CN108538924A - A kind of plastic packaging SiC Schottky diode device and its manufacturing method - Google Patents

A kind of plastic packaging SiC Schottky diode device and its manufacturing method Download PDF

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Publication number
CN108538924A
CN108538924A CN201810467692.9A CN201810467692A CN108538924A CN 108538924 A CN108538924 A CN 108538924A CN 201810467692 A CN201810467692 A CN 201810467692A CN 108538924 A CN108538924 A CN 108538924A
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CN
China
Prior art keywords
schottky diode
sic schottky
bridge piece
diode chip
outer pin
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Pending
Application number
CN201810467692.9A
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Chinese (zh)
Inventor
钱清友
王成森
徐洋
范敏波
江林华
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Agile Semiconductor Ltd
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Agile Semiconductor Ltd
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Publication date
Application filed by Agile Semiconductor Ltd filed Critical Agile Semiconductor Ltd
Priority to CN201810467692.9A priority Critical patent/CN108538924A/en
Publication of CN108538924A publication Critical patent/CN108538924A/en
Pending legal-status Critical Current

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/86Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
    • H01L29/861Diodes
    • H01L29/872Schottky diodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/367Cooling facilitated by shape of device
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/66007Multistep manufacturing processes
    • H01L29/66075Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
    • H01L29/66083Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by variation of the electric current supplied or the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched, e.g. two-terminal devices
    • H01L29/6609Diodes
    • H01L29/66143Schottky diodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321Disposition
    • H01L2224/32151Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32245Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73265Layer and wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Ceramic Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Electrodes Of Semiconductors (AREA)

Abstract

The invention discloses a kind of plastic packaging SiC Schottky diode devices, including heat dissipation metal bottom plate, outer pin, SiC Schottky diode chip, connection bridge piece, manufacturing method to be:Heat dissipation metal bottom plate is positioned in mold, the appropriate soldering paste on the boss upper table millet cake of heat dissipation metal bottom plate;By the face-down upside down of SiC Schottky diode chip anode in boss upper surface, and on SiC Schottky diode chip cathodic region surface upward and outer pin welding section with appropriate soldering paste on time point;The connection bridge piece welding areas A and the areas B are individually positioned on cathodic region and outer pin welding section simultaneously;The product assembled is subjected to disposal vacuum sintering together with mold, after the completion of to be sintered, it is cleaned, plastic packaging, encapsulation is completed, product is formed, the present invention greatly improves chip cooling effect, shorten technological process, production efficiency is improved, the through-current capability of device is greatly improved, gives full play of SiC Schottky diode chip high throughflow capacity superiority.

Description

A kind of plastic packaging SiC Schottky diode device and its manufacturing method
Technical field
The present invention relates to power semiconductor field, more particularly to a kind of plastic packaging SiC Schottky diode device and its Manufacturing method.
Background technology
Plastic packaging SiC Schottky diode currently on the market is all that cathodic region is welded on radiating bottom plate, and anode region passes through Aluminum wire bonding technique is connect with outer pin.And SiC Schottky diode chip has much compared to silicon Schotty diode chip Advantage, if critical breakdown strength is very high, thermal conductivity is very big, SiC Schottky diode chip can have more by the electric current of bigger Excellent heat conductivility.But since the blow-out current value of aluminum steel is low, Surge handling capability is poor, while because of the limitation of plastic device size, The limited amount for leading to aluminum wire bonding, to cause the through-current capability of plastic packaging SiC Schottky diode to be restricted;SiC Xiao Te Based diode is Schottky junction structure, and the heat that when products application generates mainly carrys out schottky junction, and the sun of schottky junction and chip Polar region electrode only has 100nm or so, has nearly 400um with cathode region electrode, when cathodic region is welded on radiating bottom plate, schottky junction Far from radiating bottom plate, heat transfer is slow, heat dissipation effect is poor, thermal resistance is big.
Invention content
The purpose of the present invention is to provide a kind of plastic packaging SiC Schottky diode device and its manufacturing methods.
The technical solution adopted by the present invention is:
A kind of plastic packaging SiC Schottky diode device, it is characterised in that:Including heat dissipation metal bottom plate, outer pin, SiC Schottky Diode chip for backlight unit, connection bridge piece, heat dissipation metal bottom plate top central area are equipped with boss, and the outer pin includes outer pin Welding section, outer pin exit, the SiC Schottky diode chip include anode region directed downwardly and cathodic region upward, The connection bridge piece includes the areas connection bridge piece welding A, the areas connection bridge piece welding B, and the SiC Schottky diode chip is directed downwardly Anode region is welded on by scolding tin material above boss, and the cathodic region of the SiC Schottky diode chip upward passes through scolding tin Material welds the areas A in succession with bridge piece is connect, and the connection bridge piece welding areas B are connect with outer pin welding section by scolding tin material.
The boss is rectangle or square.
The SiC Schottky diode chip is completely covered by boss upper surface, and extends boss surrounding edge, with gold Belong to the non-land areas in radiating bottom plate top surface and forms interstice coverage.
The areas the connection bridge piece welding A are rectangle or square.
A kind of manufacturing method of plastic packaging SiC Schottky diode device, it is characterised in that:Include the following steps:
Step 1:Heat dissipation metal bottom plate is positioned in mold, the appropriate soldering paste on the boss upper table millet cake of heat dissipation metal bottom plate;
Step 2:By the face-down upside down of SiC Schottky diode chip anode in boss upper surface, and in SiC Schottky two Pole pipe chip cathodic region surface upward and outer pin welding section are the same as appropriate soldering paste on time point;
Step 3:The connection bridge piece welding areas A and the connection bridge piece welding areas B are individually positioned in SiC Schottky diode chip simultaneously On cathodic region and outer pin welding section upward;
Step 4:The product assembled is subjected to disposal vacuum sintering together with mold, condition is:Vacuum degree is less than 1 × 10 ^0MPa is heated to 330-370 DEG C, sintering time 15-16min, after the completion of to be sintered, and the nitrogen for leading to 150-250L/min carries out It is cooling, it is cooled to instruction temperature and comes out of the stove at 80 DEG C or less, cleaned, plastic packaging, complete encapsulation, form product.
Advantages of the present invention:In the present invention, SiC Schottky diode chip anode is inverted down and is welded on metal On the boss of radiating bottom plate, chip cathodic region is connect using connection bridge piece with outer pin, and heat transfer distance reduces, and thermal resistance is small, production Product performance boost greatly improves chip cooling effect, eliminates aluminum wire bonding technique, shortens technological process, improves production Efficiency greatly improves the through-current capability of device, gives full play of SiC Schottky diode chip high throughflow capacity superiority.
Description of the drawings
The present invention is described in further detail with reference to the accompanying drawings and detailed description.
Fig. 1 is the side view of the present invention;
Fig. 2 is heat dissipation metal bottom plate of the present invention and the vertical view of outer pin;
Fig. 3 is the vertical view of present invention connection bridge piece;
Fig. 4 is the side view of SiC Schottky diode chip of the present invention;
Fig. 5 is the upward view of SiC Schottky diode chip of the present invention;
Fig. 6 is the vertical view of SiC Schottky diode chip of the present invention;.
Wherein:1, heat dissipation metal bottom plate;2, boss;3, outer pin;4, SiC Schottky diode chip;5, anode region; 6、;Cathodic region 7, connection bridge piece;8, the areas connection bridge piece welding A;9, the areas connection bridge piece welding B;10, outer pin welding section;11, outer Pin exit.
Specific implementation mode
As shown in figures 1 to 6, a kind of plastic packaging SiC Schottky diode device, including heat dissipation metal bottom plate 1, outer pin 3, SiC Schottky diode chip 4, connection bridge piece 7,1 top center region of heat dissipation metal bottom plate are equipped with boss 2, and outer pin 3 includes outer Pin welding section 10, outer pin exit 11, the moon of SiC Schottky diode chip 4 including anode region 5 directed downwardly and upward Polar region 6, connection bridge piece 7 include the areas connection bridge piece welding A 8, the areas connection bridge piece welding B 9, and SiC Schottky diode chip 4 is downward Anode region 5 top of boss 2 is welded on by scolding tin material, the cathodic region 6 of SiC Schottky diode chip 4 upward passes through weldering Tin material welds the areas A 8 in succession with bridge piece is connect, and the areas connection bridge piece welding B 9 are connect with outer pin welding section 10 by scolding tin material.
Boss 2 is rectangle or square.
SiC Schottky diode chip 4 is completely covered by 2 upper surface of boss, and extends 2 surrounding edge of boss, with gold Belong to the non-land areas in 1 top surface of radiating bottom plate and forms interstice coverage.
It is rectangle or square to connect the areas bridge piece welding A 8.
A kind of manufacturing method of plastic packaging SiC Schottky diode device, includes the following steps:
Step 1:Heat dissipation metal bottom plate 1 is positioned in mold, is welded in right amount on the 2 upper table millet cake of boss of heat dissipation metal bottom plate 1 Cream;
Step 2:By 4 anode surface 5 of SiC Schottky diode chip, upside down is in 2 upper surface of boss downward, and in SiC Xiao Te 6 surface of cathodic region upward of based diode chip 4 and outer pin welding section 10 are the same as appropriate soldering paste on time point;
Step 3:The areas connection bridge piece welding A 8 and the areas connection bridge piece welding B 9 are individually positioned in SiC Schottky diode core simultaneously On the cathodic region 6 and outer pin welding section 10 of piece 4 upward;
Step 4:The product assembled is subjected to disposal vacuum sintering together with mold, condition is:Vacuum degree is less than 1 × 10 ^0MPa is heated to 330-370 DEG C, sintering time 15-16min, after the completion of to be sintered, and the nitrogen for leading to 150-250L/min carries out It is cooling, it is cooled to instruction temperature and comes out of the stove at 80 DEG C or less, cleaned, plastic packaging, complete encapsulation, form product.
The present invention in the present invention, SiC Schottky diode chip anode is inverted down and is welded on heat dissipation metal bottom On the boss of plate, chip cathodic region is connect using connection bridge piece with outer pin, and heat transfer distance reduces, and thermal resistance is small, properties of product It is promoted, greatly improves chip cooling effect, eliminate aluminum wire bonding technique, shorten technological process, improve production efficiency, pole The big through-current capability for improving device gives full play of SiC Schottky diode chip high throughflow capacity superiority.

Claims (5)

1. a kind of plastic packaging SiC Schottky diode device, it is characterised in that:Including heat dissipation metal bottom plate, outer pin, SiC Xiao Te Based diode chip, connection bridge piece, heat dissipation metal bottom plate top central area are equipped with boss, and the outer pin includes drawing outside Foot welding section, outer pin exit, the SiC Schottky diode chip include anode region directed downwardly and cathode upward Area, the connection bridge piece include the areas connection bridge piece welding A, the areas connection bridge piece welding B, SiC Schottky diode chip court Under anode region be welded on above boss by scolding tin material, the cathodic region of the SiC Schottky diode chip upward passes through Scolding tin material welds the areas A in succession with bridge piece is connect, and the connection bridge piece welding areas B are connect with outer pin welding section by scolding tin material.
2. a kind of plastic packaging SiC Schottky diode device according to claim 1, it is characterised in that:The boss is length It is rectangular or square.
3. a kind of plastic packaging SiC Schottky diode device according to claim 1, it is characterised in that:The SiC Schottky Diode chip for backlight unit is completely covered by boss upper surface, and extends boss surrounding edge, with the non-boss of heat dissipation metal plate top surface Area forms interstice coverage.
4. a kind of plastic packaging SiC Schottky diode device according to claim 1, it is characterised in that:The connection bridge piece It is rectangle or square to weld the areas A.
5. a kind of manufacturing method of plastic packaging SiC Schottky diode device according to claim 1, it is characterised in that:Packet Include following steps:
Step 1:Heat dissipation metal bottom plate is positioned in mold, the appropriate soldering paste on the boss upper table millet cake of heat dissipation metal bottom plate;
Step 2:By the face-down upside down of SiC Schottky diode chip anode in boss upper surface, and in SiC Schottky two Pole pipe chip cathodic region surface upward and outer pin welding section are the same as appropriate soldering paste on time point;
Step 3:The connection bridge piece welding areas A and the connection bridge piece welding areas B are individually positioned in SiC Schottky diode chip simultaneously On cathodic region and outer pin welding section upward;
Step 4:The product assembled is subjected to disposal vacuum sintering together with mold, condition is:Vacuum degree is less than 1 × 10 ^0MPa is heated to 330-370 DEG C, sintering time 15-16min, after the completion of to be sintered, and the nitrogen for leading to 150-250L/min carries out It is cooling, it is cooled to instruction temperature and comes out of the stove at 80 DEG C or less, cleaned, plastic packaging, complete encapsulation, form product.
CN201810467692.9A 2018-05-16 2018-05-16 A kind of plastic packaging SiC Schottky diode device and its manufacturing method Pending CN108538924A (en)

Priority Applications (1)

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Application Number Priority Date Filing Date Title
CN201810467692.9A CN108538924A (en) 2018-05-16 2018-05-16 A kind of plastic packaging SiC Schottky diode device and its manufacturing method

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114497234A (en) * 2022-01-25 2022-05-13 先之科半导体科技(东莞)有限公司 Low-loss small-volume Schottky diode

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0730015A (en) * 1993-07-14 1995-01-31 Hitachi Ltd Semiconductor module and manufacture thereof
JPH0945838A (en) * 1995-07-31 1997-02-14 Rohm Co Ltd Resin-packaged semiconductor device and manufacture thereof
US20060006506A1 (en) * 2004-07-09 2006-01-12 Kabushiki Kaisha Toshiba Semiconductor device and method of manufacturing same
WO2007005844A2 (en) * 2005-07-05 2007-01-11 International Rectifier Corporation Schottky diode with improved surge capability
JP2008085199A (en) * 2006-09-28 2008-04-10 Sanyo Electric Co Ltd Semiconductor device
CN101359661A (en) * 2007-07-31 2009-02-04 万国半导体股份有限公司 Multi-die dc-dc boost power converter with efficient packaging
CN102437177A (en) * 2011-12-01 2012-05-02 重庆平伟实业股份有限公司 Novel Schottky flip-chip and manufacturing process thereof
US20160172558A1 (en) * 2014-12-11 2016-06-16 Luminus, Inc. Led flip chip structures with extended contact pads formed by sintering silver
CN208271910U (en) * 2018-05-16 2018-12-21 捷捷半导体有限公司 A kind of plastic packaging SiC Schottky diode device

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0730015A (en) * 1993-07-14 1995-01-31 Hitachi Ltd Semiconductor module and manufacture thereof
JPH0945838A (en) * 1995-07-31 1997-02-14 Rohm Co Ltd Resin-packaged semiconductor device and manufacture thereof
US20060006506A1 (en) * 2004-07-09 2006-01-12 Kabushiki Kaisha Toshiba Semiconductor device and method of manufacturing same
WO2007005844A2 (en) * 2005-07-05 2007-01-11 International Rectifier Corporation Schottky diode with improved surge capability
JP2008085199A (en) * 2006-09-28 2008-04-10 Sanyo Electric Co Ltd Semiconductor device
CN101359661A (en) * 2007-07-31 2009-02-04 万国半导体股份有限公司 Multi-die dc-dc boost power converter with efficient packaging
CN102437177A (en) * 2011-12-01 2012-05-02 重庆平伟实业股份有限公司 Novel Schottky flip-chip and manufacturing process thereof
US20160172558A1 (en) * 2014-12-11 2016-06-16 Luminus, Inc. Led flip chip structures with extended contact pads formed by sintering silver
CN208271910U (en) * 2018-05-16 2018-12-21 捷捷半导体有限公司 A kind of plastic packaging SiC Schottky diode device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114497234A (en) * 2022-01-25 2022-05-13 先之科半导体科技(东莞)有限公司 Low-loss small-volume Schottky diode
CN114497234B (en) * 2022-01-25 2022-12-06 先之科半导体科技(东莞)有限公司 Low-loss small-volume Schottky diode

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