CN103192279B - Two-dimension decoupling motion platform - Google Patents
Two-dimension decoupling motion platform Download PDFInfo
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- CN103192279B CN103192279B CN201310077550.9A CN201310077550A CN103192279B CN 103192279 B CN103192279 B CN 103192279B CN 201310077550 A CN201310077550 A CN 201310077550A CN 103192279 B CN103192279 B CN 103192279B
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Abstract
The invention provides a two-dimension decoupling motion platform, which comprises a fixing platform seat and a moving platform arranged on the fixing platform seat, wherein the moving platform comprises a horizontal moving platform and a vertical moving platform; the horizontal moving platform comprises four horizontal flexible poles, a horizontal elastic element and a horizontal piezoceramic actuator; the horizontal flexible poles are arranged around the horizontal moving platform; the horizontal elastic element is arranged on one side of the horizontal moving platform; the horizontal piezoceramic actuator and the horizontal elastic element are arranged symmetrically; the vertical moving platform comprises four vertical flexible poles, a vertical elastic element and a vertical piezoceramic actuator; the vertical flexible poles are arranged around the vertical moving platform; the vertical elastic element is arranged on one side of the vertical moving platform; and the vertical piezoceramic actuator and the vertical elastic element are arranged symmetrically. The two-dimension decoupling motion platform is driven directly by the piezoceramic actuators to acquire nanoscale displacement output; rigidity of the motion platform is improved by the flexible elements; and motion is transmitted by the elastic mechanism, so that reliable high-rigidity two-dimension decoupling positioning motion is realized.
Description
Technical field
The present invention relates to a kind of platform, particularly relate to a kind of two-dimentional decoupling motion platform.
Background technology
The precision positioning of motion platform with at a high speed, high acceleration be the general character requirement of numerous electronic manufacturing equipment and other precision machine tool, the performance of motion platform determines the quality of product, efficiency and production capacity.Traditional motion platform utilizes the mechanical movement auxiliary structure transmission campaigns such as leading screw, and in Movement transmit process, because kinematic pair exists inherent friction and gap, therefore precision can only reach micron order.But along with the development of science and technology, the especially development of microelectronic product technology, small product size reaches submicron order even nanoscale, therefore proposes nano level positioning requirements to motion platform, is therefore extremely necessary the motion platform manufacturing and designing nanoscale location.
Nano level setting movement platform generally adopts novel intelligent material as actuator, as piezoelectric ceramics and memorial alloy etc., using compliant mechanism as platform carrier, because intellectual material can the displacement of output nanometer level, compliant mechanism transmits kinergety and power by elastic deformation, there is not friction and gap, the two combination can obtain nanoscale setting movement platform.But two-freedom-degree motion platform common in the market, adopts serial or parallel connection, realize two freedom decoupling motion, but owing to adopting flexible structure, rigidity is very low, the non-constant of opposing external interference ability.Therefore, a kind of high rigidity two dimension decoupling zero nanometer-scale motions platform is urgently developed.
Summary of the invention
For the problems referred to above, the object of the present invention is to provide a kind of two-dimentional decoupling motion platform, this two-dimentional decoupling motion platform solves prior art cannot realize high rigidity, high-precision problem simultaneously.
Technical scheme of the present invention is achieved in that
A kind of two-dimentional decoupling motion platform, comprise fixed platform seat, be arranged at the mobile platform on described fixed platform seat, it is characterized in that: described mobile platform comprises transverse shifting platform and vertically moves platform, described transverse shifting platform comprises four lateral flexibility bars, transverse elasticity part, horizontal piezoelectric actuator, described lateral flexibility bar is arranged at described transverse shifting platform surrounding, described lateral flexibility bar is connected with the described platform that vertically moves, described transverse elasticity part is arranged at described transverse shifting platform side, described horizontal piezoelectric actuator and described transverse elasticity part are symmetrical arranged, described horizontal piezoelectric actuator outer setting has lateral resistance foil gauge, the described platform that vertically moves comprises four longitudinal flexible bars, longitudinal elastic element, longitudinal piezoelectric actuator, platform surrounding is vertically moved described in described longitudinal flexible bar is arranged at, described longitudinal flexible bar is connected with described transverse shifting platform, platform side is vertically moved described in described longitudinal elastic element is arranged at, described longitudinal piezoelectric actuator and described longitudinal elasticity element symmetry are arranged, and described longitudinal piezoelectric actuator outer setting has longitudinal electrical resistance foil gauge.
Preferably, described horizontal piezoelectric actuator is for laterally stacking type piezoelectric actuator, and described longitudinal piezoelectric actuator is for longitudinally stacking type piezoelectric actuator.
Preferably, described fixed platform seat is provided with longitudinal fixing hole, described vertically moving on platform is provided with horizontal fixing hole, and described horizontal fixing hole is arranged at described transverse piezoelectric actuation device mounting groove one end, and described longitudinal fixing hole is arranged at described longitudinal piezo-activator mounting groove one end.
Further, described in vertically move on platform and be provided with lateral flexibility pad, horizontal fixture is conflicted with described lateral flexibility pad through described horizontal fixing hole and is connected.
Further, described fixed platform seat is provided with longitudinal flexible pad, longitudinal fixture is conflicted with described longitudinal flexible pad through described longitudinal fixing hole and is connected.
Preferably, described transverse shifting platform be embedded at described in vertically move in platform.
Preferably, described lateral flexibility bar is connected with the described platform that vertically moves by lateral flexibility hinge, and described longitudinal flexible bar is connected with described transverse shifting platform by longitudinal flexible hinge.
Preferably, described fixed platform seat, described mobile platform are in same plane.
Preferably, described fixed platform seat is provided with fixed platform seat installing hole.
Further, described fixed platform seat installing hole is shoulder hole, and its quantity is 8.
The beneficial effect that the present invention produces is:
1, transverse shifting platform and vertically move platform by stacking type piezoelectric actuator Direct driver in the present invention, structure is simple, compact, and processing cost is low;
2, the symmetric design of double-flexibility parallel four-bar is passed through in the present invention, and the nested series design of transverse and longitudinal direction motion structure, achieve the mobile decoupling in two direction of motion, and compliant mechanism is without friction, gap, kinematic accuracy is high;
3, in the present invention, fixture pretension stacks type piezoelectric actuator, in conjunction with the elastic compression effect of elastic component, motion platform is made to have higher rigidity, and can but function of shaking be had, be subject to the external world comparatively noticeable effort time, flexibility platform can be protected not to be destroyed, avoid be subject to comparatively noticeable effort time stack type piezoelectric actuator depart from flexibility platform;
4, be pasted onto the resistance strain gage on piezoelectric ceramics surface in the present invention, can displacement information be gathered, be applied in closed-loop control, higher kinematic accuracy can be obtained.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
Fig. 1 is the structural representation of a kind of two-dimentional decoupling motion platform of the present invention embodiment mobile platform;
Fig. 2 is the structural representation of a kind of two-dimentional decoupling motion platform of the present invention embodiment;
Fig. 3 be in Fig. 2 A-A to sectional structure schematic diagram;
Fig. 4 is B place partial enlargement structural representation in Fig. 2;
In figure: 100 fixed platform seats; 110 horizontal fixing holes; 120 longitudinal fixing holes; 130 fixed platform seat installing holes; 200 mobile platforms; 210 transverse shifting platforms; 211 lateral flexibility bars; 212 transverse elasticity part mounting grooves; 213 transverse piezoelectric actuation device mounting grooves; 214 transverse elasticity parts; 215 horizontal piezoelectric actuators; 216 lateral resistance foil gauges; 217 lateral flexibility pads; 218 horizontal holding screws; 219 lateral flexibility hinges; 220 vertically move platform; 221 longitudinal flexible bars; 222 longitudinal elastic element mounting grooves; 223 longitudinal piezo-activator mounting grooves; 224 longitudinal elastic element; 225 longitudinal piezoelectric actuators; 226 longitudinal electrical resistance foil gauges; 227 longitudinal flexible pads; 228 longitudinal holding screws; 229 longitudinal flexible hinges.
Detailed description of the invention
Below in conjunction with the accompanying drawing in the embodiment of the present invention, be clearly and completely described the technical scheme in the embodiment of the present invention, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
Preferred embodiment according to Fig. 1 ~ Fig. 4, a kind of two-dimentional decoupling motion platform, comprise fixed platform seat 100, the mobile platform 200 be arranged on fixed platform seat 100, mobile platform 200 comprises transverse shifting platform 210 and vertically moves platform 220, and fixed platform seat 100 and mobile platform 200 are in same plane.In the present embodiment, fixed platform seat 100 and mobile platform 200 integrally Linear cut or laser formation, on mobile platform 200, cutting processing is formed and vertically moves platform 220, is vertically moving cutting processing formation transverse shifting platform 210 on platform 220.
Vertically move platform 220 and comprise four longitudinal flexible bars 221, longitudinal elastic element 224, longitudinal piezoelectric actuator 225, longitudinal flexible bar 221 is arranged at and vertically moves platform 220 surrounding, longitudinal elastic element mounting groove 222 is arranged at and vertically moves platform 220 side, vertically move platform 220 in the present embodiment for square, longitudinal flexible bar 221 is evenly arranged at and vertically moves on platform 220 4 angles, and longitudinal flexible bar 221 is connected with transverse shifting platform 210 by longitudinal flexible hinge 229.
Fixed platform seat 100 is provided with longitudinal fixing hole 120, fixed platform seat 100 is provided with longitudinal flexible pad 227, longitudinal fixture is conflicted with longitudinal flexible pad 227 through longitudinal fixing hole 120 and is connected, in the present embodiment, longitudinal fixing hole 120 is screwed hole, longitudinal fixture is longitudinal holding screw 228, by the longitudinal holding screw 228 of precession, longitudinal holding screw 228 is conflicted with longitudinal flexible pad 227 and is connected, longitudinal flexible pad 227 is out of shape, longitudinal piezoelectric actuator 225 is pressed in longitudinal piezoelectric ceramics mounting groove 223.
Longitudinal elastic element 224 is provided with in longitudinal elastic element mounting groove 222; longitudinal elastic element mounting groove 222 is arranged at the middle part vertically moving platform 220 side in the present embodiment; longitudinal elastic element is bonded in longitudinal elastic element mounting groove 222; longitudinal elastic element 224 preferred thermoplastic polyurethane; it has excellent rebound performance; for other have excellent resiliency can material also within protection scope of the present invention, do not repeat at this.
Longitudinal piezo-activator mounting groove 223 is symmetrical arranged with longitudinal elasticity member mounting recess 222, longitudinal piezoelectric actuator 225 is provided with in longitudinal piezo-activator mounting groove 223, longitudinal piezoelectric actuator 225 outer setting has longitudinal electrical resistance foil gauge 226, longitudinal piezoelectric actuator 225 preferably stacks type piezoelectric actuator in the present embodiment, and longitudinal electrical resistance foil gauge 226 is pasted onto and longitudinally stacks outside type piezoelectric actuator.
In the present embodiment, longitudinal flexible bar 221 is by longitudinal flexible hinge 229 and transverse shifting platform 210 and vertically move platform 220 and be connected, four symmetrical longitudinal flexible bars form double-flexibility parallel four-bar structure, can realize vertically moving platform 220 only at longitudinal linear translation, eliminate horizontal coupling displacement.The operation principle of longitudinal flexible bar is in the present embodiment: after applying voltage to longitudinal piezoelectric actuator 225, due to inverse piezoelectric effect, longitudinal piezoelectric actuator 225 produces displacement and exports, thus promotes lengthwise movement platform 220 and move, and realizes its linear translation in the vertical.
Transverse shifting platform 210 comprises four lateral flexibility bars 211, transverse elasticity part 214, horizontal piezoelectric actuator 215, lateral flexibility bar 211 is arranged at transverse shifting platform 210 surrounding, transverse shifting platform 210 is rectangle in the present embodiment, lateral flexibility bar 211 is evenly arranged on four angles of transverse shifting platform 210, lateral flexibility bar 211 by lateral flexibility hinge 219 with vertically move platform 220 and be connected, lateral flexibility bar 211 is by lateral flexibility hinge 219 and transverse shifting platform 210 with vertically move the design that platform 220 is connected and make it form flexible parallel four-bar structure in the present invention, transverse shifting platform 210 can be realized only at horizontal rectilinear motion, eliminate longitudinal coupling displacement.The operation principle of lateral flexibility bar is in the present embodiment: after applying voltage to horizontal piezoelectric actuator 215, due to inverse piezoelectric effect, horizontal piezoelectric actuator 215 produces displacement and exports, thus promotes transverse movement platform 210 and move, and realizes its linear translation in the horizontal.
Vertically move on platform 220 and be provided with horizontal fixing hole 110, horizontal fixing hole 110 is arranged at transverse piezoelectric actuation device mounting groove 213 one end, vertically move platform 220 and be provided with lateral flexibility pad 217, horizontal fixture 218 is conflicted with lateral flexibility pad 217 through horizontal fixing hole 110 and is connected, in the present embodiment, horizontal fixing hole 110 is screwed hole, horizontal fixture is horizontal holding screw 218, by the horizontal holding screw 218 of precession, horizontal holding screw 218 is conflicted with lateral flexibility pad 217 and is connected, lateral flexibility pad 217 is out of shape, horizontal piezoelectric actuator 215 is pressed in horizontal piezoelectric ceramics mounting groove 213.
Transverse elasticity part mounting groove 212 is arranged at transverse shifting platform 210 side; transverse elasticity part 214 is provided with in transverse elasticity part mounting groove 212; transverse elasticity part mounting groove 212 is arranged at the middle part of transverse shifting platform 210 side in the present embodiment; transverse elasticity part 214 is bonded in transverse elasticity part mounting groove 212; transverse elasticity part 214 preferred thermoplastic polyurethane; it has excellent rebound performance; for other have excellent resiliency can material also within protection scope of the present invention, do not repeat at this.
Transverse piezoelectric actuation device mounting groove 213 and transverse elasticity part mounting groove 212 are symmetrical arranged, horizontal piezoelectric actuator 215 is provided with in transverse piezoelectric actuation device mounting groove 213, horizontal piezoelectric actuator 215 outer setting has lateral resistance foil gauge 216, horizontal piezoelectric actuator 215 preferably stacks type piezoelectric actuator in the present embodiment, and lateral resistance foil gauge 226 is pasted onto and laterally stacks outside type piezoelectric actuator.
In the present invention, transverse shifting platform 210 utilizes horizontal holding screw 218 to promote lateral flexibility pad 217, vertically moving platform 220 utilizes longitudinal holding screw 228 to promote longitudinal flexible pad 227, safe fixed lateral piezoelectric ceramic actuator 215 and longitudinal piezoelectric ceramic actuator 225 also apply pretightning force to mobile platform, simultaneously in conjunction with the elastic reaction of transverse elasticity part 214 and longitudinal elastic element 224, whole flexibility platform is made to obtain higher rigidity, but ability of shaking and antijamming capability, avoid the phenomenon occurring that horizontal piezoelectric actuator and longitudinal piezoelectric actuator and flexibility platform depart from.
In the present invention, by double-flexibility parallel four-bar structure, realize the mobile decoupling on different directions, thus reach the function eliminating coupling and parasitic displacement, transverse shifting platform 210 is embedded at and vertically moves in platform 220, by the structures in series in the horizontal and vertical direction of motion, realize horizontal and vertical motion respectively.
Fixed platform seat 100 is provided with fixed platform seat installing hole 130, output displacement of the present invention is Nano grade, therefore, motion platform of the present invention is also referred to as micromotion platform, fixed platform seat installing hole 130 is used for motion platform of the present invention is connected with macro-moving stage, fixed platform seat installing hole 130 is shoulder hole in the present embodiment, and its quantity is 8, is symmetrically distributed in the two ends of fixed platform seat 100.Transverse shifting platform is evenly provided with stage+module hole, and stage+module hole is screwed hole in the present embodiment, and its quantity is 4, and it is used for being connected with parts to be positioned, realizes the accurate location of parts to be positioned.
The course of work of the present invention is: be fixed on macro-moving stage by fixed platform seat 100, macro-moving stage realizes micron order motion, motion platform of the present invention moves further and realizes nano-grade displacement, voltage is applied to laterally stacking type piezoelectric actuator, due to the displacement of inverse piezoelectric effect output nanometer level, thus drive transverse shifting platform 210 to move, vertically move platform 220 in like manner, thus the motion realized in motion platform plane and location.
Operation principle of the present invention is: the displacement that piezoelectric actuator has nanometer resolution exports, be pasted onto the resistance strain gage of piezoelectric actuator side as Displacement Feedback, realize high-precision location, flexibility platform relies on the strictly axisymmetric double-flexibility parallelogram lindage based on flexible hinge, realize the one direction translation of decoupling zero, simultaneously by the structures in series in two directions of motion, realize the motion on different directions, thus realize nano level accurate location.Holding screw is utilized to promote flexible pad, the fixing piezoelectric actuator of safety also applies pretightning force to motion platform, simultaneously in conjunction with the elastic reaction of elastic component, but make platform obtain higher rigidity to shake ability and antijamming capability, avoid the phenomenon occurring that piezoelectric actuator and flexibility platform depart from.
The foregoing is only preferred embodiment of the present invention, not in order to limit the present invention, within the spirit and principles in the present invention all, any amendment done, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (1)
1. a two-dimentional decoupling motion platform, comprise fixed platform seat, the mobile platform be arranged on described fixed platform seat, it is characterized in that: described mobile platform comprises transverse shifting platform and vertically moves platform, described transverse shifting platform comprises four lateral flexibility bars, transverse elasticity part, horizontal piezoelectric actuator, described in vertically move platform and comprise four longitudinal flexible bars, longitudinal elastic element, longitudinal piezoelectric actuator; Lateral flexibility bar and longitudinal flexible bar are separately positioned on transverse shifting platform and vertically move in four corner areas of platform, wherein in longitudinal flexible bar by the flexible hinge outside platform respectively and vertically move the dual-side of platform on the same line, be separately positioned on outside the sideline on transverse shifting platform top margin and base by the flexible hinge outside mobile platform in lateral flexibility bar; Described transverse elasticity part is arranged at the central region of outside, described transverse shifting platform side, the central region of outside, platform side is vertically moved described in described longitudinal elastic element is arranged at, described horizontal piezoelectric actuator and described transverse elasticity part are symmetricly set on the outside of described platform opposite side relative to transverse shifting platform, and described longitudinal piezoelectric actuator and described longitudinal elasticity elements relative are symmetricly set on the outside of described platform opposite side in vertically moving platform; Described lateral flexibility bar is connected with the described platform that vertically moves, and described horizontal piezoelectric actuator outer setting has lateral resistance foil gauge; Described longitudinal flexible bar is connected with described transverse shifting platform, and described longitudinal piezoelectric actuator outer setting has longitudinal electrical resistance foil gauge;
Described horizontal piezoelectric actuator is for laterally stacking type piezoelectric actuator, and described longitudinal piezoelectric actuator is for longitudinally stacking type piezoelectric actuator;
Described fixed platform seat is provided with longitudinal fixing hole, described vertically moving on platform is provided with horizontal fixing hole, described horizontal fixing hole is arranged at described transverse piezoelectric actuation device mounting groove one end, and described longitudinal fixing hole is arranged at described longitudinal piezo-activator mounting groove one end;
Described vertically moving on platform is provided with lateral flexibility pad, horizontal fixture is conflicted with described lateral flexibility pad through described horizontal fixing hole and is connected, described horizontal fixing hole is screwed hole, horizontal fixture is horizontal holding screw, by the horizontal holding screw of precession, horizontal holding screw is conflicted with lateral flexibility pad and is connected, and lateral flexibility pad is out of shape, is pressed on by horizontal piezoelectric actuator in horizontal piezoelectric ceramics mounting groove; Described fixed platform seat is provided with longitudinal flexible pad, longitudinal fixture is conflicted with described longitudinal flexible pad through described longitudinal fixing hole and is connected, described longitudinal fixing hole is screwed hole, longitudinal fixture is longitudinal holding screw, by the longitudinal holding screw of precession, longitudinal holding screw is conflicted with longitudinal flexible pad and is connected, and longitudinal flexible pad is out of shape, is pressed on by longitudinal piezoelectric actuator in longitudinal piezoelectric ceramics mounting groove;
Vertically move in platform described in described transverse shifting platform is embedded at;
Described lateral flexibility bar is connected with the described platform that vertically moves by lateral flexibility hinge, and described longitudinal flexible bar is connected with described transverse shifting platform by longitudinal flexible hinge;
Described fixed platform seat, described mobile platform are in same plane;
Described fixed platform seat is provided with fixed platform seat installing hole, described fixed platform seat installing hole is shoulder hole, and its quantity is 8, is symmetrically distributed in the two ends of fixed platform seat;
Described transverse elasticity part selects thermoplastic polyurethane to be bonded in transverse elasticity part mounting groove; Described longitudinal elastic element selects thermoplastic polyurethane to be bonded in longitudinal elastic element mounting groove.
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| CN201310077550.9A CN103192279B (en) | 2013-03-11 | 2013-03-11 | Two-dimension decoupling motion platform |
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| CN201310077550.9A CN103192279B (en) | 2013-03-11 | 2013-03-11 | Two-dimension decoupling motion platform |
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| CN105904232A (en) * | 2016-04-22 | 2016-08-31 | 大连交通大学 | Piezoelectric actuation two-dimensional micro-feeding platform |
| KR101864718B1 (en) * | 2016-10-28 | 2018-07-13 | 한국생산기술연구원 | A vibration decreasing apparatus with flexure mechanism device for reducing load of machine and a method for decreasing vibration |
| CN106324984A (en) * | 2016-11-09 | 2017-01-11 | 长春工业大学 | Roller-to-roller ultraviolet nanoimprint device and method |
| CN113719704B (en) * | 2021-08-10 | 2022-09-20 | 华中科技大学 | Large-stroke two-dimensional nano positioning platform |
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| CN1202937C (en) * | 2003-04-14 | 2005-05-25 | 浙江大学 | Super accurate fine motion work platform with function of restraining vibration. |
| US8234951B1 (en) * | 2009-05-13 | 2012-08-07 | University Of South Florida | Bistable aerial platform |
| CN102114600B (en) * | 2009-12-30 | 2012-07-18 | 财团法人金属工业研究发展中心 | Ultraprecise piezoelectric positioning platform |
| CN102723432B (en) * | 2012-07-04 | 2013-12-25 | 陈�峰 | Piezoelectric driving device integrating resistor strain sheet-type sensor and manufacture method thereof |
| CN203171265U (en) * | 2013-03-11 | 2013-09-04 | 东莞华中科技大学制造工程研究院 | Two-dimensional decoupling motion platform |
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Address after: 523000 nine hi tech Road, Songshan Lake hi tech Industrial Development Zone, Guangdong, Dongguan, 1 Patentee after: GUANGDONG HUST INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE Address before: Science and technology Songshan Lake Science and Technology Industrial Park in Guangdong province Dongguan City nine road 523808 No. 1 Patentee before: DG-HUST Manufacturing Engineering Institute |
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