CN108418465B - Submicron-level precise flexible micro-motion system - Google Patents
Submicron-level precise flexible micro-motion system Download PDFInfo
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- CN108418465B CN108418465B CN201810459198.8A CN201810459198A CN108418465B CN 108418465 B CN108418465 B CN 108418465B CN 201810459198 A CN201810459198 A CN 201810459198A CN 108418465 B CN108418465 B CN 108418465B
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
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Abstract
The invention provides a submicron-level precise flexible micro-motion system, and relates to the technical field of micro-operation. The submicron-level precise flexible micro-motion system comprises a mechanism body, a driver and twenty straight-round flexible hinges to form a flexible hinge mechanism. The micro driver is connected with the top of the hollow part of the mechanism and is connected with a power supply through a controller. Based on the lever principle and the flexible guiding and transmission principle, a part of flexible hinges are adopted to ensure that the driver does not bear transverse force and moment in the motion process, and no additional displacement in a non-motion direction is generated, so that the motion precision and stability of the mechanism body are ensured; the other part of flexible hinge is used for precisely transmitting the motion deltau input by the micro-motion input mechanism, so that the micro-motion output mechanism is used for outputting displacement deltav. The mechanism has the advantages of accurate output of linear displacement, high positioning precision, no additional displacement in a non-motion direction, simple structure, easy control, high motion precision, excellent performance and the like.
Description
Technical Field
The invention relates to the technical field of micro-operation, in particular to a submicron precision flexible micro-motion system.
Background
Along with the rapid development of the demands of mechanical systems in the high-tech field for high precision and miniaturization, precision and ultra-precision technologies are widely applied in the fields of high-end technologies such as microelectronics, numerical control processing, biomedicine and the like. The macro-micro driving technology is an important means for realizing precise and ultra-precise technology due to solving the contradiction between large movement stroke and high precision, and is widely applied to the technical fields of biomedicine, precise electronics, military and the like.
However, the micro-motion system provided in the prior art has the problem of low accuracy and efficiency.
Disclosure of Invention
The invention aims to provide a submicron precision flexible micro-motion system, which is based on flexible hinge transmission and guiding principles and adopts a finite element method to analyze the motion performance, the strength performance and the dynamic performance respectively, wherein the maximum positioning error value of the analysis display system is 0.215 mu m, the strength meets the design requirement, the system has excellent dynamic performance, and meanwhile, the system has higher precision and effectiveness.
Embodiments of the present invention are implemented as follows:
a submicron precision flexible micro-motion system comprising:
the mechanism body is provided with a micro-motion input mechanism and a micro-motion output mechanism, wherein the micro-motion input mechanism is used for inputting the motion delta u, and the micro-motion output mechanism is used for outputting the displacement delta v;
the driver is arranged on the mechanism body and is used for providing motion displacement for the micro-motion input mechanism, and the micro-motion input mechanism is used for inputting motion deltau under the driving action of the driver;
the flexible hinge mechanism is composed of a plurality of straight-round flexible hinges, the straight-round flexible hinges are symmetrically arranged on the mechanism body, the straight-round flexible hinges comprise a first group of flexible hinges and a second group of flexible hinges, the first group of flexible hinges are used for ensuring that a driver does not bear transverse force and moment in the moving process and does not generate additional displacement in a non-moving direction, and the moving precision and the moving stability of the mechanism body are ensured; the second group of flexible hinges is used for precisely transmitting the motion deltau input by the micro-motion input mechanism, so that the micro-motion output mechanism is used for outputting displacement deltav.
Further, in a preferred embodiment of the present invention, the number of the plurality of straight round type flexible hinges is twenty, and the first set of flexible hinges has sixteen straight round type flexible hinges, and the second set of flexible hinges has four straight round type flexible hinges.
Further, in the preferred embodiment of the present invention, sixteen straight round flexible hinges of the first set of flexible hinges are symmetrically distributed on both sides of the driver.
Further, in the preferred embodiment of the present invention, the mechanism body has a first body and a second body which are symmetrically arranged, and ten straight-round flexible hinges are arranged on the first body, and ten straight-round flexible hinges are arranged on the second body, and the symmetrically distributed straight-round flexible hinges are used for forming a dual-shaft flexible hinge, and the dual-shaft flexible hinge is used for ensuring that the driver does not bear forces in a non-moving direction.
Further, in a preferred embodiment of the present invention, eight of sixteen straight round flexible hinges of the first set of flexible hinges are disposed on the first body, and the other eight are disposed on the second body; among the four straight round flexible hinges of the second group of flexible hinges, two of the four straight round flexible hinges are arranged on the first body, and the other two of the four straight round flexible hinges are arranged on the second body.
Further, in the preferred embodiment of the present invention, a plurality of fixing assemblies are disposed on the first body and the second body at intervals, and the plurality of fixing assemblies on the first body and the second body are symmetrically disposed.
Further, in the preferred embodiment of the present invention, the fixing components are countersunk screws, and the number of the fixing components is nine, wherein four countersunk screws are disposed on the first body, and four countersunk screws are symmetrically disposed on the second body, and the remaining one countersunk screw is disposed on the symmetry axis of the first body and the second body.
Further, in a preferred embodiment of the present invention, the countersunk screws are M4 countersunk screws.
Further, in a preferred embodiment of the present invention, the driver is a piezoceramic actuator.
Further, in the preferred embodiment of the present invention, the radius of the straight round flexible hinges is 3mm, and the minimum distance is 1mm.
The beneficial effect of above-mentioned scheme:
the invention provides a submicron-level precise flexible micro-motion system, which comprises a mechanism body, a driver and a flexible hinge mechanism consisting of a plurality of straight round flexible hinges. The mechanism body provides a basis and a guarantee for the movement and the installation of each part, and is provided with a micro-motion input mechanism and a micro-motion output mechanism, wherein the micro-motion input mechanism is used for inputting movement deltau, and the micro-motion output mechanism is used for outputting displacement deltav. Meanwhile, the driver is arranged on the mechanism body and is used for providing motion displacement for the micro-motion input mechanism, and the micro-motion input mechanism is used for inputting motion deltau under the driving action of the driver. The driver is mainly used for providing driving force for the micro-motion input mechanism, so that the micro-motion output mechanism can output motion Deltav. The plurality of straight round flexible hinges are symmetrically arranged on the mechanism body, the plurality of straight round flexible hinges comprise a first group of flexible hinges and a second group of flexible hinges, and the first group of flexible hinges are used for ensuring that the driver does not bear transverse force and moment in the motion process and does not generate additional displacement in a non-motion direction, so that the motion precision and stability of the mechanism body are ensured; the second group of flexible hinges is used for precisely transmitting the motion deltau input by the micro-motion input mechanism, so that the micro-motion output mechanism is used for outputting displacement deltav. The first group of flexible hinges fully ensures the motion stability of the mechanism body, and simultaneously ensures that the driver does not bear transverse force and moment in the motion process and does not generate additional displacement in a non-motion direction. The second group of flexible hinge structures are used for driving displacement based on the first group of flexible hinge structures, and finally, the displacement deltav is accurately output.
In summary, the submicron precision flexible micro-motion system is based on the flexible hinge transmission and guiding principle, and adopts the finite element method to analyze the motion performance, the strength performance and the dynamic performance, the maximum positioning error value of the analysis display system is 0.215 μm, the strength meets the design requirement, the excellent dynamic performance is achieved, and meanwhile, the precision and the effectiveness are higher.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a submicron precision flexible micro-motion system according to an embodiment of the present invention at a first view angle;
FIG. 2 is a schematic diagram of a submicron precision flexible micro-motion system according to an embodiment of the present invention under a second view angle;
FIG. 3 is a surface footprint of a submicron precision flexible micro-motion system provided by an embodiment of the present invention;
FIG. 4 is a finite element mesh division model diagram of a submicron precision flexible micro-motion system provided by an embodiment of the present invention;
FIG. 5 is a schematic diagram of a finite element analysis result of a system motion when an input value is 1.5 μm in the submicron precision flexible micro-motion system according to the embodiment of the present invention;
FIG. 6 is a graph of a maximum simulated stress analysis of a submicron precision flexible micro-motion system provided by an embodiment of the present invention;
fig. 7 is a diagram of the first six natural frequencies of the submicron precision flexible micro-motion system according to an embodiment of the present invention.
Icon: a 100-submicron precision flexible micro-motion system; 101-a mechanism body; 103-a jog input mechanism; 105-jog output mechanism; 107-driver; 109-a first set of flexible hinges; 111-a second set of flexible hinges; 1-a first flexible hinge; 2-a second flexible hinge; 3-a third flexible hinge; 4-fourth flexible hinges; 5-a fifth flexible hinge; 6-sixth flexible hinges; 7-seventh flexible hinge; 8-eighth flexible hinge; 9-a ninth flexible hinge; 10-tenth flexible hinge; 11-eleventh flexible hinge; 12-twelfth flexible hinge; 13-thirteenth flexible hinge; 14-fourteenth flexible hinge; 15-fifteenth flexible hinge; 16-sixteenth flexible hinge; 17-seventeenth flexible hinge; 18-an eighteenth flexible hinge; 19-nineteenth flexible hinge; 20-twentieth flexible hinge; 113-a first body; 115-a second body; 117-countersunk head screw.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments of the present invention. The components of the embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the invention, as presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures.
In describing embodiments of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate an azimuth or a positional relationship based on that shown in the drawings, or an azimuth or a positional relationship in which the inventive product is conventionally put in use, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the apparatus or element to be referred to must have a specific azimuth, be configured and operated in a specific azimuth, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used merely to distinguish between descriptions and should not be construed as indicating or implying relative importance.
In the description of the embodiments of the present invention, it should also be noted that, unless explicitly specified and limited otherwise, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
In the present invention, unless expressly stated or limited otherwise, a first feature may include first and second features directly contacting each other, either above or below a second feature, or through additional features contacting each other, rather than directly contacting each other. Moreover, the first feature being above, over, and on the second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being below, beneath, and beneath the second feature includes the first feature being directly below and obliquely below the second feature, or simply indicates that the first feature is less level than the second feature.
Fig. 1 is a schematic structural diagram of a submicron precision flexible micro-motion system 100 according to the present embodiment at a first viewing angle; fig. 2 is a schematic structural diagram of the submicron precision flexible micro-motion system 100 according to the present embodiment at a second view angle. Referring to fig. 1 and 2, the present embodiment provides a submicron-sized precise flexible micro-motion system 100, and the external dimensions of the submicron-sized precise flexible micro-motion system 100 are 160mm×196mm×50mm (length×width×height). Meanwhile, the submicron precision flexible micro-motion system 100 includes: the mechanism body 101, the driver 107 and the flexible hinge mechanism composed of a plurality of straight round flexible hinges.
Specifically, referring to fig. 1 and 2 again, in the present embodiment, the mechanism body 101 provides a foundation and guarantee for the movement and installation of each component, and the mechanism body 101 has a jog input mechanism 103 and a jog output mechanism 105, wherein the jog input mechanism 103 is used for inputting the movement Δu, and the jog output mechanism 105 is used for outputting the displacement Δv.
Specifically, referring to fig. 1 and 2 again, in the present embodiment, the driver 107 is disposed on the mechanism body 101 and is used for providing a motion displacement for the micro-motion input mechanism 103, and the micro-motion input mechanism 103 is used for inputting a motion Δv under the driving action of the driver 107. The driver 107 is mainly used to provide a driving force to the jog input mechanism 103 so that the jog output mechanism 105 can output a movement Δv.
Meanwhile, it should be noted that, in the embodiment of the present invention, the submicron precision flexible micro-motion system 100 further includes a controller connected to the driver 107, and the controller is used to control the motion of the driver 107.
Specifically, referring to fig. 1 and 2 again, in the present embodiment, a plurality of straight-round flexible hinges are symmetrically disposed on the mechanism body 101 to form a flexible hinge mechanism. The flexible hinge of the flexible hinge mechanism utilizes the plastic deformation of the material of the weak part of the structure to transfer energy and displacement, has good transmission and guiding functions, and can be applied to a plurality of high-tech fields of precise and ultra-precise movements. According to the different composition shapes of the weak parts of the flexible hinge, the common flexible hinge can be divided into: straight round flexible hinges, circular arc flexible hinges, parabolic flexible hinges, rectangular flexible hinges, and the like. The flexible hinges of different types have different performances such as flexibility, transmission precision and maximum stress bearing capability: the rectangular flexible hinge has the best flexibility and rotation range, but the transmission precision is not high, and the rotation center moves in the rotation process; the arc flexible hinge has high movement precision, however, the flexibility is very poor, the movement range is smaller, and the movement is limited in a small range; the data of the straight round type flexible hinge and the parabolic type flexible hinge are between the two types of hinges, and the requirements of the motion precision and the motion range can be considered to a certain extent, wherein the straight round type flexible hinge with the advantages of simple structure, easiness in processing and the like is one type of flexible hinge which is most commonly used.
Specifically, referring to fig. 1 and 2 again, in the present embodiment, the plurality of straight-round flexible hinges includes a first set of flexible hinges 109 and a second set of flexible hinges 111, where the first set of flexible hinges 109 is used to ensure that the driver 107 does not bear lateral force and moment during movement, and does not generate additional displacement in a non-movement direction, so as to ensure the precision and stability of the movement of the mechanism body 101; the second set of flexible hinges 111 is used to precisely drive the motion deltau input by the jog input mechanism 103 such that the jog output mechanism 105 is used to output a displacement deltav. The first set of flexible hinges 109 substantially ensures the smoothness of movement of the mechanism body 101, while ensuring that the driver 107 is not subjected to lateral forces and moments during movement and that no additional displacement in non-moving directions is generated. The second set of flexible hinge 111 structures performs a transmission of displacement based on the first set of flexible hinge 109 mechanisms, and ultimately, outputs displacement Δv accurately.
In detail, referring to fig. 1 and 2 again, the number of the plurality of straight round type flexible hinges is twenty, and the first set of flexible hinges 109 has sixteen straight round type flexible hinges, and the second set of flexible hinges 111 has four straight round type flexible hinges. The first group of flexible hinges 109 includes a first flexible hinge 1, a second flexible hinge 2, a third flexible hinge 3, a fourth flexible hinge 4, a fifth flexible hinge 5, a sixth flexible hinge 6, a seventh flexible hinge 7, an eighth flexible hinge 8, a ninth flexible hinge 9, a tenth flexible hinge 10, an eleventh flexible hinge 11, a twelfth flexible hinge 12, a thirteenth flexible hinge 13, a fourteenth flexible hinge 14, a fifteenth flexible hinge 15, and a sixteenth flexible hinge 16, which are symmetrically distributed on both sides of the driver 107. The second set of flexible hinges 111 includes a seventeenth flexible hinge 17, an eighteenth flexible hinge 18, a nineteenth flexible hinge 19, and a twentieth flexible hinge 20.
Also, in the present embodiment, the first flexible hinge 1 is disposed opposite to the second flexible hinge 2. The third flexible hinge 3 is opposite to the fourth flexible hinge 4 and is located below the first flexible hinge 1 and the second flexible hinge 2. The ninth flexible hinge 9 is disposed opposite the tenth flexible hinge 10 and below the third flexible hinge 3 and the fourth flexible hinge 4. The eleventh flexible hinge 11 is disposed opposite the twelfth flexible hinge 12 and below the ninth flexible hinge 9 and the tenth flexible hinge 10. The fifth flexible hinge 5 is disposed opposite the sixth flexible hinge 6 and on opposite sides of the first flexible hinge 1 and the second flexible hinge 2. The seventh flexible hinge 7 is disposed opposite to the eighth flexible hinge 8 and below the fifth flexible hinge 5 and the sixth flexible hinge 6 and opposite to the third flexible hinge 3 and the fourth flexible hinge 4. The thirteenth flexible hinge 13 and the fourteenth flexible hinge 14 are located below the seventh flexible hinge 7 and the eighth flexible hinge 8 and on opposite sides of the ninth flexible hinge 9 and the tenth flexible hinge 10. The fifteenth flexible hinge 15 is disposed opposite the sixteenth flexible hinge 16 and below the thirteenth flexible hinge 13 and the fourteenth flexible hinge 14, opposite the ninth flexible hinge 9 and the tenth flexible hinge 10. The seventeenth flexible hinge 17 is disposed opposite to the eighteenth flexible hinge 18 above the 1-16 flexible hinges, and the nineteenth flexible hinge 19 is disposed opposite to the twentieth flexible hinge 20 on the right side of the seventeenth flexible hinge 17 and the eighteenth flexible hinge 18.
The first set of flexible hinges 109 includes a first flexible hinge 1, a second flexible hinge 2, a third flexible hinge 3, a fourth flexible hinge 4, a fifth flexible hinge 5, a sixth flexible hinge 6, a seventh flexible hinge 7, an eighth flexible hinge 8, a ninth flexible hinge 9, a tenth flexible hinge 10, an eleventh flexible hinge 11, a twelfth flexible hinge 12, a thirteenth flexible hinge 13, a fourteenth flexible hinge 14, a fifteenth flexible hinge 15 and a sixteenth flexible hinge 16 for ensuring that the driver 107 does not bear lateral forces and moments during movement and does not generate additional displacement in a non-movement direction, and ensuring the precision and stability of the movement of the mechanism body 101. The seventeenth flexible hinge 17, the eighteenth flexible hinge 18, the nineteenth flexible hinge 19, and the twentieth flexible hinge 20 are used to precisely transmit the motion Δu input by the jog input mechanism 103, so that the jog output mechanism 105 is used to output the displacement Δv.
In further detail, in the present embodiment, the mechanism body 101 has a first body 113 and a second body 115 that are symmetrically disposed, and ten straight-round flexible hinges are disposed on the first body 113, and ten straight-round flexible hinges are disposed on the second body 115. Wherein, the seventeenth flexible hinge 17, the eighteenth flexible hinge 18, the first flexible hinge 1, the second flexible hinge 2, the third flexible hinge 3, the fourth flexible hinge 4, the ninth flexible hinge 9, the tenth flexible hinge 10, the eleventh flexible hinge 11 and the twelfth flexible hinge 12 are all disposed on the first body 113 in the order from top to bottom and from left to right. The twenty-eighth flexible hinge 20, the nineteenth flexible hinge 19, the fifth flexible hinge 5, the sixth flexible hinge 6, the seventh flexible hinge 7, the eighth flexible hinge 8, the thirteenth flexible hinge 13, the fourteenth flexible hinge 14, the fifteenth flexible hinge 15, and the sixteenth flexible hinge 16 are symmetrically disposed on the second body 115. The symmetrically distributed right circular flexible hinges on the first body 113 and the second body 115 are used to form a biaxial flexible hinge, which is used to ensure that the driver 107 is not subjected to forces in non-moving directions.
Referring to fig. 1 and 2 again, in the present embodiment, a plurality of fixing elements are disposed on the first body 113 and the second body 115 at intervals, and the plurality of fixing elements on the first body 113 and the second body 115 are symmetrically disposed. The fixing components are countersunk screws 117, the number of the fixing components is nine, four countersunk screws 117 are arranged on the first body 113, the four countersunk screws 117 are symmetrically arranged on the second body 115, and the rest is arranged on the symmetry axis of the first body 113 and the second body 115.
Countersunk screws 117 are M4 countersunk screws 117. The driver 107 is a piezoceramic actuator. And the radius of the straight round flexible hinge is 3mm, and the minimum distance is 1mm. When the mechanism is fixed by 9 countersunk screws 117, the micro-motion input mechanism 103 is driven by the piezoelectric actuator at the hollow part to have motion input Deltau at a, and the micro-motion output mechanism 105 outputs motion Deltav at c under the transmission principle of the flexible hinges 17, 18, 19 and 20. In the process, the flexible hinges 1-16 ensure that the piezoelectric ceramic actuator does not bear transverse force and moment in the motion process and does not generate additional displacement in a non-motion direction (y direction is a motion direction) due to the guiding function of the flexible hinges and the symmetry principle of the mechanism, so that the motion precision and stability of the mechanism are ensured.
Meanwhile, it should be noted that the micro-motion system can generate motion or transmit energy by utilizing the reversible elastic deformation of the material of the weak part of the flexible hinge, can provide limited angular displacement rotating around the center of the hinge, has good guiding, transmission and conversion functions, and has decisive effects on realizing the functions due to the elasticity and plasticity of the material, so that the selection of the material has important influence on the guiding, transmission and conversion functions of the flexible hinge.
The micro-motion system comprises 20 symmetrically distributed flexible links, so that the maximum deformation obtained on the premise of not more than the plastic deformation limit of the material is considered when the material is selected, and the processing problem of the flexible hinge mechanism is considered, and therefore comprehensive consideration is needed when the material of the elastic hinge is selected. The prior researches prove that QBe, 60Si2Mn and 65Mn are ideal materials for the flexible hinge, and the material parameters of the materials are shown in table 1. The spring steel material 60Si2Mn is adopted as a machining material of the micro-motion system, and a wire cutting method is adopted for machining so as to ensure the precise machining of the flexible hinge mechanism.
Table 1 flexible hinge material parameters
Meanwhile, the micro-actuator 107 is a micro-actuator element designed by using the inverse piezoelectric effect of the piezoelectric material, and the micro-actuator element can generate displacement of several micrometers to tens micrometers under the action of voltage, so as to be used for micro-precisely driving the system. The piezoelectric ceramic actuator is widely used in the fields of aerospace, aviation, microelectronics industry, machinery, robots, precision measurement, precision machining, national defense and the like due to the characteristics of high resolution, quick response, small volume, large output force and the like.
According to the requirements of the system on element size, output force and output displacement, the piezoelectric ceramic actuator with the model number of P-235.10 of the general nano displacement technology PI company of Germany is selected, and the main technical parameters are shown in the table 2.
TABLE 2 Main technical parameters of piezoelectric ceramic actuator
Fig. 3 is a surface print of the submicron precision flexible micro-motion system 100 according to the present embodiment. In this embodiment, to determine the accuracy and rationality of the submicron precision flexible micro-motion system 100. The sub-micron precision flexible micro-motion system 100 was subjected to a kinematic analysis. In order to analyze the motion performance of the system, a finite element statics module is adopted to perform the kinematic analysis. The three-dimensional pattern of the micro-motion system is imported into finite element software, the external structure size is 86mm×88.5mm×50mm (length×width×height), and 60Si2Mn parameters are added into the material properties. Before meshing, in order to facilitate loading conditions on the system, a surface imprint is made on the micro-motion system according to the shape of the contact area of the piezoceramic actuator with the inside surface of the micro-motion system, as shown in fig. 3.
Fig. 4 is a finite element mesh division model diagram of the submicron precision flexible micro-motion system 100 provided in the present embodiment. Referring to fig. 4, in the present embodiment, when the finite element mesh is divided, the whole system model is first divided into meshes freely, then the mesh units of the 40 cylindrical surfaces of the 20 flexible hinges are further divided into finer mesh units, the number of nodes 554024 after the division is finally completed, the number of meshes is 330246, the mesh division model is as shown in fig. 4, and the mesh division of the key parts of the mechanism is relatively fine and smooth, and no cross or broken mesh exists, so that the mesh division quality is relatively good.
Fig. 5 is a schematic diagram of a finite element analysis result of a system motion when the input value is 1.5 μm in the submicron precision flexible micro-motion system 100 according to the present embodiment. Referring to fig. 5, a fixed constraint is applied to the cylindrical surfaces of the 9 threaded holes of the system, and displacement conditions are applied to the positions of the marks made before, so that each time of displacement application, an output displacement can be obtained at the output mechanism. For example, when an input displacement of 1.5 μm is applied to the mark, the probe function can be used to calculate the output displacement of 1.4765 μm at the center of the outer surface of the output mechanism, as shown in FIG. 5. And respectively calculating system output displacement values of ten input displacements in a system motion range (namely the extension range of the piezoelectric ceramic actuator) of 0-15 mu m. The results of the kinematic analysis of the system are shown in table 3.
TABLE 3 micro-drive system kinematics analysis
The kinematic analysis result of the micro-driving system shows that the maximum error of the system is only 1.57 percent when the system moves, and the maximum error value of the system is 0.215 mu m, which proves that the system design has higher precision and the positioning precision can reach submicron level.
Fig. 6 is a diagram of a maximum simulated stress analysis of the submicron precision flexible micro-motion system 100 according to the present embodiment. Referring to fig. 6, in the present embodiment, the strength analysis of the micro-driving system mainly analyzes whether the micro-driving system is damaged under the driving of the micro-actuator, so it is necessary to analyze whether the micro-driving system is damaged under the maximum driving displacement of the piezoelectric actuator, and thus it is necessary to analyze the maximum simulated stress of the motion of the micro-driving system. Thereby determining whether the system meets the material check strength requirements. Analysis is performed in a finite element statics module, a system model is imported, imprinting marking, meshing and constraint (system kinematic analysis) are applied to the model, and then the largest displacement 15 μm in the y forward direction is applied to the imprinting position, wherein a stress cloud chart is shown in fig. 6, and the maximum simulation stress of the system is 175.2MPa. The allowable stress of the material isThe 60Si2Mn yield limit sigma s1176MPa is set to be 1.5, and the safety coefficient lambda is put into the formula to obtain the allowable stress [ sigma ] of the material]784MPa. While the maximum simulated stress of the system is 175.2MPa, which is far less than the allowable stress of the material. The statics finite element analysis shows that the system is safe and reliable in the movement process, and the maximum stress of the micro-motion system meets the material checking strength requirement, so that the system strength performance is excellent.
Fig. 7 is a front sixth-order natural frequency chart of the submicron precision flexible micro-driving system provided in this embodiment. Referring to fig. 7, in this embodiment, in order to ensure that the dynamic performance of the system is good in the motion engineering, the natural frequency of the micro-motion system needs to be analyzed to determine whether the system will resonate during the motion process. The finite element model module is adopted in the analysis, the free mode analysis of unconstrained conditions is carried out on the micro-motion system, and the model pre-processing and grid division are similar to the system kinematics analysis (because loading is not needed, marking is not needed). The first sixth-order natural frequencies of the micro-motion system are shown in fig. 7, where the first sixth-order natural frequencies are respectively: 2306.5Hz, 2393.1Hz, 3044Hz, 6078.5Hz, 8318.7Hz, 8893.9Hz. Because the system adopts the P225.10 piezoceramic actuator to drive the micro-motion system, the maximum motion rotating speed of the P225.10 piezoceramic actuator is 2r/s, namely the maximum motion frequency is 2Hz. The maximum motion frequency of the micro-motion system in the motion process of the system is 2Hz, the first-order natural frequency is 2306.5Hz, and the system cannot resonate. Therefore, the system does not generate resonance in the motion process, and has excellent dynamic performance.
In summary, the submicron-level precise flexible micro-motion system 100 provided by the embodiment of the invention provides a design scheme of a submicron piezoelectric flexible micro-drive system, and analyzes the motion performance, the strength performance and the dynamic performance of the system, and the analysis result shows that the system has better related performance. The conclusion includes:
(1) A submicron precision flexible micro-motion system 100 is designed based on the flexible hinge transmission and guiding principle, and a submicron piezoelectric flexible micro-driving system design scheme is provided.
(2) The finite element method is adopted to analyze the motion performance, the strength performance and the dynamic performance, the maximum positioning error value of the analysis display system is 0.215 mu m, the strength meets the design requirement, the analysis result proves the design accuracy and the effectiveness of the system.
The above description is only of the preferred embodiments of the present invention and is not intended to limit the present invention, but various modifications and variations can be made to the present invention by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (7)
1. A submicron precision flexible micro-motion system, comprising:
the mechanism body is provided with a micro-motion input mechanism and a micro-motion output mechanism, wherein the micro-motion input mechanism is used for inputting the motion deltau, and the micro-motion output mechanism is used for outputting the displacement deltav;
the driver is arranged on the mechanism body and is used for providing motion displacement for the micro-motion input mechanism, and the micro-motion input mechanism is used for inputting motion deltau under the driving action of the driver;
the flexible hinge mechanism comprises a plurality of straight-round flexible hinges, wherein the straight-round flexible hinges are symmetrically arranged on the mechanism body, the straight-round flexible hinges comprise a first group of flexible hinges and a second group of flexible hinges, the first group of flexible hinges are used for ensuring that a driver does not bear transverse force and moment in the motion process, and no additional displacement in a non-motion direction is generated, so that the motion precision and stability of the mechanism body are ensured; the second group of flexible hinges are used for precisely transmitting the motion deltau input by the micro-motion input mechanism, so that the micro-motion output mechanism is used for outputting displacement deltav;
the number of the plurality of straight round flexible hinges is twenty, the first group of flexible hinges is provided with sixteen straight round flexible hinges, and the second group of flexible hinges is provided with four straight round flexible hinges;
sixteen straight round flexible hinges of the first group of flexible hinges are symmetrically distributed on two sides of the driver;
the mechanism body is provided with a first body and a second body which are symmetrically arranged, ten straight round flexible hinges are arranged on the first body, ten straight round flexible hinges are arranged on the second body, the symmetrically distributed straight round flexible hinges are used for forming a double-shaft flexible hinge, and the double-shaft flexible hinge is used for ensuring that a driver does not bear force in a non-moving direction.
2. The submicron precision flexible micro-motion system according to claim 1, characterized in that:
sixteen of the right circular flexible hinges of the first set of flexible hinges, eight of which are arranged on the first body, and the other eight of which are arranged on the second body; among the four straight round flexible hinges of the second group of flexible hinges, two of the four straight round flexible hinges are arranged on the first body, and the other two straight round flexible hinges are arranged on the second body.
3. The submicron precision flexible micro-motion system according to claim 2, characterized in that:
the first body with all be provided with a plurality of fixed subassemblies on the second body at intervals, just the first body with a plurality of fixed subassemblies symmetry on the second body set up.
4. The submicron precision flexible micro-motion system according to claim 3, characterized in that:
the fixing assembly is countersunk head screws, the number of the fixing assembly is nine, four countersunk head screws are arranged on the first body, four countersunk head screws are symmetrically arranged on the second body, and the remaining countersunk head screws are arranged on symmetrical shafts of the first body and the second body.
5. The submicron precision flexible micro-motion system according to claim 4, characterized in that:
the countersunk head screw is an M4 countersunk head screw.
6. The submicron precision flexible micro-motion system according to claim 1, characterized in that:
the driver is a piezoceramic actuator.
7. The submicron precision flexible micro-motion system according to claim 1, characterized in that:
the radius of the straight round flexible hinge is 3mm, and the minimum distance is 1mm.
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