in areas such as the automotive industry, the aerospace industry, the semiconductor industry, and the die industry. The existing method for measuring the workpiece mainly comprises a contact type measuring method and a non-contact type measuring method, wherein the contact type measuring method is low in efficiency and high in precision, and the non-contact type measuring method is high in efficiency and relatively low in precision. How to effectively combine the advantages of the two methods and give consideration to both efficiency and precision, so that the accurate actual shape of the workpiece is obtained efficiently, which is a technical problem to be solved urgently.
The paper "research on contact measurement method of free-form surface and development of prototype system" (2004 paper of university of Zhejiang university Master) uses a point contact type probe to measure a free-form surface workpiece to obtain contact measurement points, and uses software to fit the contact measurement points into a curved surface, and the method has high measurement accuracy, but needs point-by-point measurement and has low measurement efficiency; the paper "evaluation of the capacity of laser scanning to a medium of laser scanning efficiency A (International Journal of production and Quality Management 2016 No. 4) made various comparisons and analyses of the measurement of a point-contact type measurement and a laser scanning instrument, and found that the measurement efficiency of the laser scanning instrument is high compared with that of the point-contact type measurement method, but the measurement accuracy of the laser scanning instrument is relatively low except for some specific characteristics; the paper "improved dimensional imaging using the combination of laser scanning and contact probe" (published 2012, 5) selects a point contact probe or a laser scanning instrument for measuring local features according to the local geometric features of a workpiece and corresponding product manufacturing information (including geometric dimensions and tolerances, 3D text annotation and Measurement dimensions, surface roughness, and material specifications, etc.), and combines contact Measurement and non-contact Measurement to some extent.
Disclosure of Invention
The technical problem to be solved by the present invention is to provide a hybrid measurement method combining contact measurement and non-contact measurement to solve the above-mentioned drawbacks in the background art.
The technical problem solved by the invention is realized by adopting the following technical scheme:
the mixed measurement method integrating contact measurement and non-contact measurement specifically comprises the following steps:
1) firstly, rapidly measuring the surface to be measured by using a non-contact measurement method to obtain a preliminary non-contact measurement result;
2) planning a plurality of contact type measuring points Pi according to the size and the local complexity of the surface to be measured, and measuring the positions of the contact type measuring points Pi by a contact measurement method;
3) determining the position of the contact type measuring point Pi obtained in the step 2) as a correction reference on the basis of the primary non-contact measuring result obtained by the non-contact measuring method in the step 1), correcting the primary non-contact measuring result obtained in the step 1), fitting the result into a curved surface, and further obtaining a secondary non-contact measuring result;
4) calculating the difference between the position of the contact-type measuring point Pi obtained in the step 2) and the secondary non-contact measuring result obtained in the step 3) and the normal projection point Qi;
the over-contact measuring points Pi are taken as the normal Ni of the curved surface, the intersection points of the normal Ni and the fitted curved surface are the normal projection points Qi of the contact measuring points Pi, the distance from each contact measuring point Pi to the corresponding normal projection point Qi is the difference value of each contact measuring point and the secondary non-contact measuring result, and the sign of the difference value is determined according to the relative positions of the contact measuring points and the secondary non-contact measuring result;
5) dividing the normal projection points Qi obtained in the step 4) into grids on the preliminary non-contact measurement result obtained in the step 1), and obtaining all grid nodes;
6) according to the position of the contact type measuring point Pi and the difference value obtained by comparing the contact type measuring point Pi with the secondary non-contact measuring result, the difference value corresponding to each grid node in the coverage range of the contact type measuring point Pi is obtained by utilizing a bilinear interpolation method, the difference value of each grid node outside the coverage range of the contact type measuring point Pi is obtained by linear interpolation according to the difference value obtained by comparing the adjacent four contact type measuring points Pi with the secondary non-contact measuring result, and finally, according to the calculated difference value of each grid node, each grid node is moved along the direction of a normal line Ni of the primary non-contact measuring result, the corrected grid node is used as a point cloud to be fitted into a new curved surface again, and then the measurement is completed;
the size of the difference obtained by comparing the contact type measuring point Pi with the secondary non-contact measuring result is the distance between the contact type measuring point Pi and the secondary non-contact measuring result, and the sign of the difference is determined according to the relative position of the measuring point and the secondary non-contact measuring result.
Has the advantages that:
1) for the surface to be measured, only a preliminary non-contact measurement result is obtained by adopting non-contact measurement, a small number of contact measurement points are reasonably planned, and the positions of the contact measurement points are measured by a point contact type probe, so that the obtained data can be processed to obtain a final measurement result, and compared with a contact type measurement method, the measurement efficiency is further improved;
2) the final measurement result obtained by the invention is based on the initial non-contact measurement result obtained by non-contact measurement, and the secondary non-contact measurement result is corrected by taking the contact measurement point obtained by contact measurement as a correction reference, and has higher precision compared with the measurement result obtained by non-contact measurement; the efficiency advantage of non-contact measurement is exerted, and the precision advantage of contact measurement is exerted, so that the measurement time is saved, and the measurement precision is improved.
Drawings
FIG. 1 is a schematic view of a workpiece in a preferred embodiment of the invention.
FIG. 2 is a schematic view of a laser scanning apparatus scanning a workpiece along a suitable trajectory in a preferred embodiment of the invention.
FIG. 3 is a schematic diagram of a contact measurement point layout in a preferred embodiment of the present invention.
FIG. 4 is a schematic diagram of the result of measuring a workpiece by the point contact type probe and the laser scanning apparatus in the preferred embodiment of the present invention.
FIG. 5 is a diagram illustrating the normal-passing projection points dividing mesh nodes on the fitting surface according to the preferred embodiment of the invention.
FIG. 6 is a schematic diagram of bilinear interpolation in accordance with a preferred embodiment of the present invention.
The attached drawings are marked as follows: l and D are dimensions of the workpiece in two directions, a contact measurement point Pi, a normal line Ni, a normal projection point Q i, i is 1, …, 9, f (i, j), f (i ten 1, j), f (i, j ten 1), f (i, j ten v), f (i ten 1, j ten v), f (i ten u, j ten v), f (i ten 1, j ten 1) is a difference value of corresponding positions of the contact measurement point Pi, u represents a distance from the contact measurement point Pi to a first end point, and v represents a ratio of a boundary distance of an area where the contact measurement point Pi is located.
Detailed Description
In order to make the technical means, the creation characteristics, the achievement purposes and the effects of the invention easy to understand, the invention is further explained below by combining the specific drawings.
Referring to the hybrid measurement method of the fused contact measurement and the non-contact measurement shown in fig. 1 to 5, the specific steps are as follows:
1) firstly, rapidly measuring the surface to be measured by using a laser scanning instrument to obtain a preliminary non-contact measurement result;
2) planning 9 contact measurement points P1-P9 according to the size and local complexity of the surface to be measured, and measuring by a point contact type probe to obtain the positions of the contact measurement points P1-P9;
3) determining the positions of the contact-type measuring points P1-P9 obtained in the step 2) as a correction reference on the basis of the primary non-contact measuring result obtained by the non-contact measuring method in the step 1), correcting the primary non-contact measuring result obtained in the step 1), fitting the result into a curved surface, and further obtaining a secondary non-contact measuring result;
4) calculating the difference between the positions of the contact measurement points P1-P9 obtained in the step 2) and the secondary non-contact measurement result obtained in the step 3) and a normal projection point Q i;
as shown in fig. 4, the contact-type measuring points P1-P9 are used as normal lines N1-N9 of the curved surface, the intersection point of the normal line N1 and the fitted curved surface is the normal projection point Q1 of the contact-type measuring point P1, the distance from each contact-type measuring point P1 to the corresponding normal projection point Q1 is the difference between each contact-type measuring point and the secondary non-contact measuring result, and the sign of the difference is determined according to the relative position of the contact-type measuring point and the secondary non-contact measuring result; in this embodiment, if the time difference symbol of the contact measurement point Pi on the concave surface of the fitting curved surface is positive, the coordinates of the 9 contact measurement points and the coordinates of the corresponding 9 normal projection points Qi, and the 9 difference values are shown in table 1:
TABLE 1 Normal projection points and Difference data sheet of over-contact measurement points
Figure BDA0001721566470000061
5) Dividing the normal projection points Q1-Q9 obtained in the step 4) into grids on the primary non-contact measurement result obtained in the step 1), and obtaining all grid nodes;
6) then, according to the position of the contact-type measurement point Pi and the difference obtained by comparing the contact-type measurement point Pi with the secondary non-contact measurement result, the difference corresponding to each grid node within the coverage range of the contact-type measurement point Pi is obtained by using a bilinear interpolation method, and the difference of the grid node outside the coverage range of the contact-type measurement point Pi is obtained by linearly interpolating the differences obtained by comparing the adjacent four contact-type measurement points Pi with the secondary non-contact measurement result, as shown in fig. 6, for the change from (i, j + v), f (i, j) to f (i, j +1), which is a linear relationship, there are:
f(i,j+v)=[f(i,j+1)-f(i,j)]*v+f(i,j) (1)
for (i +1, j + v), the same holds:
f(i+1,j+v)=[f(i+1,j+1)-f(i+1,j)]*v+f(i+1,j) (2)
the change from f (i, j + v) to f (i +1, j + v) is also linear, and it can be deduced that:
f(i+u,j+v)=(1-u)*(1-v)*f(i,j)+(1-u)*v*f(i,j+1)+u*(1-v)*f(i+1,j)+u*v*f(i+1,j+1) (3)
crossing point Q of 100 th row line and 100 th column line in grid area of Q1, Q2, Q4 and Q5 in FIG. 5100.100For example, in combination with Table 1, Q1To Q2Distance of 700mm, Q4To Q5The distance is 630mm, and the intersection point of the 1 st row line and the 100 th column line is set as Q1.100Let Q be the intersection of the 630 th row line and the 100 th column line630.100Then Q is100.100Difference of (a)100.100The calculation is as follows:
suppose Q1To Q2The difference of (A) changes to a linear relationship, then Q1.100Difference of (a)1.100The method comprises the following steps:
Figure BDA0001721566470000071
in the same way, Q630.100Difference of (a)630.100The method comprises the following steps:
Figure BDA0001721566470000072
then Q is100.100Difference of (a)100.100The method comprises the following steps:
Figure BDA0001721566470000073
suppose again that the intersection of the 10 th row line up from Q1Q2 and the 100 th column line from Q1 to Q2 is Q-10.100Then Q is-10.100To obtain a difference value-10.100The calculation can be as follows:
Figure BDA0001721566470000074
in the same way, Q630.100Difference of (a)630.100The method comprises the following steps:
Figure BDA0001721566470000075
then Q is-10.100Difference of (a)-10.100The method comprises the following steps:
Figure BDA0001721566470000076
moving each grid node along the normal Ni direction of the preliminary non-contact measurement result according to the calculated difference value of the grid nodes, and finally re-fitting the corrected grid nodes serving as point clouds to form a new curved surface so as to finish measurement;
the size of the difference value obtained by comparing the contact type measuring point Pi with the secondary non-contact measuring result is the distance from the contact type measuring point Pi to the secondary non-contact measuring result, and the sign of the difference value is determined according to the relative position of the measuring point and the secondary non-contact measuring result;
in the mesh node, get100.100And the next 9 points in the same row as the former point, the coordinates of the 10 points before and after correction and the corresponding difference of the points are shown in table 2:
table 2 grid node correction comparison data table
Figure BDA0001721566470000081
By combining the advantages of non-contact measurement and contact measurement, the measurement time is saved, and the measurement precision is improved.
The foregoing shows and describes the general principles and broad features of the present invention and advantages thereof. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the invention as claimed. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims (5)

1. The hybrid measurement method integrating contact measurement and non-contact measurement is characterized by comprising the following specific steps of:
1) firstly, rapidly measuring the surface to be measured by using a non-contact measurement method to obtain a preliminary non-contact measurement result;
2) planning a plurality of contact measurement points (Pi) according to the size and the local complexity of the surface to be measured, and measuring the positions of the contact measurement points (Pi) by a contact measurement method;
3) determining the position of the contact type measuring point (Pi) obtained in the step 2) as a correction reference on the basis of the primary non-contact measuring result obtained by the non-contact measuring method in the step 1), correcting the primary non-contact measuring result obtained in the step 1), and fitting the result into a curved surface to further obtain a secondary non-contact measuring result;
4) calculating the difference between the position of the contact-type measuring point (Pi) obtained in the step 2) and the secondary non-contact measuring result obtained in the step 3) and a normal projection point (Qi);
5) dividing the normal projection points (Qi) obtained in the step 4) into grids on the preliminary non-contact measurement result obtained in the step 1), and obtaining all grid nodes;
6) and finally, according to the calculated difference value of each grid node, moving each grid node along the normal (Ni) direction of the primary non-contact measurement result, and re-fitting the corrected grid node as point cloud to form a new curved surface, thereby completing the measurement.
2. The hybrid measurement method of merging contact measurement and non-contact measurement according to claim 1, wherein in step 2), there are not less than 4 planned contact measurement points (Pi).
3. The hybrid measurement method of merging contact measurement and non-contact measurement according to claim 1, wherein in step 2), the position of the planned contact measurement point (Pi) is measured by a point contact probe.
4. The hybrid measurement method combining contact measurement and non-contact measurement as claimed in claim 1, wherein in step 4), the normal projection points (Qi) are calculated by using the contact measurement points (Pi) as normal lines (Ni) of the curved surface, the intersection point of the normal lines (Ni) and the fitted curved surface is the normal projection point (Qi) of the contact measurement point (Pi), and the distance from each contact measurement point (Pi) to the corresponding normal projection point (Qi) is the difference between each contact measurement point and the secondary non-contact measurement result.
5. The hybrid measurement method combining contact measurement and non-contact measurement according to claim 1, wherein in step 6), the difference value calculation method for each grid node is as follows: and calculating the difference corresponding to each grid node in the coverage range of the contact type measuring point (Pi) by using a bilinear interpolation method, and linearly interpolating the difference of the grid nodes outside the coverage range of the contact type measuring point (Pi) according to the difference obtained by comparing the adjacent four contact type measuring points (Pi) with a secondary non-contact measuring result.
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US4914828A (en) * 1988-08-09 1990-04-10 Ppg Industries, Inc. Surface inspection device and method
WO2009141838A1 (en) * 2008-05-19 2009-11-26 Zhermack S.P.A. Method for contactless measurement of surface shape objects, particularly for dental arch portions or teeth portions
CN102128599A (en) * 2010-12-27 2011-07-20 中国科学院长春光学精密机械与物理研究所 Contact aspheric surface shape test device
CN103481122A (en) * 2013-08-08 2014-01-01 哈尔滨理工大学 Contact measurement error compensation method oriented to freeform surface and compensation system
CN103954231A (en) * 2014-03-28 2014-07-30 电子科技大学 Non-contact measuring method for deformed plate and strip cross section profile in cold roll forming process
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