CN108956700B - For detecting the submicron film sensor of SF6 substitution gas decomposition product - Google Patents
For detecting the submicron film sensor of SF6 substitution gas decomposition product Download PDFInfo
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- CN108956700B CN108956700B CN201811087434.4A CN201811087434A CN108956700B CN 108956700 B CN108956700 B CN 108956700B CN 201811087434 A CN201811087434 A CN 201811087434A CN 108956700 B CN108956700 B CN 108956700B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
Abstract
The invention discloses one kind for detecting SF6Substitute the submicron film sensor of gas decomposition product, including sensor base, sensor base upper surface is electric current sensor film, for output transducer response current, sensor base lower surface is bonding material layer, for fixing sensor base, air-sensitive probe array is provided on electric current sensor film, air-sensitive probe array is externally coated with unformed fluoroplymer layer, wherein, sensor base is made of polytetrafluoroethylene (PTFE) or liquid-state silicon gel material, electric current sensor film is made of metal material, pass through shielded cable output response electric current, bonding material layer is the polypropylene film of low-permeability, air-sensitive probe array material is the chlorophyll sensitive to fluorine atom, air-sensitive probe array is prepared using plasma chemical vapor deposition, the present invention, which solves shortage in the prior art, can accurately detect environmentally friendly S F6The problem of substituting the equipment of gas decomposition components.
Description
Technical field
The invention belongs to high voltage electric equipment fault diagnosises and monitoring running state technical field, and in particular to one kind is used for
Detect SF6Substitute the submicron film sensor of gas decomposition product.
Background technique
Find novel SF6Gas is substituted to cut down SF6Use can successfully manage global warming, guarantee electric power from
The health of dealer has great environmental benefit and social benefit.
The SF mainly studied at present6Substitution gas can be divided into following four: conventional gas (N2、Air、 CO2Deng), SF6
Mixed gas (SF6+N2、SF6+CF4、SF6+O2Deng), strong electronegativity gas (CF3I、 c-C4F8、C3F8Deng) and its mixed gas,
Novel artificial synthesizing environment-friendly gas (C4F7N and C5F10) and its mixed gas etc. O.For conventional gas, Hitachi, Ltd and AE electricity
Power company has carried out a large amount of experimental study, the results showed that partial discharge inception voltage of the dry air under needle to board electrode is big
In N2；The insulation breakdown characteristic of 0.5MPa Air is better than N2、CO2, with 80%N2+ 20%O2The insulation effect of mixed gas is suitable.
In SF6In mixed gas, SF6+N2And SF6+CF4With insulation performance more outstanding.Siemens take the lead in using SF6
+N2Dielectric of the mixed gas as gas-insulated metal closed power transmission line was applied in investment in 2001.In strong electronegativity
In gas and its mixed gas research, CF3I is with it close to CO2GWP value and be better than SF6Dielectric strength, by people pay close attention to.
The experimental study that University Of Chongqing carries out shows 0.3MPa 30%CF3I+70%N2Mixed gas can be used as dielectric application
In middle voltage electrical equipment.It is worth noting that, the C that 3M company releases5F10O and C4F7N gas has good insulating capacity,
Itself GWP value is very low and nontoxic, usually and CO2, Air or O2Equal background gas mix to reduce condensing temperature, substitute SF6As
The potentiality of dielectric are considerably beyond remaining gas.C is respectively adopted in Alstom and ABB AB4F7N+CO2And C5F10O+Air
Mixed gas develops 145kV GIS model machine, and dielectric strength is close to SF6It is horizontal.
But C5F10O、C4F7The environmentally friendly SF such as N6It is still unknown to substitute gas decomposition components, to insulation characterisitic
It influences also without complete conclusion.Therefore, environmentally friendly SF can accurately be detected by how obtaining one kind6Substitute gas decomposition components
Microsensor, thus the problem of being applied to high-tension electricity equipment fault diagnosis, being still prior art urgent need to resolve.
Summary of the invention
The object of the present invention is to provide one kind for detecting SF6The submicron film sensor of gas decomposition product is substituted,
It solves to lack in the prior art and can accurately detect environmentally friendly SF6The problem of substituting the equipment of gas decomposition components.
The technical scheme adopted by the invention is that for detecting SF6Substitute the submicron film sensing of gas decomposition product
Device, which is characterized in that including sensor base, sensor base upper surface is electric current sensor film, is rung for output transducer
Electric current is answered, sensor base lower surface is provided with gas on electric current sensor film for fixing sensor base for bonding material layer
Quick probe array, air-sensitive probe array are externally coated with unformed fluoroplymer layer.
The features of the present invention also characterized in that
Sensor base is made of polytetrafluoroethylene (PTFE) or liquid-state silicon gel material.
Electric current sensor film is made of metal material, and passes through shielded cable output response electric current.
Bonding material layer is the polypropylene film of low-permeability.
Air-sensitive probe array material is the chlorophyll sensitive to fluorine atom, and air-sensitive probe array utilizes plasma chemistry gas
Phase sedimentation is prepared.
The probe length of air-sensitive probe array is submicron order.
The invention has the advantages that for detecting SF6Substitute the submicron film sensor of gas decomposition product, the biography
Sensor utilizes the air-sensitive probe array material tests environmentally friendly SF sensitive to fluorine atom6Substitution gas decomposition product contains
Amount is suitable for gas content and monitors on-line；Using chlorophyll as air-sensitive probe array material, by generate ultra-weak electronic signal with
Reflect environmentally friendly SF6The content of gas decomposition product is substituted, high sensitivity, selectivity are good, reduce practical operation difficulty；It adopts
It uses unformed fluoropolymer as air-sensitive probe array material coating, improves sensor service life, avoid gas macromolecular pair
The interference of testing result；Environmentally friendly SF6Substituting gas includes but is not limited to C5F10O、C4F7N、CF3I、 C3F8Deng Yi Jishang
State gas respectively with CO2, dry air, O2The mixture of equal background gas；The present invention can effectively identify that gas, detection gas contain
Amount, it is small in size, easy to operate, be easily installed, power equipment normal work is not influenced, be can be applied to high-tension electricity equipment fault and is examined
Disconnected and status monitoring.
Detailed description of the invention
Fig. 1 is the present invention for detecting SF6Substitute the planar structure side of the submicron film sensor of gas decomposition product
View；
Fig. 2 is the relationship between the submicron order thin film sensor response current in the present invention and under test gas content；
Fig. 3 is the length of the air-sensitive probe array in the present invention, sensor response current, the pass between under test gas type
System.
In figure, 1. sensor bases, 2. electric current sensor films, 3. bonding material layers, 4. air-sensitive probe arrays, 5. without fixed
Type fluoroplymer layer.
Specific embodiment
The following describes the present invention in detail with reference to the accompanying drawings and specific embodiments.
The present invention is for detecting SF6Substitute gas decomposition product submicron film sensor, structure chart as shown in Figure 1,
Including sensor base 1,1 upper surface of sensor base is electric current sensor film 2, is used for output transducer response current, sensing
1 lower surface of device substrate is provided with air-sensitive probe for fixing sensor base 1 for bonding material layer 3 on electric current sensor film 2
Array 4, air-sensitive probe array 4 are externally coated with unformed fluoroplymer layer 5.
Sensor base 1 is made of polytetrafluoroethylene (PTFE) or liquid-state silicon gel material.
Electric current sensor film 2 is made of metal material, and passes through shielded cable output response electric current.
Bonding material layer 3 is the polypropylene film of low-permeability.
4 material of air-sensitive probe array is the chlorophyll sensitive to fluorine atom, and air-sensitive probe array 4 utilizes plasma chemistry
Vapour deposition process is prepared.
The probe length of air-sensitive probe array 4 is submicron order.
The present invention is for detecting SF6The submicron film sensor of gas decomposition product is substituted, test object is environmental-friendly
Type SF6Substituting gas includes but is not limited to C5F10O、C4F7N、CF3I、C3F8Deng and above-mentioned gas respectively with CO2, it is dry empty
Gas, O2The mixture of equal background gas.The environmentally friendly SF6Substitution gas decomposition product contains fluorine atom.
The present invention is for detecting SF6In the submicron film sensor for substituting gas decomposition product, sensor base 1 is used
The material that ductility is good, dielectric strength is high is made, such as polytetrafluoroethylene (PTFE), liquid-state silicon gel；Electric current sensor film 2 is by ductility
Good metal material is made, so that sensor has preferable flexibility, it on the one hand can be by appropriate deformation to adapt to electric power
The complex configuration of equipment, to detect environmentally friendly SF6Gas decomposition product is substituted in the content of different spaces；On the other hand
So that the sensor of appropriate deformation will not influence the normal work of air-sensitive probe array and electric current sensor film, to have higher
Service life.4 material of air-sensitive probe array is the chlorophyll sensitive to fluorine atom, variation ratio of the chlorophyll to fluorine atom content
More sensitive, the ultra-weak electronic signal of generation can be used for reflecting the environmentally friendly SF6Substitute the content of gas decomposition product.Fluorine is former
Son with as magnesium ion chemically reacts, formation de-magnesium pheophytin, in above-mentioned reaction process magnesium ion passes through in chlorophyll
The gain and loss of electronics generates ultra-weak electronic signal, can be used for reflecting the environmentally friendly SF6Substitute the content of gas decomposition product.Nothing
Fluoroplymer layer 5 of being formed has stable chemical property, can be corroded to avoid air-sensitive probe array 4；Unformed fluoropolymer
Layer 5 also has good screening, can be to avoid environmentally friendly SF6Substitute interference of the gas macromolecular to testing result.Cause
This present invention using unformed fluoropolymer as the present invention of air-sensitive probe array use the low polypropylene film of permeability as
On the one hand jointing material guarantees that sensor will not fall off in long-term work from equipment, another aspect jointing material molecule is not
Electric current sensor film and air-sensitive probe array can be penetrated into, guarantees the susceptibility and accuracy of sensor.
The present invention is for detecting SF6The submicron film sensor of gas decomposition product is substituted, response current is nA grades.Figure
2 show the relationship between the submicron order thin film sensor response current in the present invention and under test gas content.It can from Fig. 2
See, in practical applications, with the increase of gas content, response current and gas content are positively correlated linear relationship.Also from Fig. 2
As can be seen that the submicron order thin film sensor in the present invention is for CF3、CF4、CN、CF2Etc. environmentally friendly SF6Substitute gas
Decomposition product has different current response characteristics, can detect under test gas content accordingly, and identify gaseous species.
Not only in this, submicron order thin film sensor disclosed in this invention can also carry out the measurement of mixed gas.Fig. 3
It is shown the length of the air-sensitive probe array in the present invention, sensor response current, the relationship between under test gas type, from figure
3 as can be seen that the indicatrix between different tested gas types and air-sensitive probe length, sensor response current has obviously
Difference selects the sensor composition sensor array of the air-sensitive probe array of multiple probes with different length and density accordingly
Column, air-sensitive probe array can simultaneously detect mixed gas, for distinguishing gaseous species.
The present invention is for detecting SF6The submicron film sensor for substituting gas decomposition product, using sensitive to fluorine atom
Air-sensitive probe array, improve sensor selectivity, reduce cross sensitivity degree；Secondly because the present invention stability is high,
Coating of the good unformed fluoropolymer of screening property as air-sensitive probe array, further improves the sensitivity and essence of sensor
Exactness, while the service life of sensor is increased substantially；Again, the present invention passes through the sensor on measurement electric current sensor film
Response current, and then reflect the content of under test gas.So, when air-sensitive probe in detecting to environmentally friendly SF6Substitute gas
When body decomposition product, sensor generates response current, can be obtained by the size of response current on measurement electric current sensor film
The content of under test gas.
Claims (3)
1. for detecting SF6Substitute the submicron film sensor of gas decomposition product, which is characterized in that including sensor base
(1), sensor base (1) upper surface is electric current sensor film (2), is used for output transducer response current, the sensor base
Bottom (1) lower surface is bonding material layer (3), and for fixing sensor base (1), electric current sensor film is provided with air-sensitive on (2)
Probe array (4), air-sensitive probe array (4) are externally coated with unformed fluoroplymer layer (5)；
The bonding material layer (3) is the polypropylene film of low-permeability；
Air-sensitive probe array (4) material is the chlorophyll sensitive to fluorine atom, and air-sensitive probe array (4) utilizes plasma
Chemical vapour deposition technique is prepared；
The probe length of the air-sensitive probe array (4) is submicron order.
2. according to claim 1 for detecting SF6Substitute the submicron film sensor of gas decomposition product, feature
It is, the sensor base (1) is made of polytetrafluoroethylene (PTFE) or liquid-state silicon gel material.
3. according to claim 1 for detecting SF6Substitute the submicron film sensor of gas decomposition product, feature
It is, the electric current sensor film (2) is made of metal material, and passes through shielded cable output response electric current.
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| CN201811087434.4A CN108956700B (en) | 2018-09-18 | 2018-09-18 | For detecting the submicron film sensor of SF6 substitution gas decomposition product |
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| CN201811087434.4A CN108956700B (en) | 2018-09-18 | 2018-09-18 | For detecting the submicron film sensor of SF6 substitution gas decomposition product |
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| CN108956700B true CN108956700B (en) | 2019-07-23 |
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| CN110031513B (en) * | 2019-03-28 | 2022-01-07 | 西安理工大学 | Miniature sensor for detecting Cu vapor content in environment-friendly switch equipment |
| CN110807247B (en) * | 2019-10-09 | 2023-04-07 | 平高集团有限公司 | SF based on environmental protection 6 Alternative medium selection method |
| CN112362723B (en) * | 2020-10-29 | 2022-03-04 | 武汉大学 | SF based on steady-state Thomson principle6Substitute gas searching method and device |
| CN113917295A (en) * | 2021-09-29 | 2022-01-11 | 西安理工大学 | Power equipment insulation state monitoring system and method based on gas components |
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| CN201269864Y (en) * | 2008-09-22 | 2009-07-08 | 河南省日立信电子有限公司 | Intelligent SF6 gas sensor |
| CN201382934Y (en) * | 2009-04-15 | 2010-01-13 | 北京嘉东科技有限公司 | Gas detection sensor device |
| CN102426176B (en) * | 2011-11-18 | 2013-03-27 | 南京工业大学 | Gas sensor and manufacturing technique thereof |
| CN104316579A (en) * | 2014-08-23 | 2015-01-28 | 国家电网公司 | Gas distribution method of detector for detecting SF6 gas decomposition products |
| US10132959B2 (en) * | 2015-02-20 | 2018-11-20 | Halliburton Energy Services, Inc. | Thin-layer spectroelectrochemistry cell and methods for use in subterranean formation operations |
| CN106872564B (en) * | 2015-12-14 | 2020-09-25 | 国网智能电网研究院 | SF (sulfur hexafluoride)6Gas sensor |
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