CN108717159A - A kind of probe card for integrated circuit test and test system protection structure - Google Patents
A kind of probe card for integrated circuit test and test system protection structure Download PDFInfo
- Publication number
- CN108717159A CN108717159A CN201810517740.0A CN201810517740A CN108717159A CN 108717159 A CN108717159 A CN 108717159A CN 201810517740 A CN201810517740 A CN 201810517740A CN 108717159 A CN108717159 A CN 108717159A
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- CN
- China
- Prior art keywords
- integrated circuit
- circuit test
- adapter
- test system
- probe card
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
A kind of probe card for integrated circuit test of present invention offer and test system protection structure; the integrated circuit test system protection structure includes guard member and adapter; the guard member includes fuse member and two pins; the fuse member both ends respectively connect a pin; the resistance to flow valuve of maximum of the fuse member is less than the resistance to flow valuve of maximum of probe card; the adapter includes first adapter and the second adapter; the first adapter and second adapter are both provided with via, and the pin is detachable to be correspondingly connected with the via.In probe card for integrated circuit test provided by the invention and test system protection structure; it is played a protective role by the fusing of the fuse member in guard member; it is connected simultaneously with the pin of guard member using the adapter with via; without dismantling probe card, additional professional technique is not needed, the guard member speed replaced in probe card is fast; save the plenty of time; it is convenient due to replacing, human and material resources can be saved, cost has been saved.
Description
Technical field
The present invention relates to ic manufacturing technology field more particularly to a kind of probe card for integrated circuit test and test systems
Blanket insurance protection structure, integrated circuit test system.
Background technology
In semiconductor fabrication, IC chip is tested after processing is completed, and collection usually can be used
The survey of IC chip is completed at circuit test system such as ATE (Auto Test Equipment, automatic test equipment)
Examination.In the test process of wafer, due to the area very little of the chip on wafer, it cannot be connected with ATE by direct method
Its electric parameter is tested, so just needing to introduce probe card with probe to transfer.
Since the material of probe limits, probe has resistance to flow valuve, if it exceeds this limit, probe can occur to melt even
Fusing.It is limited again by shape size thickness due to probe, the resistance to flow valuve of various pieces is different, and needle point is whole spy
The most thin minimum part of needle, the resistance to flow valuve of this part is also minimum, i.e., probe by electric current be less than the resistance to flow valuve of needle point, for whole
Root probe is all safe.So the resistance to flow valuve for choosing this part of needle point is the resistance to flow valuve of maximum of whole probe.General probe card
Maximum resistance to flow valuve can be all considered when design, but due to wafer process defect etc., in test process sometimes
Prodigious short circuit current is generated, once more than the resistance to flow valuve of maximum of probe, probe fusing is may result in and can not be continuing with, from
And influence production.If even no stand-by equipment is replaced, producing line can be caused to stop line.In addition, replacing probe needs one
Fixed professional technique needs additional human and material resources, financial resources and time, increases cost, delays the friendship phase.
Therefore, how to provide a kind of structure protected to probe is those skilled in the art's skill urgently to be resolved hurrily
Art problem.
Invention content
The purpose of the present invention is to provide a kind of probe card for integrated circuit test and test system protection structure, integrated circuits
Test system solves the problems, such as that test process middle probe damages.
To solve the above-mentioned problems, the present invention provides a kind of integrated circuit test system protection structure, the integrated circuit
It includes guard member and adapter to test system protection structure, and the guard member includes fuse member and two pins, the fuse member
Respectively one pin of connection, the resistance to flow valuve of maximum of the fuse member are less than the resistance to flow valuve of maximum of probe card, the switching at both ends
Part includes first adapter and the second adapter, and the first adapter and second adapter are both provided with via, described
Pin is detachable to be correspondingly connected with the via.
Optionally, in the integrated circuit test system protects structure, the resistance to flow valuve of maximum of the fuse member is probe
90% or less the resistance to flow valuve of electronics of card.
Optionally, in the integrated circuit test system protects structure, the material of the connector includes gold.
Optionally, in the integrated circuit test system protects structure, the shape of the connector is column.
Optionally, in the integrated circuit test system protects structure, the shape of the cross section of the via is circle
Or polygon.
Optionally, in the integrated circuit test system protects structure, the area of the cross section of the via is from opening
The trend to taper off to the other end.
The present invention also provides a kind of probe card for integrated circuit test, the probe card for integrated circuit test includes above-mentioned integrated
Circuit test system protects structure and probe, the probe to connect into the guard member by the adapter.
The present invention also provides a kind of integrated circuit test system, the integrated circuit test system includes said integrated circuit
Test probe card.
Probe card for integrated circuit test provided by the invention and integrated circuit test system protection structure, integrated circuit testing
It in system, is played a protective role by the fusing of the fuse member in guard member, while using the adapter and guarantor with via
The pin of guard is connected, and without dismantling probe card for integrated circuit test, does not need additional professional technique, replaces collection
It is fast at the guard member speed in circuit test probe card, the plenty of time is saved, it is convenient due to replacing, a large amount of manpowers, object can be saved
Power has saved cost.
Description of the drawings
Fig. 1 is that the integrated circuit test system of the embodiment of the present invention protects the guard member of structure to cut open intention；
Fig. 2 is the structural schematic diagram that the integrated circuit test system of the embodiment of the present invention protects the guard member of structure.
Specific implementation mode
In order to keep objects, features and advantages of the present invention more obvious and easy to understand, attached drawing is please referred to.It should be clear that this explanation
Structure, ratio, size etc. depicted in book institute accompanying drawings, only to coordinate the revealed content of specification, for being familiar with this
The personage of technology understands and reads, and is not limited to the enforceable qualifications of the present invention, therefore does not have technical essence meaning
Justice, the modification of any structure, the change of proportionate relationship or the adjustment of size are not influencing the effect of present invention can be generated and institute
Under the purpose that can reach, should all still it fall in the range of disclosed technology contents obtain and can cover.
With reference to shown in figure 1 and Fig. 2, a kind of integrated circuit test system protection structure provided by the invention, the integrated electricity
Path test system protection structure includes guard member 10 and adapter, and the guard member 10 includes fuse member 11 and two pins 12,
Respectively one pin 12 of connection, the resistance to flow valuve of maximum of the fuse member 11 are less than the maximum of probe card at the fuse member 11 both ends
Resistance to flow valuve, the adapter include first adapter and the second adapter, and the first adapter and second adapter are equal
It is provided with via, the pin 12 is detachable to be correspondingly connected with the via.
For preferable protective effect, the resistance to flow valuve of maximum of the fuse member 11 is the 90% of the resistance to flow valuve of maximum of probe card
Hereinafter, it is namely smaller than the electric current that the tip portion of the probe in probe card can bear by 90%, ensure that the normal of probe card makes
With, and acted on before probe reaches maximum resistance to flow valuve by the fusing of fuse member 11 and make loop open circuit, make the short circuit current of generation
Etc. probe can not be flowed through, to protect probe, wherein maximum resistance to flow valuve can be determined according to the model of specific probe, relatively really
The fixed resistance to flow valuve for showing probe, for example, the resistance to flow valuve of probe is 0.1A, 0.5A or 1A etc..
Optionally, the material of the fuse member 11 includes lead-antimony alloy, and lead-antimony alloy has good electric conductivity, fusing point
It is low, its maximum resistance to flow valuve is can determine by choosing suitable length etc., if there is short circuit current generates, because electric current is through overprotection
Part, the fusing so guard member will generate heat, to make loop open circuit.Fuse member can be by being attached to the shells such as plastics or resin
The electric connection of upper realization and pin, can not be restricted the shape size of guard member.
In order to ensure the reliability of connection, the material of the adapter includes gold, since the priming of guard member is detachable
It is correspondingly connected with the via of adapter, guard member just needs replacing after fusing, and adapter can be used for a long time, and gold is as preferable
Material has good physicochemical characteristics, realizes in the via of the insertion connector of the pin plug type of guard member and electrically connects
It connects, the other end of the connector far from via can be fixedly attached to by modes such as welding in the circuit of probe card, detachable
Connection i.e. pin, which are realized with adapter by the way of via, to be connect and separates, to conveniently realize guard member
Replacement.It is that via A and B difference is solderable now as shown in Fig. 2, compared to the connection type of general PCB trace linking probe
First adapter and the second adapter are connect, the pin 1 of guard member can be inserted in the first adapter of via A, and pin 2 can be inserted in
In the second adapter of hole B, since adapter is that contact connects with pin, it is possible to be dismantled.
Optionally, the shape of the adapter is column, and column may include the multichannels shape such as cylinder, cylindroid, prism.
Corresponding, the shape of the cross section of the via is round or polygon, since pin is correspondingly connected with via,
It can be understood that the shape of pin should match with via, good connection is ensured by determining shape, wherein round go back
Including ellipse, polygon can be regular polygon such as equilateral triangle or square etc. or other such as right angled triangle or length
It is rectangular etc..
In the present embodiment, the trend that the area of the cross section of the via tapers off from opening to the other end, to side
Just pin is inserted into from opening in via, also ensures the stability of electric connection, while can also compare just in dismounting and change
Profit, be easy to use, the trend successively decreased include it is linear successively decrease, further include the nonlinear decreasing fashion such as stepped, equally may be used
To be dismantled and be played purpose easy to use.
The present invention also provides a kind of probe card for integrated circuit test, the probe card for integrated circuit test includes above-mentioned integrated
Circuit test system protects structure and probe, the probe to connect into the guard member, realized to probe by the adapter
Protective effect.The connection type realized for multiple pins and multiple adapters is all on the basis of guard member and adapter
It realizes, to realize many-one, one-to-many or multi-to-multi protected mode, is not out integrated circuit test system of the present invention and protects
Specific connection type can be set as needed in the protection domain of protection structure.
The present invention also provides a kind of integrated circuit test system, the integrated circuit test system includes said integrated circuit
Test probe card, when probe card for integrated circuit test is tested, in case of failures such as short circuits, due to integrated circuit testing
Guard member in probe card can be replaced, and the exclusion of failure only needs replacing the guard member on probe card for integrated circuit test i.e.
Can, probe card for integrated circuit test need not be dismantled, additional professional technique is not needed, replacement speed is fast, saves the plenty of time,
It is convenient due to replacing, a large amount of human and material resources are saved, cost has been saved.
In probe card for integrated circuit test provided by the invention and test system protection structure, integrated circuit test system,
It is played a protective role by the fusing of the fuse member in guard member, while using with the adapter of via and drawing for guard member
Foot is connected, and without dismantling probe card for integrated circuit test, does not need additional professional technique, replaces integrated circuit and survey
The guard member speed tried in probe card is fast, saves the plenty of time, convenient due to replacing, and can save a large amount of human and material resources, saves
Cost.
Foregoing description is only the description to present pre-ferred embodiments, not to any restriction of the scope of the invention, this hair
Any change, the modification that the those of ordinary skill in bright field does according to the disclosure above content, belong to the protection of claims
Range.
Claims (9)
1. a kind of integrated circuit test system protects structure, which is characterized in that the integrated circuit test system protects structure packet
It includes：
Guard member, the guard member include fuse member and two pins, and the fuse member both ends respectively connect a pin, institute
The resistance to flow valuve of maximum for stating fuse member is less than the resistance to flow valuve of maximum of probe card；
Adapter, the adapter include first adapter and the second adapter, and the first adapter and described second are transferred
Part is both provided with via, and the pin is detachable to be correspondingly connected with the via.
2. integrated circuit test system as described in claim 1 protects structure, which is characterized in that the maximum resistant to flow of the fuse member
Value is 90% or less the resistance to flow valuve of maximum of probe card.
3. integrated circuit test system as claimed in claim 1 or 2 protects structure, which is characterized in that the material of the fuse member
Including lead-antimony alloy.
4. integrated circuit test system as claimed in claim 1 or 2 protects structure, which is characterized in that the material of the adapter
Including gold.
5. integrated circuit test system as described in claim 1 protects structure, which is characterized in that the shape of the adapter is column
Shape.
6. integrated circuit test system protects structure as described in claim 1 or 5, which is characterized in that the cross section of the via
Shape be round or polygon.
7. integrated circuit test system as claimed in claim 6 protects structure, which is characterized in that the face of the cross section of the via
The trend that product tapers off from opening to the other end.
8. a kind of probe card for integrated circuit test, which is characterized in that the probe card for integrated circuit test includes such as claim
Any one of 1-7 integrated circuit test systems protection structure and probe, the probe by the adapter connect into
The guard member.
9. a kind of integrated circuit test system, which is characterized in that the integrated circuit test system includes as claimed in claim 8
Probe card for integrated circuit test.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810517740.0A CN108717159A (en) | 2018-05-25 | 2018-05-25 | A kind of probe card for integrated circuit test and test system protection structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810517740.0A CN108717159A (en) | 2018-05-25 | 2018-05-25 | A kind of probe card for integrated circuit test and test system protection structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108717159A true CN108717159A (en) | 2018-10-30 |
Family
ID=63900329
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810517740.0A Pending CN108717159A (en) | 2018-05-25 | 2018-05-25 | A kind of probe card for integrated circuit test and test system protection structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108717159A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112903022A (en) * | 2021-02-04 | 2021-06-04 | 上海泽丰半导体科技有限公司 | Probe test system, operation method and detection method thereof |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002124552A (en) * | 2000-10-13 | 2002-04-26 | Seiko Instruments Inc | Probe card and semiconductor-inspecting equipment |
| CN1512186A (en) * | 2002-10-02 | 2004-07-14 | ��ʽ���������Ƽ� | Probe sheet, probe card, semiconductor detector and method for producing semiconductor device |
| CN101825651A (en) * | 2009-03-06 | 2010-09-08 | 恩益禧电子股份有限公司 | Probe, comprise the semiconductor test apparatus of probe and the fuse checking method of probe |
| CN104280906A (en) * | 2014-09-30 | 2015-01-14 | 合肥鑫晟光电科技有限公司 | Probe block and detector |
| CN105277755A (en) * | 2015-11-23 | 2016-01-27 | 上海华岭集成电路技术股份有限公司 | Cantilever type probe system |
| CN205508751U (en) * | 2016-01-26 | 2016-08-24 | 黄泉善 | Thermal fuse |
-
2018
- 2018-05-25 CN CN201810517740.0A patent/CN108717159A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002124552A (en) * | 2000-10-13 | 2002-04-26 | Seiko Instruments Inc | Probe card and semiconductor-inspecting equipment |
| CN1512186A (en) * | 2002-10-02 | 2004-07-14 | ��ʽ���������Ƽ� | Probe sheet, probe card, semiconductor detector and method for producing semiconductor device |
| CN101825651A (en) * | 2009-03-06 | 2010-09-08 | 恩益禧电子股份有限公司 | Probe, comprise the semiconductor test apparatus of probe and the fuse checking method of probe |
| CN104280906A (en) * | 2014-09-30 | 2015-01-14 | 合肥鑫晟光电科技有限公司 | Probe block and detector |
| CN105277755A (en) * | 2015-11-23 | 2016-01-27 | 上海华岭集成电路技术股份有限公司 | Cantilever type probe system |
| CN205508751U (en) * | 2016-01-26 | 2016-08-24 | 黄泉善 | Thermal fuse |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112903022A (en) * | 2021-02-04 | 2021-06-04 | 上海泽丰半导体科技有限公司 | Probe test system, operation method and detection method thereof |
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|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20181030 |