CN108788792A - A kind of driving of plane can pitching Three-degree-of-freedom motion platform - Google Patents
A kind of driving of plane can pitching Three-degree-of-freedom motion platform Download PDFInfo
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- CN108788792A CN108788792A CN201811056665.9A CN201811056665A CN108788792A CN 108788792 A CN108788792 A CN 108788792A CN 201811056665 A CN201811056665 A CN 201811056665A CN 108788792 A CN108788792 A CN 108788792A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25H—WORKSHOP EQUIPMENT, e.g. FOR MARKING-OUT WORK; STORAGE MEANS FOR WORKSHOPS
- B25H1/00—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby
- B25H1/14—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby with provision for adjusting the bench top
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
An embodiment of the present invention provides a kind of plane driving can pitching Three-degree-of-freedom motion platform, including：The first moving parts, the second moving parts, third moving parts, moving platform on pedestal and two wedge blocks with inclined surface；Third moving parts are set between the first moving parts and the second moving parts, and the movement locus of the first moving parts and the second moving parts is parallel, and vertical with the movement locus of third moving parts；Two wedge blocks are respectively arranged on the first moving parts and the second moving parts, and the inclined surface of two wedge blocks is opposite；Moving platform is set on third moving parts, and the both sides of moving platform are slidably connected with two inclined surface respectively；When the first moving parts and the second moving parts move in the same direction, moving platform is rotated along the central shaft of moving platform；When the first moving parts and the second moving parts counter motion, moving platform is moved up and down relative to pedestal.X, Y and θ can be achieved in the present inventionYThe decoupling motion of Three Degree Of Freedom.
Description
Technical field
The present invention relates to micro-electronic manufacturing manufacture field more particularly to a kind of plane drive can pitching three-degree-of-freedom motion
Platform.
Background technology
Now, with industries such as accurate digital control processing, IC manufacturing, MEMS processing and manufacturing, bioengineering
Development with rapid changepl. never-ending changes and improvements, manufacturing industry equipment research and development are extremely urgent.Such as in micro-electronic manufacturing industry, product is in terms of volume
Develop towards the directions such as small, light, thin always, but functionally becomes stronger day by day, diversification.Between solution two such developing direction
Contradictory optimal path is exactly the processing that characteristic size is carried out using finer manufacturing equipment, improves the density of encapsulation.In this way
As soon as to indexs such as the kinematic accuracy of manufacturing equipment, stroke, speed, acceleration, degree of freedom, more stringent requirements are proposed.This
Outside, for example, the fields such as digital control processing, bioengineering to multivariant high speed and precision motion platform also with widespread demand.
It can be seen that the importance of multiple degrees of freedom high speed and precision motion platform and its more urgent research and development requirement.
In the research of existing motion platform, Platform Designing is mostly several single axis stage simple superposition, has more company
Band link and moving parts, kinematic error accumulation is serious, is largely difficult to meet multiple degrees of freedom and high-precision simultaneously.Therefore, it carries
It simplifies rigorous for a kind of structure and can realize that the platform precisely moved becomes those skilled in the art's technology urgently to be resolved hurrily and asks
Topic.
Invention content
An embodiment of the present invention provides a kind of plane driving can pitching Three-degree-of-freedom motion platform, it can be achieved that X, Y and θY
The decoupling motion of Three Degree Of Freedom.
An embodiment of the present invention provides a kind of plane driving can pitching Three-degree-of-freedom motion platform, including：Set on pedestal
On the wedge blocks of the first moving parts, the second moving parts, third moving parts, moving platform and two with inclined surface；
The third moving parts are set between first moving parts and second moving parts, first fortune
Dynamic component is parallel with the movement locus of the second moving parts and vertical with the movement locus of third moving parts；
Two wedge blocks are respectively arranged on first moving parts and second moving parts, and described in two
The inclined surface of wedge block is opposite；
The moving platform be set to the third moving parts on, and the both sides of the moving platform respectively with two inclinations
Face is slidably connected；
When first moving parts and second moving parts move in the same direction, the moving platform is along the moving platform
Central shaft rotated；
When first moving parts and the second moving parts counter motion, the moving platform is relative to the bottom
Seat moves up and down.
Preferably, the moving platform includes：Thick bar, thin bar and workbench；
The thick bar is fixedly connected on the third moving parts, and there is the thick bar axle center hole, the axle center hole to use
In the first end for accommodating the thin bar so that the thin bar can move up and down in the thick bar relative to the pedestal；
There is the workbench the first centre bore, first centre bore to be used to accommodate the second end of the thin bar, institute
It states workbench and the second end of the thin bar is rotatablely connected, the workbench can be rotated around the junction of the two.
Preferably, the second end of the thin bar has the second centre bore, and the workbench is in first central hole
With the horizontal axis across second centre bore, and the horizontal axis is parallel with the inclined surface.
Preferably, it is provided with the first guide rail on the inclined surface of each wedge block and is installed on first guide rail
There is cylindricality sliding slot, the both sides of the workbench to be equipped with the circle to match with the cylindricality sliding slot for sliding block, each sliding block
Column.
Preferably, first moving parts, second moving parts and the third moving parts include：Macro fortune
Moving part and macro/micromotion part with the macro movement parts elastic connection are equipped with piezoelectric ceramics between the two；
Two wedge blocks are respectively fixedly connected in the macro micro- of first moving parts and second moving parts
In movement parts, the thick bar is fixedly connected on the macro/micromotion part of the third moving parts.
Preferably, there is extension, the extension to have empty slot, have on the macro/micromotion part in the macro movement parts
There are the cavity for accommodating the extension, the cavity to be equipped with the protrusion for being embedded in the non-end of the empty slot.
Preferably, the piezoelectric ceramics is arranged in the empty slot and positioned at the side of the protrusion, the empty slot it is interior and
The other side of the protrusion is equipped with high steel spring.
Preferably, a kind of plane driving provided in an embodiment of the present invention can pitching Three-degree-of-freedom motion platform further include：
Three and first moving parts, second moving parts and the one-to-one driving device of third moving parts,
Three driving devices are installed on the pedestal.
Preferably, each driving device both sides are equipped with the second guide rail, and second guide rail is for being arranged moving parts.
Preferably, the driving device is linear motor.
As can be seen from the above technical solutions, the embodiment of the present invention has the following advantages：
An embodiment of the present invention provides a kind of plane driving can pitching Three-degree-of-freedom motion platform, including：Set on pedestal
On the wedge blocks of the first moving parts, the second moving parts, third moving parts, moving platform and two with inclined surface；The
Three moving parts are set between the first moving parts and the second moving parts, the movement of the first moving parts and the second moving parts
Track is parallel, and vertical with the movement locus of third moving parts；Two wedge blocks are respectively arranged on the first moving parts and
On two moving parts, and the inclined surface of two wedge blocks is opposite；Moving platform is set on third moving parts, and the both sides of moving platform
It is slidably connected respectively with two inclined surface；When the first moving parts and the second moving parts move in the same direction, moving platform is along dynamic flat
The central shaft of platform is rotated；When the first moving parts and the second moving parts counter motion, moving platform is relative on pedestal
Lower movement.The present invention coordinates wedge block to carry out the movement in two vertical direction by multigroup moving parts so that with wedge block
The moving platform being slidably connected can realize X, the movement in Y-direction, and can be realized and be rotated with central axis, realize three freely
Spend decoupling motion.
Description of the drawings
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technology description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of invention without having to pay creative labor, may be used also for those of ordinary skill in the art
To obtain other attached drawings according to these attached drawings.
Fig. 1 be a kind of plane driving provided by the invention can pitching Three-degree-of-freedom motion platform one embodiment knot
Structure schematic diagram；
Fig. 2 be a kind of plane driving provided by the invention can pitching Three-degree-of-freedom motion platform explosive view.
Specific implementation mode
An embodiment of the present invention provides a kind of plane driving can pitching Three-degree-of-freedom motion platform, it can be achieved that X, Y and θY
The decoupling motion of Three Degree Of Freedom.
In order to make the invention's purpose, features and advantages of the invention more obvious and easy to understand, below in conjunction with the present invention
Attached drawing in embodiment, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that disclosed below
Embodiment be only a part of the embodiment of the present invention, and not all embodiment.Based on the embodiments of the present invention, this field
All other embodiment that those of ordinary skill is obtained without making creative work, belongs to protection of the present invention
Range.
Referring to Fig. 1, a kind of plane driving provided by the invention can pitching Three-degree-of-freedom motion platform an implementation
Example, including：
The first moving parts, the second moving parts, third moving parts, moving platform on pedestal and two, which have, to incline
The wedge block 5300,5400 on inclined-plane；
Third moving parts are set between the first moving parts and the second moving parts, the first moving parts and the second movement
The movement locus of component is parallel, and vertical with the movement locus of third moving parts；
Two wedge blocks are respectively arranged on the first moving parts and the second moving parts, and two wedge blocks 5300,5400
Inclined surface it is opposite；
Moving platform is set on third moving parts, and the both sides of moving platform are slidably connected with two inclined surface respectively；
When the first moving parts and the second moving parts move in the same direction, moving platform is turned along the central shaft of moving platform
It is dynamic；
When the first moving parts and the second moving parts counter motion, moving platform is moved up and down relative to pedestal.
The present invention coordinates wedge block to carry out the movement in two vertical direction by multigroup moving parts so that with wedge block
The moving platform being slidably connected can realize X, the movement in Y-direction, and can be realized and be rotated with central axis, realize three freely
Spend decoupling motion.
In the present embodiment, the first moving parts, the second moving parts are similar with third moving parts, with third exercise group
As explanation for part, as shown in Fig. 2, third moving parts include：Macro movement parts 3012 and with macro movement parts elastic connection
Macro/micromotion part 3013 is equipped with piezoelectric ceramics 3017 between the two.There is extension, extension to have sky in macro movement parts 3012
There is on macro/micromotion part 3013 slot the cavity for accommodating extension, cavity to be equipped with the protrusion for being embedded in the non-end of empty slot.Pressure
Electroceramics 3017 is arranged in empty slot and positioned at the side of protrusion, and the interior and raised other side of empty slot is equipped with high steel spring 3014.
First moving parts, the structure of the second moving parts are similar with third moving parts, are not repeated herein.
Herein to driving the process of macro/micromotion part to illustrate after piezoelectric ceramics deformation：Due to the protrusion of macro/micromotion part
Piezoelectric ceramics and high steel spring are placed in both sides respectively, and when piezoelectric ceramics does not power on, the elastic force of high pressure spring at this time is right by protrusion
Piezoelectric ceramics carries out squeezing action (holding out against piezoelectric ceramics), prevents piezoelectric ceramics from deforming upon.Ceramics after the power is turned on, itself send out by ceramics
Raw deformation applies a pressure to protrusion, which is more than the elastic force of spring at this time, therefore under force, macro/micromotion part
It is subjected to displacement i.e. micromotion.
Be also equipped on pedestal three it is one-to-one with the first moving parts, the second moving parts and third moving parts
Driving device 3011,5111 and 5211, the driving device can be linear motor.It should be noted that every group of moving parts
There are L-type movement parts in macro movement parts, be the mover of electronics, stator i.e. driving device of electronics is fixed on the base, when fixed
After son is powered, magnetic force moving mover is generated therebetween and is moved along a straight line, that is, has driven the linear motion of macro movement parts, macro fortune
Moving part has then driven the linear motion of entire moving parts, and then has driven the macro movement of moving platform.
Each driving device both sides are equipped with the second guide rail (such as 3011 corresponding second guide rail 3020 of driving device, driving dress
Set 5111 corresponding second guide rails 5120,5211 corresponding second guide rail 5220 of driving device), the second guide rail is moved for being arranged
Component.It is understood that due to there are three driving device, each driving device both sides is both provided with a pair of guide rails
(i.e. the second guide rail), each pair of guide rail is for being arranged corresponding moving parts so that moving parts carried out on guide rail macro movement and
Micromotion.
In the present embodiment, moving platform includes：Thick bar 4010, thin bar 4020 and workbench 1000；
Thick bar 4010 is fixedly connected on third moving parts, and thick bar 4010 has axle center hole, axle center hole thin for accommodating
The first end of bar 4020 so that thin bar 4020 can move up and down in thick bar relative to pedestal.It is understood that thick bar 4010
It is coaxially disposed with thin bar 4020.
There is workbench 1,000 first centre bore, the first centre bore to be used to accommodate the second end of thin bar 4020, thin bar
There is 4020 second end the second centre bore, workbench 1000 to have the cross across the second centre bore in the first central hole
Axis, and horizontal axis is parallel with inclined surface.
The structure of two wedge blocks 5300,5400 is consistent, and wedge block 5300 is as explanation, the inclination of wedge block 5300 herein
It guide rail 5310 and the sliding block 5311 that is installed on the first guide rail 5310 that first is provided on face, and sliding block 5311 has cylindricality sliding slot,
The both sides of workbench are equipped with the cylinder to match with cylindricality sliding slot, it should be noted that and cylinder is embedded in cylindricality sliding slot, due to
The length of round sliding slot is less than cylinder, and therefore, cylinder can not only be rotated in sliding slot, can also be carried out along cylinder in sliding slot
Sliding on axis direction.
Since two wedge blocks 5300,5400 are respectively fixedly connected in the macro micro- of the first moving parts and the second moving parts
In movement parts 5113,5213, thick bar 4010 is fixedly connected on the macro/micromotion part 3013 of third moving parts, when third moves
When component moves, if its direction of motion is X-direction, if macro movement, then macro movement parts 3012 and macro/micromotion part at this time
3013 move along a straight line together, therefore the macro movement for having driven moving platform to carry out in X-direction is (if micromotion, then only macro micro-
Movement parts 3013 move along a straight line, and then moving platform is driven to carry out the micromotion in X-direction), in the motion process, work is flat
The cylinder of platform both sides carries out the sliding along cylinder axis direction, i.e. with sliding block relative motion occurs for cylinder.It should be noted that with
Under to Y-direction, θYMovement in two degree of freedom, macro movement is that macro movement parts and macro/micromotion part carry out straight line fortune together
Dynamic, micromotion is that macro/micromotion part moves along a straight line, and is repeated no more later.
And the first moving parts and the second moving parts are located along the same line, the driving of the two is by respective driving source control
System, therefore, the movement velocity of the two may be controlled to it is identical can also control as difference, can be adjusted according to actual demand.
When the first moving parts and the second moving parts are moved toward one another or are moved backwards, and the movement velocity of the two
Unanimously, it is either carried out at the same time macro movement and is still carried out at the same time micromotion, two wedge blocks are transported in opposite directions at a same speed
Dynamic or backwards to moving, i.e. two wedge blocks are simultaneously close to workbench or simultaneously far from workbench, then the sliding block on wedge block
It is risen or fallen along inclined surface, since there are the cylinder in embedded sliding block cylindricality sliding slot in workbench both sides, in the effect of power
Under so that workbench steadily rises or falls (thin bar is completed to move up and down to realize moving up and down for platform in thick bar),
Complete macro movement or the micromotion in Y-direction.
When the first moving parts and the second moving parts are moved in the same direction, if it is macro movement, the movement speed of the two
Degree can be the same or different, and two wedge blocks are also moved in the same direction, then one of wedge block is close to workbench, separately
One wedge block rises the decline of another sliding block, under force, workbench two far from workbench, at this time a sliding block
The cylinder of side is rotated in the sliding slot of sliding block so that workbench is revolved along the central shaft where its first centre bore
Turn, that is, completes θYAdjusting.
The present invention is a kind of macro micro- novel decoupling form of two-stage Three Degree Of Freedom of parallel connection, i.e., macro driving and micro-move device totally six
The driving source coordinated movement of various economic factors is, it can be achieved that the arbitrary combination of Three Degree Of Freedom and its macro micro- switching.
Further, the driving source in the present invention is horizontal positioned, and moving platform is realized by stable contract type structure
Angle displacement more drives stability.Each moving parts are directly connected to moving platform and fixed platform (pedestal), final kinematic error without
The accumulation of error in serial mechanism under same moving condition, will there is higher kinematic accuracy.Driving source and the symmetrical cloth of moving parts
The position close to moving platform on pedestal is set, position of centre of gravity is good, avoids the moment of inertia caused by driving source weight itself, entirely
Mechanism has preferable isotropism and good Motion trajectory characteristic.
Since moving platform forms loop with each moving parts respectively, mechanism rigidity improves a lot, to compared with
High thrust, response speed, bearing capacity, every group of moving parts are all made of the composite drive form of macro micro- common rail, it can be achieved that macro fortune
The dynamic instant switching at runtime with micromotion.The wherein motor-driven macro movement of high-performance linear makes mechanism that there is high speed, height to accelerate.
The micromotion of Piezoelectric Ceramic can effectively make up the error that transmission link is brought, and mutually vibration is inhibited to generate, be obviously improved flat
The positioning accuracy of platform.The final accurate generation realized under high-speed motion environment.
The above, the above embodiments are merely illustrative of the technical solutions of the present invention, rather than its limitations；Although with reference to before
Stating embodiment, invention is explained in detail, it will be understood by those of ordinary skill in the art that：It still can be to preceding
The technical solution recorded in each embodiment is stated to modify or equivalent replacement of some of the technical features；And these
Modification or replacement, the spirit and scope for various embodiments of the present invention technical solution that it does not separate the essence of the corresponding technical solution.
Claims (10)
1. a kind of driving of plane can pitching Three-degree-of-freedom motion platform, which is characterized in that including：The first fortune on pedestal
Dynamic component, the second moving parts, third moving parts, moving platform and two wedge blocks with inclined surface；
The third moving parts are set between first moving parts and second moving parts, first exercise group
Part is parallel with the movement locus of the second moving parts, and vertical with the movement locus of third moving parts；
Two wedge blocks are respectively arranged on first moving parts and second moving parts, and two wedge shapes
The inclined surface of block is opposite；
The moving platform is set on the third moving parts, and the both sides of the moving platform are slided with two inclined surface respectively
Dynamic connection；
When first moving parts and second moving parts move in the same direction, the moving platform is along the moving platform
Mandrel is rotated；
When first moving parts and the second moving parts counter motion, the moving platform is relative on the pedestal
Lower movement.
2. plane according to claim 1 driving can pitching Three-degree-of-freedom motion platform, which is characterized in that it is described dynamic flat
Platform includes：Thick bar, thin bar and workbench；
The thick bar is fixedly connected on the third moving parts, and the thick bar has axle center hole, and the axle center hole is for holding
Receive the first end of the thin bar so that the thin bar can move up and down in the thick bar relative to the pedestal；
There is the workbench the first centre bore, first centre bore to be used to accommodate the second end of the thin bar, the work
Make platform and the second end of the thin bar is rotatablely connected, the workbench can be rotated around the junction of the two.
3. plane according to claim 2 driving can pitching Three-degree-of-freedom motion platform, which is characterized in that the thin bar
Second end have the second centre bore, the workbench first central hole have across second centre bore
Horizontal axis, and the horizontal axis is parallel with the inclined surface.
4. plane according to claim 3 driving can pitching Three-degree-of-freedom motion platform, which is characterized in that it is each described
The sliding block for being provided with the first guide rail on the inclined surface of wedge block and being installed on first guide rail, each sliding block have column
Shape sliding slot, the both sides of the workbench are equipped with the cylinder to match with the cylindricality sliding slot.
5. plane according to claim 4 driving can pitching Three-degree-of-freedom motion platform, which is characterized in that described first
Moving parts, second moving parts and the third moving parts include：Macro movement parts and with the macro movement parts bullet
Property connection macro/micromotion part, between the two be equipped with piezoelectric ceramics；
Two wedge blocks are respectively fixedly connected in the macro/micromotion of first moving parts and second moving parts
On part, the thick bar is fixedly connected on the macro/micromotion part of the third moving parts.
6. plane according to claim 5 driving can pitching Three-degree-of-freedom motion platform, which is characterized in that the macro fortune
There is extension, the extension to have empty slot, have the cavity for accommodating the extension on the macro/micromotion part on moving part,
The cavity is equipped with the protrusion for being embedded in the non-end of the empty slot.
7. plane according to claim 6 driving can pitching Three-degree-of-freedom motion platform, which is characterized in that the piezoelectricity
Ceramics are arranged in the empty slot and positioned at the sides of the protrusion, and in the empty slot and other side of the protrusion is equipped with Gao Gang
Spring.
8. plane according to claim 1 driving can pitching Three-degree-of-freedom motion platform, which is characterized in that further include：
Three and first moving parts, second moving parts and the one-to-one driving device of third moving parts,
Three driving devices are installed on the pedestal.
9. plane according to claim 8 driving can pitching Three-degree-of-freedom motion platform, which is characterized in that it is each described
Driving device both sides are equipped with the second guide rail, and second guide rail is for being arranged moving parts.
10. plane according to claim 8 driving can pitching Three-degree-of-freedom motion platform, which is characterized in that the drive
Dynamic device is linear motor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811056665.9A CN108788792B (en) | 2018-09-11 | 2018-09-11 | Plane-driven pitching three-degree-of-freedom motion platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811056665.9A CN108788792B (en) | 2018-09-11 | 2018-09-11 | Plane-driven pitching three-degree-of-freedom motion platform |
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| Publication Number | Publication Date |
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| CN108788792A true CN108788792A (en) | 2018-11-13 |
| CN108788792B CN108788792B (en) | 2023-07-25 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201811056665.9A Active CN108788792B (en) | 2018-09-11 | 2018-09-11 | Plane-driven pitching three-degree-of-freedom motion platform |
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| CN108386447A (en) * | 2018-03-05 | 2018-08-10 | 广东工业大学 | A kind of Coupled Rigid-flexible sliding block and motion platform |
| CN208977288U (en) * | 2018-09-11 | 2019-06-14 | 广东工业大学 | A kind of driving of plane can pitching Three-degree-of-freedom motion platform |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0355136A (en) * | 1989-07-25 | 1991-03-08 | Sumitomo Heavy Ind Ltd | Actuator unit and stage device capable of level adjustment with use thereof |
| US20080087128A1 (en) * | 2006-10-12 | 2008-04-17 | Garner Timothy D | Cross-wedge motion platform |
| CN108214423A (en) * | 2016-12-21 | 2018-06-29 | 无锡星微科技有限公司 | A kind of motion platform for OLED detection devices |
| CN107145164A (en) * | 2017-05-19 | 2017-09-08 | 广东工业大学 | A kind of grand micro- compound locating platform of vertical movement |
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| Publication number | Publication date |
|---|---|
| CN108788792B (en) | 2023-07-25 |
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