CN108557756A - A kind of micromachined knife rest with force servo function - Google Patents

A kind of micromachined knife rest with force servo function Download PDF

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Publication number
CN108557756A
CN108557756A CN201810069712.7A CN201810069712A CN108557756A CN 108557756 A CN108557756 A CN 108557756A CN 201810069712 A CN201810069712 A CN 201810069712A CN 108557756 A CN108557756 A CN 108557756A
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China
Prior art keywords
flexible hinge
displacement
knife rest
probe
displacement sensor
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CN201810069712.7A
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CN108557756B (en
Inventor
闫永达
蔡建雄
张景然
王豫章
耿延泉
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Harbin Institute of Technology
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Harbin Institute of Technology
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82BNANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
    • B82B3/00Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
    • B82B3/0004Apparatus specially adapted for the manufacture or treatment of nanostructural devices or systems or methods for manufacturing the same
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82BNANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
    • B82B3/00Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
    • B82B3/0085Testing nanostructures
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00Manufacture or treatment of nanostructures

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)

Abstract

The invention discloses a kind of micro Process knife rest with force servo function, the micro Process knife rest includes PZT actuators, the first displacement sensor, second displacement sensor, lead screw, nut, rotating ring, flexible hinge, probe, guiding trestle and XY displacement platforms.The present invention utilizes flexible hinge, will switch to the measurement to flexible hinge normal deformation amount to the measurement of normal force, simpler to the measurement of displacement, more accurately;Using the symmetrical flexible hinge of annular center, it can be effective against the deformation of lateral force generation, probe is made as to keep vertical as possible with X/Y plane, reduce deflection angle;The angle of probe can be adjusted by marking closely screw using rotating ring cooperation, realize the micromachined of different angle;Maximum load can be changed by replacing flexible hinge, with suitable for the workpiece for processing different hardness;The spacing of second displacement sensor and flexible hinge can be adjusted by feed screw nut, convenient for determining initial spacing, be convenient for measuring.

Description

A kind of micromachined knife rest with force servo function
Technical field
The present invention relates to a kind of micromachined knife rest more particularly to a kind of micromachined knives with force servo function Frame.
Background technology
With the development of nanotechnology, especially atomic force microscope(Atomic Force Microscope, AFM)'s Invention, it has been found that machining process still has immeasurable potentiality in the processing of nanostructure.Nano-machine adds Work is the extension of tradition machinery processing, and the probe of micro-or nano size is instead of traditional mechanical cutting tool, profit in this method With the interaction force between needle point and sample, micro-nano knot is generated in sample surfaces scraping, impression, lifting or pushing material Structure.Nano-machine processing method using the processing method of force servo control has the advantages that protrusion:It can realize more accurate " to knife ";Workpiece need not carry out stringent leveling;There is " following " effect to workpiece surface, particularly suitable in curved surface and Nanostructure is processed on inclined-plane.
Currently, atomic force microscope(AFM)Common nano-machine process equipment, its main feature is that high precision machining, plus Work is integrated with detection;Nano dot, nano wire/groove etc. can be processed in surfaces of various materials such as metal, semiconductor, polymer Structure.But AFM is applied to the effect of workpiece surface by needle point as a kind of system for measuring in atomic level and evaluating surface Power is very small so that and working ability and workpiece material are restricted, and processing efficiency is relatively low, range is smaller, instrument cost is high, Also far from the process requirements for meeting current micro-nano structure.
Invention content
In order to solve above-mentioned deficiency, the present invention provides it is a kind of with top load, advantage of low cost with force servo work( The micro Process knife rest of energy.
The purpose of the present invention is what is be achieved through the following technical solutions:
A kind of micro Process knife rest with force servo function, including PZT actuators, the first displacement sensor, second displacement sensing Device, lead screw, nut, rotating ring, flexible hinge, probe, guiding trestle and XY displacement platforms, wherein:
The guiding trestle is inverted " t " type, is made of horizontal stand and vertical rack, is equipped on the right side of the middle part of the vertical rack Horizontal branch frame;
The work of the XY displacement platforms is face-down;
The fixing end of the PZT actuators is mounted on the working face of the XY displacement platforms, tache motorice and the horizontal stand Left side upper surface connection;
First displacement sensor be mounted on the XY displacement platforms working face on, and positioned at the vertical rack just on Side;
The lead screw is mounted on horizontal branch frame;
The nut is mounted on the lead screw, and positioned at the lower section of horizontal branch frame;
The second displacement sensor is mounted on the nut;
The rotating ring is mounted on the right side of the horizontal stand, is fixed by marking closely screw;
The flexible hinge is installed on the lower section of the rotating ring, and the two is concentric;
The probe is mounted on the flexible hinge central lower.
The invention has the advantages that:
1, the present invention utilizes flexible hinge, will switch to the measurement to flexible hinge normal deformation amount to the measurement of normal force, aligns The measurement of shifting is simpler, more accurately.
2, as shown in Fig. 2, the present invention uses the symmetrical flexible hinge of annular center, the change of lateral force generation can be effective against Shape makes probe as keep vertical as possible with X/Y plane, reduces deflection angle.
3, as shown in 3 figures, the present invention marks closely screw using rotating ring cooperation can adjust the angle of probe, and rotating ring can band Dynamic flexible hinge and probe rotate about the axis together, adjust after angle with screw lock is marked closely, realize the microcomputer of different angle Tool is processed.
4, the present invention can change maximum load by replacing flexible hinge, with suitable for the workpiece for processing different hardness.
5, the present invention can adjust the spacing of second displacement sensor and flexible hinge by feed screw nut, convenient for determining just Beginning spacing, is convenient for measuring.
6, knife rest of the invention has the function of force servo, can process micro-nano-scale on plane, inclined-plane and curved surface Impression, cut etc..
7, knife rest of the invention can control normal force size from micro- ox to several milli ox magnitudes, and higher hardness material may be implemented The processing of material has stronger working ability and wider array of adaptability than commercial AFM system.
8, large range of micromachined may be implemented using XY displacement platforms in knife rest of the invention.
9, knife rest of the invention in process, can measure the depth of processing and corresponding normal force simultaneously.
Description of the drawings
Fig. 1 is the schematic diagram of the micromachined knife rest with force servo function, in figure:The first displacement sensors of 1-, 2- Lead screw, 3- nuts, 4- second displacements sensor, 5- flexible hinges, 6- rotating rings, 7- are marked closely screw, 8- guiding trestles, 9- and are visited Needle, 10-PZT actuators, 11-XY displacement platforms;
Fig. 2 is the structural schematic diagram of flexible hinge;
Fig. 3 is the schematic diagram of probe angulation method of adjustment;
Fig. 4 is the control system schematic diagram of the micromachined knife rest with force servo function, in figure:12- displays, 13- master Control computer, 14- kinetic control systems, 15- signal acquiring systems, 16-PZT actuators driver, the driving of 17-XY displacement platforms Device;
Fig. 5 is the stereogram of the micromachined knife rest with force servo function;
Fig. 6 is the front view of the micromachined knife rest with force servo function;
Fig. 7 is the enlarged drawing of Fig. 6 part sections A;
Fig. 8 is the B-B sectional views of Fig. 6.
Specific implementation mode
Technical scheme of the present invention is further described below in conjunction with the accompanying drawings, however, it is not limited to this, every to this Inventive technique scheme is modified or replaced equivalently, and without departing from the spirit of the technical scheme of the invention and range, should all be covered In protection scope of the present invention.
Micro Process knife rest provided by the invention with force servo function includes mechanical system and control system two parts.
As shown in Fig. 1,5-8, the mechanical system includes PZT actuators 10, the first displacement sensor 1, second displacement biography Sensor 4, lead screw 2, nut 3, rotating ring 6, flexible hinge 5, probe 9, guiding trestle 8 and XY displacement platforms 11.Wherein:
The guiding trestle 8 is inverted " t " type, is made of horizontal stand and vertical rack, is set on the right side of the middle part of the vertical rack There is horizontal branch frame;
The work of the XY displacement platforms 11 is face-down;
The fixing end of the PZT actuators 10 is mounted on the working face of XY displacement platforms 11, tache motorice and the horizontal stand Left side upper surface connection, can drive the guiding trestle 8 move up and down;
First displacement sensor 1 is mounted on the working face of the XY displacement platforms 11, and positioned at the vertical rack Surface, the spacing with the vertical rack are l1
The probe 9 is mounted on 5 central lower of the flexible hinge;
The flexible hinge 5 is installed on 6 lower section of rotating ring, and the two is concentric, and the rotating ring 6 is mounted on the horizontal stand Right side is fixed by marking closely screw 7, flexible hinge 5 can be driven to rotate about the axis, to adjust the angle of probe 9;
The lead screw 2 is mounted on horizontal branch frame;
The nut 3 is mounted on the lead screw 2, and positioned at the lower section of the horizontal branch frame;
The second displacement sensor 4 is mounted on the nut 3, and the nut 3 can be moved up and down by the lead screw 2, To adjust the spacing l of the second displacement sensor 4 and the flexible hinge 52
As shown in figure 4, the control system includes main control computer 13, kinetic control system 14 and signal acquiring system 15 Three parts.Control signal specifically includes:The drive signal of PZT actuators, the drive signal of XY displacement platforms, the first displacement pass The measuring signal of sensor 1 and second displacement sensor 4.Pass through kinetic control system, two D/A modules, PZT actuator drivers 16 and XY displacement platforms driver 17 realizes the motion control of PZT actuators 10 and XY displacement platforms 11.Pass through signal acquisition system Unite 15, two A/D modules, the first displacement sensor 1 and second displacement sensor 4 realizes 10 output displacement of PZT actuators and soft The measurement of property 5 normal deformation amount of hinge.Data processing is carried out by the software of main control computer 13, and provides depth-normal direction in real time Force curve.
Operation principle:
As initial position when just touching the contactless power of workpiece surface using 9 needle point of probe.
Loading procedure, PZT actuators 10, which increase output displacement, makes guiding trestle 8 move downward, l1As guiding trestle 8 Displacement, that is, PZT actuators 10 output displacement.Guiding trestle 8 drives probe 9 to move downward;When probe 9 is pressed into workpiece, Flexible hinge 5 is kept its upwardly-deformed by upward normal force, the spacing l with second displacement sensor 42Reduce, so l2For The normal deformation amount of flexible hinge 5.The difference of the output displacement of PZT actuators 10 and the normal deformation amount of flexible hinge 5(∆ l1-∆l2)The depth of workpiece is pressed into for probe 9.The normal deformation amount of flexible hinge 5 has certain line with suffered normal force Sexual intercourse, so as to calculate the normal force suffered by probe 9.
Uninstall process, PZT actuators 10, which reduce output displacement, makes guiding trestle 8 move upwards, the method that flexible hinge 5 is subject to Gradually restore to deformation, normal force is gradually reduced, and final probe 9 is detached from workpiece.
In process, the depth of processing and corresponding normal force can be measured simultaneously.Then using XY displacement platforms 11 The processing of micro/nano-scale impression, cut etc. can be carried out in the specific position and wide range of workpiece.

Claims (2)

1. a kind of micro Process knife rest with force servo function, it is characterised in that the micro Process knife rest includes PZT actuators, One displacement sensor, second displacement sensor, lead screw, nut, rotating ring, flexible hinge, probe, guiding trestle and XY displacements are flat Platform, wherein:
The guiding trestle is inverted " t " type, is made of horizontal stand and vertical rack, is equipped on the right side of the middle part of the vertical rack Horizontal branch frame;
The work of the XY displacement platforms is face-down;
The fixing end of the PZT actuators is mounted on the working face of the XY displacement platforms, tache motorice and the horizontal stand Left side upper surface connection;
First displacement sensor be mounted on the XY displacement platforms working face on, and positioned at the vertical rack just on Side;
The lead screw is mounted on horizontal branch frame;
The nut is mounted on the lead screw, and positioned at the lower section of horizontal branch frame;
The second displacement sensor is mounted on the nut;
The rotating ring is mounted on the right side of the horizontal stand, is fixed by marking closely screw;
The flexible hinge is installed on the lower section of the rotating ring, and the two is concentric;
The probe is mounted on the flexible hinge central lower.
2. the micro Process knife rest according to claim 1 with force servo function, it is characterised in that the flexible hinge is The symmetrical flexible hinge of annular center.
CN201810069712.7A 2018-01-24 2018-01-24 A kind of micromachined knife rest with force servo function Active CN108557756B (en)

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