CN108615202A - Engineering equipment preset parameter management system and management method after encapsulation - Google Patents

Engineering equipment preset parameter management system and management method after encapsulation Download PDF

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Publication number
CN108615202A
CN108615202A CN201611144727.2A CN201611144727A CN108615202A CN 108615202 A CN108615202 A CN 108615202A CN 201611144727 A CN201611144727 A CN 201611144727A CN 108615202 A CN108615202 A CN 108615202A
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Prior art keywords
parameter
equipment
equipments
materials
goods
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CN201611144727.2A
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Inventor
张乾
戴凌渊
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Hitech Semiconductor Wuxi Co Ltd
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Hitech Semiconductor Wuxi Co Ltd
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Priority to CN201611144727.2A priority Critical patent/CN108615202A/en
Publication of CN108615202A publication Critical patent/CN108615202A/en
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    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06QINFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q50/00Information and communication technology [ICT] specially adapted for implementation of business processes of specific business sectors, e.g. utilities or tourism
    • G06Q50/04Manufacturing
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/30Computing systems specially adapted for manufacturing

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  • Business, Economics & Management (AREA)
  • Engineering & Computer Science (AREA)
  • Primary Health Care (AREA)
  • Strategic Management (AREA)
  • Economics (AREA)
  • General Health & Medical Sciences (AREA)
  • Human Resources & Organizations (AREA)
  • Marketing (AREA)
  • Manufacturing & Machinery (AREA)
  • Health & Medical Sciences (AREA)
  • Tourism & Hospitality (AREA)
  • Physics & Mathematics (AREA)
  • General Business, Economics & Management (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • General Factory Administration (AREA)
  • Management, Administration, Business Operations System, And Electronic Commerce (AREA)

Abstract

The present invention relates to the management systems of encapsulation field, engineering equipment preset parameter manages system after especially encapsulating, including sequentially connected device parameter management system, device talk system, automated procedures system, parameter server system, parameter server system is also connect with device talk system;It is that equipment carries system that device parameter, which manages system, for selecting production goods, materials and equipments type and carrying out parameter setting to the production goods, materials and equipments;Device talk system realizes the real-time communication of equipment and automated procedures system and parameter server system by application semiconductor equipment standard communication protocol;Automated procedures system judges whether current raw material goods, materials and equipments produces in this equipment;Parameter server system judges whether parameter current setting meets the manufacturing parameter of the goods, materials and equipments.This system assures that the accuracy that parameter uses, realizes the stringent controllable of equipment manufacturing parameter, effectively avoids the generation of product quality problem.

Description

Engineering equipment preset parameter management system and management method after encapsulation
Technical field
The present invention relates to the management systems of encapsulation field, engineering equipment preset parameter management system and pipe after especially encapsulating Reason method.
Background technology
In each process of rear engineering of encapsulation, equipment usually needs to adjust different parameters by equipment and technology personnel, with suitable Answer the production requirement of different type product.Such operation easily occurs causing parameter setting mistake due to human error, to Influence product quality;And such human error is not easy to find, Quality Accident is unable to get prevention.
Invention content
To solve the above problems, the present invention provide it is a kind of can judge parameter setting whether correctly encapsulate after engineering equipment it is pre- Parameter management system processed and management method, specific technical solution are:
Engineering equipment preset parameter manages system, including sequentially connected device parameter management system, device talk system after encapsulation System, automated procedures system, parameter server system, the parameter server system are also connect with device talk system;It is described It is that equipment carries system that device parameter, which manages system, is set for selecting production goods, materials and equipments type and carrying out parameter to the production goods, materials and equipments It is fixed;The device talk system realizes equipment and automated procedures system and ginseng by application semiconductor equipment standard communication protocol The real-time communication of number server system;The automated procedures system judges whether current raw material goods, materials and equipments produces in this equipment; The parameter server system judges whether parameter current setting meets the manufacturing parameter of the goods, materials and equipments.
Engineering equipment preset parameter management method, comprises the steps of after encapsulation:
Step 101:In advance in parameter server system arrange parameter reference range;
Step 102:By different parameters according in different production goods, materials and equipments information preservations to parameter server system;
Step 103:Parameter information is downloaded in equipment by device parameter server system and is used by equipment;
Step 104:Start a new wheel goods, materials and equipments production;
Step 105:Device parameter manages system and the goods, materials and equipments information of production and the parameter information being being currently used is uploaded to clothes In device system of being engaged in;
Step 106:The information that parameter server system uploads equipment carries out validity comparison, displays whether normally to produce;
Step 107:Operating personnel confirm the result of feedback, judge whether that production can be normally carried out.
The judgment step of the step 104 to 107:
Step 201:Relevant information is issued device talk system by equipment when loading new raw material goods, materials and equipments;
Step 202:After device talk system receives information, information is parsed and is transmitted to automated procedures system;
Step 203:Automated procedures system carries out logic judgment, judges whether current raw material goods, materials and equipments should give birth in this equipment Production, if so, 204 and 205 will be entered step, if not entering step 206;
Step 204:Information is transmitted to parameter server system by automated procedures system, and parameter server system passes through Virtualization Mode Check that program carries out Verification, Verification result is sent to device parameter by device talk system and manages system;
Step 205:If the consistent device parameter management system prompt parameter of verification result is correct, is confirmed by operating personnel and given birth to Production, if the inconsistent equipment pause production of verification result, device parameter manage system prompt error message, wait for subsequent processing;
Step 206:Information is transferred to device parameter by device talk system and manages system by automated procedures system, and equipment is temporary Stop producing, device parameter manages system prompt error message, waits for subsequent processing.
The product information that will be produced can be sent automatically to parameter server system and be confirmed by equipment, then automatically Corresponding parameter is downloaded to be produced, it is ensured that the accuracy that parameter uses, and parameter server system can also be by right The parameter manually adjusted is checked, it is ensured that used equipment operating parameter realizes equipment production within zone of reasonableness Parameter it is stringent controllable, effectively avoid the generation of product quality problem.
Description of the drawings
Fig. 1 is the flow chart of the management system of the present invention;
Fig. 2 is the parameter decision flow chart of the present invention.
Specific implementation mode
In conjunction with the specific implementation mode of the description of the drawings present invention.
As shown in Figure 1, engineering equipment preset parameter manages system, including sequentially connected device parameter management system after encapsulation System, device talk system, automated procedures system, parameter server system, the parameter server system also with device talk System connects;The device parameter management system is that equipment carries system, for selecting production goods, materials and equipments type and being provided to the production Material carries out parameter setting;The device talk system is by applying semiconductor equipment standard communication protocol(SECS/GEN)Realization is set The standby real-time communication with automated procedures system and parameter server system;The automated procedures system judges current raw material money Whether material produces in this equipment;The parameter server system receives supplemental characteristic and judges whether parameter current setting meets The manufacturing parameter of the goods, materials and equipments.
As shown in Fig. 2, engineering equipment preset parameter management method after encapsulation, comprises the steps of:
Step 101:In advance in parameter server system arrange parameter reference range;
Step 102:By different parameters according in different production goods, materials and equipments information preservations to parameter server system;
Step 103:Parameter information is downloaded in equipment by device parameter server system and is used by equipment;
Step 104:Start a new wheel goods, materials and equipments production;
Step 105:Device parameter manages system and the goods, materials and equipments information of production and the parameter information being being currently used is uploaded to clothes In device system of being engaged in;
Step 106:The information that parameter server system uploads equipment carries out validity comparison, displays whether normally to produce;
Step 107:Operating personnel confirm the result of feedback, judge whether that production can be normally carried out.
The judgment step of the step 104 to 107:
Step 201:Relevant information is issued device talk system by equipment when loading new raw material goods, materials and equipments;
Step 202:After device talk system receives information, information is parsed and is transmitted to automated procedures system;
Step 203:Automated procedures system carries out logic judgment, judges whether current raw material goods, materials and equipments should give birth in this equipment Production, if so, 204 and 205 will be entered step, if not entering step 206;
Step 204:Information is transmitted to parameter server system by automated procedures system, and parameter server system passes through Virtualization Mode Check that program carries out Verification, Verification result is sent to device parameter by device talk system and manages system;
Step 205:If the consistent device parameter management system prompt parameter of verification result is correct, is confirmed by operating personnel and given birth to Production, if the inconsistent equipment pause production of verification result, device parameter manage system prompt error message, wait for subsequent processing;
Step 206:Information is transferred to device parameter by device talk system and manages system by automated procedures system, and equipment is temporary Stop producing, device parameter manages system prompt error message, waits for subsequent processing.

Claims (3)

1. engineering equipment preset parameter manages system after encapsulation, which is characterized in that including sequentially connected device parameter management system System, device talk system, automated procedures system, parameter server system, the parameter server system also with device talk System connects;The device parameter management system is that equipment carries system, for selecting production goods, materials and equipments type and being provided to the production Material carries out parameter setting;The device talk system realizes equipment and automation by application semiconductor equipment standard communication protocol The real-time communication of programming system and parameter server system;Whether the automated procedures system judges current raw material goods, materials and equipments at this It is produced in equipment;The parameter server system judges whether parameter current setting meets the manufacturing parameter of the goods, materials and equipments.
2. the management method of engineering equipment preset parameter management system after encapsulation according to claim 1, which is characterized in that It comprises the steps of:
Step 101:In advance in parameter server system arrange parameter reference range;
Step 102:By different parameters according in different production goods, materials and equipments information preservations to parameter server system;
Step 103:Parameter is downloaded to from information management server system in equipment and is used by equipment management system;
Step 104:Start a new wheel goods, materials and equipments production;
Step 105:Device parameter manages system and the goods, materials and equipments information of production and the parameter information being being currently used is uploaded to clothes In device system of being engaged in;
Step 106:The information that parameter server system uploads equipment carries out validity comparison, displays whether normally to produce;
Step 107:Operating personnel confirm the result of feedback, judge whether that production can be normally carried out.
3. engineering equipment preset parameter management method after encapsulation according to claim 2, which is characterized in that the step 104 to 107 judgment step:
Step 201:Relevant information is issued device talk system by equipment when loading new raw material goods, materials and equipments;
Step 202:After device talk system receives information, information is parsed and is transmitted to automated procedures system;
Step 203:Automated procedures system carries out logic judgment, judges whether current raw material goods, materials and equipments should give birth in this equipment Production, if so, 204 and 205 will be entered step, if not entering step 206;
Step 204:Information is transmitted to parameter server system by automated procedures system, and parameter server system passes through Virtualization Mode Check that program carries out Verification, Verification result is sent to device parameter by device talk system and manages system;
Step 205:If the consistent device parameter management system prompt parameter of verification result is correct, is confirmed by operating personnel and given birth to Production, if the inconsistent equipment pause production of verification result, device parameter manage system prompt error message, wait for subsequent processing;
Step 206:Information is transferred to device parameter by device talk system and manages system by automated procedures system, and equipment is temporary Stop producing, device parameter manages system prompt error message, waits for subsequent processing.
CN201611144727.2A 2016-12-13 2016-12-13 Engineering equipment preset parameter management system and management method after encapsulation Pending CN108615202A (en)

Priority Applications (1)

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CN201611144727.2A CN108615202A (en) 2016-12-13 2016-12-13 Engineering equipment preset parameter management system and management method after encapsulation

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Application Number Priority Date Filing Date Title
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CN108615202A true CN108615202A (en) 2018-10-02

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113496128A (en) * 2020-04-07 2021-10-12 海太半导体(无锡)有限公司 Method for binding and automatically operating serial number of jig for loading materials

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103425066A (en) * 2013-08-02 2013-12-04 上海华力微电子有限公司 Wafer batch operation dynamic processing system and method
CN104517196A (en) * 2015-01-07 2015-04-15 海太半导体(无锡)有限公司 Material supply management system and method for semiconductor packaging equipment
KR20160021419A (en) * 2014-08-14 2016-02-25 엔에이치엔엔터테인먼트 주식회사 Mobile terminal test system and mobile terminal test method using the system
CN105652828A (en) * 2015-12-09 2016-06-08 重庆川仪自动化股份有限公司 MES monitoring system and method thereof
CN205750508U (en) * 2016-06-23 2016-11-30 北京中冶力和科技有限公司 A kind of industrial automation message tube Ore-controlling Role

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103425066A (en) * 2013-08-02 2013-12-04 上海华力微电子有限公司 Wafer batch operation dynamic processing system and method
KR20160021419A (en) * 2014-08-14 2016-02-25 엔에이치엔엔터테인먼트 주식회사 Mobile terminal test system and mobile terminal test method using the system
CN104517196A (en) * 2015-01-07 2015-04-15 海太半导体(无锡)有限公司 Material supply management system and method for semiconductor packaging equipment
CN105652828A (en) * 2015-12-09 2016-06-08 重庆川仪自动化股份有限公司 MES monitoring system and method thereof
CN205750508U (en) * 2016-06-23 2016-11-30 北京中冶力和科技有限公司 A kind of industrial automation message tube Ore-controlling Role

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113496128A (en) * 2020-04-07 2021-10-12 海太半导体(无锡)有限公司 Method for binding and automatically operating serial number of jig for loading materials

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Application publication date: 20181002