CN108971480A - A kind of preparation method of graphene coated metal nanometer line - Google Patents

A kind of preparation method of graphene coated metal nanometer line Download PDF

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Publication number
CN108971480A
CN108971480A CN201810236164.2A CN201810236164A CN108971480A CN 108971480 A CN108971480 A CN 108971480A CN 201810236164 A CN201810236164 A CN 201810236164A CN 108971480 A CN108971480 A CN 108971480A
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nanometer line
graphene coated
metal nanometer
temperature
preparation
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韩卫忠
胡中伟
郭朝维
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Xian Jiaotong University
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Xian Jiaotong University
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Priority to CN201810236164.2A priority Critical patent/CN108971480A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/16Metallic particles coated with a non-metal
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00Making metallic powder or suspensions thereof
    • B22F9/16Making metallic powder or suspensions thereof using chemical processes
    • B22F9/18Making metallic powder or suspensions thereof using chemical processes with reduction of metal compounds
    • B22F9/20Making metallic powder or suspensions thereof using chemical processes with reduction of metal compounds starting from solid metal compounds
    • B22F9/22Making metallic powder or suspensions thereof using chemical processes with reduction of metal compounds starting from solid metal compounds using gaseous reductors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00Manufacture or treatment of nanostructures

Abstract

The invention discloses a kind of preparation methods of graphene coated metal nanometer line, comprising the following steps: 1) on a silicon substrate prefabricated scratch, then silicon base is cleaned and dried;2) nickel salt is placed in dehydrated alcohol, drop is in silicon base after ultrasonic disperse;3) silicon base is placed in 600 DEG C of -1200 DEG C of temperature, and is kept the temperature, then cool to room temperature with the furnace;4) metal oxide powder is uniformly put into Al2O3In porcelain Noah's ark, then the silicon substrate bottom cover that will be handled through step 3) is in Al2O3On porcelain Noah's ark, then by Al2O3Porcelain Noah's ark is placed in horizontal pipe furnace;5) to the built-in distilled water of drexel bottle, then drexel bottle is fixed on warm table, H2And Ar is passed into horizontal pipe furnace after drexel bottle gas washing;6) temperature in horizontal pipe furnace is adjusted to 800 DEG C -1200 DEG C, is cooled to room temperature after heat preservation, the metal nanometer line of the uniform graphene coated of line footpath can be obtained on a silicon substrate, this method can prepare the metal nanometer line of graphene coated.

Description

A kind of preparation method of graphene coated metal nanometer line
Technical field
The present invention relates to a kind of preparation methods of metal nanometer line, and in particular to a kind of graphene coated metal nanometer line Preparation method.
Background technique
In recent years, close attention of this unique monodimension nanometer material of nano wire increasingly by numerous researchers. Wang Zhonglin professor in 2006 proposes concept (Wang the Z L, Song of nano generator with the unique piezoelectric property of ZnO nano-wire J.Science, 2006,312 (5771): 242), some researches show that the anodes that Si nano wire does lithium ion battery within 08 year being capable of pole The earth improve battery charging and discharging transformation efficiency, and after charge and discharge cycles several times still be able to maintain stablize (Chan C K, Peng H, Liu G, et al.Nature Nanotech, 2008,3 (1): 187-191.), also some researches show that with LaB6Nanometer Line has low-down field cut-in voltage and highly stable Flied emission electric current, with this nano wire as field emitting electronic source As the field emitting electronic source of scanning electron microscope, low noise, high-resolution scanned photograph can be more easily obtained.It can be seen that Nano wire is worth us deeply to go to study since its unique performance has boundless potential application foreground.
Metal nanometer line is provided simultaneously with the preferable ductility of metal material and the higher intensity of nano material and by wide General concern.By taking tungsten as an example, tungsten has very excellent physical and chemical performance: high-melting-point, high intensity, good thermostabilization Property, anti-oxidant, antiacid caustic corrosion, these unique performances lead tungsten in aerospace, mechanical industry, nuclear energy, military project etc. Domain is widely used.One-dimensional tungsten nano material also has 1-dimention nano material other than having both the excellent performance of block tungsten Expect exclusive performance.Therefore, reinforced phase of this monodimension nanometer material of tungsten nanowires with superhigh intensity as composite material, Has boundless application prospect.
In recent years, scholars have prepared the different tungsten nanowires of diameter, length using different methods in succession.Document " Lee Y H, Choi C H, Jang Y T, et al.Appl.Phys.Lett, 2002,81 (4): 745-747 " is to be coated with one layer The silicon wafer of the tungsten film of about 300nm is substrate, is put into H2It is heated rapidly in the gaseous mixture of+Ar after 850 DEG C of heat preservation a period of times again It is rapidly cooled to room temperature;Synthesize length about in the tungsten nanowires of 1 μ m diameter 100nm or so.Document " Yeong K S, Law J B K, Thong J T L.Appl.Phys.Lett, 2006,88 (19): 4823-95. ", will by nozzle using hydroxyl tungsten as raw material It is injected between two electrodes, to two electrode power-up, the deposition of tungsten nanowires is induced to synthesize by field emission electron.Text Offer " Karpovich N F, Lebukhova N V, Zavodinsky V G, et al.J.Phys.Chem.C, 2008,112 (47): 18455-18458. " restores NiWO by CO4Be aided with Ni do catalyst successfully synthesized diameter be about 200~ 300nm, length are about 10~50 μm, the tungsten nanowires of six side's pencil-shaped of section.Document " Guangyu Liu, Min Song, Xinli Liu, et al.Philos.Mag, 2013,93 (6): 584-597. " is with SiO2It is aided with Ni by CVD method for substrate to make Catalyst has synthesized 15 μm or so of diameter 150nm length of tungsten nanowires at 950 DEG C.But the tungsten nanowires of most of synthesis Young's modulus is below bulk value (410GPa);Document " Cimalla V,C C,Pezoldt J,et Al.J.Nanomater, 2008 (1): 145-152. " has found the tungsten nanowires poplar of diameter 100nm or so by AFM bend test Family name's modulus averages are 332GPa;Document " Hou L Z, Wang S L, Chen G L, et Al.T.Nonferr.Metal.Soc, 2013,23 (8): 2323-2328. " measures the tungsten that diameter is 200nm by nanometer indentation Young's modulus of nano wire average value be 225GPa, document " Pugachevskii M A.Tech.Phys.Lett, 2010,36 (7): It is about 100GPa that 639-641. ", which measures diameter in the Young's modulus of 1 μm or so of tungsten nanowires by AFM,.
In order to significantly improve the mechanics and functional characteristic of metal nanometer line, graphene coated metal nanometer line can be passed through Then in the prior art mode does not disclose graphene coated metal nanometer line to improve the mechanical property of metal nanometer line Preparation method.
Summary of the invention
It is an object of the invention to overcome the above-mentioned prior art, a kind of graphene coated metal nanometer line is provided Preparation method, this method can prepare the metal nanometer line of graphene coated.
In order to achieve the above objectives, the preparation method of graphene coated metal nanometer line of the present invention includes following step It is rapid:
1) prefabricated scratch on a silicon substrate, then silicon base is cleaned and dried;
2) nickel salt is placed in dehydrated alcohol, drop is in silicon base after ultrasonic disperse;
3) silicon base is placed in 600 DEG C of -1200 DEG C of temperature, and is kept the temperature in the atmosphere of hydrogen, then in hydrogen Room temperature is cooled to the furnace in the atmosphere of gas, so that nickel salt evenly dispersed in silicon base to be reduced into the nano particle of Ni;
4) metal oxide powder is uniformly put into Al2O3In porcelain Noah's ark, then by through step 3) handle silicon substrate bottom cover exist Al2O3On porcelain Noah's ark, then by Al2O3Porcelain Noah's ark is placed in horizontal pipe furnace;
5) to the built-in distilled water of drexel bottle, then drexel bottle is fixed on warm table, H2And Ar leads to after drexel bottle gas washing Enter into horizontal pipe furnace, to exclude the air in horizontal pipe furnace;
6) flow velocity of Ar is adjusted to 100sccm or more, by H2Flow velocity adjust to 30sccm hereinafter, by gas washing water in bottle Temperature adjust to 80 DEG C -120 DEG C, the temperature in horizontal pipe furnace is adjusted to 800 DEG C -1200 DEG C, is cooled to room after heat preservation Temperature can obtain the metal nanometer line of the uniform graphene coated of line footpath on a silicon substrate.
The concrete operations of step 1) are as follows: draw knife prefabricated scratch on a silicon substrate with diamond, then silicon base is placed in anhydrous It is cleaned by ultrasonic in ethyl alcohol, is then dried.
Silicon base is placed in 600 DEG C -1200 DEG C by step 3), and the concrete operations kept the temperature in the atmosphere of hydrogen Are as follows: silicon base is placed in horizontal pipe furnace, then with heating rate more than or equal to 10 DEG C/min speed be warming up to 600 DEG C- 1200 DEG C, and kept the temperature in the atmosphere of hydrogen.
The purity of metal oxide powder is greater than 99.99%.
H in step 5)2Flow velocity be more than or equal to 50sccm, the flow velocity of Ar is more than or equal to 200sccm, H2And when being passed through of Ar Between be more than or equal to 10min.
Soaking time in step 6) is more than or equal to 4h.
H2And Ar purity is all larger than 99.99%.
The invention has the following advantages:
For the preparation method of graphene coated metal nanometer line of the present invention when specific operation, elder generation is equal on a silicon substrate Then nickel salt is reduced to the nano particle of Ni, then metal oxide powder is uniformly put into Al by even dispersion nickel salt2O3Porcelain Noah's ark In, then by silicon substrate bottom cover in Al2O3On porcelain Noah's ark, finally by Al2O3Porcelain Noah's ark is placed in Ar and H2In the environment of heat up after protect Temperature, then cool to room temperature with the furnace, the metal nanometer line of the uniform graphene coated of line footpath, operation letter can be obtained on a silicon substrate Singly, by graphene coated metal nanometer line, the breaking strength and Young mould of metal nanometer line can effectively conveniently, be improved Amount, promotes the mechanical property of metal nanometer line significantly, and can lead in microelectronic component and metallic composite etc. Domain is widely used.
Detailed description of the invention
Fig. 1 a is the basic shape appearance figure of scanning electron microscope of one graphene coated tungsten nanowires of embodiment;
Fig. 1 b is the bright field image figure of the transmission electron microscope of tungsten nanowires on copper mesh in embodiment one;
Fig. 2 is the test result figure of Raman test in embodiment one;
Fig. 3 is stress-strain curve diagram obtained in embodiment one.
Specific embodiment
The invention will be described in further detail with reference to the accompanying drawing:
The preparation method of graphene coated metal nanometer line of the present invention the following steps are included:
1) prefabricated scratch on a silicon substrate, then silicon base is cleaned and dried;
2) nickel salt is placed in dehydrated alcohol, drop is in silicon base after ultrasonic disperse, wherein nickel salt and dehydrated alcohol press matter Amount is than being no more than 2:1;
3) silicon base is placed in 600 DEG C of -1200 DEG C of temperature, and is kept the temperature in the atmosphere of hydrogen, then in hydrogen Room temperature is cooled to the furnace in the atmosphere of gas, so that nickel salt evenly dispersed in silicon base to be reduced into the nano particle of Ni;
4) metal oxide powder is uniformly put into Al2O3In porcelain Noah's ark, then by through step 3) handle silicon substrate bottom cover exist Al2O3On porcelain Noah's ark, then by Al2O3Porcelain Noah's ark is placed in horizontal pipe furnace, wherein metal oxide powder is uniformly filled out Full porcelain Noah's ark, and metal oxide powder is no more than 10g.
5) to the built-in distilled water of drexel bottle, then drexel bottle is fixed on warm table, H2And Ar leads to after drexel bottle gas washing Enter into horizontal pipe furnace, to exclude the air in horizontal pipe furnace;
6) flow velocity of Ar is adjusted to 100sccm or more, by H2Flow velocity adjust to 30sccm hereinafter, by gas washing water in bottle Temperature adjust to 80 DEG C -120 DEG C, the temperature in horizontal pipe furnace is adjusted to 800 DEG C -1200 DEG C, is cooled to room after heat preservation Temperature can obtain the metal nanometer line of the uniform graphene coated of line footpath on a silicon substrate.
The concrete operations of step 1) are as follows: draw knife prefabricated scratch on a silicon substrate with diamond, then silicon base is placed in anhydrous It is cleaned by ultrasonic in ethyl alcohol, is then dried.
Silicon base is placed in 600 DEG C -1200 DEG C by step 3), and the concrete operations kept the temperature in the atmosphere of hydrogen Are as follows: silicon base is placed in horizontal pipe furnace, then with heating rate more than or equal to 10 DEG C/min speed be warming up to 600 DEG C- 1200 DEG C, and kept the temperature in the atmosphere of hydrogen.
The purity of metal oxide powder is greater than 99.99%.
H in step 5)2Flow velocity be more than or equal to 50sccm, the flow velocity of Ar is more than or equal to 200sccm, H2And when being passed through of Ar Between be more than or equal to 10min.
Soaking time in step 6) is more than or equal to 4h.
H2And Ar purity is all larger than 99.99%.
Embodiment one
The metal oxide powder is WO3Powder, the tungsten nanowires of graphene coated are prepared using the present invention, and Fig. 1 a is The basic shape appearance figure of scanning electron microscope for the graphene coated tungsten nanowires that the present embodiment obtains, can see by Fig. 1 a, in silicon base The more uniform tungsten nanowires of line footpath are distributed with, length is between 0~50 μm.Fig. 1 b is the transmission electron microscope of tungsten nanowires on copper mesh Bright field image, the illustration in Fig. 1 b is corresponding diffraction spot, by Fig. 1 b it is found that the tungsten nanowires of the graphene coated synthesized it is straight Diameter is uniform, along its length without apparent taper, can see the tungsten nanowires growth side of graphene coated from its diffraction spot To for [111].
By the manipulator in focused ion beam by the nanometer line drawing to PTP of deposited on silicon substrates, to receiving on PTP Rice noodles carry out Raman test with 532nm laser source, and Fig. 2 is the test result of Raman test.It can be clearly seen that stone from Fig. 2 The peak feature G of black alkene, so that the tungsten nanowires for confirming that the present invention synthesizes are wrapped up by multi-layer graphene.
The tungsten nanowires for being coated with graphene for being 35nm to diameter in transmission electron microscope carry out original position stretching test, obtain figure Stress-strain diagram shown in 3, from stress-strain diagram, it can be seen that, the breaking strength for being coated with the tungsten nanowires of graphene is high Up to 29.5GPa, Young's modulus is up to 964GPa, this shows that the metal nanometer line of graphene coated has high intensity and mould Amount, reinforcing effect are significant.

Claims (7)

1. a kind of preparation method of graphene coated metal nanometer line, which comprises the following steps:
1) prefabricated scratch on a silicon substrate, then silicon base is cleaned and dried;
2) nickel salt is placed in dehydrated alcohol, drop is in silicon base after ultrasonic disperse;
3) silicon base is placed in 600 DEG C of -1200 DEG C of temperature, and is kept the temperature in the atmosphere of hydrogen, then in hydrogen Room temperature is cooled in atmosphere with the furnace, so that nickel salt evenly dispersed in silicon base to be reduced into the nano particle of Ni;
4) metal oxide powder is uniformly put into Al2O3In porcelain Noah's ark, then the silicon substrate bottom cover that will be handled through step 3) is in Al2O3Porcelain On Noah's ark, then by Al2O3Porcelain Noah's ark is placed in horizontal pipe furnace;
5) to the built-in distilled water of drexel bottle, then drexel bottle is fixed on warm table, H2And Ar is passed into water after drexel bottle gas washing In flat tube furnace, to exclude the air in horizontal pipe furnace;
6) flow velocity of Ar is adjusted to 100sccm or more, by H2Flow velocity adjust to 30sccm hereinafter, by the temperature of gas washing water in bottle Degree is adjusted to 80 DEG C -120 DEG C, and the temperature in horizontal pipe furnace is adjusted to 800 DEG C -1200 DEG C, is cooled to room temperature after heat preservation, i.e., The metal nanometer line of the uniform graphene coated of line footpath can be obtained on a silicon substrate.
2. the preparation method of graphene coated metal nanometer line according to claim 1, which is characterized in that the tool of step 1) Gymnastics conduct: drawing knife prefabricated scratch on a silicon substrate with diamond, then silicon base be placed in dehydrated alcohol and is cleaned by ultrasonic, Then it dries.
3. the preparation method of graphene coated metal nanometer line according to claim 1, which is characterized in that step 3) is by silicon Substrate is placed in 600 DEG C -1200 DEG C, and the concrete operations kept the temperature in the atmosphere of hydrogen are as follows: silicon base is placed in water Speed in flat tube furnace, then with heating rate more than or equal to 10 DEG C/min is warming up to 600 DEG C -1200 DEG C, and in the gas of hydrogen It is kept the temperature in atmosphere.
4. the preparation method of graphene coated metal nanometer line according to claim 1, which is characterized in that metal oxide The purity of powder is greater than 99.99%.
5. the preparation method of graphene coated metal nanometer line according to claim 1, which is characterized in that H in step 5)2 Flow velocity be more than or equal to 50sccm, the flow velocity of Ar is more than or equal to 200sccm, H2And the time that is passed through of Ar is more than or equal to 10min.
6. the preparation method of graphene coated metal nanometer line according to claim 1, which is characterized in that in step 6) Soaking time is more than or equal to 4h.
7. the preparation method of graphene coated metal nanometer line according to claim 1, which is characterized in that H2And Ar purity It is all larger than 99.99%.
CN201810236164.2A 2018-03-21 2018-03-21 A kind of preparation method of graphene coated metal nanometer line Pending CN108971480A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109830572A (en) * 2019-03-06 2019-05-31 厦门瑶光半导体科技有限公司 A kind of preparation method becoming work function wide spectrum transparent ohmic electrode

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CN103014683A (en) * 2012-12-11 2013-04-03 西安交通大学 Preparation method of graphene-based nano-silver composite
CN103551591A (en) * 2013-11-11 2014-02-05 福建医科大学 Porous platinum-graphene oxide composite nano material and preparation method thereof
CN104797524A (en) * 2012-11-14 2015-07-22 Lg电子株式会社 Method for preparing graphene and said graphene, electronic device using said graphene
CN106315566A (en) * 2016-08-15 2017-01-11 安徽师范大学 Preparation method of graphene

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Publication number Priority date Publication date Assignee Title
JP2009091174A (en) * 2007-10-04 2009-04-30 Univ Of Fukui Method for producing graphene sheet
KR20110068647A (en) * 2009-12-16 2011-06-22 울산대학교 산학협력단 Manufacturing method of graphene and graphene-nano metal composite powders using electrical explosion of wire
CN101760724A (en) * 2010-01-26 2010-06-30 电子科技大学 Method for preparing graphene membrane electrode with overlarge area and high quality
CN101992303A (en) * 2010-10-29 2011-03-30 江苏大学 Method for preparing graphene/Ni nano composite material
CN102350505A (en) * 2011-09-22 2012-02-15 浙江师范大学 Preparation method for nickel/graphene nanometer compound material
CN104797524A (en) * 2012-11-14 2015-07-22 Lg电子株式会社 Method for preparing graphene and said graphene, electronic device using said graphene
CN103014683A (en) * 2012-12-11 2013-04-03 西安交通大学 Preparation method of graphene-based nano-silver composite
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CN109830572A (en) * 2019-03-06 2019-05-31 厦门瑶光半导体科技有限公司 A kind of preparation method becoming work function wide spectrum transparent ohmic electrode

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