CN105157606A - Non-contact type high-precision three-dimensional measurement method and measurement device for complex optical surface shapes - Google Patents
Non-contact type high-precision three-dimensional measurement method and measurement device for complex optical surface shapes Download PDFInfo
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- CN105157606A CN105157606A CN201510521197.8A CN201510521197A CN105157606A CN 105157606 A CN105157606 A CN 105157606A CN 201510521197 A CN201510521197 A CN 201510521197A CN 105157606 A CN105157606 A CN 105157606A
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Abstract
The invention discloses a non-contact type high-precision three-dimensional measurement method and a measurement device for complex optical surface shapes and relates to the technical field of optical surface shape detection, which solves the problems in the prior art that existing measurement methods for the surface shapes of optical elements are high in measurement cost and low in precision and cannot realize the three-dimensional measurement on the surface shapes of optical elements. According to the technical scheme of the invention, the two-dimensional distribution of the height information of an optical surface is acquired through the non-contact three-dimensional coordinate position scanning process, and then the surface shape or the profile information of the optical surface can be measured. A three-dimensional translation platform conducts the translational motion in the x-y direction to realize the point-by-point scanning process of the optical surface, so that the height h variation of the optical surface over all scanning points can be measured. During the scanning process, along with the height h variation of the optical surface, the three-dimensional translation platform is moved in the z direction, so that a spectrum confocal sensor is enabled to always focus the surface of a to-be-measured optical element. A micro three-beam interferometer is aligned with a standard planar mirror. The distance between the surface of the to-be-measured optical element and the standard planar mirror is measured in real time, so that the surface shape information of the to-be-measured optical element can be obtained. The measurement device is low in cost and easy in operation.
Description
Technical field
The present invention relates to surface characterization test technical field, be specifically related to a kind of contactless complicated optical surface profile high precision three-dimensional measurement device and measuring method.
Background technology
Under the promotion of active demand and technical progress, in optical system, use the optical element with complicated face shape more and more.Complicated face shape optical element there is more freedom, can effectively correct all kinds of senior aberration, simplify optical system structure, improve Performance of Optical System.Complicated face shape optical element is significant to contemporary optics System Development, is widely used in all kinds optical imagery, optical detection, electro-optical countermeasure svstem.
Optical surface profile measuring method is divided into interferometry and profile scan mensuration.Interferometry measures the method that complicated optical surface profile generally adopts compensating glass and computed hologram; Adopt compensating glass interferometric method need for tested concrete face shape design and process specific compensating glass, measure cost high; Adopt the measurement range of tested surface shape during calculation holographic method and precision to limit by the making precision of hologram sheet and size, and size is larger, precision is lower.Profile scan mensuration is divided into contact and contactless; Contact face shape scanning and measuring apparatus mainly comprises three coordinate measuring machine and probe-type contourgraph, and scan tested surface shape successively by probe and obtain measurement data, measuring process may destroy optical surface smooth finish and rete, is not suitable for the measurement of optical surface; Contactless profile scan mensuration mainly contains long-range contourgraph, it is a f-θ lens combination, that measures measuring beam and standard light beam by optic probe departs from the gradient measuring optical surface, thus measure its surface profile, but one-dimensional scanning face shape can only be obtained, can not 3 d shape be obtained.
Summary of the invention
The present invention is that the solution existing measuring method to optical component surface shape existence measurement cost is high, precision is low and cannot realizes the problems such as three-dimensional measurement to optical component surface shape, provides a kind of contactless complicated optical surface profile high precision three-dimensional measurement method and measurement mechanism.
Contactless complicated optical surface profile high precision three-dimensional measurement method, the method is realized by following steps:
Step one, use autocollimator adjustment Spectral Confocal sensor, miniature Three-beam Interfere instrument and standard flat catoptron point to, and make described Spectral Confocal sensor, miniature Three-beam Interfere instrument and standard flat catoptron coaxial;
Step 2, optical element to be measured is arranged on measuring table, determines analyzing spot quantity and the sweep span of optical component surface shape to be measured; The analyzing spot of described optical component surface shape to be measured is scanned successively, measures and record the three-D profile information of each analyzing spot; Fitting of a polynomial is carried out to the three-D profile information of all analyzing spots, obtains the 3 d shape figure of optical component surface shape to be measured;
Concrete measuring process is:
First, at X-Y direction moving three dimension translation stage to the initial sweep point of optical component surface shape to be measured, at Z-direction moving three dimension translation stage, Spectral Confocal sensor is made to focus in described initial sweep point, the distance of described Spectral Confocal sensor and initial sweep point is d, the distance to standard flat catoptron measured by miniature Three-beam Interfere instrument, obtains the three-D profile information of initial sweep point on optical element to be measured;
Then, in the x-y directions D translation platform is moved to the next analyzing spot of optical component surface shape to be measured, at Z-direction moving three dimension translation stage, make Spectral Confocal sensor focus analyzing spot in correspondence, the distance of the confocal sensor of spectral preservation analyzing spot corresponding to this is d; The distance of described miniature Three-beam Interfere instrument to standard flat catoptron measured in real time by miniature Three-beam Interfere instrument, obtains the three-D profile information of this analyzing spot, until complete the measurement of all analyzing spot three-D profile information;
Finally, fitting of a polynomial is carried out to the three-D profile information of all analyzing spots, obtain the 3 d shape figure of optical component surface shape to be measured.
Contactless complicated optical surface profile high precision three-dimensional measurement, this device comprises measuring table, Spectral Confocal sensor, D translation platform, miniature Three-beam Interfere instrument and standard flat catoptron; Described Spectral Confocal sensor and miniature Three-beam Interfere instrument are fixed on D translation platform; Described D translation platform and standard flat catoptron are fixed on measuring table.
Beneficial effect of the present invention: device of the present invention obtains the Two dimensional Distribution (height h is with the distribution of x, y) of optical surface elevation information based on non-contacting three-dimensional coordinate position scanning, thus records its face shape or profile information.By the translation of D translation platform in x-y direction, point by point scanning is carried out to optical surface, measure the change (Z-direction) of often upper optical surface profile height h; In scanning process, along with the change of optical surface height, at Z-direction moving three dimension translation stage, Spectral Confocal sensor is made to focus in optical element surface to be measured all the time, namely the distance between Spectral Confocal sensor and each measurement point remains unchanged, and plays " zero-bit monitor " effect;
Described miniature Three-beam Interfere instrument alignment criteria plane mirror, the change of distance both measuring in real time, this variable quantity is exactly the relative height change h of optical surface different scanning point; (x, y, h) information of record different scanning point, can obtain the face shape information of this optical surface; Adopt repeatedly fitting of a polynomial to obtain optimal approximation curved surface, may be used for describing this Optical Surface.Measuring table adopts stainless steel air floating platform, can eliminate extraneous vibration impact;
Contactless shape scanning and measuring apparatus of the present invention, the 3D face shape of high-acruracy survey complex optical surfaces under the prerequisite not damaging optical surface, has the advantages such as low cost, easily operation.
Accompanying drawing explanation
Fig. 1 is the structural representation of contactless complicated optical surface profile high precision three-dimensional measurement device of the present invention.
In figure: 1, test platform, 2, D translation platform, 3, Spectral Confocal sensor, 4, miniature Three-beam Interfere instrument, 5, standard flat catoptron, 6, optical element to be measured.
Embodiment
Embodiment one, contactless complicated optical surface profile high precision three-dimensional measurement method, the method is realized by following steps:
One, use autocollimation theodolite to aim at Spectral Confocal sensor 3, miniature Three-beam Interfere instrument 4, standard flat catoptron 5 respectively, adjustment three attitude, makes three point in the same direction;
Two, optical element 6 to be measured is arranged on test platform, uses level meter auxiliary adjustment sample attitude, eliminate inclination equal error; According to the size measuring requirement and optical element to be measured, determine sweep parameter such as scanning survey point quantity N and spacing d etc.; X, vertical direction Y-direction move to scan start point (x to setting D translation platform 2 in the horizontal direction
0, y
0), make Spectral Confocal sensor 3 focus in this point at fore-and-aft direction z to movement; The distance h to standard flat catoptron 5 measured by described miniature Three-beam Interfere instrument 4
(0,0);
Three, D translation platform 2 at X-Y to moving to next analyzing spot (x
1, y
0), make Spectral Confocal sensor 3 focus in this point at z to movement, namely keep the probe of Spectral Confocal sensor and the distance of optical element to be measured 6 measurement point in scanning process constant; The distance h to standard flat catoptron 5 measured by miniature Three-beam Interfere instrument 4
(1,0);
Four, repeat said process, obtain the height distributed intelligence (x of all analyzing spots
i, y
j, h
(i, j));
Five, to the height distributed intelligence (x of all analyzing spots
i, y
j, h
(i, j)) carry out fitting of a polynomial, obtain the 3 d shape figure of optical component surface shape to be measured.
" zero-bit supervision " precision that photometry component side shape treated by Spectral Confocal sensor 3 described in present embodiment is 20nm; The range measurement accuracy of miniature Three-beam Interfere instrument 4 pairs of standard flat catoptrons 5 is 1nm; D translation platform X-Y is 400mm to range of movement, and position repeatability is better than 3 μm, and Z-direction range of movement is 50mm, and position repeatability is better than 50nm; Standard flat catoptron 5 bore is 300mm, and surface figure accuracy is λ/8, and surface is coated with aluminium film.
Embodiment two, composition graphs 1 illustrate present embodiment, present embodiment is the measurement mechanism of the contactless complicated optical surface profile high precision three-dimensional measurement method described in embodiment one, and this device comprises measuring table 1, Spectral Confocal sensor 3, D translation platform 2, miniature Three-beam Interfere instrument 4 and standard flat catoptron 5; Described Spectral Confocal sensor 3 and miniature Three-beam Interfere instrument 4 are fixed on D translation platform 2; Described D translation platform 2 and standard flat catoptron 5 are fixed on measuring table 2.
Measuring table 1 described in present embodiment adopts stainless steel air floating platform, and the surface of described standard flat catoptron 5 is coated with aluminium film.
Claims (7)
1. contactless complicated optical surface profile high precision three-dimensional measurement method, it is characterized in that, the method is realized by following steps:
Step one, use autocollimator adjustment Spectral Confocal sensor (3), miniature Three-beam Interfere instrument (4) and standard flat catoptron (5) point to, and make described Spectral Confocal sensor (3), miniature Three-beam Interfere instrument (4) and standard flat catoptron (5) coaxial;
Step 2, optical element to be measured to be arranged on measuring table (1), to determine analyzing spot quantity and the sweep span of optical component surface shape to be measured (6); The analyzing spot of described optical component surface shape to be measured (6) is scanned successively, measures and record the three-D profile information of each analyzing spot; Fitting of a polynomial is carried out to the three-D profile information of all analyzing spots, obtains the 3 d shape figure of optical component surface shape to be measured (6);
Concrete measuring process is:
First, in X-Y direction moving three dimension translation stage (2) to the initial sweep point of optical component surface shape to be measured (6), at Z-direction moving three dimension translation stage (2), Spectral Confocal sensor (3) is made to focus in described initial sweep point, described Spectral Confocal sensor (3) is d with the distance of initial sweep point, miniature Three-beam Interfere instrument (4) measures the distance to standard flat catoptron (5), obtains the three-D profile information of initial sweep point on optical element to be measured;
Then, in the x-y directions D translation platform (2) is moved to the next analyzing spot of optical component surface shape to be measured (6), at Z-direction moving three dimension translation stage (2), make Spectral Confocal sensor (3) focus analyzing spot in correspondence, the distance of the confocal sensor of spectral preservation (3) analyzing spot corresponding to this is d; Miniature Three-beam Interfere instrument (4) measures the distance of described miniature Three-beam Interfere instrument (4) to standard flat catoptron (5) in real time, obtain the three-D profile information of this analyzing spot, until complete the measurement of all analyzing spot three-D profile information;
Finally, fitting of a polynomial is carried out to the three-D profile information of all analyzing spots, obtain the 3 d shape figure of optical component surface shape to be measured.
2. contactless complicated optical surface profile high precision three-dimensional measurement method according to claim 1, it is characterized in that, Spectral Confocal sensor is as zero-bit monitor, and measuring accuracy is 20nm.
3. device according to claim 1, is characterized in that, the surface of described standard flat catoptron is coated with aluminium film.
4. the device of contactless complicated optical surface profile high precision three-dimensional measurement method according to claim 1, it is characterized in that, this device comprises measuring table (1), Spectral Confocal sensor (3), D translation platform (2), miniature Three-beam Interfere instrument (4) and standard flat catoptron (5); Described Spectral Confocal sensor (3) and miniature Three-beam Interfere instrument (4) are fixed on D translation platform (2); Described D translation platform (2) and standard flat catoptron (5) are fixed on measuring table (1).
5. device according to claim 4, is characterized in that, described measuring table (1) adopts stainless steel air floating platform.
6. device according to claim 5, is characterized in that, the surface of described standard flat catoptron (5) is coated with aluminium film.
7. device according to claim 5, is characterized in that, described Spectral Confocal sensor is as zero-bit monitor, and measuring accuracy is 20nm.
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|---|---|---|---|---|
| CN106767519A (en) * | 2017-03-13 | 2017-05-31 | 王俊民 | Spectral Confocal detecting system and method |
| CN106950560A (en) * | 2017-01-16 | 2017-07-14 | 东莞市三姆森光电科技有限公司 | A kind of multidimensional Spectral Confocal ranging software |
| CN107621235A (en) * | 2017-08-26 | 2018-01-23 | 东莞市三姆森光电科技有限公司 | Mobile phone curved surface housing profile measuring method and its measuring apparatus based on Spectral Confocal technology |
| CN108020171A (en) * | 2017-12-25 | 2018-05-11 | 东莞市三姆森光电科技有限公司 | Mobile phone curved surface housing profile measuring method and its measuring apparatus based on Spectral Confocal technology |
| CN108362212A (en) * | 2018-04-02 | 2018-08-03 | 无锡星微科技有限公司 | It is a kind of to be used for the motion platform and its implementation that wafer thickness and curvature detect |
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| CN110017792A (en) * | 2019-04-10 | 2019-07-16 | 中山大学 | A kind of novel optical curved surface two-dimensional measurement method and its measuring system |
| CN112964198A (en) * | 2021-04-12 | 2021-06-15 | 天津大学 | Curved surface sample bus contour measuring system and method based on automatic focusing principle |
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| CN106950560A (en) * | 2017-01-16 | 2017-07-14 | 东莞市三姆森光电科技有限公司 | A kind of multidimensional Spectral Confocal ranging software |
| CN106767519A (en) * | 2017-03-13 | 2017-05-31 | 王俊民 | Spectral Confocal detecting system and method |
| CN107621235A (en) * | 2017-08-26 | 2018-01-23 | 东莞市三姆森光电科技有限公司 | Mobile phone curved surface housing profile measuring method and its measuring apparatus based on Spectral Confocal technology |
| CN107621235B (en) * | 2017-08-26 | 2024-02-27 | 东莞市三姆森光电科技有限公司 | Method and equipment for measuring contour of curved surface shell of mobile phone based on spectral confocal technology |
| CN108020171A (en) * | 2017-12-25 | 2018-05-11 | 东莞市三姆森光电科技有限公司 | Mobile phone curved surface housing profile measuring method and its measuring apparatus based on Spectral Confocal technology |
| CN108020171B (en) * | 2017-12-25 | 2023-06-20 | 东莞市三姆森光电科技有限公司 | Method and equipment for measuring contour of curved surface shell of mobile phone based on spectral confocal |
| CN108362212A (en) * | 2018-04-02 | 2018-08-03 | 无锡星微科技有限公司 | It is a kind of to be used for the motion platform and its implementation that wafer thickness and curvature detect |
| CN108709509A (en) * | 2018-07-04 | 2018-10-26 | 郑州市明锐电子科技有限公司 | Profile camera, the mating contactless caliper of super-large diameter revolving body workpieces and contactless revolving body measurement method |
| CN108709509B (en) * | 2018-07-04 | 2024-03-22 | 郑州市明锐电子科技有限公司 | Contour camera, matched oversized-diameter revolving body workpiece non-contact caliper and non-contact revolving body measuring method |
| CN109029285A (en) * | 2018-07-06 | 2018-12-18 | 江西洪都航空工业集团有限责任公司 | Merge the hybrid measurement method of contact type measurement and non-cpntact measurement |
| CN109029285B (en) * | 2018-07-06 | 2020-08-28 | 江西洪都航空工业集团有限责任公司 | Hybrid measurement method integrating contact measurement and non-contact measurement |
| CN110017792A (en) * | 2019-04-10 | 2019-07-16 | 中山大学 | A kind of novel optical curved surface two-dimensional measurement method and its measuring system |
| CN113029031A (en) * | 2021-03-26 | 2021-06-25 | 中南大学 | High-precision step-by-step surface shape measuring method and device based on spectrum confocal |
| CN113029031B (en) * | 2021-03-26 | 2022-03-18 | 中南大学 | High-precision step-by-step surface shape measuring method and device based on spectrum confocal |
| CN112964198A (en) * | 2021-04-12 | 2021-06-15 | 天津大学 | Curved surface sample bus contour measuring system and method based on automatic focusing principle |
| CN112977535A (en) * | 2021-05-11 | 2021-06-18 | 领视科技成都有限公司 | Electrified railway clearance detection method and system based on laser scanning |
| CN114440790B (en) * | 2022-01-27 | 2022-11-01 | 浙江大学 | Method and device for simultaneously detecting surface shape and thickness distribution of inner wall and outer wall of thin-wall revolving body |
| US11761756B2 (en) | 2022-01-27 | 2023-09-19 | Zhejiang University | Method and device for simultaneously detecting surface shapes and thickness distribution of inner and outer walls of thin-wall rotating body |
| CN114440790A (en) * | 2022-01-27 | 2022-05-06 | 浙江大学 | Method and device for simultaneously detecting surface shape and thickness distribution of inner wall and outer wall of thin-wall revolving body |
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