CN108788792B - Plane-driven pitching three-degree-of-freedom motion platform - Google Patents
Plane-driven pitching three-degree-of-freedom motion platform Download PDFInfo
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- CN108788792B CN108788792B CN201811056665.9A CN201811056665A CN108788792B CN 108788792 B CN108788792 B CN 108788792B CN 201811056665 A CN201811056665 A CN 201811056665A CN 108788792 B CN108788792 B CN 108788792B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25H—WORKSHOP EQUIPMENT, e.g. FOR MARKING-OUT WORK; STORAGE MEANS FOR WORKSHOPS
- B25H1/00—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby
- B25H1/14—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby with provision for adjusting the bench top
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
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Abstract
The embodiment of the invention provides a plane-driven pitching three-degree-of-freedom motion platform, which comprises: first and second moving components arranged on the baseThe movable platform comprises a moving assembly, a third moving assembly, a movable platform and two wedge-shaped blocks with inclined planes; the third motion assembly is arranged between the first motion assembly and the second motion assembly, and the motion tracks of the first motion assembly and the second motion assembly are parallel and perpendicular to the motion track of the third motion assembly; the two wedge-shaped blocks are respectively arranged on the first motion assembly and the second motion assembly, and inclined surfaces of the two wedge-shaped blocks are opposite; the movable platform is arranged on the third movement assembly, and two sides of the movable platform are respectively connected with the two inclined planes in a sliding manner; when the first motion assembly and the second motion assembly move in the same direction, the movable platform rotates along the central shaft of the movable platform; when the first moving assembly and the second moving assembly move reversely, the movable platform moves up and down relative to the base. X, Y and theta can be realized by the invention Y Three degrees of freedom decoupling motion.
Description
Technical Field
The invention relates to the field of microelectronic manufacturing and processing, in particular to a plane-driven pitching three-degree-of-freedom motion platform.
Background
Nowadays, with the recent development of precision numerical control processing, integrated circuit manufacturing, micro-electromechanical system processing, bioengineering and other industries, the development of manufacturing equipment is urgent. For example, in the microelectronics manufacturing industry, products have been developed in terms of size, weight, thinness, etc., but are increasingly powerful and diversified in function. The best way to solve the contradiction between these two directions of development is to use finer manufacturing equipment for feature size processing, and to increase the packaging density. In this way, higher demands are made on the indexes such as the motion accuracy, stroke, speed, acceleration, degree of freedom, etc. of the manufacturing equipment. In addition, fields such as numerical control machining, bioengineering and the like have wide demands for high-speed precision motion platforms with multiple degrees of freedom. The importance of the multi-degree-of-freedom high-speed precise motion platform and the urgent research and development requirements thereof can be seen.
In the existing motion platform research, the platform design is a plurality of single-axis platforms which are simply overlapped, and the single-axis platform has a plurality of associated links and motion components, so that the accumulation of motion errors is serious, and most of the single-axis platforms are difficult to simultaneously meet the requirements of multiple degrees of freedom and high precision. Therefore, providing a platform with a compact and precise structure and capable of realizing precise movement is a technical problem to be solved by those skilled in the art.
Disclosure of Invention
The embodiment of the invention provides a plane-driven pitching three-degree-of-freedom motion platform which can realize X, Y and theta Y Three degrees of freedom decoupling motion.
The embodiment of the invention provides a plane-driven pitching three-degree-of-freedom motion platform, which comprises: the first motion assembly, the second motion assembly, the third motion assembly, the movable platform and the two wedge-shaped blocks with inclined planes are arranged on the base;
the third motion assembly is arranged between the first motion assembly and the second motion assembly, and the motion tracks of the first motion assembly and the second motion assembly are parallel and perpendicular to the motion track of the third motion assembly;
the two wedge-shaped blocks are respectively arranged on the first motion assembly and the second motion assembly, and inclined surfaces of the two wedge-shaped blocks are opposite;
the movable platform is arranged on the third motion assembly, and two sides of the movable platform are respectively connected with the two inclined planes in a sliding manner;
when the first motion assembly and the second motion assembly move in the same direction, the movable platform rotates along the central shaft of the movable platform;
when the first motion assembly and the second motion assembly move reversely, the movable platform moves up and down relative to the base.
Preferably, the moving platform comprises: thick rod, thin rod and working platform;
the thick rod is fixedly connected to the third movement assembly, and is provided with an axle center hole for accommodating the first end of the thin rod, so that the thin rod can move up and down relative to the base in the thick rod;
the working platform is provided with a first central hole, the first central hole is used for accommodating the second end of the thin rod, the working platform is rotationally connected with the second end of the thin rod, and the working platform can rotate around the joint of the two.
Preferably, the second end of the wand has a second central aperture, the work platform has a transverse axis passing through the second central aperture at the first central aperture, and the transverse axis is parallel to the inclined plane.
Preferably, a first guide rail and a sliding block mounted on the first guide rail are arranged on the inclined surface of each wedge-shaped block, each sliding block is provided with a cylindrical sliding groove, and cylinders matched with the cylindrical sliding grooves are arranged on two sides of the working platform.
Preferably, the first, second and third motion assemblies each comprise: the device comprises a macro-motion piece and a macro-micro motion piece which is elastically connected with the macro-motion piece, wherein piezoelectric ceramics are arranged between the macro-motion piece and the macro-micro motion piece;
the two wedge blocks are respectively and fixedly connected to the macro-micro motion parts of the first motion assembly and the second motion assembly, and the thick rod is fixedly connected to the macro-micro motion parts of the third motion assembly.
Preferably, the macro-movement part is provided with an extension part, the extension part is provided with a hollow groove, the macro-movement part is provided with a cavity for accommodating the extension part, and the cavity is provided with a protrusion for being embedded into the non-end part of the hollow groove.
Preferably, the piezoelectric ceramic is arranged in the empty groove and positioned at one side of the bulge, and a high steel spring is arranged in the empty groove and at the other side of the bulge.
Preferably, the plane-driven three-degree-of-freedom motion platform capable of pitching provided by the embodiment of the invention further comprises: and the three driving devices are in one-to-one correspondence with the first motion assembly, the second motion assembly and the third motion assembly, and are arranged on the base.
Preferably, two sides of each driving device are provided with second guide rails, and the second guide rails are used for arranging the moving assemblies.
Preferably, the driving device is a linear motor.
From the above technical solutions, the embodiment of the present invention has the following advantages:
the embodiment of the invention provides a plane-driven pitching three-degree-of-freedom motion platform, which comprises: the first motion assembly, the second motion assembly, the third motion assembly, the movable platform and the two wedge-shaped blocks with inclined planes are arranged on the base; the third motion assembly is arranged between the first motion assembly and the second motion assembly, and the motion tracks of the first motion assembly and the second motion assembly are parallel and perpendicular to the motion track of the third motion assembly; the two wedge-shaped blocks are respectively arranged on the first motion assembly and the second motion assembly, and inclined surfaces of the two wedge-shaped blocks are opposite; the movable platform is arranged on the third movement assembly, and two sides of the movable platform are respectively connected with the two inclined planes in a sliding manner; when the first motion assembly and the second motion assembly move in the same direction, the movable platform rotates along the central shaft of the movable platform; when the first moving assembly and the second moving assembly move reversely, the movable platform moves up and down relative to the base. According to the invention, the plurality of groups of motion components are matched with the wedge blocks to perform motion in two vertical directions, so that a motion platform in sliding connection with the wedge blocks can realize motion in the X, Y direction, and can realize rotation by a central shaft of the motion platform, thereby realizing three-degree-of-freedom decoupling motion.
Drawings
In order to more clearly illustrate the embodiments of the invention or the technical solutions of the prior art, the drawings which are used in the description of the embodiments or the prior art will be briefly described, it being obvious that the drawings in the description below are only some embodiments of the invention, and that other drawings can be obtained from these drawings without inventive faculty for a person skilled in the art.
FIG. 1 is a schematic diagram of an embodiment of a planar driven three degree of freedom motion platform;
fig. 2 is an exploded view of a planar-driven three-degree-of-freedom motion platform capable of pitching.
Detailed Description
The embodiment of the invention provides a plane-driven pitching three-degree-of-freedom motion platform which can realize X, Y and theta Y Three degrees of freedom decoupling motion.
In order to make the objects, features and advantages of the present invention more comprehensible, the technical solutions in the embodiments of the present invention are described in detail below with reference to the accompanying drawings, and it is apparent that the embodiments described below are only some embodiments of the present invention, but not all embodiments of the present invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Referring to fig. 1, an embodiment of a plane-driven three-degree-of-freedom motion platform capable of pitching according to the present invention includes:
the first moving assembly, the second moving assembly, the third moving assembly, the moving platform and the two wedge-shaped blocks 5300 and 5400 with inclined surfaces are arranged on the base;
the third motion assembly is arranged between the first motion assembly and the second motion assembly, and the motion tracks of the first motion assembly and the second motion assembly are parallel and perpendicular to the motion track of the third motion assembly;
the two wedge blocks are respectively arranged on the first motion assembly and the second motion assembly, and inclined surfaces of the two wedge blocks 5300 and 5400 are opposite;
the movable platform is arranged on the third movement assembly, and two sides of the movable platform are respectively connected with the two inclined planes in a sliding manner;
when the first motion assembly and the second motion assembly move in the same direction, the movable platform rotates along the central shaft of the movable platform;
when the first moving assembly and the second moving assembly move reversely, the movable platform moves up and down relative to the base.
According to the invention, the plurality of groups of motion components are matched with the wedge blocks to perform motion in two vertical directions, so that a motion platform in sliding connection with the wedge blocks can realize motion in the X, Y direction, and can realize rotation by a central shaft of the motion platform, thereby realizing three-degree-of-freedom decoupling motion.
In this embodiment, the first motion assembly, the second motion assembly and the third motion assembly are similar, and the third motion assembly is taken as an example for illustration, and as shown in fig. 2, the third motion assembly includes: the macro-movement piece 3012 and the macro-movement piece 3013 which are elastically connected with the macro-movement piece are provided with piezoelectric ceramics 3017 therebetween. The macro-exercise piece 3012 is provided with an extension piece, the extension piece is provided with a hollow groove, the macro-exercise piece 3013 is provided with a cavity for accommodating the extension piece, and the cavity is provided with a protrusion for being embedded into the non-end part of the hollow groove. The piezoelectric ceramic 3017 is arranged in the empty groove and is positioned at one side of the bulge, and a high steel spring 3014 is arranged at the other side of the bulge in the empty groove. The first motion assembly and the second motion assembly are similar to the third motion assembly in structure, and are not described herein.
Here, the process of driving macro-micro moving parts after the piezoelectric ceramic is deformed is explained: because the piezoelectric ceramics and the high-steel springs are respectively arranged at the two sides of the bulge of the macro-micro moving part, when the piezoelectric ceramics are not electrified, the elasticity of the high-voltage springs at the moment extrudes the piezoelectric ceramics through the bulge (pushing the piezoelectric ceramics), so that the piezoelectric ceramics are prevented from being deformed. After the ceramic is electrified, the ceramic deforms to apply pressure to the bulge, and the pressure is larger than the elasticity of the spring at the moment, so that the macro-micro moving part moves, namely micro-movement, under the action of force.
The base is also provided with three driving devices 3011, 5111 and 5211 which are in one-to-one correspondence with the first moving assembly, the second moving assembly and the third moving assembly, and the driving devices can be linear motors. It should be noted that, the macro-moving part of each group of moving components is provided with an L-shaped moving part which is an electronic active cell, the electronic stator, namely, the driving device, is fixed on the base, and when the stator is electrified, magnetic force is generated between the two to push the active cell to perform linear movement, namely, the macro-moving part is driven to perform linear movement, and then the macro-moving part drives the linear movement of the whole moving component, so that the macro-movement of the moving platform is driven.
Two sides of each driving device are provided with second guide rails (such as a second guide rail 3020 corresponding to the driving device 3011, a second guide rail 5120 corresponding to the driving device 5111, and a second guide rail 5220 corresponding to the driving device 5211), and the second guide rails are used for setting a motion assembly. It will be appreciated that since there are three drive means, a pair of rails (i.e. the second rail) are provided on each side of each drive means, each pair of rails being used to provide a corresponding movement assembly such that the movement assembly performs macro and micro movements on the rails.
In this embodiment, the movable platform includes: coarse rod 4010, fine rod 4020, and work platform 1000;
rod 4010 is fixedly coupled to a third motion assembly, rod 4010 has an axial bore for receiving a first end of rod 4020 such that rod 4020 is movable up and down within the rod relative to the base. It will be appreciated that coarse rod 4010 and fine rod 4020 are coaxially disposed.
Work platform 1000 has a first central bore for receiving a second end of rod 4020, rod 4020 has a second central bore at the second end, work platform 1000 has a transverse axis passing through the second central bore at the first central bore, and the transverse axis is parallel to the inclined plane.
The two wedge blocks 5300 and 5400 are identical in structure, the wedge block 5300 is taken as an illustration, a first guide rail 5310 and a sliding block 5311 mounted on the first guide rail 5310 are arranged on the inclined surface of the wedge block 5300, the sliding block 5311 is provided with a cylindrical sliding groove, two sides of the working platform are provided with cylinders matched with the cylindrical sliding groove, the cylinders are embedded into the cylindrical sliding groove, and the cylinders can rotate in the sliding groove and slide along the axial direction of the cylinders because the length of the circular sliding groove is smaller than that of the cylinders.
Because the two wedge blocks 5300 and 5400 are respectively and fixedly connected to the macro-micro moving parts 5113 and 5213 of the first moving component and the second moving component, the thick rod 4010 is fixedly connected to the macro-micro moving part 3013 of the third moving component, when the third moving component moves, the moving direction is set to be the X direction, if the third moving component moves in the macro direction, the macro-moving part 3012 and the macro-micro moving part 3013 move together in the X direction, so that the moving platform is driven to perform macro-movement in the X direction (if the moving platform moves in the micro direction, only the macro-micro moving part 3013 performs linear movement, and then the moving platform is driven to perform micro movement in the X direction), and in the moving process, the cylinders on two sides of the working platform slide along the axis direction of the cylinders, namely the cylinders and the sliding blocks perform relative movement. The following applies to the Y direction and θ Y The macro motion of the two degrees of freedom is that the macro motion piece and the macro motion piece perform linear motion together, and the micro motion is that the macro motion piece and the micro motion piece perform linear motion, and the details are not repeated.
The first moving assembly and the second moving assembly are positioned on the same straight line, and the driving of the first moving assembly and the second moving assembly is controlled by respective driving sources, so that the moving speeds of the first moving assembly and the second moving assembly can be controlled to be the same or different, and can be adjusted according to actual requirements.
When the first motion assembly and the second motion assembly perform opposite motion or back motion, the motion speeds of the first motion assembly and the second motion assembly are consistent, no matter macro motion is performed at the same time or micro motion is performed at the same time, the two wedge blocks perform opposite motion or back motion at the same speed, namely, the two wedge blocks are simultaneously close to the working platform or are simultaneously far away from the working platform, the sliding blocks on the wedge blocks ascend or descend along the inclined plane, and as the two sides of the working platform are provided with the cylinders embedded in the cylindrical sliding grooves of the sliding blocks, the working platform stably ascends or descends (the thin rod moves up and down in the thick rod to realize the up and down motion of the platform), namely, the macro motion or the micro motion in the Y direction is completed.
When the first motion component and the second motion component move in the same direction, the first motion component and the second motion component are macro motion, the motion speeds of the first motion component and the second motion component can be the same or different, two wedge blocks move in the same direction, one wedge block is close to the working platform, the other wedge block is far away from the working platform, at the moment, one sliding block ascends and the other sliding block descends, and under the action of force, cylinders on two sides of the working platform rotate in sliding grooves of the sliding blocks, so that the working platform rotates along the central shaft where the first central hole is located, namely theta is completed Y Is provided.
The invention relates to a novel parallel macro-micro two-stage three-degree-of-freedom decoupling mode, namely, six driving sources of macro driving and micro driving move in a coordinated manner, and any combination of three degrees of freedom and macro-micro switching of the three degrees of freedom can be realized.
Furthermore, the driving sources are horizontally arranged, and the angular displacement of the movable platform is realized through a stable wedge-shaped structure, so that the driving stability is improved. Each motion component is directly connected with the movable platform and the fixed platform (base), and finally, the motion error is free from error accumulation in the series mechanism, and under the same motion condition, the motion precision is higher. The driving source and the motion assembly are symmetrically arranged at the position, close to the moving platform, on the base, the gravity center position is good, the moment of inertia caused by the weight of the driving source is avoided, and the whole mechanism has good isotropy and good motion track planning characteristics.
Because the moving platform and each moving assembly form a closed loop respectively, the rigidity of the mechanism is greatly improved, so that the device has higher thrust, response speed and bearing capacity, and each group of moving assemblies adopts a compound driving mode of macro and micro common rails, so that the instant dynamic switching between macro movement and micro movement can be realized. Wherein the macro motion driven by the high-performance linear motor ensures that the mechanism has high speed and high acceleration. The micro-motion driven by the piezoelectric ceramics can effectively compensate errors brought by a transmission link, mutually inhibit vibration, and remarkably improve the positioning accuracy of the platform. And finally, the precise generation under the high-speed motion environment is realized.
The above embodiments are only for illustrating the technical solution of the present invention, and not for limiting the same; although the invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present invention.
Claims (10)
1. A planar-driven, three-degree-of-freedom motion platform capable of pitching, comprising: the first motion assembly, the second motion assembly, the third motion assembly, the movable platform and the two wedge-shaped blocks with inclined planes are arranged on the base;
the third motion assembly is arranged between the first motion assembly and the second motion assembly, and the motion tracks of the first motion assembly and the second motion assembly are parallel and perpendicular to the motion track of the third motion assembly;
the two wedge-shaped blocks are respectively arranged on the first motion assembly and the second motion assembly, and inclined surfaces of the two wedge-shaped blocks are opposite;
the movable platform is arranged on the third motion assembly, and two sides of the movable platform are respectively connected with the two inclined planes in a sliding manner;
when the first motion assembly and the second motion assembly move in the same direction, the movable platform rotates along the central shaft of the movable platform;
when the first motion assembly and the second motion assembly move reversely, the movable platform moves up and down relative to the base.
2. The planar actuated, three degree of freedom motion platform of claim 1 wherein the motion platform comprises: thick rod, thin rod and working platform;
the thick rod is fixedly connected to the third movement assembly, and is provided with an axle center hole for accommodating the first end of the thin rod, so that the thin rod can move up and down relative to the base in the thick rod;
the working platform is provided with a first central hole, the first central hole is used for accommodating the second end of the thin rod, the working platform is rotationally connected with the second end of the thin rod, and the working platform can rotate around the joint of the two.
3. The planar actuated, three degree of freedom motion tilting platform of claim 2 wherein the second end of the wand has a second central aperture, the work platform has a transverse axis at the first central aperture passing through the second central aperture, and the transverse axis is parallel to the inclined plane.
4. A planar-driven three-degree-of-freedom motion platform capable of pitching according to claim 3, wherein a first guide rail and a sliding block mounted on the first guide rail are arranged on the inclined surface of each wedge-shaped block, each sliding block is provided with a cylindrical sliding groove, and cylinders matched with the cylindrical sliding grooves are arranged on two sides of the working platform.
5. The planar actuated, three degree of freedom motion platform of claim 4 wherein the first, second and third motion assemblies each comprise: the device comprises a macro-motion piece and a macro-micro motion piece which is elastically connected with the macro-motion piece, wherein piezoelectric ceramics are arranged between the macro-motion piece and the macro-micro motion piece;
the two wedge blocks are respectively and fixedly connected to the macro-micro motion parts of the first motion assembly and the second motion assembly, and the thick rod is fixedly connected to the macro-micro motion parts of the third motion assembly.
6. The planar actuated three degree of freedom motion platform of claim 5 wherein the macro-motion member has an extension member thereon, the extension member has a recess, the macro-micro motion member has a cavity therein for receiving the extension member, and the cavity has a protrusion thereon for engaging a non-end portion of the recess.
7. The planar driven three degree of freedom motion platform of claim 6 wherein the piezoelectric ceramic is disposed in the hollow and on one side of the protrusion, and a high steel spring is disposed in the hollow and on the other side of the protrusion.
8. The planar actuated, three degree of freedom motion platform of claim 1 further comprising: and the three driving devices are in one-to-one correspondence with the first motion assembly, the second motion assembly and the third motion assembly, and are arranged on the base.
9. The planar actuated three degree of freedom motion platform of claim 8 wherein each of said actuating means is provided on both sides with a second guide rail for providing a motion assembly.
10. The planar actuated three degree of freedom motion platform of claim 8 wherein the actuating means is a linear motor.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201811056665.9A CN108788792B (en) | 2018-09-11 | 2018-09-11 | Plane-driven pitching three-degree-of-freedom motion platform |
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| CN201811056665.9A CN108788792B (en) | 2018-09-11 | 2018-09-11 | Plane-driven pitching three-degree-of-freedom motion platform |
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| CN108788792B true CN108788792B (en) | 2023-07-25 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2773777B2 (en) * | 1989-07-25 | 1998-07-09 | 住友重機械工業株式会社 | Actuator unit and stage device capable of level adjustment using the same |
| US20080087128A1 (en) * | 2006-10-12 | 2008-04-17 | Garner Timothy D | Cross-wedge motion platform |
| CN108214423B (en) * | 2016-12-21 | 2024-07-19 | 无锡星微科技有限公司 | Motion platform for OLED detection equipment |
| CN107145164A (en) * | 2017-05-19 | 2017-09-08 | 广东工业大学 | A kind of grand micro- compound locating platform of vertical movement |
| CN108386447B (en) * | 2018-03-05 | 2023-10-03 | 广东工业大学 | Rigid-flexible coupling sliding block and motion platform |
| CN108296800A (en) * | 2018-03-22 | 2018-07-20 | 广东工业大学 | A kind of XZ high-precision movement platforms vertically decoupled |
| CN108213992B (en) * | 2018-03-22 | 2023-07-25 | 广东工业大学 | Coplanar decoupling XY high-precision motion platform |
| CN208977288U (en) * | 2018-09-11 | 2019-06-14 | 广东工业大学 | A kind of driving of plane can pitching Three-degree-of-freedom motion platform |
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