CN208707550U - A kind of accurate diminution flexible micro system - Google Patents
A kind of accurate diminution flexible micro system Download PDFInfo
- Publication number
- CN208707550U CN208707550U CN201820715977.5U CN201820715977U CN208707550U CN 208707550 U CN208707550 U CN 208707550U CN 201820715977 U CN201820715977 U CN 201820715977U CN 208707550 U CN208707550 U CN 208707550U
- Authority
- CN
- China
- Prior art keywords
- flexible hinge
- flexible
- hinge
- fine motion
- diminution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Prostheses (AREA)
Abstract
The utility model provides a kind of accurate diminution flexible micro system, is related to microoperation technical field.Precision reduces the flexure hinge mechanism that flexible micro system includes mechanism body, driver and 24 straight round flexible hinge compositions.It connect at the top of microdrive and mechanism hollow part, is connected to power supply by controller.Based on lever principle and flexible guiding, transmission principle, guarantee that driver is not subject to cross force and torque during the motion using a part of flexible hinge, and do not generate the additional displacement in non-athletic direction, it is ensured that the accuracy and stationarity of mechanism body movement；Precision drive and diminution are carried out using the movement Δ u that another part flexible hinge inputs fine motion input mechanism, the output of fine motion output mechanism is made to reduce displacement v.The system have straight-line displacement can accurately be reduced, can accurately adjust according to actual needs diminution ratio, do not generate non-athletic direction additional displacement, structure it is simple, it is easily controllable, improve kinematic accuracy, function admirable the advantages that.
Description
Technical field
The utility model relates to microoperation technical fields, in particular to a kind of accurate diminution flexible micro system.
Background technique
With the fast development of nanometer technique, in micro mechanical system, micro-electronic machining, bioengineering, life medicine,
The precision positioning technology performance in multiple microoperation fields such as aerospace and optics, high position precision, high Motion Resolution rate is focused on
The effect wanted.How integrated design obtains having become both at home and abroad with the precisely locating platform of high-precision, big stroke, quick response
The hot spot of research field.
It is concentrated mainly on to the research of flexible displacement reduction system at present and is displaced the statics such as drawdown ratio, input rigidity
Can modeling and optimization design, the circular arc type flexible hinge for mostly using form of cut or cuts single greatly in system；Majority, which concentrates on, to be reduced
The research of type micromotion mechanism, it is less to displacement output scaled-down version fine motion system research.Meanwhile diminution fine motion system can be by input displacement
It reduces by a certain percentage, can be obtained lesser output displacement also and the positioning accuracy of micro-displacement can be improved.Therefore, it contracts to precision
Small flexible micro system aspects research has practical significance.
Utility model content
The purpose of this utility model is to provide a kind of accurate diminution flexible micro systems, and straight-line displacement accurately can be contracted
It is small, the additional displacement in non-athletic direction can't be generated, and diminution ratio can be adjusted according to actual needs.Meanwhile the essence
Close diminution flexible micro system maximum reduces error amount and meets design requirement, with excellent dynamic for 0.117 μm, intensity
Can, accuracy and validity with higher.
The utility model is realized in this way:
A kind of accurate diminution flexible micro system, comprising:
Mechanism body, mechanism body have fine motion input mechanism and fine motion output mechanism, and fine motion input mechanism is for defeated
Enter to move Δ u, fine motion output mechanism reduces displacement v for exporting；
Driver, driver are set to mechanism body, and for providing moving displacement, fine motion input for fine motion input mechanism
Mechanism is used for input motion Δ u under the driving effect of driver；
The flexure hinge mechanism of multiple straight round flexible hinge compositions, multiple straight round flexible hinges are symmetrically disposed on mechanism
Ontology, and multiple straight round flexible hinges include first group of flexible hinge and second group of flexible hinge, first group of flexible hinge is used
It is not subject to cross force and torque during the motion in guarantee driver, and does not generate the additional displacement in non-athletic direction, it is ensured that
The accuracy and stationarity of mechanism body movement；The movement Δ u that second group of flexible hinge is used to input fine motion input mechanism into
Row precision drive and diminution, so that fine motion output mechanism reduces displacement v for exporting.
Further, in the preferred embodiment of the utility model, the quantity of multiple straight round flexible hinges is 24
It is a, and first group of flexible hinge has 12 straight round flexible hinges, second group of flexible hinge is straight round soft with 12
Property hinge.
Further, in the preferred embodiment of the utility model, the straight round flexibility of 12 of first group of flexible hinge
Hinge is symmetrically distributed in driver two sides.
Further, in the preferred embodiment of the utility model, mechanism body have symmetrically arranged the first noumenon with
Second ontology, and 12 straight round flexible hinges are provided on the first noumenon, be provided on the second ontology 12 it is straight round
Flexible hinge, symmetrical straight round flexible hinge drive for forming shaft flexible hinge, shaft flexible hinge for guaranteeing
Dynamic device is not subject to the power in non-athletic direction.
Further, in the preferred embodiment of the utility model, the straight round flexibility of 12 of first group of flexible hinge
In hinge, six of them is set to the first noumenon, and in addition six are set to the second ontology；12 of second group of flexible hinge are straight
In round flexible hinge, six of them is set to the first noumenon, and in addition six are set to the second ontology.
Further, it in the preferred embodiment of the utility model, is arranged at intervals on the first noumenon and the second ontology
Multiple fixation kits, and multiple fixation kits on the first noumenon and the second ontology are symmetrical arranged.
Further, in the preferred embodiment of the utility model, fixation kit is sunk screw, the number of fixation kit
It is six, wherein three sunk screws are set to the first noumenon, the other three sunk screw is symmetrically disposed on the second ontology.
Further, in the preferred embodiment of the utility model, sunk screw is M4 sunk screw.
Further, in the preferred embodiment of the utility model, driver is piezoelectric actuator.
Further, in the preferred embodiment of the utility model, the radius of straight round flexible hinge is 3mm, and most
Small distance is 1mm.
Above scheme the utility model has the advantages that
The utility model provide it is a kind of it is accurate reduce flexible micro system, including mechanism body, driver and multiple
The flexure hinge mechanism of straight round flexible hinge composition.Wherein, mechanism body is that the movement of each component provides the foundation with installation
With guarantee, mechanism body has fine motion input mechanism and fine motion output mechanism, and fine motion input mechanism is used for input motion Δ u,
Fine motion output mechanism reduces displacement v for exporting.Meanwhile driver is set to mechanism body, and for inputting machine for fine motion
Structure provides moving displacement, and fine motion input mechanism is used for input motion Δ u under the driving effect of driver.Driver is mainly used for
Driving force is provided for fine motion input mechanism, fine motion output mechanism is allowed to export the movement Δ v after reducing.Also, it is multiple straight
Round flexible hinge is symmetrically disposed on mechanism body, and multiple straight round flexible hinges include first group of flexible hinge and second group
Flexible hinge, first group of flexible hinge are not generated for guaranteeing that driver is not subject to cross force and torque during the motion
The additional displacement in non-athletic direction, it is ensured that the accuracy and stationarity of mechanism body movement；Second group of flexible hinge is used for will be micro-
The movement Δ u of dynamic input mechanism input carries out precision drive and diminution, so that fine motion output mechanism reduces displacement for exporting
Δv.First group of flexible hinge has fully ensured that the robust motion of mechanism body, while ensuring driver during the motion not
Cross force and torque are born, and does not generate the additional displacement in non-athletic direction.Second group of flexible hinge structure is in first group of flexibility
The precision drive and diminution being displaced on the basis of linkage, final output reduce displacement v.
In conclusion the precision, which reduces flexible micro system, accurately to reduce straight-line displacement, can't generate non-athletic
The additional displacement in direction, and diminution ratio can be adjusted according to actual needs.Meanwhile the precision reduces flexible micro system most
It is big to reduce that error amount is 0.117 μm, intensity meets design requirement, with excellent dynamic property, accuracy with higher and
Validity.
Detailed description of the invention
It, below will be to use required in embodiment in order to illustrate more clearly of the technical solution of the utility model embodiment
Attached drawing be briefly described, it should be understood that the following drawings illustrates only some embodiments of the utility model, therefore should not be by
Regard the restriction to range as, for those of ordinary skill in the art, without creative efforts, may be used also
To obtain other relevant attached drawings according to these attached drawings.
Fig. 1 is that the accurate structure for reducing flexible micro system under the first visual angle that the embodiments of the present invention provide is shown
It is intended to；
Fig. 2 is that the accurate structure for reducing flexible micro system under the second visual angle that the embodiments of the present invention provide is shown
It is intended to；
Fig. 3 is the accurate imprint surface figure for reducing flexible micro system that the embodiments of the present invention provide；
Fig. 4 is the accurate FEM meshing model for reducing flexible micro system that the embodiments of the present invention provide
Figure；
Fig. 5 is that the precision that the embodiments of the present invention provide reduces in flexible micro system, when input value is 1 μm
System motion Finite element analysis results figure；
Fig. 6 is input value Δ u and output valve in the accurate diminution flexible micro system that the embodiments of the present invention provide
The relation line schematic diagram of Δ v；
Fig. 7 is the accurate maximum analog stress analysis for reducing flexible micro system that the embodiments of the present invention provide
Figure；
Fig. 8 is the intrinsic frequency figure for accurate preceding 6 rank for reducing flexible micro system that the embodiments of the present invention provide.
Icon: 100- precision reduces flexible micro system；101- mechanism body；103- fine motion output mechanism；105- fine motion
Input mechanism；107- driver；First group of flexible hinge of 109-；Second group of flexible hinge of 111-；The first flexible hinge of 1-；2-
Two flexible hinges；3- third flexible hinge；The 4th flexible hinge of 4-；The 5th flexible hinge of 5-；The 6th flexible hinge of 6-；7- the 7th
Flexible hinge；The 8th flexible hinge of 8-；The 9th flexible hinge of 9-；The tenth flexible hinge of 10-；The 11st flexible hinge of 11-；12-
12nd flexible hinge；The 13rd flexible hinge of 13-；The 14th flexible hinge of 14-；The 15th flexible hinge of 15-；16- the tenth
Six flexible hinges；The 17th flexible hinge of 17-；The 18th flexible hinge of 18-；The 19th flexible hinge of 19-；20- the 20th is soft
Property hinge；The 21st flexible hinge of 21-；The 22nd flexible hinge of 22-；The 23rd flexible hinge of 23-；24- the 20th
Four flexible hinges；115- the first noumenon；The second ontology of 117-；119- sunk screw.
Specific embodiment
It is practical new below in conjunction with this to keep the objectives, technical solutions, and advantages of the embodiments of the present invention clearer
Attached drawing in type embodiment, the technical scheme in the utility model embodiment is clearly and completely described, it is clear that is retouched
The embodiment stated is the utility model a part of the embodiment, instead of all the embodiments.Usually here in attached drawing description and
The component of the utility model embodiment shown can be arranged and be designed with a variety of different configurations.Therefore, below to attached
The detailed description of the embodiments of the present invention provided in figure is not intended to limit the range of claimed invention,
But it is merely representative of the selected embodiment of the utility model.Based on the embodiments of the present invention, ordinary skill people
Member's every other embodiment obtained without creative efforts, belongs to the model of the utility model protection
It encloses.
It should also be noted that similar label and letter indicate similar terms in following attached drawing, therefore, once a certain Xiang Yi
It is defined in a attached drawing, does not then need that it is further defined and explained in subsequent attached drawing.
In the description of the utility model embodiment, it should be noted that term " center ", "upper", "lower", " left side ",
The orientation or positional relationship of the instructions such as " right side ", "vertical", "horizontal", "inner", "outside" is orientation based on the figure or position
Relationship or the utility model product using when the orientation or positional relationship usually put, be merely for convenience of describing this reality
It is described with novel with simplified, rather than the device or element of indication or suggestion meaning must have a particular orientation, with specific
Orientation construction and operation, therefore should not be understood as limiting the present invention.In addition, term " first ", " second ", " third "
It is described etc. being only used for distinguishing, is not understood to indicate or imply relative importance.
In the description of the utility model embodiment, it is also necessary to which explanation is unless specifically defined or limited otherwise, art
Language " setting ", " installation ", " connected ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, be also possible to detachable
Connection, or be integrally connected；It can be mechanical connection, be also possible to be electrically connected；It can be directly connected, centre can also be passed through
Medium is indirectly connected, and can be the connection inside two elements.It for the ordinary skill in the art, can specific feelings
Condition understands the concrete meaning of above-mentioned term in the present invention.
In the present invention unless specifically defined or limited otherwise, fisrt feature is on or below second feature
It may include that the first and second features directly contact, also may include that the first and second features are not direct contacts but pass through it
Between other characterisation contact.Moreover, fisrt feature is on second feature, top and above include fisrt feature the
Right above two features and oblique upper, or first feature horizontal height is merely representative of higher than second feature.Fisrt feature is in the second spy
Under sign, lower section and fisrt feature included below be directly below and diagonally below the second feature, or be merely representative of fisrt feature level
Height is less than second feature.
Fig. 1 is the accurate structural schematic diagram for reducing flexible micro system 100 under the first visual angle provided in this embodiment；Figure
2 be the accurate structural schematic diagram for reducing flexible micro system 100 under the second visual angle provided in this embodiment.Please refer to Fig. 1 with
Fig. 2, present embodiments provides a kind of accurate diminution flexible micro system 100, which reduces the shape of flexible micro system 100
Having a size of 160mm × 196mm × 50mm (length × width × height), and it includes: mechanism body that the precision, which reduces flexible micro system 100,
101, the flexure hinge mechanism of driver 107 and multiple straight round flexible hinge compositions.
Specifically, referring to Fig. 1 and Fig. 2, in the present embodiment, mechanism body 101 is the movement and peace of each component
Dress provides the foundation and guarantees, mechanism body 101 has fine motion input mechanism 105 and fine motion output mechanism 103, fine motion input
Mechanism 105 is used for input motion Δ u, and fine motion output mechanism 103 reduces displacement v for exporting.
Specifically, referring to Fig. 1 and Fig. 2, in the present embodiment, driver 107 is set to mechanism body 101, and
For providing moving displacement for fine motion input mechanism 105, fine motion input mechanism 105 is used under the driving effect of driver 107
Input motion Δ u.Driver 107 is mainly used for providing driving force for fine motion input mechanism 105, so that fine motion output mechanism 103
The movement Δ v after reducing can be exported.
Simultaneously, it should be noted that in the embodiments of the present invention, precision reduces flexible micro system 100 and also wraps
The controller connecting with driver 107 is included, controller is used to control the movement of driver 107.
Specifically, referring to Fig. 1 and Fig. 2, in the present embodiment, multiple straight round flexible hinges are symmetrically disposed on machine
Structure ontology 101.Flexible hinge transmits energy and displacement using the plastic deformation of its structural weak some materials, has very
Good transmission and guiding role can be applied to the high-tech area of many accurate and ultraprecise movements.According to flexible hinge
The formed shape of weak part is different, and common flexible hinge can be divided into: straight round flexible hinge, is thrown circular arc type flexible hinge
Object line style flexible hinge, rectangle type flexible hinge etc..It the flexibility of different type flexible hinge, transmission accuracy and can bear most
The performances such as big stress are different: rectangle type flexible hinge has best flexibility and rotating range, but transmission accuracy is not high, rotation
There is movement at center during rotation；Circular arc type flexible hinge has very high kinematic accuracy, however its flexibility is excessively poor,
Motion range is smaller, is confined to a small range movement；The data of straight round flexible hinge and parabolic type flexible hinge between
Between the hinge of both the above type, demand of both kinematic accuracy and motion range can be taken into account to a certain extent,
In have many advantages, such as that the straight round flexible hinge that structure is simple, easy to process is the most-often used seed type of flexible hinge.
In detail, in the present embodiment, multiple straight round flexible hinges include that first group of flexible hinge 109 and second group are soft
Property hinge 111, first group of flexible hinge 109 for guaranteeing that driver 107 is not subject to cross force and torque during the motion, and
The additional displacement in non-athletic direction is not generated, it is ensured that the accuracy and stationarity that mechanism body 101 moves；Second group of flexible hinge
The 111 movement Δ u for inputting fine motion input mechanism 105 carries out precision drive and diminution, so that fine motion output mechanism 103
Displacement v is reduced for exporting.First group of flexible hinge 109 has fully ensured that the robust motion of mechanism body 101, while really
It protects driver 107 and is not subject to cross force and torque during the motion, and do not generate the additional displacement in non-athletic direction.Second group
The precision drive and diminution that 111 structure of flexible hinge is displaced on the basis of first group of 109 mechanism of flexible hinge, finally
Displacement v is reduced in output.
In detail, referring to Fig. 1 and Fig. 2, the quantity of multiple straight round flexible hinges is 24, and first group
Flexible hinge 109 has 12 straight round flexible hinges, and second group of flexible hinge 111 has 12 straight round flexible hinges
Chain.Wherein, first group of flexible hinge 109 is soft including the first flexible hinge 1, the second flexible hinge 2, third flexible hinge the 3, the 4th
Property hinge 4, the 5th flexible hinge 5, the 6th flexible hinge 6, the 7th flexible hinge 7, the 8th flexible hinge 8, the 9th flexible hinge
9, the tenth flexible hinge 10, the 11st flexible hinge 11 and the 12nd flexible hinge 12.The 12 of first group of flexible hinge 109
A straight round flexible hinge is symmetrically distributed in 107 two sides of driver.Second group of flexible hinge 111 includes the 13rd flexible hinge
13, the 14th flexible hinge 14, the 15th flexible hinge 15, the 16th flexible hinge 16, the 17th flexible hinge the 17, the 18th
Flexible hinge 18, the 19th flexible hinge 19, the 20th flexible hinge 20, the 21st flexible hinge the 21, the 22nd are flexible
Hinge 22, the 23rd flexible hinge 23 and the 24th flexible hinge 24.
Also, in the present embodiment, the first flexible hinge 1 is oppositely arranged with the second flexible hinge 2.Third flexible hinge 3
It is oppositely arranged with the 4th flexible hinge 4, and is located at the lower section of first flexible hinge 1 and the second flexible hinge 2.5th is flexible
Hinge 5 is oppositely arranged with the 6th flexible hinge 6, and is located at the lower section of third flexible hinge 3 and the 4th flexible hinge 4.Likewise,
7th flexible hinge 7 is oppositely arranged with the 8th flexible hinge 8, and is located at pair of the first flexible hinge 1 and the second flexible hinge 2
Side.9th flexible hinge 9 is oppositely arranged with the tenth flexible hinge 10, and is located at the 7th flexible hinge 7 and the 8th flexible hinge 8
Lower section, positioned at the opposite side of third flexible hinge 3 and the 4th flexible hinge 4.11st flexible hinge 11 and the 12nd flexible hinge
12 are oppositely arranged, and are located at the lower section of the 9th flexible hinge 9 and the tenth flexible hinge 10, are located at the 5th flexible hinge 5 and the 6th
The opposite side of flexible hinge 6.13rd flexible hinge 13 is oppositely arranged with the 14th flexible hinge 14.15th flexible hinge 15 with
16th flexible hinge 16 is oppositely arranged, and is located at the right side of the 13rd flexible hinge 13 and the 14th flexible hinge 14.Tenth
Seven flexible hinges 17 are oppositely arranged with the 18th flexible hinge 18, and are located at the 15th flexible hinge 15 and the 16th flexible hinge
16 right side.19th flexible hinge 19 and the 20th flexible hinge 20 are oppositely arranged and are located at the 17th flexible hinge 17 and the
The right side of 18 flexible hinges 18.21st flexible hinge 21 is oppositely arranged with the 22nd flexible hinge 22, and is located at the
13 flexible hinges 13, the 14th flexible hinge 14, the 15th flexible hinge 15, the 16th flexible hinge the 16, the 17th are flexible
The top of hinge 17, the 18th flexible hinge 18, the 19th flexible hinge 19 and the 20th flexible hinge 20.23rd is soft
Property hinge 23 and the 24th flexible hinge 24 be oppositely arranged and be located at the 21st flexible hinge 21 and the 22nd flexible hinge
The right side of chain 22.
First flexible hinge 1, the second flexible hinge 2, third flexible hinge 3, the 4th flexible hinge 4, the 5th flexible hinge
5, the 6th flexible hinge 6, the 7th flexible hinge 7, the 8th flexible hinge 8, the 9th flexible hinge 9, the tenth flexible hinge the 10, the tenth
One flexible hinge 11 and the 12nd flexible hinge 12 are for guaranteeing that driver 107 is not subject to cross force and power during the motion
Square, and the additional displacement in non-athletic direction is not generated, it is ensured that the accuracy and stationarity that mechanism body 101 moves.13rd is soft
Property hinge 13, the 14th flexible hinge 14, the 15th flexible hinge 15, the 16th flexible hinge 16, the 17th flexible hinge 17,
18th flexible hinge 18, the 19th flexible hinge 19, the 20th flexible hinge 20, the 21st flexible hinge the 21, the 20th
Two flexible hinges 22, the 23rd flexible hinge 23 and the 24th flexible hinge 24 are used for fine motion input mechanism 105 is defeated
The movement Δ u entered carries out precision drive and diminution, so that fine motion output mechanism 103 reduces displacement v for exporting.
In further detail, in the present embodiment, mechanism body 101 has symmetrically arranged the first noumenon 115 and second
Ontology 117, and 12 straight round flexible hinges are provided on the first noumenon 115,12 are provided on the second ontology 117 directly
Round flexible hinge.Wherein, according to sequence from top to bottom and from left to right, the 21st flexible hinge the 21, the 22nd
Flexible hinge 22, the 13rd flexible hinge 13, the 14th flexible hinge 14, the 15th flexible hinge 15, the 16th flexible hinge
16, the first flexible hinge 1, the second flexible hinge 2, third flexible hinge 3, the 4th flexible hinge 4, the 5th flexible hinge 5 and
6th flexible hinge 6 is respectively positioned on the first noumenon 115.23rd flexible hinge 23, the 24th flexible hinge the 24, the 17th
Flexible hinge 17, the 18th flexible hinge 18, the 19th flexible hinge 19, the 20th flexible hinge 20, the 7th flexible hinge 7,
8th flexible hinge 8, the 9th flexible hinge 9, the tenth flexible hinge 10, the 11st flexible hinge 11 and the 12nd flexible hinge
12 are symmetrically disposed on the second ontology 117.Symmetrical straight round flexible hinge on the first noumenon 115 and the second ontology 117
Chain is for forming shaft flexible hinge, and shaft flexible hinge is for guaranteeing that driver 107 is not subject to the power in non-athletic direction.
Referring to Fig. 1 and Fig. 2, in the present embodiment, interval setting on the first noumenon 115 and the second ontology 117
There are multiple fixation kits, and multiple fixation kits on the first noumenon 115 and the second ontology 117 are symmetrical arranged.Fixation kit is
Sunk screw 119, the number of fixation kit is six, wherein three sunk screws 119 are set to the first noumenon 115, in addition three
A sunk screw 119 is symmetrically disposed on the second ontology 117.
As a preferred option, in the present embodiment, sunk screw 119 is M4 sunk screw 119.Driver 107 is pressure
Electroceramics actuator.And the radius of straight round flexible hinge is 3mm, and minimum range is 1mm.It establishes as shown in Figure 2
Rectangular coordinate system, after mechanism is fixed by 6 M4 sunk screws 119, fine motion is defeated under the driving of the driver 107 of hollow part
Entering mechanism 105 has movement input Δ u, in the case where transmission, the diminution of flexible hinge 13~24 act on, in fine motion output mechanism 103
It is equipped with certain displacement relative to initial bit, reduces displacement v to export.In the process, flexible hinge 1-12 is due to flexibility
The guiding role of hinge and the symmetry principle of mechanism guarantee that driver 107 is not subject to cross force and torque during the motion, and
The additional displacement in non-athletic direction (y to for the direction of motion) is not generated, it is ensured that the accuracy and stationarity of mechanism kinematic.
Simultaneously, it should be noted that fine motion system can pass through the reversible elasticity of vulnerable area material using flexible hinge
Deformation come generate movement or transmitting energy, the finite angular displacements of around hinge center rotating can be provided, have well guiding,
Transmission and conversion function, the elasticity of material, plastic property have decisive role to realization above functions, so the selection of material
Having great influence is realized for the guiding of flexible hinge, transmission and conversion function.
Fine motion system includes 24 symmetrical flexible hinges, therefore is considered as when the selection of material no more than material
Maximum deformation is obtained under the premise of the plastic deformation limit, also needs the processing problems for considering compliant mechanism, therefore selecting elasticity
To be comprehensively considered when on the material of hinge.Existing research thinks that QBe2,60Si2Mn, 65Mn are that flexible hinge is ideal
Material, the material parameter of these types of material is shown in Table 1.Comprehensively consider each parameter of material and domestic and international flexible hinge materials'use
Experience, the rapidoprint using spring steel material 60Si2Mn as fine motion system, and use wire cutting method to be processed with
Guarantee the Precision Machining of mechanism.
1 flexible hinge material parameter of table
Simultaneously, it should be noted that microdrive 107 uses piezoelectric actuator, and piezoelectric actuator is to utilize
The inverse piezoelectric effect of piezoelectric material and a kind of micro drives element designed can be generated in voltage effect lower piezoelectric ceramic actuator
Several microns to tens microns of displacement can be used to carry out mechanism micro precision actuation.Since it is with high resolution, response
Fastly, the features such as small in size, High power output, piezoelectric actuator is in space flight, aviation, microelectronics industry, machinery, robot, essence
The fields such as close measurement, Precision Machining, national defence are widely used.
According to system to component size, power output, output displacement needs, select Germany general love nanometer displacement technology PI
The model P-235.10 piezoelectric actuator of company, important technological parameters are shown in Table 2.
2. piezoelectric actuator important technological parameters of table
Also, in the present embodiment, in order to determine the precision reduce flexible micro system 100 accuracy and reasonability.
Flexible micro system 100 is reduced to the precision and has carried out kinematics analysis.The precision reduces flexible micro system 100 can be according to reality
Border needs autonomous Design drawdown ratio, designs actual conditions according to the present embodiment herein and calculates drawdown ratio.It is former in system as shown in Figure 2
Manage in figure, when input point is displaced the c being transmitted to by Δ u in figure, by lever principle and similar triangles theory it can be concluded that
The displacement v and the 17th flexible hinge the 17 and the 18th of 23rd flexible hinge 23 and the 24th flexible hinge 24 are flexible
The displacement u ratio of hinge 18 is equal to the 19th flexible hinge 19 and 20 center line of the 20th flexible hinge and the 23rd flexible hinge
The vertical range L1 and the 19th flexible hinge 19 of 24 center line of chain 23 and the 24th flexible hinge and the 20th flexible hinge
The vertical range L2 ratio of 20 center lines and the 17th flexible hinge 17 and 18 center line of the 18th flexible hinge, namelyThen the 23rd flexible hinge 23, the 24th flexible hinge 24 output displacement be that Δ v isL1=21mm, L2=42mm in microsystem design, so Δ v=0.5 Δ u.According to flexible hinge
Transmitting effect and symmetric relation it is found that fine motion output mechanism 103 shifts up at c in y as 0.5 Δ u, and anhydrous square
To displacement.Therefore, it is 0.5 which, which reduces the design minification of flexible micro system 100, and without additional displacement.Meanwhile this reality
The accurate flexible micro system 100 that reduces for applying example offer can adjust the transformation that drawdown ratio is realized in structure design, this reality as needed
Without limitation with novel embodiment.
Fig. 3 is the accurate imprint surface figure for reducing flexible micro system 100 provided in this embodiment.Referring to Fig. 3, at this
In embodiment, in order to which the movenent performance to system is analyzed, kinematics analysis is carried out to it using finite element static module.
The 3-D graphic for reducing flexible micro system is converted to x_t format to import in finite element software again, contour structure size
160mm × 150mm × 50mm (length × width × height) adds 60Si2Mn parameter in material properties.It is loaded to apply to system
Condition is convenient, before grid dividing, according to the shape of piezoelectric actuator and the contact area on fine motion system memory surface
An imprint surface is made in fine motion system, as shown in Figure 3.
Fig. 4 is the accurate FEM meshing illustraton of model for reducing flexible micro system 100 provided in this embodiment.It please join
Fig. 4 is read, it is finer in order to make to analyze result, in FEM meshing, grid is carried out certainly to whole system model first
By dividing, grid cell refinement point then is carried out to 48 cylindrical surfaces of 24 flexible hinges again, it is final to divide the node completed
1878027, grid number 1117673, grid dividing model such as Fig. 3 can be shown in the key position grid dividing to system by figure
It is thinner and smooth, no intersection or fracture net, so grid dividing quality is good.
Fig. 5 is the system fortune when input value is 1 μm in accurate diminution flexible micro system 100 provided in this embodiment
Dynamic Finite element analysis results figure.Referring to Fig. 5, applying to 6 threaded hole cylindrical surfaces of system and fixing about when carrying out constraint
Beam applies displacement condition in the positive direction of the y-axis at the stamp positions made before, every time can after input system applies displacement
An output displacement is obtained in output system.For example, can use probe when to applying one 1 μm of input displacement at the marking
The output displacement that function calculating goes out output system outer surface center is 0.4922 μm, such as Fig. 4.System motion range (i.e.
Piezoelectric actuator elongation range) it is 0~15 μm, calculate separately the system output displacement value of 15 input displacements.System
The results are shown in Table 3 for the kinematics analysis of system.
The analysis of 3. fine motion system kinematics of table
By micro actuator kinematics analysis result it is found that system error is only 1.56% during exercise, system maximum miss
Poor 7.5 μm of * 1.56%=0.117 μm, it was demonstrated that system designs accuracy with higher and positioning accuracy can reach submicron order.
Fig. 6 is the pass of input value Δ u and output valve Δ v in accurate diminution flexible micro system 100 provided in this embodiment
Anchor line (string) schematic diagram.Referring to Fig. 6, finite element analysis and theoretical analysis result are compared, designed precision is reduced soft
Property fine motion system 100 carry out analysis examination, finite element simulation and theoretical analysis result are as shown in table 3, simulation result and it is theoretical most
Big output displacement is respectively 7.3833 μm, 7.5 μm, and output displacement almost approaches, and error is smaller, by finite element simulation and theoretical point
Analysis result carries out input value Δ u to fine motion swing mechanism with MATLAB respectively and output valve Δ v is fitted to linear equation, inputs
It is worth Δ u and the relationship Linear Fit Chart of output valve Δ v is as shown in Figure 6.Analyzing the linear equation being fitted to kinematical theory is
Δ v=0.500 Δ u, the linearity 1.Linear equation to kinematics finite element analysis fitting is Δ v=0.492 Δ u,
Its linearity is 1.As shown from the above formula, which reduces motion theory analysis and the finite element fraction of flexible micro system 100
It analyses matched curve closely and the linearity is fine, therefore, which, which reduces the movement of flexible micro system 100, has very high essence
True property and the linearity.
Fig. 7 is the accurate maximum analog stress analysis figure for reducing flexible micro system 100 provided in this embodiment.It please refers to
Fig. 7, in the present embodiment, the precision reduce 100 intensive analysis Main Analysis fine motion system of flexible micro system in driver 107
Driving under whether can destroy, it is therefore desirable to calculate under piezoelectric actuator maximum drive displacement that fine motion system motion is most
Big simulation stress, so that it is determined that whether the system meets the requirement that material checks intensity.
Analysis is carried out in finite element static module, and import system model carries out imprinting mark, grid dividing, to model
Apply constraint (homologous ray kinematics analysis), then apply y-axis maximum 15 μm of displacement forward at the marking, Stress Map is as schemed
7, it is seen that the system maximum analog stress is 57.412MPa.The allowable stress of material is60Si2Mn is surrendered into pole
Limit σ s is 1176MPa, sets safety coefficient λ as 1.5, and carrying it into above-mentioned formula and finding out material allowable stress [σ] is 784MPa.
And system maximum analog stress is 175.2MPa, is much smaller than material allowable stress.The system known to static finite element analysis
Safe and reliable during the motion, fine motion system maximum stress meets material and checks intensity requirement, and therefore, system strength performance is good
It is good.
Fig. 8 is the intrinsic frequency figure of accurate preceding 6 rank for reducing flexible micro system 100 provided in this embodiment.It please refers to
Whether Fig. 8 can resonate to judge system during the motion, the intrinsic frequency to fine motion system is needed to analyze,
To complete the Dynamic Performance Analysis of system.Finite element modal module is used when analysis, and unconfined condition is carried out to fine motion system
Free Modal Analysis, model pre-processing and grid dividing are similar to system kinematics analysis.The preceding intrinsic frequency of 6 rank of fine motion system
Rate such as Fig. 7, the first six rank intrinsic frequency be respectively as follows: 521.83Hz, 718.4Hz, 1013.2Hz, 1123.5Hz, 1564.5Hz,
1971.3Hz.Since, system drives fine motion system using P235.10 piezoelectric actuator, and P225.10 piezoelectric ceramic actuator
Device largest motion revolving speed is that 2r/s i.e. largest motion frequency is 2Hz.System fine motion system largest motion frequency during the motion
For 2Hz, and first natural frequency is 521.83Hz, and largest motion frequency is much smaller than the intrinsic frequency of single order during system motion
Rate, system will not resonate.Therefore, system will not resonate during the motion, and system has excellent dynamic property.
In conclusion the accurate diminution flexible micro system 100 that the embodiments of the present invention provide, the movement to system
Performance, strength character, dynamic property are analyzed, and analysis result display system has preferable correlated performance.Conclusion is as follows:
(1) a kind of accurate diminution flexible micro system is proposed based on lever principle and flexible hinge guiding, transmission principle
100 design scheme, the system can accurately reduce straight-line displacement, can't generate non-athletic direction additional displacement, and can root
Diminution ratio is adjusted according to actual needs.
(2) movenent performance, strength character, Dynamic Performance Analysis have been carried out respectively to the system using limited element analysis technique,
Analysis shows that system maximum reduces, error amount is 0.117 μm, intensity meets design requirement, with excellent dynamic property, analysis
As a result system design accuracy and validity are demonstrated.
The above descriptions are merely preferred embodiments of the present invention, is not intended to limit the utility model, for this
For the technical staff in field, various modifications and changes may be made to the present invention.It is all in the spirit and principles of the utility model
Within, any modification, equivalent replacement, improvement and so on should be included within the scope of protection of this utility model.
Claims (5)
1. a kind of accurate diminution flexible micro system characterized by comprising
Mechanism body, the mechanism body have fine motion input mechanism and fine motion output mechanism, and the fine motion input mechanism is used
In input motion Δ u, using lever principle, the fine motion output mechanism reduces displacement v for exporting；
Driver, the driver are set to the mechanism body, and for providing moving displacement for the fine motion input mechanism,
The fine motion input mechanism is used for input motion Δ u under the driving effect of the driver；
The flexure hinge mechanism of multiple straight round flexible hinge compositions, multiple straight round flexible hinges are symmetrically disposed on described
Mechanism body, and multiple straight round flexible hinges include first group of flexible hinge and second group of flexible hinge, described first group is soft
Property hinge for guaranteeing that driver is not subject to cross force and torque during the motion, and do not generate the extra order in non-athletic direction
It moves, it is ensured that the accuracy and stationarity of the mechanism body movement；Second group of flexible hinge is for inputting the fine motion
The movement Δ u of mechanism input carries out precision drive and diminution, so that the fine motion output mechanism reduces displacement for exporting
v；
Wherein, the quantity of multiple straight round flexible hinges is 24, and first group of flexible hinge has 12
A straight round flexible hinge, second group of flexible hinge have 12 straight round flexible hinges.
2. accurate diminution flexible micro system according to claim 1, it is characterised in that:
The straight round flexible hinge of 12 of first group of flexible hinge is symmetrically distributed in the driver two sides.
3. accurate diminution flexible micro system according to claim 1, it is characterised in that:
The mechanism body has symmetrically arranged the first noumenon and the second ontology, and 12 are provided on the first noumenon
The straight round flexible hinge is provided with 12 straight round flexible hinges on second ontology, and symmetrical is straight
For round flexible hinge for forming shaft flexible hinge, the shaft flexible hinge is non-athletic for guaranteeing that driver is not subject to
The power in direction.
4. accurate diminution flexible micro system according to claim 3, it is characterised in that:
In the straight round flexible hinge of 12 of first group of flexible hinge, six of them is set to the first
Body, in addition six are set to second ontology；In the straight round flexible hinge of 12 of second group of flexible hinge,
Six of them is set to the first noumenon, and in addition six are set to second ontology.
5. accurate diminution flexible micro system according to claim 4, it is characterised in that:
Be arranged at intervals with multiple fixation kits on the first noumenon and second ontology, and the first noumenon with it is described
Multiple fixation kits on second ontology are symmetrical arranged.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820715977.5U CN208707550U (en) | 2018-05-14 | 2018-05-14 | A kind of accurate diminution flexible micro system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820715977.5U CN208707550U (en) | 2018-05-14 | 2018-05-14 | A kind of accurate diminution flexible micro system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208707550U true CN208707550U (en) | 2019-04-05 |
Family
ID=65935650
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820715977.5U Expired - Fee Related CN208707550U (en) | 2018-05-14 | 2018-05-14 | A kind of accurate diminution flexible micro system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208707550U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108418464A (en) * | 2018-05-14 | 2018-08-17 | 西安科技大学 | A kind of accurate diminution flexible micro system |
-
2018
- 2018-05-14 CN CN201820715977.5U patent/CN208707550U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108418464A (en) * | 2018-05-14 | 2018-08-17 | 西安科技大学 | A kind of accurate diminution flexible micro system |
| CN108418464B (en) * | 2018-05-14 | 2024-01-19 | 西安科技大学 | Flexible micro-motion system capable of precisely shrinking |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102279101A (en) | Six-dimension force high-frequency fatigue testing machine and method for using same | |
| CN105404239B (en) | A kind of any attitude measuring method of five axles series-parallel machine tool Kinematic Calibration | |
| CN105006254A (en) | Large-stroke quick-response X-Y micro-motion workbench with double displacement magnification | |
| CN208707550U (en) | A kind of accurate diminution flexible micro system | |
| CN104268329A (en) | Joint simulation method for electro-hydraulic and piezoelectric driving macro and micro parallel mechanism | |
| CN101786269B (en) | Micrometer-nanometer transmission platform | |
| CN101003357B (en) | Method for making nano microstructure based on constant force mode of atomic force microscope | |
| CN108418464A (en) | A kind of accurate diminution flexible micro system | |
| CN208862769U (en) | A kind of submicron order precision flexible micro system | |
| CN105221335A (en) | A kind ofly reduce the shimmy intelligent controller of fan blade and method thereof | |
| Yang et al. | Development of a novel pile-up structure based nanopositioning mechanism driven by piezoelectric actuator | |
| CN108494285A (en) | A kind of accurate amplification flexible micro system | |
| CN108418465A (en) | A kind of submicron order precision flexible micro system | |
| CN201773112U (en) | Relocation system of AFM | |
| CN101673140B (en) | Four-branched-chain parallel six freedom degrees force feedback device | |
| CN111979110B (en) | Micro-target screening device based on multi-needle array vibration excitation fluid | |
| CN102930904B (en) | Micro-motion platform for improving resolution of linear motor based on flexible inclined beam | |
| CN113845085A (en) | Three-degree-of-freedom bidirectional movement precision positioning platform | |
| CN206732672U (en) | The fast tool servo device of two-axle interlocking | |
| CN206876166U (en) | A kind of three coordinate surveying instruments | |
| Deshmukh et al. | Conceptual design of a compliant pantograph | |
| Reddy et al. | Development of high speed closed loop operation for single notch flexure-based nanopositioning system | |
| CN110993039A (en) | Method for controlling molybdenum disulfide post-buckling morphology by kirigami based on molecular dynamics | |
| CN106881598A (en) | A kind of micro displacement workbench | |
| CN110008543A (en) | A kind of emulation mode for considering neutral axis of the beam and rotating beam dynamic response being influenced |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190405 Termination date: 20200514 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |