CN108508345A - Electronic component transmission device and electronic component check device - Google Patents

Electronic component transmission device and electronic component check device Download PDF

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Publication number
CN108508345A
CN108508345A CN201810156886.7A CN201810156886A CN108508345A CN 108508345 A CN108508345 A CN 108508345A CN 201810156886 A CN201810156886 A CN 201810156886A CN 108508345 A CN108508345 A CN 108508345A
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CN
China
Prior art keywords
electronic component
information
setting
setting screen
list
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201810156886.7A
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Chinese (zh)
Inventor
山崎孝
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
North Star Technology Co.,Ltd.
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of CN108508345A publication Critical patent/CN108508345A/en
Pending legal-status Critical Current

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2893Handling, conveying or loading, e.g. belts, boats, vacuum fingers

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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • User Interface Of Digital Computer (AREA)
  • Supply And Installment Of Electrical Components (AREA)

Abstract

The present invention relates to setting the electronic component transmission device and electronic component check device that the setting can be easily and securely carried out when the action of transport unit.Electronic component transmission device is it is characterized in that, have:Transmit the transport unit of electronic component;And display unit, its available setting pattern successively that the second setting screen is shown after showing the first setting screen, above-mentioned first setting screen can receive the first information for transmitting above-mentioned electronic component by above-mentioned transport unit, and above-mentioned second setting screen can be received for transmitting the second information above-mentioned electronic component, different from the above-mentioned first information by above-mentioned transport unit.

Description

Electronic component transmission device and electronic component check device
Technical field
The present invention relates to electronic component transmission device and electronic component check devices.
Background technology
Conventionally, there is known the electronic component check device of the electrical characteristic of electronic component such as checking IC devices, IC processors, the i.e. electronic component transmission device for transmitting IC devices is assembled in the electronic component check device (for example, referring to patent document 1).
In electronic component transmission device recorded in patent document 1, in the operation screen for being shown in panel display It is upper to carry out that the inputting of various data, various actions instruction inputs.In addition, when operating operation screen, it can be as needed in face Help screen is shown on plate display.Help screen includes the detailed letter explained about the content of the project contained by operation screen Breath.
Patent document 1:Japanese Unexamined Patent Publication 11-38084 bulletins
However, in electronic component check device recorded in patent document 1, it is not yet done even if showing help screen Operator, the i.e. novice operator for knowing operation screen can not be inputted with accurately sequence to the project contained by operation screen sometimes Various data etc..
Invention content
Such purpose is reached by following present invention.
The present invention is at least part in order to solve the above-mentioned technical problem and completes, and can be used as following and realizes.
The electronic component transmission device of the present invention is characterized in that having:Transport unit transmits electronic component;And Display unit can select to show setting successively for the second setting screen after showing the first setting screen by the display unit Mould-fixed, first setting screen can receive the first letter for transmitting the electronic component by the transport unit Breath, second setting screen can receive for by the transport unit transmit the electronic component, with described first The second different information of information.
As a result, in the case where setting transport unit the action of transmission electronic component, it can select to set pattern successively. In this successively setting pattern, the first setting screen of the action setting of transport unit is shown successively with the second setting screen Show.Such as in the case where operator is beginner, which can be according to the first setting picture for being shown in display unit successively Face, the second setting screen confirm the first setting screen, the second setting screen to confirm or input the first information, second one by one Information.The action setting in portion is transmitted with accurate sequence exhaustive as a result,.
In the electronic component transmission device of the present invention, it is preferred that be provided with the load for loading the electronic component Portion is set, and has the image pickup part for the image that can shoot the mounting portion.
The image of mounting portion thereby, it is possible to the transmission prior to electronic component is shot with image pickup part.Based on the shooting figure Picture can make transport unit be shifted exactly to target location (such as electronic component as transmission object).Then, in the shifting Dynamic purpose is located in, and transport unit can accurately hold electronic component from mounting portion.Alternatively, in contrast, transport unit can Accurately electronic component is discharged into mounting portion.
In the electronic component transmission device of the present invention, it is preferred that the image pickup part is installed on the transport unit.
The image of mounting portion thereby, it is possible to the transmission prior to electronic component is shot with image pickup part.Based on the shooting figure Picture can make transport unit be shifted exactly to target location (such as electronic component as transmission object).Then, in the shifting Dynamic purpose is located in, and transport unit can accurately hold electronic component from mounting portion.Alternatively, in contrast, transport unit can Accurately electronic component is discharged into mounting portion.
In the electronic component transmission device of the present invention, it is preferred that in the first information and second information At least one party is the information for transmitting the electronic component by the transport unit for the image based on the mounting portion.
Thereby, it is possible to swimmingly carry out the transmission of the electronic component of the image based on mounting portion.
In the electronic component transmission device of the present invention, it is preferred that the mounting portion, which has, stores the electronics member Device and multiple recess portions with rectangular configuration, at least one party is in following information in the first information and second information Any information:For specifying in the electronics member device that the transport unit holds the electronic component or release is held The information of the recess portion of benchmark when part as overlook observation;The electronics member device is held for being shown in the transport unit The information when electronic component that part or release are held as the shooting image of the recess portion of benchmark;For referring to As relative to load when being scheduled on the electronic component that the transport unit holds the electronic component or release is held Set the information of the recess portion of the benchmark of the height in portion;And for specify the transport unit hold the electronic component, Or release held the electronic component when as height benchmark the mounting portion face information.
Such first information, the second information distance between the adjacent mutual center of recess portion (ピ ッ チ) are smaller then to get over energy The quickly and accurately information needed for the holding, release of progress electronic component.Thereby, it is possible to quickly and accurately carry out electronics Holding, the release of component.
In the electronic component transmission device of the present invention, it is preferred that the first information is for specifying described Benchmark when the electronic component that transport unit holds the electronic component or release is held as overlook observation The information of the recess portion, second information are to hold the electronic component or release for being shown in the transport unit The information when electronic component held as the shooting image of the recess portion of benchmark.
If not specified recess portion, it is difficult to obtain the shooting image of recess portion, therefore the sequence of such information is effective.
In the electronic component transmission device of the present invention, it is preferred that the first information is described for being shown in As the recess portion of benchmark when the electronic component that transport unit holds the electronic component or release is held The information of image is shot, second information is to hold the electronic component or release in the transport unit for specifying The information when electronic component held as the face of the mounting portion of the benchmark of height.
If not obtaining the shooting image of recess portion, it is difficult to grasp around the recess portion of mounting portion, i.e. the upper surface of mounting portion Where be present in, therefore the sequence of such information is effective.
In the electronic component transmission device of the present invention, it is preferred that the first information is for specifying described As the height relative to mounting portion when the electronic component that transport unit holds the electronic component or release is held The information of the recess portion of the benchmark of degree, second information are to hold the electronics member device in the transport unit for specifying The information when electronic component that part or release are held as the face of the mounting portion of the benchmark of height.
If the recess portion of the not specified benchmark as height, it is difficult to grasp its specified recess portion and the load as altitude datum The position relationship of the appointed part of the upper surface in portion is set, therefore the sequence of such information is effective.
In the electronic component transmission device of the present invention, it is preferred that first setting screen includes to make described the The second setting screen display operation unit that two setting screens are shown.
As a result, before operating the second setting screen display operation unit, the first setting screen is still shown on display unit, by This, such as can substantially ensure and fully confirm, input the time of the first information.
In the electronic component transmission device of the present invention, it is preferred that first setting screen includes at least one Check box can carry out the second setting screen display operation unit in the case where whole check boxes is selected Operation.
Thereby, it is possible to prevent the leakage to check box from selecting.
In the electronic component transmission device of the present invention, it is preferred that the pattern of setting successively includes third setting Picture.
It is with the work(different from the first setting screen, the second setting screen that third setting screen can for example be made as a result, The image of energy.
In the electronic component transmission device of the present invention, it is preferred that show omission described the on the display unit The display of one setting screen or second setting screen and the third setting screen that makes the third setting screen show are shown Operation portion.
Thereby, it is possible to omit the confirmation of the first information, the second information, input.
In the electronic component transmission device of the present invention, it is preferred that can be selected as first setting screen The setting pattern together of arrangement display is carried out with second setting screen.
As a result, for example in the case where operator is skilled person, consider that selection is set together compared to pattern is set successively Mould-fixed more can promptly be transmitted the action setting in portion.
In the electronic component transmission device of the present invention, it is preferred that display can select institute on the display unit State the mode selecting operation portion of setting pattern and either mode in the pattern of setting together successively.
The operator of electronic component transmission device can be according to the skilled journey of operation electronic component check device as a result, Degree selection sets pattern and either mode in setting pattern together successively.For example, in the case where operator is skilled person, energy Enough selections set pattern together, on the contrary, in the case where operator is beginner, setting pattern is preferred successively for selection.
In the electronic component transmission device of the present invention, it is preferred that the pattern of setting successively includes can be from institute The midway for stating setting pattern successively is transferred to the mode shifts operation portion of setting together for setting pattern together.
Thereby, it is possible to stop setting pattern successively in midway, and re-start under setting pattern together the first information, the The input etc. of two information etc..
In the electronic component transmission device of the present invention, it is preferred that the pattern of setting together includes can be from institute It states and sets mode shifts together to the mode shifts operation portion of setting successively for setting pattern successively.
Thereby, it is possible to stop setting pattern together, and the first information, the second information are re-started under setting pattern successively Deng input etc..
In the electronic component transmission device of the present invention, it is preferred that can be connected to and check the electronic component Inspection portion, and have:Supply area, from the supply area, transmission is supplied to the inspection to the electronic component before inspection Look into portion;And recovery zone, the electronic component after inspection are transmitted to the recovery zone from the inspection portion and are returned It receives, the pattern of setting successively is set for the supply area and the recovery zone.
Thereby, it is possible to the various conditions in supply area needed for the action of transport unit are carried out with accurate sequence exhaustive Setting.Equally, the various conditions in recovery zone needed for the action of transport unit can be carried out with accurate sequence exhaustive Setting.
The electronic component check device of the present invention is characterized in that having:Transport unit transmits electronic component;Display Portion can select the setting mould successively that the second setting screen is shown after showing the first setting screen by the display unit Formula;And inspection portion, check that the electronic component, first setting screen can be received for being passed by the transport unit Send the first information of the electronic component, second setting screen that can receive for by described in transport unit transmission The second electronic component, different from first information information.
As a result, in the case where setting transport unit the action of transmission electronic component, it can select to set pattern successively. In this successively setting pattern, the first setting screen of the action setting of transport unit is shown successively with the second setting screen Show.Such as in the case where operator is beginner, which can be according to the first setting picture for being shown in display unit successively Face, the second setting screen confirm the first setting screen, the second setting screen to confirm or input the first information, second one by one Information.The action setting in portion is transmitted with accurate sequence exhaustive as a result,.
In addition, electronic component can be sent to inspection portion, thereby, it is possible to be carried out to the electronic component in inspection portion Inspection.In addition, the electronic component after checking can be transmitted from inspection portion.
Description of the drawings
Fig. 1 is the diagrammatic perspective of the first embodiment of the electronic component check device of the present invention from face side Figure.
Fig. 2 is the general view for the action state for indicating electronic component check device shown in FIG. 1.
Fig. 3 is displayed at the list (example) of the monitor of electronic component check device shown in FIG. 1.
Fig. 4 is displayed at the list (example) of the monitor of electronic component check device shown in FIG. 1.
Fig. 5 is displayed at the list (example) of the monitor of electronic component check device shown in FIG. 1.
Fig. 6 is displayed at the list (example) of the monitor of electronic component check device shown in FIG. 1.
Fig. 7 is displayed at the list (example) of the monitor of electronic component check device shown in FIG. 1.
Fig. 8 is displayed at the list (example) of the monitor of electronic component check device shown in FIG. 1.
Fig. 9 is displayed at the list (example) of the monitor of electronic component check device shown in FIG. 1.
Figure 10 is displayed at the list (example) of the monitor of electronic component check device shown in FIG. 1.
Figure 11 is displayed at the list (example) of the monitor of electronic component check device shown in FIG. 1.
Figure 12 is displayed at the list (example) of the monitor of electronic component check device shown in FIG. 1.
Figure 13 is displayed at the list (example) of the monitor of electronic component check device shown in FIG. 1.
Figure 14 is displayed at the list (example) of the monitor of electronic component check device shown in FIG. 1.
Figure 15 is displayed at the list (example) of the monitor of electronic component check device shown in FIG. 1.
Figure 16 is displayed at the list (example) of the monitor of electronic component check device shown in FIG. 1.
Figure 17 is displayed at the list (example) of the monitor of electronic component check device shown in FIG. 1.
Figure 18 is displayed at the list (example) of the monitor of electronic component check device shown in FIG. 1.
Figure 19 is displayed at the list (example) of the monitor of electronic component check device shown in FIG. 1.
Figure 20 is displayed at the list (example) of the monitor of electronic component check device shown in FIG. 1.
Figure 21 is displayed at the list (example) of the monitor of electronic component check device shown in FIG. 1.
Figure 22 is displayed at the list (example) of the monitor of electronic component check device shown in FIG. 1.
Figure 23 is displayed at the list (example) of the monitor of electronic component check device shown in FIG. 1.
Figure 24 is displayed at the list (example) of the monitor of electronic component check device shown in FIG. 1.
Reference sign
1 ... electronic component check device, 10 ... electronic component transmission devices, 11A ... tray delivery mechanisms, 11B ... Tray delivery mechanism, 12 ... temperature adjustment sections, 13 ... device transfer heads, 131 ... image pickup parts, 14 ... device supply units, 14A ... devices Part supply unit, 14B ... device supply units, 15 ... tray delivery mechanisms, 16 ... inspection portions, 17 ... device transfer heads, 17A ... devices Transfer head, 17B ... device transfer heads, 18 ... device recoverers, 18A ... device recoverers, 18B ... device recoverers, 19 ... return Receipts pallet, 20 ... device transfer heads, 201 ... image pickup parts, 21 ... tray delivery mechanisms, 22A ... tray delivery mechanisms, 22B ... Tray delivery mechanism, 231 ... first spaced walls, 232 ... second spaced walls, 233 ... third spaced walls, 234 ... the 4th spaced walls, 235 ... the 5th spaced walls, 241 ... protecgulums, 242 ... side covers, 243 ... side covers, 244 ... rear covers, 245 ... head covers, 25 ... transport units, 27 ... rotary tables, 28 ... rotary tables, 90 ... IC devices, 200 ... pallets, 300 ... monitors, 301 ... display pictures, 400 ... signal lamps, 500 ... loud speakers, 600 ... Mouse tables, 700 ... operation panels, 800 ... control units, A1 ... pallets drainage area Domain, A2 ... devices supply area, the inspection areas A3 ..., A4 ... devices recovery zone, A5 ... pallets remove region, and BT100 ... is pressed Button group, BT101 ... buttons, BT102 ... buttons, BT103 ... buttons, BT104 ... buttons, BT105 ... buttons, BT106 ... buttons, BT107 ... button BT201 ... buttons, BT202 ... buttons, BT203 ... buttons, BT204 ... buttons, BT205 ... buttons, BT206 ... buttons, BT207 ... buttons, BT208 ... buttons, BT209 ... buttons, BT210 ... buttons, BT211 ... buttons, BT212 ... buttons, BT213 ... buttons, BT214 ... buttons, BT215 ... buttons, BT216 ... buttons, BT301 ... buttons, BT302 ... buttons, BT303 ... buttons, BT421 ... buttons, BT422 ... buttons, BT521 ... buttons, BT522 ... buttons, BT621 ... buttons, BT622 ... buttons, BT623 ... buttons, BT811 ... buttons, BT812 ... buttons, BT813 ... buttons, BT814 ... buttons, BT815 ... buttons, BT816 ... buttons, BT817 ... buttons, BT921 ... buttons, BT922 ... buttons, BT1021 ... buttons, BT1022 ... buttons, BT1121 ... buttons, BT1122 ... buttons, BT1123 ... buttons, BT1211 ... are pressed Button, BT1212 ... buttons, BT1213 ... buttons, BT1214 ... buttons, BT1215 ... buttons, BT1216 ... buttons, BT1217 ... Button, BT1321 ... buttons, BT1322 ... buttons, BT1421 ... buttons, BT1422 ... buttons, BT1521 ... buttons, BT1522 ... buttons, BT1523 ... buttons, BT1621 ... buttons, BT1622 ... buttons, BT1623 ... buttons, BT1711 ... are pressed Button, BT1712 ... buttons, BT1713 ... buttons, BT1714 ... buttons, BT1811 ... buttons, BT1812 ... buttons, BT1911 ... Button, BT1912 ... buttons, BT2011 ... buttons, BT2121 ... buttons, BT2122 ... buttons, BT2123 ... buttons, BT2124 ... buttons, CB511 ... check boxes, CB512 ... check boxes, CB513 ... check boxes, CB514 ... check boxes, CB515 ... Check box, CB516 ... check boxes, CB611 ... check boxes, CB612 ... check boxes, CB613 ... check boxes, CB2101 ... final elections Frame, EX311 ... illustrate that EX312 ... illustrates, EX401 ... illustrates, EX501 ... illustrates, EX601 ... illustrates, EX602 ... illustrates, EX603 ... illustrates that EX604 ... illustrates, EX701 ... illustrates, EX901 ... illustrates, EX1001 ... illustrates, EX1101 ... illustrates, EX1301 ... illustrates that EX1501 ... illustrates, EX1601 ... illustrates, EX1701 ... illustrates, EX1702 ... illustrates, EX1703 ... is said Bright, EX1801 ... illustrates, EX1802 ... illustrates, EX1901 ... illustrates, EX2001 ... illustrates, EX2105 ... illustrates, FM1 ... tables It is single, FM2 ... lists, FM3 ... lists, FM4 ... lists, FM5 ... lists, FM6 ... lists, FM7 ... lists, FM8 ... lists, FM9 ... lists, FM10 ... lists, FM11 ... lists, FM12 ... lists, FM13 ... lists, FM14 ... lists, FM15 ... lists, FM16 ... lists, FM17 ... lists, FM18 ... lists, FM19 ... lists, FM20 ... lists, FM21 ... lists, IM911 ... are practical Image, IM912 ... pocket, IM913 ... cursors, IM1011 ... model images, IM1311 ... real images, IM1313 ... light Mark, IM1931 ... imaged images, IT110 ... first item groups, IT111 ... projects, IT112 ... projects, IT113 ... projects, IT114 ... projects, IT115 ... projects, IT116 ... projects, IT117 ... projects, IT118 ... projects, IT119 ... projects, IT120 ... second item groups, IT121 ... projects, IT122 ... projects, IT123 ... projects, IT124 ... projects, IT125 ... items Mesh, IT126 ... projects, IT130 ... third item groups, IT131 ... projects, IT132 ... projects, IT133 ... projects, IT134 ... Project, IT140 ... fourth item groups, IT141 ... projects, IT142 ... projects, IT143 ... projects, IT144 ... projects, IT150 ... fifth item groups, IT151 ... projects, IT411 ... projects, IT412 ... projects, IT413 ... projects, IT414 ... items Mesh, IT415 ... projects, IT931 ... projects, IT932 ... projects, IT1331 ... projects, IT1821 ... projects, IT1822 ... items Mesh, IT1921 ... projects, IT1922 ... projects, IT1923 ... projects, IT1924 ... projects, IT2111 ... projects, IT2112 ... Project, IT2113 ... projects, IT2114 ... projects, IT2115 ... projects, MD801 ... illustratons of model, MD1201 ... illustratons of model, TB2102 ... labels, TB2103 ... labels, TB2104 ... labels, α11A... arrow, α11B... arrow, α13X... arrow, α13Y... arrow Head, α14... arrow, α15... arrow, α17Y... arrow, α18... arrow, α20X... arrow, α20Y... arrow, α21... arrow, α22A... arrow Head, α22B... arrow, α27... arrow, α28... arrow, α90... arrow
Specific implementation mode
Hereinafter, preferred embodiment based on ... shown in the drawings, explains the electronic component transmission device of the present invention in detail And electronic component check device.
In the following, referring to Fig.1~Figure 24, to the electronic component transmission device and electronic component check device of the present invention First embodiment illustrate.It should be noted that in the following, for convenience of description, as shown in Figure 1, by mutually orthogonal Three axis are set as X-axis, Y-axis and Z axis.In addition, the X/Y plane including X-axis and Y-axis is level, Z axis is vertical.In addition, will be with X-axis Parallel direction is also referred to as " X-direction (first direction) ", and the direction parallel with Y-axis is also referred to as " Y-direction (second direction) ", will The direction parallel with Z axis is also referred to as " Z-direction (third direction) ".In addition, by the arrow of all directions towards direction be known as " just ", By its opposite direction referred to as " negative ".In addition, the "horizontal" described in present specification is not limited to complete level, as long as It is the transmission for not hindering electronic component, also includes relative to horizontal how much (being, for example, less than 5 ° or so) inclined states.
The electronic component transmission device 10 of the present invention has appearance shown in FIG. 1, and is configuration (structure shown in Fig. 2 At).The electronic component transmission device 10 is processor, has the 13 (transport unit of device transfer head of transmission electronic component 25) and it can select to show the monitor for setting pattern successively of the second setting screen after showing the first setting screen 300 (display units).Moreover, the first setting screen for being shown in monitor 300 can be received for (being passed by device transfer head 13 Send portion 25) transmission electronic component the first information, the second setting screen can receive for by transport unit 25 transmit electronics The second component, different from first information information.
As a result, as described later, it for being equipped with the device transfer head 13 (transport unit 25) of image pickup part 131, can set It selects to set pattern successively in the case of the action of side transmission electronic component while deckle is shot with image pickup part 131. In this successively setting pattern, the first setting screen and the second setting screen of the action setting of device transfer head 13 are suitable by this Sequence is shown.Such as in the case where operator is beginner, which can be according to being shown in monitor 300 successively First setting screen, the second setting screen confirm the first setting screen, the second setting screen one by one, to confirm or input One information, the second information.The action setting of device transfer head 13 is carried out with accurate sequence exhaustive as a result,.
In addition, as shown in Fig. 2, the present invention electronic component check device 1 have electronic component transmission device 10, into And also there is the inspection portion 16 for checking electronic component.That is, the electronic component check device 1 of the present invention has:Device transmits First 13 (transport units 25) transmit electronic component;Monitor 300 (display unit) can select showing the first setting screen The setting pattern successively of the second setting screen is shown later;And inspection portion 16, check electronic component.Moreover, being shown in First setting screen of monitor 300 can be received for transmitting electronic component by device transfer head 13 (transport unit 25) The first information, the second setting screen can receive for by device transfer head 13 (transport unit 25) transmit electronic component, Second information different from the first information.
It can get the electronic component check device 1 with electronic component transmission device 10 above-mentioned as a result,. In addition, electronic component can be sent to inspection portion 16, thereby, it is possible to be carried out for the electronic component by inspection portion 16 It checks.In addition, the electronic component after checking can be transmitted from inspection portion 16.
Hereinafter, explaining the composition in each portion in detail.
As shown in Figure 1 and Figure 2, the electronic component check device 1 of built-in electronic component transmission device 10 is to transmit for example As BGA (Ball Grid Array:Ball grid array) encapsulation the electronic components such as IC devices and examined in its transmit process Look into, test the device of the electrical characteristic of (in the following, referred to as " checking " merely) electronic component.It should be noted that in the following, in order to Convenient for explanation, typically to illustrating IC devices as the case where electronic component above-mentioned, as " IC devices 90”.IC devices 90 are tabular in the present embodiment.
In addition, as IC devices, in addition to the foregoing, such as " LSI (Large Scale can be also enumerated Integration:Large scale integrated circuit) ", " CMOS (Complementary MOS:Complementary metal oxide semiconductor) ", “CCD(Charge Coupled Device:Charge coupling device) ", by " module obtained by multiple IC device blocks encapsulations IC ", " quartz crystal device ", " pressure sensor ", " inertial sensor (acceleration transducer) ", " gyro sensor ", " fingerprint passes Sensor " etc..
Electronic component check device 1 (electronic component transmission device 10) has pallet supply area A1, device supply Region A2 (supply area), inspection area A3, device recovery zone A4 (recovery zone) and pallet remove region A5, such as rear institute It states, these regions are divided by each wall portion.Also, IC devices 90 remove region A5 from pallet supply area A1 to pallet Along arrow α90Each region above-mentioned is passed through in direction successively, and the inspection area A3 in midway is checked.In this way, electronic component The inspection portion 16 and control unit that check device 1 has electronic component transmission device 10, is checked in the A3 of inspection area 800, wherein electronic component transmission device 10 has transmission IC devices 90 (electronic component), makes it via the biography in each region Send portion 25.In addition to this, electronic component check device 1 is also equipped with monitor 300, signal lamp 400 and operation panel 700.
It should be noted that electronic component check device 1 will be configured with pallet supply area A1, pallet removes region A5 A side, i.e. downside in Fig. 2 as face side, using configured with the upside in a side of inspection area A3, i.e. Fig. 2 as the back side Side is used.
It is replaced corresponding to the various types of of IC devices 90 in addition, electronic component check device 1 is pre-loaded with (setting) , external member that be referred to as " test loaded tool (Change Kit (being also expressed as sometimes " C/K ")) " used.The test loaded tool Mounting component (mounting portion) with mounting IC devices 90 (electronic component), which, which has, is configured at device drainage area The first mounting component of domain A2 and the second mounting component for being configured at device recovery zone A4.As the first mounting component, such as With aftermentioned temperature adjustment section 12, device supply unit 14 and rotary table 27.As the second mounting component, such as with after The device recoverer 18 and rotary table 28 stated.In addition, in the mounting component loaded for IC devices 90, in addition to as described above Test loaded tool, the pallet 200 also prepared by user, in addition to this also have inspection portion 16 at recycling pallet 19.It is configured at device The pallet 200 of supply area A2 can be referred to as the first mounting component, be configured at pallet 200 and the recycling of device recovery zone A4 It can be referred to as the second mounting component with pallet 19.
The component that pallet supply area A1 is supplied with the pallet 200 for the multiple IC devices 90 for being arranged with non-inspection state supplies To portion.Pallet supply area A1 can also be referred to as the loading area that can be laminated and load multiple pallets 200.It should be noted that In present embodiment, multiple recess portions (pouch-shaped portion) are configured with rectangular in each pallet 200.It can be stored one by one in each recess portion IC devices 90.
Device supply area A2 is each IC devices before the inspection that will be transmitted from pallet supply area A1 on the pallet 200 come 90 (electronic components) transmission is supplied to the region in (the inspection portion 16) inspection area A3.It should be noted that be supplied across pallet The mode of region A1 and device supply area A2 are provided with the tray delivery mechanism for transmitting pallet 200 in the horizontal direction one by one 11A、11B.Tray delivery mechanism 11A is a part for transport unit 25, can be together with the IC devices 90 1 for being placed in the pallet 200 Rising makes arrow α of the pallet 200 into the positive side of Y-direction, i.e. Fig. 211AIt moves in direction.Thus, it is possible to which steadily IC devices 90 are sent Enter device supply area A2.In addition, tray delivery mechanism 11B is that empty pallet 200 can be made into the negative side of Y-direction, i.e. Fig. 2 Arrow α11BThe moving portion of direction movement.It is supplied thus, it is possible to which empty pallet 200 is made to be moved to pallet from device supply area A2 Give region A1.
Temperature adjustment section (ソ ー Network プ レ ー ト are provided in the A2 of device supply area, and (English is stated:Soak plate, the Chinese Language states (an example):Temperature-uniforming plate)) 12, device transfer head 13, tray delivery mechanism 15 and rotary table 27.In addition, also setting There is the device supply unit 14 moved in a manner of across device supply area A2 and inspection area A3.
Temperature adjustment section 12 is to load the mounting component of multiple IC devices 90, and being referred to as can be to the IC device 90 of the mounting " temperature-uniforming plate " being heated or cooled together.By the temperature-uniforming plate, the IC before can checking in advance inspection portion 16 Device 90 is heated or cooled, and is adjusted to the temperature suitable for the inspection (high temperature inspection or low temperature inspection).Structure shown in Fig. 2 Cheng Zhong, temperature adjustment section 12 configure, in the Y direction there are two fixations.In addition, being supplied from pallet by tray delivery mechanism 11A The IC devices 90 on pallet 200 that region A1 is sent into are transferred into any one temperature adjustment section 12.It should be noted that by solid The temperature adjustment section 12 as mounting component is determined, so as to steadily be carried out to the IC devices 90 in the temperature adjustment section 12 Temperature adjusts.In addition, temperature adjustment section 12 is grounded (ground).
Device transfer head 13 is to hold the handle part of IC devices 90, and being supported to can be in the A2 of device supply area along X Direction and Y-direction movement, and then be also supported to also move in z-direction.The device transfer head 13 is also transport unit 25 part, the IC devices 90 that can be responsible between the pallet 200 being sent into from pallet supply area A1 and temperature adjustment section 12 Transmission and temperature adjustment section 12 and aftermentioned device supply unit 14 between IC devices 90 transmission.It should be noted that In fig. 2, pass through arrow α13XMovement of the device transfer head 13 in X-direction is shown, arrow α is passed through13YDevice transfer head 13 is shown Movement in the Y direction.
Device supply unit 14 is the mounting component for the IC devices 90 that mounting has carried out temperature adjustment by temperature adjustment section 12, It can be referred to as the IC devices 90 being sent to " the supply shuttle plate " near inspection portion 16 or be referred to simply as " supply shuttle Part ".The device supply unit 14 can also be used as a part for transport unit 25.
In addition, as the device supply unit 14 of mounting component, be supported to can be in device supply area A2 and inspection area Between A3 in X direction, i.e. arrow α14Direction moves back and forth.Device supply unit 14 can be steadily by IC devices 90 from device as a result, Part supply area A2 is sent near the inspection portion 16 of inspection area A3, in addition, IC devices 90 are by device in the A3 of inspection area After transfer head 17 is taken away, device supply unit 14 can again return to device supply area A2.
In composition shown in Fig. 2, along Y-direction configuration, there are two device supply units 14, sometimes by the device of Y-direction negative side Supply unit 14 is referred to as " device supply unit 14A ", and the device supply unit 14 of Y-direction positive side is referred to as " device supply unit 14B ".And And device supply unit 14A is transferred into the A2 of device supply area for the IC devices 90 in temperature adjustment section 12 or device supplies Give portion 14B.In addition, be similarly configured to can be to being placed in the device supply unit 14 for device supply unit 14 and temperature adjustment section 12 IC devices 90 be heated or cooled.It, can accordingly, for the IC devices 90 for having carried out temperature adjustment by temperature adjustment section 12 To maintain its temperature to be sent near the inspection portion 16 of inspection area A3 with adjusting state.It should be noted that device supply unit 14 are also grounded in the same manner as temperature adjustment section 12.
Rotary table 27 is configured between device supply unit 14A and device supply unit 14B.Rotary table 27 is propped up It holds as being capable of around the Z-axis direction arrow α27Direction rotates.Moreover, when IC devices 90 are placed in device supply unit 14, wanting to become More (change) posture, the i.e. direction of IC devices 90 about the z axis of IC devices 90 come in the case of being loaded, it can be by IC devices 90 Temporarily it is placed in rotary table 27.By rotating rotary table 27 under the carrying state, IC devices 90 can be changed Posture.The IC devices 90 for changing posture are sent to device supply unit 14 with keeping the posture by device transfer head 13.
Tray delivery mechanism 15 is that the empty pallet 200 in the state of eliminating all IC devices 90 is supplied in device To the positive side of X-direction, i.e. arrow α in the A2 of region15The mechanism of direction transmission.Also, after the transmission, pass through pallet conveyer Structure 11B makes empty pallet 200 return to pallet supply area A1 from device supply area A2.
Inspection area A3 is the region for checking IC devices 90.It is equipped in the A3 of the inspection area and IC devices 90 is checked Inspection portion 16 and device transfer head 17.
Device transfer head 17 is a part for transport unit 25, can hold the IC devices for maintaining temperature adjustment state above-mentioned 90 and the IC devices 90 are transmitted in the A3 of inspection area.The device transfer head 17 is supported to can be along Y in the A3 of inspection area Direction and Z-direction move back and forth, and are known as a part for the mechanism of " index arm (index arm) ".Device transmits as a result, First 17 can will transmit from the IC devices 90 on the device supply unit 14 that device supply area A2 is sent into, be placed in inspection portion 16 On.It should be noted that in fig. 2, passing through arrow α17YThe reciprocating movement of device transfer head 17 in the Y direction is shown.In addition, Although device transfer head 17 is supported to move back and forth along Y-direction, but not limited to this, can also support as can also It moves back and forth in X direction.In addition, in composition shown in Fig. 2, there are two device transfer head 17 configures in the Y direction, sometimes will The device transfer head 17 of Y-direction negative side is referred to as " device transfer head 17A ", and the device transfer head 17 of Y-direction positive side is referred to as " device Transfer head 17B ".Device transfer head 17A can be responsible for IC devices 90 from device supply unit 14A to inspection portion in the A3 of inspection area 16 transmission, device transfer head 17B can be responsible for IC devices 90 from device supply unit 14B to inspection portion 16 in the A3 of inspection area Transmission.
In addition, device transfer head 17 with temperature adjustment section 12 is similarly configured to that the IC devices 90 of holding can be added Heat is cooling.Thus, it is possible to which the temperature in IC devices 90 is constantly maintained to adjust state from device supply unit 14 to inspection portion 16.
Inspection portion 16 can be connect with electronic component transmission device 10, and mounting is used as electronics member device under its connection status The IC devices 90 of part check the electrical characteristic of the IC devices 90.It is provided in the inspection portion 16 and the terminal of IC devices 90 electricity Multiple probes of connection.Then, by the electrical connection of the terminal and probe of IC devices 90, i.e. contact, so as to carry out IC devices 90 inspection.The inspection of IC devices 90 is stored in the inspection control unit being had based on the tester being connect with inspection portion 16 Program carries out.It should be noted that also similarly adding to IC devices 90 with temperature adjustment section 12 in inspection portion 16 Heat is cooling, which can be adjusted to the temperature suitable for checking.
Device recovery zone A4 is the multiple IC devices for being examined and finishing in the A3 of inspection area after its inspection, i.e. inspection Part 90 (electronic component) is transmitted to its region recycled from inspection portion 16.It is provided with back in the A4 of the device recovery zone It receives and uses pallet 19, device transfer head 20, tray delivery mechanism 21 and rotary table 28.In addition, being additionally provided with across inspection area The device recoverer 18 of A3 and device recovery zone A4 movements.In addition, being also prepared for free pallet in the A4 of device recovery zone 200。
Device recoverer 18 is can to load to finish the IC devices 90 checked by inspection portion 16 and by the IC devices 90 It is sent to the mounting component of device recovery zone A4, be referred to as " recycling shuttle plate " or is referred to simply as " recycling shuttle Part ".The device recoverer 18 also can be used as a part for transport unit 25.
In addition, device recoverer 18 be supported to can between inspection area A3 and device recovery zone A4 in X direction, That is arrow α18Direction moves back and forth.In addition, in composition shown in Fig. 2, device recoverer 18 is in the same manner as device supply unit 14 In the Y direction there are two configuration, the device recoverer 18 of Y-direction negative side is referred to as " device recoverer 18A " sometimes, by Y-direction The device recoverer 18 of positive side is referred to as " device recoverer 18B ".Then, the IC devices 90 in inspection portion 16 are transmitted, are placed in Device recoverer 18A or device recoverer 18B.It should be noted that IC devices 90 are from inspection portion 16 to device recoverer 18A Transmission be responsible for by device transfer head 17A, be responsible for by device transfer head 17B from inspection portion 16 to the transmission of device recoverer 18B. In addition, device recoverer 18 is also grounded in the same manner as temperature adjustment section 12, device supply unit 14.
The recycling mounting component that pallet 19 is the IC devices 90 that the portion 16 on inspection that loads is checked, is fixed as not It is moved in the A4 of device recovery zone.Even being configured with the device of the various movable parts such as device transfer head 20 more as a result, Part recovery zone A4 can also steadily load the IC devices 90 for checking and finishing on recycling pallet 19.It should be noted that In composition shown in Fig. 2, there are three recycling is configured in X direction with pallet 19.
In addition, empty pallet 200 is also there are three configurations in X direction.The pallet 200 of the sky is also mounting portion 16 on inspection The mounting component of the IC devices 90 checked.Then, movement is come on the device recoverer 18 of device recovery zone A4 IC devices 90 are transmitted, be placed in recycling pallet 19 and the pallet 200 of sky in either one on.Each inspection is corresponded to as a result, As a result classified to IC devices 90, recycled.
Device transfer head 20 be supported to can in the A4 of device recovery zone in X direction and Y-direction movement, and also With can also be along the part that Z-direction moves.The device transfer head 20 is a part for transport unit 25, can by IC devices 90 from Device recoverer 18 is sent to recycling pallet 19, empty pallet 200.It should be noted that in fig. 2, passing through arrow α20XShow Go out movement of the device transfer head 20 in X-direction, passes through arrow α20YThe movement of device transfer head 20 in the Y direction is shown.
Tray delivery mechanism 21 is the pallet 200 for the sky that will be sent into from pallet removal region A5 in the A4 of device recovery zone To X-direction, i.e. arrow α21The mechanism of direction transmission.Then, after the transmission, empty pallet 200 is configured in recycling IC devices That is, the position of part 90, can become any pallet in three above-mentioned empty pallets 200.
Pallet removal region A5 is recycling, removes the pallet 200 for being arranged with the multiple IC devices 90 for checking the state that finishes Removal portion.Multiple pallets 200 can be stacked in pallet removes region A5.
Rotary table 28 is configured between device recoverer 18A and device recoverer 18B.Rotary table 28 is propped up It holds as being capable of around the Z-axis direction arrow α28Direction rotates.Then, when IC devices 90 are placed in for example empty pallet 200, wanting So that the posture of IC devices 90 is reverted to original state, wants to revert to by before the progress posture changing of rotary table 27 In the case of state, IC devices 90 can be temporarily placed in rotary table 28.By making rotation work under the carrying state Make the rotation of platform 28, the posture of IC devices 90 can be made to revert to original state.The IC devices 90 for having restored posture keep the appearance Empty pallet 200 is sent to gesture by device transfer head 20.
In addition, being provided with pallet 200 one by one along the side Y in a manner of across device recovery zone A4 and pallet removal region A5 Tray delivery mechanism 22A, tray delivery mechanism 22B to transmission.Tray delivery mechanism 22A is a part for transport unit 25, is Pallet 200 can be made along Y-direction, i.e. arrow α22AThe moving portion that direction moves back and forth.Thus, it is possible to the IC devices that inspection is finished Part 90 is sent to pallet from device recovery zone A4 and removes region A5.In addition, tray delivery mechanism 22B can be used in recycling IC The empty pallet 200 of device 90 is to the positive side of Y-direction, i.e. arrow α22BIt moves in direction.Thus, it is possible to make empty pallet 200 from support Disk removal region A5 is moved to device recovery zone A4.
Control unit 800 can for example control tray delivery mechanism 11A, tray delivery mechanism 11B, temperature adjustment section 12, device Part transfer head 13, device supply unit 14, tray delivery mechanism 15, inspection portion 16, device transfer head 17, device recoverer 18, device Part transfer head 20, tray delivery mechanism 21, tray delivery mechanism 22A, tray delivery mechanism 22B, rotary table 27 and rotation The action in each portion such as revolving worktable 28.
Operator can set by monitor 300 or confirm the operation condition etc. of electronic component check device 1.The prison Visual organ 300 for example with the display picture 301 being made of liquid crystal panel, is configured at the front of electronic component check device 1 Upper lateral part.As shown in Figure 1, right side is provided with the Mouse table 600 of mounting mouse in the figure that pallet removes region A5.The mouse exists It is used when being operated to the picture shown by monitor 300.
In addition, for monitor 300, operation panel 700 is configured in the lower right of Fig. 1.Operation panel 700 with Order electronic component check device 1 carries out desired action to monitor 300 respectively.
In addition, signal lamp 400 can report the action of electronic component check device 1 by the combination of luminous color State etc..Signal lamp 400 is configured at the top of electronic component check device 1.It should be noted that loud speaker 500 is built in In electronic component check device 1, the action shape of electronic component check device 1 can also be reported by the loud speaker 500 State etc..
In electronic component check device 1, supplied by 231 segmented tray supply area A1 of the first spaced walls and device Between the A2 of region, is separated between device supply area A2 and inspection area A3 by the second spaced walls 232, pass through third spaced walls Between 233 separate inspection area A3 and device recovery zone A4, separate device recovery zone A4 and support by the 4th spaced walls 234 Disk removes between the A5 of region.In addition, between device supply area A2 and device recovery zone A4 also by the 5th spaced walls 235 every It opens.
The most external (most exterior) of electronic component check device 1 is covered by cap, the cap for example have protecgulum 241, Side cover 242, side cover 243, rear cover 244 and head cover 245.
As previously mentioned, being provided with the pallet 200 loaded for IC devices 90 (electronic component) in the A2 of device supply area (mounting portion).With multiple recess portions of the ranks shape configured with storage IC devices 90 one by one on pallet 200.For example, due to IC devices The reason of size of part 90, the mutual distance between centers of adjacent recess portion are extremely narrow sometimes.In this case, worry to impair device Part transfer head 13 holds IC devices 90 from pallet 200.For this purpose, as shown in Fig. 2, 1 (electronic component of electronic component check device Transmission device 10) in order to accurately hold IC devices 90 from pallet 200, the pallet 200 (mounting portion) can be shot by having The image pickup part 131 of the image of recess portion.Image pickup part 131 is installed on device transfer head 13 (transport unit 25).It should be noted that camera shooting Portion 131 is for example by CCD (Charge Coupled Device:Charge coupling device) camera constitutes, and towards Z-direction negative side and Configuration.
In electronic component check device 1, prior to IC devices 90 holding using image pickup part 131 shoot pallet 200 Recess portion image.Based on the shooting image, device transfer head 13 can be made to be shifted exactly to target location, i.e. as holding The IC devices 90 of object.Then, in the mobile destination, device transfer head 13 can accurately hold IC devices 90.
In addition, being loaded for IC devices 90 (electronic component) as previously mentioned, being also equipped in the A4 of device recovery zone Pallet 200 (mounting portion).As described above, in the case where the mutual distance between centers of adjacent recess portion is extremely narrow, worry have It damages and IC devices 90 is accurately discharged on pallet 200 in device transfer head 20.For this purpose, as shown in Fig. 2, electronic component inspection For device 1 (electronic component transmission device 10) in order to accurately discharge IC devices 90 from pallet 200, the support can be shot by having The image pickup part 201 of the image of the recess portion of disk 200 (mounting portion).Image pickup part 201 is installed on device transfer head 20 (transport unit 25).It needs It is noted that image pickup part 201 is also in the same manner as image pickup part 131, such as by CCD (Charge Coupled Device:Charge Coupled apparatus) camera is constituted, and is configured towards Z-direction negative side.
In electronic component check device 1, prior to IC devices 90 release using image pickup part 201 shoot pallet 200 Recess portion image.Based on the shooting image, device transfer head 20 can be made to be shifted exactly to target location, to store IC The recess portion of device 90.Then, at the mobile destination, device transfer head 20 can discharge IC devices 90.
In electronic component check device 1, in the case of as described above using image pickup part 131, image pickup part 201, It needs to set various conditions to electronic component check device 1.In the setting, selection uses setting pattern (the first mould successively Formula) with either mode in setting pattern (second mode) together.Successively setting pattern be can be by the setting of various conditions successively Be shown in monitor 300, i.e. in the form of guide (dialogic operation) come the pattern that is set.Together setting pattern be can will be each The pattern that the setting of kind condition is shown in monitor 300 to be set together.
As previously mentioned, electronic component transmission device 10 can be connected to the inspection for checking IC devices 90 (electronic component) Portion 16.In addition, the IC devices 90 (electronic component) that electronic component transmission device 10 has before checking are supplied to from its transmission The device supply area A2 (supply area) in inspection portion 16 and IC devices 90 (electronic component) after checking are from inspection portion 16 The device recovery zone A4 (recovery zone) for being transmitted to it and being recycled.Then, for the device supply area (drainage areas A2 Domain) and device recovery zone A4 (recovery zone) setting set pattern successively.Thereby, it is possible in device supply area A2 with standard The setting of various conditions when carrying out to true sequence exhaustive using image pickup part 131.In addition, also can be in device recovery zone The setting of various conditions when A4 is carried out with accurate sequence exhaustive using image pickup part 201.It is same as setting pattern successively Ground also sets pattern together to device supply area A2 and device recovery zone A4 settings.
Hereinafter, typically being illustrated with setting pattern together to the pattern of setting successively in the A2 of device supply area. Before set pattern, the together execution of setting pattern successively, in executing, it is any after executing, it is each shown in Fig. 3~Figure 24 List is properly displayed in monitor 300.It should be noted that " list (フ ォ ー system) " is sometimes referred to as " picture ", " right Words frame ", " window " etc..
First, list FM1 shown in Fig. 3 is shown on monitor 300.List FM1 is key frame.In list FM1 Including button group BT100, first item group IT110, second item group IT120, third item group IT130, fourth item group IT140 and fifth item group IT150.
It is used comprising the button BT101 of " end ", the button BT102 of " shutdown ", " type setting " in button group BT100 Button BT103, the button BT104 of " unit setting ", the button BT105 of " maintenance ", " user's definition " button The button BT107 of BT106 and " calculator ".
Item comprising the project IT111 of " user's selection " setting, " temperature model " setting in first item group IT110 Mesh IT112, the project IT113 of " tester connection " setting, the project IT114 of " transfer mode " setting, " starting pattern " The project IT115 of setting, the project IT116 of " binary system (Bin) setting " setting, " device rotation " setting project IT117, the project IT118 of " setting data " setting, " test section " setting project IT119.
Project IT121, " hot plate (temperature adjustment section) " comprising " supply shuttle " setting in second item group IT120 The project IT122 of setting, the project IT123 of " arm 2 " setting, the project IT124 of " arm 1 " setting, " plug heats device " The project IT125 of the setting and project IT126 of " plug is pneumatic " setting.
Third item group IT130 is as the project IT131 that " supply/storage counter " includes " supply " confirmation, " conjunction The project IT132 of meter " confirmation, the project IT133 of " qualified/unqualified " and " storage 1~storage 3/ fixes 1~is fixed The project IT134 of 3 " confirmations.
Fourth item group IT140 includes that " synthesis " setting is used as " contact counter (U Application タ Network ト カ ウ ン タ ー) " Project IT141, the project IT142 of " by type " setting, " by type % " setting project IT143 and " 1/ arm of arm The project IT144 of 2 " confirmations.
Fifth item group IT150 is as the project IT151 that " tester classification " includes " plug " confirmation.
If next, the button BT103 of operation button group BT100, as shown in figure 4, list FM2 is overlappingly shown in table Single FM1.List FM2 is Menu.The button of button BT201 comprising " installation ", " pallet list " in list FM2 BT202, the button BT203 of " plate list ", the button BT204 of " pallet distribution ", " temperature-compensating " button BT205, The button BT206 of " contact ", the button BT207 of " tester I/F ", the button BT208 of " Bin settings ", " double devices " Button BT209, the button BT210 of " cleaning ", the button BT211 of " yield ", " QA samplings " button BT212, The button BT213 of " FIFO functions ", the button BT214 of " supply correction ", " recycling corrects " button BT215 and The button BT216 of " exiting (Exit) ".
If next, the button BT214 of operation list FM2, on monitor 300 (display unit) display can select according to Selection picture, the list FM3 (mode selecting operations i.e. shown in fig. 5 of secondary setting pattern and either mode in setting pattern together Portion).Operator can set pattern and one successively according to the qualification selection of operation electronic component check device 1 as a result, And either mode in setting pattern.For example, in the case where operator is skilled person, can select to set pattern, phase together Instead, it in the case where operator is beginner, preferably selects and sets pattern successively.
The button of button BT301 and " be normally set up and (set together) " comprising " setting successively " in list FM3 BT302.It shows and " is set successively according to instruction on the right side of button BT301." illustrate EX311.Button BT302's Right side, which is shown, " shows common setting screen." illustrate EX312.Then, if select button BT301, operated, Then enter and set pattern successively (with reference to Fig. 6~Figure 23).On the other hand, if select button BT302, enter and set mould together Formula (with reference to Figure 24).In addition, list FM3 also includes the button BT303 of " cancellation ".
Here, first to having selected button BT301 the case where illustrate.
If select button BT301, list FM4 shown in fig. 6 is shown.List FM4 is to confirm to be set pattern successively Picture, show and " set with composition below." illustrate EX401.
In list FM4 comprising the project IT411 of " device size " confirmation, " processing " confirmation project IT412, The project IT413 of " pallet list " confirmation, the project IT414 of " plate list " confirmation and " rotary table ", which confirm, to be used Project IT415.
In addition, including the button BT422 of the button BT421 and " cancellation " of " next step " in list FM4.
If next, confirming the content of project IT411~project IT415 of list FM4 and operation button BT421, show Show list FM5 shown in Fig. 7.List FM5 is the picture at the position that confirmation is shot with image pickup part 131, and showing " please select Pallet, the C/K set." illustrate EX501.
Include the check box of " supply tray (pallet 200 in the A2 of device supply area) " selection in list FM5 CB511, the check box CB512 of its " height detection " selection, the check box CB513 of " supply shuttle " selection, its " height Check box CB514, the check box CB515 of " hot plate " selection and the answering for its " height detection " selection of detection " selection Select frame CB516.In the figure 7, as an example, whole check boxes is selected.
In addition, including the button BT522 of the button BT521 and " cancellation " of " next step " in list FM5.
Next, if the button BT521 of operation list FM5, shows list FM6 shown in Fig. 8.List FM6 is instruction The picture for preparing required component in device supply area A2, shows and " asks readiness tray, C/K, device and checked." Illustrate EX601.
Check box CB611 comprising " supply tray " selection in list FM6, " supply shuttle " selection final election The frame CB612 and check box CB613 of " hot plate " selection.It is shown on the downside of check box CB611 " please by palette adjustment In loading machine.Device is please put into the pocket [row, row] of pallet.:Pocket [2,2] (from upper left) " illustrates EX602. It is shown on the downside of check box CB612 and " wishes dress supply shuttle 1 good health.Please it is inserted into specified [pocket] of supply shuttle 1 Device.:Pocket [Aa] " illustrates EX603.It is shown on the downside of check box CB613 and " wishes dress hot plate 1 good health.Please device is put Enter the pocket [row, row] of hot plate 1.:Pocket [4,1] (from upper left) " illustrates EX604.
In addition, in list FM6 comprising the button BT621 of " previous step ", " next step " button BT622 and " take Disappear " button BT623.
Next, according to illustrating EX602, illustrating EX603, illustrate that the instruction of EX604 is prepared, as shown in figure 9, choosing Check box CB611, check box CB612, check box CB613.It should be noted that state shown in Fig. 9, i.e. whole check boxes Selected state is an example.
Next, if the button BT622 of operation list FM6, shows list FM7 shown in Fig. 10.List FM7 is to confirm The picture of the beginning of the position detection of the supply tray shot with image pickup part 131 shows " registration ' supply tray ' ' position detection '." illustrate EX701.In addition, being pressed comprising the button BT721 of " skipping ", " next step " in list FM7 The button BT722 and button BT723 of " cancellation ".
Next, if the button BT722 of operation list FM7, shows list FM8 shown in Figure 11.List FM8 is selection The picture of the pocket (recess portion of pallet 200) of the supply tray shot with image pickup part 131.
The button BT811 of illustraton of model MD801, " 4 pocket " selection comprising simulation supply tray in list FM8, " 6 The button BT812 of pocket " selection, the button BT813 of " 9 pocket " selection, " 12 pocket " selection button The BT814 and button BT815 of " 15 pocket " selection.In illustraton of model MD801 in fig. 11, the pocket of blacking is Selected pocket, as an example, operation button BT812 and selected 6 pocket.
In addition, including the button BT817 of the button BT816 and " cancellation " of " next step " in list FM8.
Next, if the button BT816 of operation list FM8, shows list FM9 shown in Figure 12.List FM9 is to electricity The pocket of 1 teaching supply tray of sub- component check device is in the picture of where, shows that " supply tray is please to surround bag Shape portion and the mode of surrounding shape specify region." illustrate EX901.
The actual image I M911 of positive practical (real-time) shooting of image pickup part 131 is shown in list FM9.Operator operates mouse Mark the mouse on platform 600, pocket IM912 cursor IM913 being overlapped in actual image I M911.Then, in the state Under, operate the button BT921 of " next step " that includes in list FM9.Thus teaching is carried out.In addition, also including in list FM9 The button BT922 of " cancellation ".
In addition, also including that " interception area (region for surrounding pocket and surrounding shape) " setting is used in list FM9 Project IT931 and " shutter speed " setting project IT932.
Then, if the button BT921 of operation list FM9, shows list FM10 shown in Figure 13.List FM10 is to confirm The picture for having carried out the pocket suitability of teaching, shows and " registers the image" illustrate EX1001.
In addition, showing the model image IM1011 of a representative pocket in list FM10.The model image IM1011 is the base for being synthesized into the shooting image for 6 pocket for selecting in list FM8 and being taken by image pickup part 131 Quasi- image.In electronic component check device 1, the benchmark image can be compared and taken by image pickup part 131 pallet 200 Recess portion real image and accurately detect the recess portion for being accommodated with IC devices 90.Thereby, it is possible to keep device transfer head 13 accurate Really it is moved to the IC devices 90 for being accommodated in recess portion.
In addition, the button BT1022 of the button BT1021 and " cancellation " comprising " confirming (OK) " in list FM10. Carried out teaching pocket it is suitable in the case of, operation button BT1021.
After operation button BT1021, list FM11 shown in Figure 14 is shown.List FM11 be confirmation image pickup part 131 into The picture of the beginning of the height detection of the supply tray of row shooting, shows " ' height detection ' of registration ' supply tray '." Illustrate EX1101.In addition, in list FM11 comprising the button BT1121 of " skipping ", " next step " button BT1122, with And the button BT1123 of " cancellation ".
Next, if the button BT1122 of operation list FM11, shows list FM12 shown in figure 15.List FM12 is The picture of the pocket (recess portion of pallet 200) of height of the selection for detecting the supply tray shot by image pickup part 131.
The button BT1211 of illustraton of model MD1201, " 4 pocket " selection comprising simulation supply tray in list FM12, The button BT1212 of " 6 pocket " selection, the button BT1213 of " 9 pocket " selection, " 12 pocket " selection are pressed The button BT1214 and button BT1215 of " 15 pocket " selection.In illustraton of model MD1201 in fig.15, blacking it is bag-shaped Portion is selected pocket, as an example, operation button BT1213 and selected 9 pocket.
In addition, including the button BT1217 of the button BT1216 and " cancellation " of " next step " in list FM12.
Next, if the button BT1216 of operation list FM12, shows list FM13 shown in Figure 16.List FM13 is The picture of height is detected in the where of supply tray to 1 teaching of electronic component check device, shows that " supply tray please specify The flat surface that adsorption nozzle can decline." illustrate EX1301.
The actual image I M1311 of positive practical (real-time) shooting of image pickup part 131 is shown in list FM13.Operator operates Mouse on Mouse table 600, the mobile cursor IM1313 in actual image I M1311 pass through cursor IM1313 instruction supply supports The height detection position of disk.Then, in this state, the button BT1321 of " next step " that includes in operation list FM13. Thus teaching is carried out.In electronic component check device 1, the height detection position of the supply tray is used as device transfer head The benchmark of height when 13 holding (absorption) IC devices 90.Device transfer head 13 can accurately hold and be accommodated in recess portion as a result, IC devices 90.
It should be noted that also including button BT1322 and " the height detection position " of " cancellation " in list FM13 Project IT1331.
Then, if the button BT1321 of operation list FM13, shows list FM14 shown in Figure 17.List FM14 is true The picture of recognizing the height detection position suitability for the supply tray for having carried out teaching, showing " can more new high degree” Illustrate EX1401.
In addition, including the button BT1422 of the button BT1421 and " no (NO) " of " being (YES) " in list FM14. In the case of the height detection position suitable for having carried out the supply tray of teaching, operation button BT1421.
After operation button BT1421, list FM15 shown in Figure 18 is shown.List FM15 be confirmation image pickup part 131 into The picture of the beginning of the position detection of the supply shuttle of row shooting shows and " registers ' examining position for ' supply shuttle ' It surveys '." illustrate EX1501.In addition, the button comprising the button BT1521 of " skipping ", " next step " in list FM15 The BT1522 and button BT1523 of " cancellation ".Here, as an example, operation button BT1521.It needs to illustrate Be, in the case where operating button BT1522, in a manner of being adapted for shuttle successively display with list FM8 and its it Identical list afterwards.
After operation button BT1521, list FM16 shown in Figure 19 is shown.List FM16 be confirmation image pickup part 131 into The picture of the beginning of the position detection of the hot plate of row shooting, shows " ' position detection ' of registration ' hot plate '." explanation EX1601.In addition, in list FM16 comprising the button BT1621 of " skipping ", " next step " button BT1622 and " take Disappear " button BT1623.Here, as an example, operation button BT1621.It should be noted that operating button In the case of BT1622, display and list FM8 and its later identical list successively in a manner of being suitable for hot plate.
After operation button BT1621, list FM17 shown in Figure 20 is shown.List FM17 is selected to one by one IC devices 90 are carried out before being still based on together to multiple IC devices 90 based on the holding of the aforementioned IC devices 90 for shooting image The picture of the holding of the IC devices 90 of shooting image is stated, showing " please select ' correction mode '." illustrate EX1701.
The button BT1712 of button BT1711 and " correcting together " comprising " individually correction " in list FM17.By It shows and " the independent calculating position correcting value of each pocket is transmitted on the right side of button BT1711.It can obtain high-precision Calibration result." illustrate EX1702.It is shown on the right side of button BT1712 and " calculates a correcting value according to each pallet, C/K To be transmitted.It can inhibit being greatly reduced for productivity." illustrate EX1703.
In addition, also including the button BT1714 of the button BT1713 and " cancellation " of " next step " in list FM17.This In, as an example, operation button BT1713 after operation button BT1711.
After operation button BT1713, list FM18 shown in Figure 21 is shown.List FM18 be selection image pickup part 131 into The picture on the opportunity of row shooting, showing " please select detection opportunity." illustrate EX1801.
Project IT1821 comprising the right moment for camera selection for " pallet " in list FM18 and the shooting for " C/K " The project IT1822 of timing.
In addition, also illustrating EX1802 comprising right moment for camera in list FM18.In figure 21, it as EX1802 is illustrated, shows It is shown with " when only starting running:It is only performed once in operation start.Intervals:When operation start and later to refer to It fixes time to be spaced and regularly execute.According to each tray loading:It is held when operation start and later when being loaded pallet Row.”.
In addition, also including the button BT1812 of the button BT1811 and " cancellation " of " next step " in list FM18.
After operation button BT1811, list FM19 shown in Figure 22 is shown.List FM19 is specified device transfer head 13 picture when holding IC devices 90 with the intervals of IC devices shows " when please the specify pickup/release and gap of nozzle." Illustrate EX1901.
Project IT1921 comprising the interval setting with the IC devices 90 on " pallet " in list FM19 and " shuttle " On IC devices 90 interval setting project IT1922, with " hot plate " on IC devices 90 interval setting project IT1923 and with the IC devices 90 on " rotary table " interval setting project IT1924.
In addition, also including the imaged image for depicting device transfer head 13 and the position relationship of IC devices 90 in list FM19 IM1931。
In addition, also including the button BT1912 of the button BT1911 and " cancellation " of " next step " in list FM19.
After operation button BT1911, list FM20 shown in Figure 23 is shown.List FM20 is to set pattern knot successively The picture of beam shows and " sets and terminated.It invites except pallet, the device used." illustrate EX2001.Include in list FM20 The button BT2011 of " closing ".Pallet, device and operation button BT2011 can be removed according to the instruction of EX2001 is illustrated.
As described previously for the device transfer head 13 (transport unit 25) for being equipped with image pickup part 131, imaged on setting side When the action of IC devices 90 is transmitted on the shooting in portion 131, side, it can select to set pattern successively.In this successively setting pattern, press Each list (list FM4~list FM20) of the action setting of sequential display part transfer head 13.Such as operator be just In the case of scholar, the operator can according to be shown in successively the list of monitor 300, confirm one by one list confirming or Input various conditions.The action setting of device transfer head 13 is carried out with accurate sequence exhaustive as a result,.
In addition, operating the feelings of the button BT302 of " be normally set up and (set together) " in list FM3 shown in Fig. 5 Under condition, list FM21 shown in Figure 24 is shown.List FM21 is the picture for being set pattern together.
Include to choose whether the check box CB2101 using image pickup part 131, for each of " supply tray " in list FM21 The label TB2102 of kind of condition setting, for " supply shuttle " various condition settings label TB2103, Yi Jizhen To the label TB2104 of the various condition settings of " hot plate ".
If choosing check box CB2101, become the state that image pickup part 131 can be used.It is aobvious on the right side of check box CB2101 Be shown with " keeping transmission correction effective " illustrates EX2105.
In label TB2102 comprising be equivalent to list FM8, list FM9 and list FM10 content project IT2111, with And it is equivalent to the project IT2112 of the content of list FM12 and list FM13.Then, by carrying out for project IT2111 and Setting, the selection of project IT2112, the electronic component check device 1 when can be directed to using image pickup part 131 are set respectively together Kind condition.It should be noted that in the case where having selected label TB2103, " supply shuttle " can be carried out and " supply Pallet " is similarly set, and in the case where having selected label TB2104, can be carried out to " hot plate " same as " supply tray " Setting.
In addition, including the project IT2113 for the content for being equivalent to list FM17 in list FM21, being equivalent to list FM18's The project IT2114 of content and be equivalent to list FM19 content project IT2115.
In addition, the button BT2121 comprising " successively set " in list FM21, " confirmation (OK) " button BT2122, The button BT2123 of " cancellation " and the button BT2124 of " application ".
Then, for being equipped with the device transfer head 13 (transport unit 25) of image pickup part 131, in setting side image pickup part 131 When carrying out the action of shooting side transmission IC devices 90, other than it can select the pattern of setting successively above-mentioned, additionally it is possible to select Pattern is set together.In this together setting pattern, the action that device transfer head 13 can be all carried out on list FM21 is set It is fixed.Such as in the case where operator is skilled person, it is believed that compared to pattern is set successively, selection sets pattern energy together Enough action settings for more quickly carrying out device transfer head 13.
In setting pattern successively, such as in the case where list FM5 shown in Fig. 7 is set as " the first setting screen ", List FM6 shown in the Fig. 8 (Fig. 9) shown after the display of the first setting screen can be referred to as " the second setting screen ". Hereinafter, sometimes will using the first setting screen as list FM5, using the second setting screen as list FM6 the case where be referred to as " situation 1”。
List FM5 as the first setting screen can be received, can be inputted for by (the transmission of device transfer head 13 Portion 25) transmission IC devices 90 (electronic component) information (hereinafter referred to as " first information ").As the first information, table can be enumerated The check box CB511 that includes in single FM5, check box CB512, check box CB513, check box CB514, check box CB515 and Check box CB516.
List FM6 as the second setting screen can be received for transmitting IC by device transfer head 13 (transport unit 25) Device 90 (electronic component), different from first information information (hereinafter referred to as " the second information ").It, can as the second information Enumerate the check box CB611, check box CB612 and check box CB613 for including in list FM6.
In addition, in situation 1, the list FM5 as the first setting screen includes the list made as the second setting screen Button BT521 that FM6 is shown, as the second setting screen display operation unit.As a result, before operation button BT521, monitoring List FM5 is still shown on device 300, can for example substantially ensure the time for fully confirming, inputting the first information as a result,.
In addition, in situation 1, the list FM5 as the first setting screen includes that at least one check box is (shown in Fig. 7 Composition in be check box CB511, check box CB512, check box CB513, check box CB514, check box CB515, check box CB516 totally 6), it, can be to being pressed as the second setting screen display operation unit in the case where whole check boxes is selected Button BT521 is operated.Thereby, it is possible to prevent the leakage to check box from selecting.
It, can will be in addition, for example in the case where list FM6 shown in Fig. 8 (Fig. 9) is set as " the first setting screen " List FM8 shown in the Figure 11 shown after the display of first setting screen is referred to as " the second setting screen ".Hereinafter, sometimes will be with First setting screen is list FM6, using the second setting screen as list FM8 the case where be referred to as " situation 2 ".
As the first information in the first setting screen, i.e. list FM6, the check box for including in list FM6 can be enumerated CB611, check box CB612 and check box CB613.
As the second information in the second setting screen, i.e. list FM8, the illustraton of model for including in list FM8 can be enumerated MD801, button BT811, button BT812, button BT813, button BT814 and button BT815.
It, can will be first in addition, for example in the case where list FM8 shown in Figure 11 is set as " the first setting screen " List FM9 shown in the Figure 12 shown after the display of setting screen is referred to as " the second setting screen ".Hereinafter, sometimes will be with first Setting screen is list FM8, using the second setting screen as list FM9 the case where be referred to as " situation 3 ".
As the first information in the first setting screen, i.e. list FM8, the illustraton of model for including in list FM8 can be enumerated MD801, button BT811, button BT812, button BT813, button BT814 and button BT815.
As the second information in the second setting screen, i.e. list FM9, the cursor for including in list FM9 can be enumerated IM913, project IT931 and project IT932.
In addition, in situation 3, the list FM8 as the first setting screen includes the list made as the second setting screen Button BT816 that FM9 is shown, as the second setting screen display operation unit.As a result, before operation button BT816, monitoring List FM8 is still shown on device 300, can for example substantially ensure the time for fully confirming, inputting the first information as a result,.
It, can will be first in addition, for example in the case where list FM9 shown in Figure 12 is set as " the first setting screen " The list FM12 shown in figure 15 shown after the display of setting screen is referred to as " the second setting screen ".Hereinafter, sometimes will be with One setting screen is list FM9, using the second setting screen as list FM12 the case where be referred to as " situation 4 ".
As the first information in the first setting screen, i.e. list FM9, the cursor for including in list FM9 can be enumerated IM913, project IT931 and project IT932.
As the second information in the second setting screen, i.e. list FM12, the illustraton of model for including in list FM12 can be enumerated MD1201, button BT1211, button BT1212, button BT1213, button BT1214 and button BT1215.
It, can will be in addition, for example in the case where list FM12 shown in figure 15 is set as " the first setting screen " List FM13 shown in the Figure 16 shown after the display of one setting screen is referred to as " the second setting screen ".Hereinafter, sometimes will be with First setting screen is list FM12, using the second setting screen as list FM13 the case where be referred to as " situation 5 ".
As the first information in the first setting screen, i.e. list FM12, the illustraton of model for including in list FM12 can be enumerated MD1201, button BT1211, button BT1212, button BT1213, button BT1214 and button BT1215.
As the second information in the second setting screen, i.e. list FM13, the cursor for including in list FM13 can be enumerated IM1313 and project IT1331.
In addition, in situation 5, the list FM12 as the first setting screen includes the list made as the second setting screen Button BT1216 that FM13 is shown, as the second setting screen display operation unit.As a result, before operation button BT1216, List FM12 is still shown on monitor 300, can for example substantially ensure the time for fully confirming, inputting the first information as a result,.
It, can will be first in addition, for example in the case where list FM9 shown in Figure 12 is set as " the first setting screen " List FM13 shown in the Figure 16 shown after the display of setting screen is referred to as " the second setting screen ".Hereinafter, sometimes will be with One setting screen is list FM9, using the second setting screen as list FM13 the case where be referred to as " situation 6 ".
As the first information in the first setting screen, i.e. list FM9, the cursor for including in list FM9 can be enumerated IM913, project IT931 and project IT932.
As the second information in the second setting screen, i.e. list FM13, the cursor for including in list FM13 can be enumerated IM1313 and project IT1331.
It, can will be in addition, for example in the case where list FM17 shown in Figure 20 is set as " the first setting screen " List FM18 shown in the Figure 21 shown after the display of one setting screen is referred to as " the second setting screen ".Hereinafter, sometimes will be with First setting screen is list FM17, using the second setting screen as list FM18 the case where be referred to as " situation 7 ".
As the first information in the first setting screen, i.e. list FM17, the button for including in list FM17 can be enumerated BT1711 and button BT1712.
As the second information in the second setting screen, i.e. list FM18, the project for including in list FM18 can be enumerated IT1821 and project IT1822.
In addition, in situation 7, the list FM17 as the first setting screen includes the list made as the second setting screen Button BT1713 that FM18 is shown, as the second setting screen display operation unit.As a result, before operation button BT1713, List FM17 is still shown on monitor 300, can for example substantially ensure the time for fully confirming, inputting the first information as a result,.
It, can will be in addition, for example in the case where list FM18 shown in Figure 21 is set as " the first setting screen " List FM19 shown in the Figure 22 shown after the display of one setting screen is referred to as " the second setting screen ".Hereinafter, sometimes will be with First setting screen is list FM18, using the second setting screen as list FM19 the case where be referred to as " situation 8 ".
As the first information in the first setting screen, i.e. list FM18, the project for including in list FM18 can be enumerated IT1821 and project IT1822.
As the second information in the second setting screen, i.e. list FM19, the project for including in list FM19 can be enumerated IT1921, project IT1922, project IT1923 and project IT1924.
In addition, in situation 8, the list FM18 as the first setting screen includes the list made as the second setting screen Button BT1811 that FM19 is shown, as the second setting screen display operation unit.As a result, before operation button BT1811, List FM18 is still shown on monitor 300, can for example substantially ensure the time for fully confirming, inputting the first information as a result,.
Then, by making the first setting screen and the second setting screen become such as 1~situation of situation 8, accordingly, for peace Device transfer head 13 equipped with image pickup part 131 transmits the action of IC devices 90 when being shot with image pickup part 131 in setting When, it can easily and securely carry out the action setting.
In addition, at least one party is for being shot based on image pickup part 131 in above such first information and the second information The shooting image (image) of pallet 200 (mounting portion) transmits (the electronics member of IC devices 90 by device transfer head 13 (transport unit 25) Device) information, i.e. transmission needed for information.It should be noted that in the present embodiment, the first information and the second information The information of the two is the information needed for the transmission, and however, it is not limited to this, can also be in the first information and the second information One side is the information needed for the transmission.Then, information in this way can swimmingly carry out the IC devices based on shooting image 90 transmission.
Pallet 200 (mounting portion) has storage IC devices 90 (electronic component) and multiple recess portions with rectangular configuration. Also, at least one party is needed for the transmission of the IC devices 90 based on shooting image as described above in the first information and the second information Information, any information in particularly preferably following information:
Information A:For specify device transfer head 13 (transport unit 25) hold IC devices 90 (electronic component) or The information of the recess portion of (XY coordinates) benchmark when discharging held IC devices 90 (electronic component) as overlook observation;
Information B:For be shown in device transfer head 13 (transport unit 25) hold IC devices 90 (electronic component) or Information when held IC devices 90 (electronic component) of release as the shooting image of the recess portion of benchmark;
Information C:For specify device transfer head 13 (transport unit 25) hold IC devices 90 (electronic component) or Recess portion when held IC devices 90 (electronic component) of release as the benchmark of the height relative to pallet 200 (mounting portion) Information;
Information D:For specify device transfer head 13 (transport unit 25) hold IC devices 90 (electronic component) or Face, this reality when held IC devices 90 (electronic component) of release as the pallet 200 (mounting portion) of the benchmark of height Apply the information of the upper surface (face of table side) in mode.Such information A, information B, information C, information D become adjacent recess portion Mutual distance between centers is smaller, gets over the holding that can quickly and accurately carry out IC devices 90, the information needed for release.By This, can quickly and accurately carry out holding, the release of IC devices 90.
Then, " first information ", " the second information " are set as by any information in information A, information B, information C, information D Combination, combination preferably below.
The first information is information A, i.e. for specifying in 90 (electronics member of device transfer head 13 (transport unit 25) holding IC devices Device) or support when held IC devices 90 (electronic component) of release under overlook observation as (XY coordinates) benchmark The information of the recess portion of disk 200.Second information is information B, i.e. for being shown in device transfer head 13 (transport unit 25) holding IC devices Recess portion when part 90 (electronic component) or held IC devices 90 (electronic component) of release as the pallet 200 of benchmark Shooting image information.First setting screen is being set as list FM8, the second setting screen is set as to " the situation of list FM9 It can be such combination under 3 ".If the recess portion of not specified pallet 200, it is difficult to obtain the shooting figure of the recess portion of pallet 200 Picture, therefore the sequence of such first information " information A " → second information " information B " is effective.
The first information is information B, i.e. for being shown in 90 (electronics member of device transfer head 13 (transport unit 25) holding IC devices Device) or shooting image when held IC devices 90 (electronic component) of release as the recess portion of the pallet 200 of benchmark Information.Second information is information D, i.e. for specifying in 90 (electronics member of device transfer head 13 (transport unit 25) holding IC devices Device) or when held IC devices 90 (electronic component) of release as the pallet 200 (mounting portion) of the benchmark of height The information in face, upper surface (face of table side) i.e. in present embodiment.First setting screen is being set as list FM9, by second Setting screen is set as in " situation 6 " of list FM13 being such combination.It is difficult if not obtaining the shooting image of recess portion Around recess portion to grasp pallet 200, i.e. the upper surface of pallet 200 be present in where, therefore the such first information " information The sequence of the information of B " → second " information D " is effective.
The first information is information C, i.e. for specifying in 90 (electronics member of device transfer head 13 (transport unit 25) holding IC devices Device) or when held IC devices 90 (electronic component) of release as the height relative to pallet 200 (mounting portion) The information of the recess portion of the pallet 200 of benchmark.Second information is information D, i.e. for specifying in device transfer head 13 (transport unit 25) Benchmark when holding IC devices 90 (electronic component) or discharging held IC devices 90 (electronic component) as height The face of pallet 200 (mounting portion), upper surface (face of table side) i.e. in present embodiment information.By the first setting screen It is set as list FM12, is set as the second setting screen in " situation 5 " of list FM13 being such combination.If not specified The recess portion of pallet 200 as altitude datum is then difficult to grasp the upper table of its specified recess portion and the pallet 200 as altitude datum The position relationship of the appointed part in face, therefore the sequence of such first information " information C " → second information " information D " is effective 's.
In addition, setting pattern includes third setting screen successively.As the third setting screen, there is no particular restriction, example Such as, it can be set as shown in list FM15, Figure 19 shown in list FM11, Figure 18 shown in list FM7, Figure 14 shown in Fig. 10 List FM16.Include the button BT721 of " skipping " in list FM7, the button BT1121 of " skipping " included in list FM11, Include the button BT1521 of " skipping " in list FM15, the button BT1621 of " skipping " is included in list FM16.Such as it is logical The button BT721 for crossing operation list FM7, can omit in case 3 as the list FM8 of the first setting screen and as second The display of the list FM9 of setting screen and jump to list FM11.In this way, showing omission first on monitor 300 (display unit) The display of setting screen or the second setting screen and so that third setting screen is shown as third setting screen display operation The button BT721 in portion.Thereby, it is possible to omit the confirmation of the first information, the second information, input.
As previously mentioned, including the button BT422 of " cancellation " in list FM4 shown in fig. 6.In list FM5 shown in Fig. 7 Include the button BT522 of " cancellation ".Include the button BT623 of " cancellation " in list FM6 shown in Fig. 8 (Fig. 9).Figure 10 institutes Include the button BT723 of " cancellation " in the list FM7 shown.Include the button of " cancellation " in list FM8 shown in Figure 11 BT817.Include the button BT922 of " cancellation " in list FM9 shown in Figure 12.Include " to take in list FM10 shown in Figure 13 Disappear " button BT1022.Include the button BT1123 of " cancellation " in list FM11 shown in Figure 14.List shown in figure 15 Include the button BT1217 of " cancellation " in FM12.Include the button BT1322 of " cancellation " in list FM13 shown in Figure 16. Include the button BT1523 of " cancellation " in list FM15 shown in Figure 18.It is used comprising " cancellation " in list FM16 shown in Figure 19 Button BT1623.Include the button BT1714 of " cancellation " in list FM17 shown in Figure 20.List FM18 shown in Figure 21 In include the button BT1812 of " cancellation ".Include the button BT1912 of " cancellation " in list FM19 shown in Figure 22.Then, The button of which " cancellation " no matter is operated, can be transferred to from the midway of setting pattern successively and set pattern, i.e. together List FM21 shown in Figure 24.In this way, setting pattern includes that can be transferred to set together from the midway of setting pattern successively successively The button as " cancellation " for setting mode shifts operation portion together of mould-fixed.Operator can stop in midway as a result, The input etc. for setting pattern successively and re-starting the first information, the second information in setting pattern together etc..It needs to illustrate It is that the first information, the second information etc. before operating the button of " cancellation " in setting pattern successively can both be stored in control Portion 800 processed, can not also be stored in control unit 800.
As shown in figure 24, include project IT2111, item as described above in as the list FM21 of setting pattern together Mesh IT2112, project IT2113, project IT2114 and project IT2115.Moreover, any one of these projects mesh can be appointed Meaning ground is referred to as " the first setting screen " and " the second setting screen ".In addition, in list FM21, arrangement shows the first setting picture Face and the second setting screen.In this way, in electronic component check device 1, can be selected as the first setting screen and second Setting screen carries out the setting pattern together of arrangement display.Such as in the case where operator is skilled person, it is believed that compared to Pattern is set successively, and setting pattern more can promptly carry out the action setting of device transfer head 13 together for selection.
In addition, the list FM21 as setting pattern together includes can be from setting mode shifts together to setting mould successively Formula as the button BT2121 for setting mode shifts operation portion successively.As a result, operator can stop setting pattern together and The input etc. of the first information, second information etc. is re-started under setting pattern successively.It should be noted that setting mould together First information, the second information under formula before operation button BT2121 etc. can both be stored in control unit 800, can not also store In control unit 800.
More than, although illustrating the electronic component transmission device and electronics member of the present invention for embodiment illustrated Device inspection apparatus, but the present invention is not limited to this, constitutes electronic component transmission device and electronic component inspection dress Each portion set can replace with the arbitrary composition that can play identical function.Furthermore it is also possible to add arbitrary construct.
In addition, the electronic component transmission device and electronic component check device of the present invention can also combine it is above-mentioned each Arbitrary 2 or more compositions (feature) in embodiment and obtain.
In addition, about setting pattern successively, setting pattern together, it in the above-described embodiment will be in device supply area IC devices are held from pallet as an example, but can also be from supply shuttle, temperature tune based on the shooting result of image pickup part Whole or rotary table holds IC devices.This can similarly be applicable in device recovery zone.

Claims (18)

1. a kind of electronic component transmission device, which is characterized in that have:
Transport unit transmits electronic component;And
Display unit, by the display unit, can select to show after showing the first setting screen the second setting screen according to Secondary setting pattern,
First setting screen can receive the first information for transmitting the electronic component by the transport unit,
Second setting screen can receive for by the transport unit transmit the electronic component, with described first The second different information of information.
2. electronic component transmission device according to claim 1, which is characterized in that
The electronic component transmission device is provided with the mounting portion for loading the electronic component,
The electronic component transmission device has the image pickup part for the image that can shoot the mounting portion.
3. electronic component transmission device according to claim 2, which is characterized in that
The image pickup part is installed on the transport unit.
4. electronic component transmission device according to claim 2, which is characterized in that
At least one party is to pass through the biography for the image based on the mounting portion in the first information and second information The information for sending portion to transmit the electronic component.
5. electronic component transmission device according to claim 2, which is characterized in that
The mounting portion, which has, stores the electronic component and multiple recess portions with rectangular configuration,
At least one party is any information in following information in the first information and second information:
Make in the electronic component that the transport unit holds the electronic component or release is held for specifying For overlook observation when benchmark the recess portion information;
Make when for being shown in the transport unit holds the electronic component or release is held the electronic component On the basis of the recess portion shooting image information;
Make in the electronic component that the transport unit holds the electronic component or release is held for specifying For the information of the recess portion of the benchmark of the height relative to mounting portion;And
Make in the electronic component that the transport unit holds the electronic component or release is held for specifying For the information in the face of the mounting portion of the benchmark of height.
6. electronic component transmission device according to claim 5, which is characterized in that
The first information is to hold the electronic component in the transport unit or described in release held for specifying The information of the recess portion of benchmark when electronic component as overlook observation,
Second information is to hold the electronic component or described in release held for being shown in the transport unit Information when electronic component as the shooting image of the recess portion of benchmark.
7. electronic component transmission device according to claim 5, which is characterized in that
The first information is to hold the electronic component or described in release held for being shown in the transport unit Information when electronic component as the shooting image of the recess portion of benchmark,
Second information is to hold the electronic component in the transport unit or described in release held for specifying Information when electronic component as the face of the mounting portion of the benchmark of height.
8. electronic component transmission device according to claim 5, which is characterized in that
The first information is to hold the electronic component in the transport unit or described in release held for specifying Information when electronic component as the recess portion of the benchmark of the height relative to mounting portion,
Second information is to hold the electronic component in the transport unit or described in release held for specifying Information when electronic component as the face of the mounting portion of the benchmark of height.
9. electronic component transmission device according to claim 1, which is characterized in that
First setting screen includes to make the second setting screen display operation unit that second setting screen is shown.
10. electronic component transmission device according to claim 9, which is characterized in that
First setting screen includes at least one check box, can in the case where whole check boxes is selected The second setting screen display operation unit is operated.
11. electronic component transmission device according to claim 1, which is characterized in that
The pattern of setting successively includes third setting screen.
12. electronic component transmission device according to claim 11, which is characterized in that
The display for omitting first setting screen or second setting screen is shown on the display unit and is made described The third setting screen display operation unit that third setting screen is shown.
13. electronic component transmission device according to claim 1, which is characterized in that
It can be selected as in the electronic component transmission device by first setting screen and second setting screen Carry out the setting pattern together of arrangement display.
14. electronic component transmission device according to claim 13, which is characterized in that
Display can select the setting pattern successively and either mode in the pattern of setting together on the display unit Mode selecting operation portion.
15. electronic component transmission device according to claim 13, which is characterized in that
The pattern of setting successively includes that can be transferred to the setting pattern together from the midway of the pattern of setting successively Mode shifts operation portion is set together.
16. electronic component transmission device according to claim 13, which is characterized in that
The pattern of setting together includes can be from the setting successively to the setting pattern successively of setting mode shifts together Mould-fixed transfer operation portion.
17. electronic component transmission device according to claim 1, which is characterized in that
The electronic component transmission device can be connected to the inspection portion for checking the electronic component,
The electronic component transmission device has:
Supply area, from the supply area, transmission is supplied to the inspection portion to the electronic component before inspection;And
Recovery zone, the electronic component after inspection are transmitted to the recovery zone from the inspection portion and are recycled,
The pattern of setting successively is set for the supply area and the recovery zone.
18. a kind of electronic component check device, which is characterized in that have:
Transport unit transmits electronic component;
Display unit, by the display unit, can select to show after showing the first setting screen the second setting screen according to Secondary setting pattern;And
Inspection portion checks the electronic component,
First setting screen can receive the first information for transmitting the electronic component by the transport unit,
Second setting screen can receive for by the transport unit transmit the electronic component, with described first The second different information of information.
CN201810156886.7A 2017-02-28 2018-02-24 Electronic component transmission device and electronic component check device Pending CN108508345A (en)

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