CN108521778B - 基板受力状况的判断方法及运输*** - Google Patents
基板受力状况的判断方法及运输*** Download PDFInfo
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- CN108521778B CN108521778B CN201780004624.2A CN201780004624A CN108521778B CN 108521778 B CN108521778 B CN 108521778B CN 201780004624 A CN201780004624 A CN 201780004624A CN 108521778 B CN108521778 B CN 108521778B
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- 239000000758 substrate Substances 0.000 title claims abstract description 158
- 238000000034 method Methods 0.000 title claims abstract description 44
- 238000001514 detection method Methods 0.000 claims abstract description 90
- 238000012545 processing Methods 0.000 claims description 46
- 230000005540 biological transmission Effects 0.000 claims description 16
- 230000032258 transport Effects 0.000 description 20
- 230000008569 process Effects 0.000 description 10
- 230000006870 function Effects 0.000 description 6
- 230000002159 abnormal effect Effects 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000007689 inspection Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
Abstract
Description
Claims (12)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/CN2017/084767 WO2018209613A1 (zh) | 2017-05-17 | 2017-05-17 | 基板受力状况的判断方法及运输*** |
Publications (2)
Publication Number | Publication Date |
---|---|
CN108521778A CN108521778A (zh) | 2018-09-11 |
CN108521778B true CN108521778B (zh) | 2020-10-02 |
Family
ID=63433119
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201780004624.2A Expired - Fee Related CN108521778B (zh) | 2017-05-17 | 2017-05-17 | 基板受力状况的判断方法及运输*** |
Country Status (2)
Country | Link |
---|---|
CN (1) | CN108521778B (zh) |
WO (1) | WO2018209613A1 (zh) |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1135153A (ja) * | 1997-07-22 | 1999-02-09 | Dainippon Screen Mfg Co Ltd | 基板収納カセットからの基板取出し装置 |
JP5128148B2 (ja) * | 2007-03-02 | 2013-01-23 | 株式会社オーク製作所 | 搬送装置 |
CN101858873B (zh) * | 2009-04-08 | 2013-01-02 | 日商鹰野株式会社 | 外观检查*** |
JP5534719B2 (ja) * | 2009-06-08 | 2014-07-02 | リンテック株式会社 | 位置認識装置及び位置認識方法 |
JP2013084677A (ja) * | 2011-10-06 | 2013-05-09 | Toshiba Corp | 異物検査装置および半導体製造装置 |
KR101481992B1 (ko) * | 2012-12-05 | 2015-01-14 | 한국미쯔보시다이아몬드공업(주) | 기판 이송 장치 |
CN203465489U (zh) * | 2013-08-21 | 2014-03-05 | 合肥京东方光电科技有限公司 | 一种基板的承载机构 |
EP3190069B1 (en) * | 2014-09-04 | 2020-02-19 | FUJI Corporation | Substrate conveyance device and method for inspecting conveyor belt |
CN104238202B (zh) * | 2014-09-30 | 2017-05-24 | 合肥京东方光电科技有限公司 | 一种用于涂布封框胶的涂布装置、涂布***及涂布方法 |
CN104609137B (zh) * | 2015-01-04 | 2017-03-08 | 京东方科技集团股份有限公司 | 玻璃基板传送装置 |
CN104849882A (zh) * | 2015-05-05 | 2015-08-19 | 深圳市华星光电技术有限公司 | 一种用于液晶显示面板的检测装置 |
CN104979256B (zh) * | 2015-07-31 | 2017-12-26 | 京东方科技集团股份有限公司 | 一种基板传送装置 |
CN205248294U (zh) * | 2015-12-31 | 2016-05-18 | 常州亿晶光电科技有限公司 | 压力型太阳能电池板碎裂检测机构 |
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2017
- 2017-05-17 WO PCT/CN2017/084767 patent/WO2018209613A1/zh active Application Filing
- 2017-05-17 CN CN201780004624.2A patent/CN108521778B/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
WO2018209613A1 (zh) | 2018-11-22 |
CN108521778A (zh) | 2018-09-11 |
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Address after: Building 43, Dayun software Town, No. 8288, Longgang Avenue, Henggang street, Longgang District, Shenzhen City, Guangdong Province Patentee after: Shenzhen Ruoyu Technology Co.,Ltd. Address before: Building 43, Dayun software Town, No. 8288, Longgang Avenue, Henggang street, Longgang District, Shenzhen City, Guangdong Province Patentee before: SHENZHEN ROYOLE TECHNOLOGIES Co.,Ltd. |
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TR01 | Transfer of patent right |
Effective date of registration: 20210816 Address after: 518100 Rouyu international flexible display base, No. 18 dingshanhe Road, Pingdi street, Longgang District, Shenzhen, Guangdong Province Patentee after: SHENZHEN ROYOLE DISPLAY TECHNOLOGY Co.,Ltd. Address before: Building 43, Dayun software Town, No. 8288, Longgang Avenue, Henggang street, Longgang District, Shenzhen City, Guangdong Province Patentee before: Shenzhen Ruoyu Technology Co.,Ltd. |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20201002 |
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