CN110807247B - SF based on environmental protection 6 Alternative medium selection method - Google Patents

SF based on environmental protection 6 Alternative medium selection method Download PDF

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CN110807247B
CN110807247B CN201910952221.1A CN201910952221A CN110807247B CN 110807247 B CN110807247 B CN 110807247B CN 201910952221 A CN201910952221 A CN 201910952221A CN 110807247 B CN110807247 B CN 110807247B
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gas
gwp
temperature
substitute
mixed
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CN110807247A (en
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韩国辉
林莘
庚振新
徐建源
张佳
朱峰
朱莹
李瑞嵩
张震
赵晓民
李旭旭
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State Grid Corp of China SGCC
Electric Power Research Institute of State Grid Anhui Electric Power Co Ltd
Shenyang University of Technology
Pinggao Group Co Ltd
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State Grid Corp of China SGCC
Electric Power Research Institute of State Grid Anhui Electric Power Co Ltd
Shenyang University of Technology
Pinggao Group Co Ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H33/00High-tension or heavy-current switches with arc-extinguishing or arc-preventing means
    • H01H33/60Switches wherein the means for extinguishing or preventing the arc do not include separate means for obtaining or increasing flow of arc-extinguishing fluid
    • H01H33/64Switches wherein the means for extinguishing or preventing the arc do not include separate means for obtaining or increasing flow of arc-extinguishing fluid wherein the break is in gas
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H33/00High-tension or heavy-current switches with arc-extinguishing or arc-preventing means
    • H01H33/70Switches with separate means for directing, obtaining, or increasing flow of arc-extinguishing fluid
    • H01H33/88Switches with separate means for directing, obtaining, or increasing flow of arc-extinguishing fluid the flow of arc-extinguishing fluid being produced or increased by movement of pistons or other pressure-producing parts
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02BBOARDS, SUBSTATIONS OR SWITCHING ARRANGEMENTS FOR THE SUPPLY OR DISTRIBUTION OF ELECTRIC POWER
    • H02B13/00Arrangement of switchgear in which switches are enclosed in, or structurally associated with, a casing, e.g. cubicle
    • H02B13/02Arrangement of switchgear in which switches are enclosed in, or structurally associated with, a casing, e.g. cubicle with metal casing
    • H02B13/035Gas-insulated switchgear
    • H02B13/055Features relating to the gas

Abstract

The invention provides an SF based on environmental protection 6 A method for selecting a substitute medium relates to the technical field of electricity. The invention comprises the following steps: step 1: determination of SF 6 Temperature environment and inflation pressure range of the replacement media; and 2, step: calculating according to Riedel vapor pressure equation and Raoult law to obtain SF under corresponding inflation pressure 6 The corresponding liquefaction temperature of the replacement medium; and step 3: selecting SF with a liquefaction temperature meeting the requirement according to the range of the given ambient temperature for operating the equipment 6 A replacement media; and 4, step 4: for SF screened in step 3 6 The global warming potentials of the substitute media are compared to obtain a gas that satisfies the conditions. The method has simple calculation means, easy operation and strong applicability, and can select corresponding SF aiming at different power equipment 6 Substitute gas, the invention can greatly reduce SF 6 The use of (2) has positive effect on environmental protection.

Description

SF based on environmental protection 6 Alternative medium selection method
Technical Field
The invention relates to the technical field of electricity, in particular to an SF (sulfur hexafluoride) based on environmental protection 6 Alternative media selection methods.
Background
SF 6 Insulating and arc-extinguishing media are widely used in electrical power equipment such as Gas Insulated Switchgear (GIS) and Gas Insulated Lines (GIL). However, SF 6 Gas faces two very serious problems in applications: (1) SF 6 Gas is a serious greenhouse gas with Global Warming Potential (GWP) of about CO 2 23900 times higher than that of the original standard and is listed in the Kyoto protocol, which was filed in 1997One of 6 greenhouse gases with limited emissions; (2) SF 6 The higher liquefaction temperature of the gas limits its application in alpine regions, such as SF at 0.1MPa and 0.6MPa 6 The liquefaction temperatures of the gases are about-64 ℃ and-25 ℃ respectively, and CO 2 About-78.5 ℃ and-53 ℃ respectively. Albeit at SF 6 Adding N 2 、CO 2 、CF 4 The binary mixed gas can reduce the liquefaction temperature, but the insulation and arc extinguishing performance of the mixed gas is lower than that of SF 6 Cannot fundamentally solve SF 6 Environmental problems are caused in the using process. The above reasons allow the exploration of environmentally friendly SF 6 The alternative gas becomes an important research direction and a hot problem which needs to be solved urgently in the field. As SF 6 The substitute gas must meet the following basic requirements:
1) The environmental requirements are as follows: low enough greenhouse effect, no damage to ozone layer, no ecological toxicity.
2) Health and safety requirements: has no toxicity or low enough toxicity to human, and is not easy to burn, explode, etc.
3) The technical requirements are as follows: low liquefying temperature, high insulating strength, high heat dissipation capacity and good arc extinguishing performance.
Substitution of SF by a single conventional gas 6 The gas being mainly CO 2 、N 2 And dry air, the 3 gases have stable physical and chemical properties, low cost, difficult combustion and no combustion, and the liquefaction temperature is far lower than that of SF 6 A gas. Wherein CO is 2 Gases have recently received considerable attention as potential environmentally friendly arc extinguishing media.
Partial replacement of gas studies have been mainly directed to SF 6 With CO 2 、N 2 And inert gases, PFC (perfluorohydrocarbons), and the like. The main purpose of which is to pass SF 6 The liquefaction temperature of the gas is reduced by mixing the gas with the low-liquefaction-temperature gas, which has very important engineering significance, and simultaneously, the cost can be reduced to a certain degree, and the SF can be reduced 6 The effect of the gas on the environment.
Recently, ABB company reports that the novel environmental protection gas researched by the ABB company belongs to C of perfluoroketones 5 F 10 O、C 6 F 12 Work on O and its mixed gases, point out C 5 F 10 O and C 6 F 12 The dielectric strength of O gas is about pure SF 6 2 times and 2.5 times of the gas, however, the liquefaction temperature of the gas is too high (e.g. C at 0.1 MPa) 5 F 10 O and C 6 F 12 The liquefaction temperatures of O were about 24 ℃ and 49 ℃ respectively, and could not be used alone. In addition, C 4 F 7 N has a global warming potential of about CO 2 2100 times lower than SF 6 Gas, no toxicity and no corrosion, and has dielectric constant of SF 6 2 times of the total weight of the powder. Its liquefaction temperature is relatively high, and at one atmospheric pressure, its liquefaction temperature is about-4.7 deg.C, and then it is mixed with CO 2 Or N 2 Mixing to reduce the liquefaction temperature to within an acceptable range, 3% at one standard atmospheric pressure 4 F 7 N/97%CO 2 Liquefying the mixed gas at a temperature of less than-35 deg.C, and at a minimum temperature of-25 deg.C, 5% 4 F 7 N/95%CO 2 The highest allowable pressure of the mixed gas is 0.65MPa. CO2 2 Or N 2 The mixed gas can also reduce the global warming potential of the mixed gas, reduce the harm to the environment and has better application prospect.
Disclosure of Invention
The technical problem to be solved by the present invention is to provide an environmentally friendly SF based on the above mentioned shortcomings of the prior art 6 The method has simple calculation means, easy operation and strong applicability, and can select corresponding SF according to different power equipment 6 Substitute gas, the invention can greatly reduce SF 6 The use of (2) has positive effect on environmental protection.
In order to solve the technical problems, the technical scheme adopted by the invention is as follows:
the invention provides an SF based on environmental protection 6 The alternative medium selecting method comprises the following steps:
step 1: based on SF 6 Determining the operating temperature of the electrical device to which the substitute medium is to be applied 6 Temperature environment of the substitute medium, rootDetermining SF according to charging pressure requirements of the electrical equipment being used 6 The inflation pressure range of the displacing medium;
step 2: calculating according to Riedel vapor pressure equation and Raoult law to obtain SF under corresponding inflation pressure 6 The corresponding liquefaction temperature of the replacement medium;
Figure BDA0002226111140000021
A=-35Q (2)
B=-36Q (3)
C=42Q+α C (4)
D=-Q (5)
Q=0.0838(3.758-α C ) (6)
Figure BDA0002226111140000022
Figure BDA0002226111140000023
in the formula: t is r =T/T c ,T br =T b /T c ,T、P、T r 、P r 、T c And P c Absolute temperature, absolute pressure, contrast temperature, contrast pressure, critical temperature, and critical pressure, respectively; t is a unit of b Represents the boiling temperature, T r 6 The equation of the term is an inflection point of a vapor pressure curve in a high-pressure area; p 1 Saturated vapor pressure of gas with higher liquefaction temperature, P 2 Is the saturated vapor pressure of the buffer gas; p is m Is the saturated vapor pressure of the mixed gas; x and y are respectively the mole fractions of the gas phase and the liquid phase of the gas with higher liquefaction temperature; A. b, C, D, Q and psi b Are all empirical values derived from experimental data; alpha is alpha C Is the Riedel constant;
obtaining SF according to calculation method of GWP of mixed gas 6 Global warming potential of the replacement media;
GWP z =x 1 ·GWP 1 +x 2 ·GWP 2 +…+x n ·GWP n (9)
in the formula: x is the number of 1 、x 2 ····x n Is the mass fraction of each gas in the mixed gas; GWP 1 、GWP 2 ····GWP n GWP of each component; GWP z Is GWP of the mixed gas, wherein n is a positive integer;
and step 3: selecting SF with a liquefaction temperature meeting the requirement according to the range of the given ambient temperature for operating the equipment 6 An alternative medium;
and 4, step 4: for SF screened in step 3 6 Comparing the global warming potentials of the substitute media to obtain a gas meeting the conditions; the condition is SF 6 The global warming potential of the replacement media must be lower than that of pure SF 6 5% of the total.
SF in said step 1 6 The substitute medium includes a single conventional substitute gas, a complete substitute gas, and a partial substitute gas; wherein the single conventional substitute gas comprises: CO2 2 、O 2 、N 2 And air; the complete replacement gas includes: C-C 4 F 8 、CF 4 、 C 3 F 8 、C 2 F 6 、CF 3 I、C 4 F 7 N and its mixed gas and perfluoroketone gas and its mixed gas; the partial substitute gas is composed of SF 6 Mixed with a buffer gas, wherein SF 6 The mixed buffer gas comprises N 2 、CO 2 、CF 4 Or an inert gas.
Said C 4 F 7 N and the mixed gas thereof is composed of C 4 F 7 N gas and its buffer gas, said C 4 F 7 N and C in its mixed gas 4 F 7 The molar fraction content of N gas is not higher than 20%.
The perfluoroketone gas and the mixed gas thereof consist of perfluoroketone gas and buffer gas thereof.
Said C 4 F 7 The buffer gas in the N and the mixed gas is CO 2 、N 2 Air or CO 2 And O 2 And (4) mixing the gases.
The buffer gas in the perfluoroketone gas and the mixed gas thereof is CO 2 、N 2 Or air.
Adopt the produced beneficial effect of above-mentioned technical scheme to lie in: the invention provides an SF based on environmental protection 6 The method uses the liquefaction temperature and the global warming potential of the gas insulation medium as comparison parameters, can quickly select the gas insulation medium meeting the requirements of different power equipment in different temperature environments and inflation pressures, and obtains the environment-friendly SF meeting the requirements through the calculation of the local greenhouse effect coefficient 6 Replacing the gas. The method has simple calculation means, easy operation and strong applicability, and can select corresponding SF according to different power equipment 6 Substitute gas, the invention can greatly reduce SF 6 The use of (2) has positive effect on environmental protection.
Drawings
FIG. 1 is an environmental SF according to an embodiment of the present invention 6 A flow chart of an alternative media selection method;
FIG. 2 is a graph showing the calculation results of saturated vapor pressure of C4F7N and the mixture thereof according to the embodiment of the present invention;
FIG. 3 is a graph of the liquefaction temperature of a mixed gas as a function of C4F7N content at different pressures in accordance with an embodiment of the present invention;
FIG. 4 is a graph of the results of the calculation of the global warming potentials of C4F7N/CO2 and C4F7N/N2 in accordance with the preferred embodiment of the present invention.
Detailed Description
The following detailed description of embodiments of the present invention is provided in connection with the accompanying drawings and examples. The following examples are intended to illustrate the invention, but are not intended to limit the scope of the invention.
The method of this example is as follows.
As shown in FIG. 1, the present application is an SF based on environmental protection 6 A method for selecting a substitute medium comprising a single conventional substitute gas, a complete substitute gas, and a partial substitute gas, said method comprising:
step 1: based on SF 6 Operating temperature of the power plant to be used, instead of the medium, determining SF 6 Determining SF according to the charging pressure requirements of the applied power equipment specified in the national standards, replacing the temperature environment of the medium 6 The inflation pressure range of the displacing medium.
Step 2: calculating according to Riedel vapor pressure equation and Raoult law to obtain SF under corresponding inflation pressure 6 The corresponding liquefaction temperature of the replacement medium;
under a certain pressure, when the same substance is in a gas-liquid equilibrium state or a gas-solid equilibrium state along with the change of temperature, the corresponding temperature is the liquefaction temperature of the substance. The liquefaction temperature of the same substance at different pressures varies and decreases with decreasing pressure. When the two gases are mixed, the liquefaction temperature critical value of the mixed gas is between the liquefaction temperature critical value of the two gases and the liquefaction temperature of the two gases under the corresponding pressures. In addition, because the compressed state of the mixed gas is different, the liquefaction temperature of the mixed gas cannot be obtained by partial pressure calculation of the gas with higher liquefaction temperature through the Dalton partial pressure law.
The liquefaction temperature calculation formula is as follows:
Figure BDA0002226111140000041
A=-35Q (2)
B=-36Q (3)
C=42Q+α C (4)
D=-Q (5)
Q=0.0838(3.758-α C ) (6)
Figure BDA0002226111140000042
Figure BDA0002226111140000043
in the formula: t is r =T/T c ,T br =T b /T c ,T、P、T r 、P r 、T c And P c Absolute temperature, absolute pressure, contrast temperature, contrast pressure, critical temperature, and critical pressure, respectively; t is b Represents the boiling temperature, T r 6 The equation can describe the turning point of the vapor pressure curve in the high pressure area; p 1 Saturated vapor pressure of gas with higher liquefaction temperature, P 2 Is the saturated vapor pressure of the buffer gas; p m Is the saturated vapor pressure of the mixed gas; x and y are respectively the gas phase and liquid phase mole fractions of the gas with higher liquefaction temperature. A. B, C, D, Q and psi b Are all empirical values derived from experimental data; alpha (alpha) ("alpha") C Is the Riedel constant;
obtaining SF according to a calculation method of mixed gas GWP 6 Global warming potential of the replacement media;
GWP z =x 1 ·GWP 1 +x 2 ·GWP 2 +…+x n ·GWP n (2)
in the formula: x is the number of 1 、x 2 ····x n Is the mass fraction of each gas in the mixed gas; GWP 1 、GWP 2 ····GWP n GWP of each component; GWP z Is the GWP of the mixed gas, wherein n is a positive integer; the method not only can calculate the global warming potential of the mixed gas, but also is suitable for the global warming potential of single gas.
According to the above-described calculation method of saturated vapor pressure and global warming potential, with C 4 F 7 N and its mixed gas are taken as examples, and C is obtained by calculation 4 F 7 N/CO 2 And C 4 F 7 N/N 2 Saturated vapor pressure and global warming potential of two mixed gases, and mixing with SF 6 The data relating to the gas were compared.
As shown in FIG. 2, C is measured at a temperature of 283K or less 4 F 7 C with N mole fraction of 10% 4 F 7 N/N 2 Saturated vapor pressure and SF 6 Not much different but the same C 4 F 7 C of N content 4 F 7 N/CO 2 Has a saturated vapor pressure slightly less than SF 6
When the ambient temperature is 253K, C as shown in FIG. 3 4 F 7 C with N content of 5%, 10%, 15% or 20% 4 F 7 N/N 2 The maximum pressure of the mixed gas which is not liquefied is 1.04MPa, 0.53MPa, 0.35MPa or 0.27MPa respectively; at the same temperature, C 4 F 7 C with N content of 5%, 10%, 15% or 20% 4 F 7 N/CO 2 The maximum pressure at which the mixed gas is not liquefied is 0.86MPa, 0.48MPa, 0.33MPa or 0.25MPa, respectively.
FIG. 4 is C 4 F 7 N/CO 2 And C 4 F 7 N/N 2 When C is the global warming potential value 4 F 7 With the same mole fraction of N, C 4 F 7 N/CO 2 Has a GWP of less than C 4 F 7 N/N 2 Wherein, C 4 F 7 C with N mole fractions of 5%, 8% and 10% 4 F 7 N/CO 2 The mixed gas GWPs are 399, 586, and 693, respectively.
And step 3: selecting SF with a liquefaction temperature meeting the requirement according to the range of the given ambient temperature for operating the equipment 6 A replacement media;
taking the two mixed gases calculated in step 2 as an example, in practical application, the lowest temperature is 253K 4 F 7 N/CO 2 And C 4 F 7 N/N 2 The mixed gas is not liquefied in GIL under 0.5MPa, and C in the mixed gas 4 F 7 The ratio of N is at most about 8% and 10%, respectively, and in a circuit breaker at 0.7MPa, C is present in the gas mixture 4 F 7 The percentage of N is at most about 5% and 8%, respectively.
And 4, step 4: for the SF screened in step 3 6 The global warming potentials of the substitute media are compared to obtain a gas meeting the requirements.
By C calculated in step 2 4 F 7 N/CO 2 Mixed gas global warming potential, C 4 F 7 C with N mole fractions of 5%, 8% and 10% 4 F 7 N/CO 2 The GWP of the mixed gas is respectively not higher than 1.67 percent, 2.45 percent and 2.90 percent of SF6, and is lower than 5 percent of the global warming potential of SF6, thereby meeting the requirement.
Regulation (EC) No. 842/2006 for certain fluorinated greenhouse gases according to European parliament and council of 17.5.2006 [11 ]]The calculation method of mixed gas GWP is mentioned to obtain SF 6 Replacing the global warming potential of the medium.
SF for environmental protection as described in this application 6 The displacing medium includes a single conventional displacing gas, a complete displacing gas, and a partial displacing gas. Wherein the single replacement medium comprises CO 2 、O 2 、N 2 And air; the complete replacement gas comprises C-C 4 F 8 、CF 4 、C 3 F 8 、 C 2 F 6 、CF 3 I、C 4 F 7 N and its mixed gas, perfluoroketone gas and its mixed gas. C 4 F 7 N and the mixed gas thereof is composed of C 4 F 7 N gas and buffer gas thereof, said C 4 F 7 N and C in its mixed gas 4 F 7 The mol fraction content of N gas is not higher than 20%, and the perfluoroketone gas and the mixed gas thereof are composed of perfluoroketone gas and buffer gas thereof. Part of the substitute gas is made of SF 6 Mixed with other gases to form with SF 6 The mixed buffer gas comprises N 2 、CO 2 、CF 4 And an inert gas. Completely substitute C in gas 4 F 7 One buffer gas of N and its mixed gas contains CO 2 、N 2 And air, and in addition, two buffer gases with CO 2 And O 2 Said C 4 F 7 N and C in mixed gas thereof 4 F 7 The molar fraction content of N gas is not higher than 20%; the buffer gas in the perfluoroketone gas and the mixed gas thereof in the completely-substituted gas only comprises CO 2 、N 2 And air.
All of the above gases, CO in a single conventional substitute gas 2 、N 2 And air, respectively, and liquefaction temperatures at-78.5 deg.C, -196 deg.C, and-183 deg.C, respectively, at one standard atmospheric pressure. Completely substitute C-C in gas 4 F 8 、 CF 4 、C 3 F 8 、C 2 F 6 、CF 3 I、C 4 F 7 N、C 5 F 10 O and C 6 F 12 The global warming potentials of O are 8700, 6500, 7000, 9200, 5, 2100, 1 and 1, respectively, and the liquefaction temperatures at one standard atmospheric pressure are-6 ℃, -186.8 ℃, -37 ℃, -78 ℃, -225.5 ℃, -4.7 ℃, 26.5 ℃ and 49 ℃, respectively. By the above basic parameters, the present application provides an SF based on environmental protection 6 The alternative medium is selected by first determining SF 6 Temperature environment and inflation pressure range of the replacement media; SF is then determined from the inflation pressure 6 Replacing the liquefaction temperature and global warming potential corresponding to the medium; selecting SF with a liquefaction temperature meeting the requirement according to the range of the given environmental temperature 6 A replacement media; final screening of SF 6 The global warming potential of the substitute medium is compared to obtain the gas meeting the environmental protection requirement. By the method, the SF meeting the environmental protection requirements under different environments can be conveniently and efficiently calculated 6 Replacing the constituents of the medium.
SF based on environmental protection that this application provided 6 The environment-friendly gas selected by the alternative medium selection method meets the environment application requirements, has small global warming potential, and can be widely applied to power equipment such as gas circuit breakers (GBC), disconnecting switches (DC), gas insulated metal enclosed type combined electrical appliances (GIS), gas insulated transmission pipelines (GIL) and the like.
Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit of the corresponding technical solutions and scope of the present invention as defined in the appended claims.

Claims (6)

1. SF based on environmental protection 6 The alternative medium selection method is characterized by comprising the following steps: the method comprises the following steps:
step 1: based on SF 6 Determining the operating temperature of the electrical device to which the substitute medium is to be applied 6 Determining SF according to charging pressure requirements of applied power equipment according to temperature environment of substitute medium 6 The inflation pressure range of the displacing medium;
and 2, step: calculating according to Riedel vapor pressure equation and Raoult law to obtain SF under corresponding inflation pressure 6 The corresponding liquefaction temperature of the replacement medium;
Figure FDA0002226111130000011
A=-35Q (2)
B=-36Q (3)
C=42Q+α C (4)
D=-Q (5)
Q=0.0838(3.758-α C ) (6)
Figure FDA0002226111130000012
Figure FDA0002226111130000013
in the formula: t is r =T/T c ,T br =T b /T c ,T、P、T r 、P r 、T c And P c Absolute temperature, absolute pressure, contrast temperature, contrast pressure, critical temperature, and critical pressure, respectively; t is b Represents the boiling temperature, T r 6 The equation of the term is an inflection point of a vapor pressure curve in a high-pressure area; p 1 Saturated vapor pressure of gas with higher liquefaction temperature, P 2 Is the saturated vapor pressure of the buffer gas; p m Is the saturated vapor pressure of the mixed gas; x and y are respectively the mole fractions of the gas phase and the liquid phase of the gas with higher liquefaction temperature; A. b, C, D, Q and psi b Are all empirical values derived from experimental data; alpha (alpha) ("alpha") C Is the Riedel constant;
obtaining SF according to a calculation method of mixed gas GWP 6 Global warming potential of the replacement media;
GWP z =x 1 ·GWP 1 +x 2 ·GWP 2 +…+x n ·GWP n (9)
in the formula: x is the number of 1 、x 2 ....x n Is the mass fraction of each gas in the mixed gas; GWP 1 、GWP 2 ....GWP n Is the GWP of each component; GWP z Is the GWP of the mixed gas, wherein n is a positive integer;
and step 3: selecting SF with a liquefaction temperature meeting the requirement according to the range of the given ambient temperature for operating the equipment 6 An alternative medium;
and 4, step 4: for SF screened in step 3 6 Comparing the global warming potentials of the substitute media to obtain a gas meeting the conditions; the condition is SF 6 The global warming potential of the replacement media must be lower than that of pure SF 6 5% of the total.
2. The SF according to claim 1 6 The alternative medium selecting method is characterized by comprising the following steps: said step 1Middle SF 6 The substitute medium includes a single conventional substitute gas, a complete substitute gas, and a partial substitute gas;
wherein the single conventional substitute gas comprises: CO2 2 、O 2 、N 2 And air; the complete replacement gas includes: C-C 4 F 8 、CF 4 、C 3 F 8 、C 2 F 6 、CF 3 I、C 4 F 7 N and its mixed gas and perfluoroketone gas and its mixed gas; part of the substitute gas is made of SF 6 Mixed with a buffer gas, wherein SF 6 The mixed buffer gas comprises N 2 、CO 2 、CF 4 Or an inert gas.
3. The SF according to claim 2 6 The alternative medium selecting method is characterized by comprising the following steps: said C 4 F 7 N and the mixed gas thereof is composed of C 4 F 7 N gas and buffer gas thereof, said C 4 F 7 N and C in mixed gas thereof 4 F 7 The molar fraction content of N gas is not higher than 20%.
4. The SF according to claim 2 6 The alternative medium selection method is characterized by comprising the following steps: the perfluoroketone gas and the mixed gas thereof consist of the perfluoroketone gas and the buffer gas thereof.
5. The SF according to claim 3 6 The alternative medium selection method is characterized by comprising the following steps: said C 4 F 7 The buffer gas in the N and the mixed gas is CO 2 、N 2 Air or CO 2 And O 2 And (4) mixing the gases.
6. The SF according to claim 4 6 The alternative medium selection method is characterized by comprising the following steps: the buffer gas in the perfluoroketone gas and the mixed gas thereof is CO 2 、N 2 Or air.
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