CN108381295B - A kind of ultra-precise cutting or milling based on film thickness measuring in place is to the skill in using a kitchen knife in cookery - Google Patents
A kind of ultra-precise cutting or milling based on film thickness measuring in place is to the skill in using a kitchen knife in cookery Download PDFInfo
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- CN108381295B CN108381295B CN201810163879.XA CN201810163879A CN108381295B CN 108381295 B CN108381295 B CN 108381295B CN 201810163879 A CN201810163879 A CN 201810163879A CN 108381295 B CN108381295 B CN 108381295B
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- milling
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q15/00—Automatic control or regulation of feed movement, cutting velocity or position of tool or work
- B23Q15/20—Automatic control or regulation of feed movement, cutting velocity or position of tool or work before or after the tool acts upon the workpiece
- B23Q15/22—Control or regulation of position of tool or workpiece
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The present invention discloses a kind of ultra-precise cutting based on film thickness measuring in place or milling to the skill in using a kitchen knife in cookery, and include the following steps: step 110: vacuum chuck is autotomyed；Step 120: the smooth processing of workpiece；Step 130: transparent membrane coating；Step 140: the smooth processing of film；Step 150: film thickness detection；Step 160: micro-nano technology；Step 170: film removal.Ultra-precise cutting or milling provided by the invention based on film thickness measuring in place makes that the true timing accuracy of cutter zero reference point is high, high-efficient, at low cost and Cutter wear is few to the skill in using a kitchen knife in cookery.
Description
Technical field
The present invention relates to ultra-precise cutting or Milling Process technical fields, are based on film thickness measuring in place more particularly to one kind
Ultra-precise cutting or milling to the skill in using a kitchen knife in cookery.
Background technique
Currently, mainly passing through in ultra-precise cutting or Milling Process, vehicle/milling is around-France to knife and vehicle/milling datum level method is to fine
The determination of cutter progress machining benchmark point.Vehicle/milling is around-France to knife to be referred to: when workpiece rotation, fine cutter is gradually to workpiece surface
Feeding, the feed-disabling when the annulus that can observe in surface vehicle/mill out human eye, and using the position of cutter at this time as subsequent plus
The zero reference point of work.Vehicle/milling datum level method refers to: before processing, first carrying out material removal process to the surface of workpiece, obtains one
A datum level, and using the position of cutter at this time as the zero reference point of following process.
Vehicle/milling is around-France to knife easy to operate, but there is error in principle.When can observe annulus in workpiece surface
When, actual zero reference point error is about 500nm.If the geometric accuracy of workpiece topography feature requires to be less than 500nm, by
In the presence of the datum error, it is impossible to realize that the precision is processed.
Error is not present in vehicle/milling datum level method from principle, but datum level will meet optical mirror surface requirement, therefore milling
It must be processed when processing with very low feed speed, processing efficiency is low, at high cost.In addition, when machined material is superhard
When material (monocrystalline silicon, silicon carbide, tungsten carbide etc.), in the process of datum level, the serious wear of cutter, it is difficult to ensure that high
The machining in quality criteria face, simultaneously because the abrasion of cutter also cannot achieve subsequent high quality machining.
Therefore we need a kind of precision high, high-efficient, at low cost and true to the cutter zero reference point for reducing tool wear
Determine method.
Summary of the invention
The object of the present invention is to provide a kind of ultra-precise cuttings based on film thickness measuring in place or milling to the skill in using a kitchen knife in cookery, to solve
The above-mentioned problems of the prior art, makes that the true timing accuracy of cutter zero reference point is high, high-efficient, at low cost and Cutter wear
It is few.
To achieve the above object, the present invention provides following schemes:
The present invention provides a kind of ultra-precise cutting based on film thickness measuring in place or milling to the skill in using a kitchen knife in cookery, includes the following steps；
Step 110: vacuum chuck is autotomyed: the vacuum chuck on machine tool chief axis is smooth by vehicle/Milling Process；
Step 120: the smooth processing of workpiece；By absorption of workpieces on machine tool chief axis, smooth processing is carried out to workpiece surface；
Step 130: transparent membrane coating；Transparent membrane is coated on to the work surface of workpiece；
Step 140: the smooth processing of film；Smooth processing is carried out to film surface using vehicle/milling cutter, then uses vehicle/milling again
Surface of the knife after smooth is got on the bus/one planar annular of milling, and will be set as datum mark Z by vehicle/milling cutter point of a knife Z coordinate at this time1；
Step 150: film thickness detection；Using the planar annular coating layer thickness of film in-situ measurement equipment measurement film, and remember
Record thickness T；
Step 160: micro-nano technology；According to thickness T, vehicle/milling cutter datum mark is set as Z0, and Z0=Z1- T, when processing is deep
When degree is the minutiae of D, only vehicle/milling cutter need to be fed D, geometric dimension micro-nano technology can be completed；
Step 170: film removal: the workpiece processed is placed in organic solvent and is dissolved, clean, dry after obtain table
Face has the workpieces processing of micro structure array.
Optionally, in-situ measurement equipment described in step 150 is ellipsometer, and the ellipsometer includes being located along the same line
Light source, the polarizer and wave plate, and be at an angle of with the line of the light source, the polarizer and wave plate analyzer, the photoelectricity of setting
Detector.
Optionally, the measurement accuracy of the ellipsometer is 0.1nm.
Optionally, the film is that the easy film-forming material of PMMA, PP, PVC, PS, PC or PET room temperature is made.
Optionally, the film is transparent membrane.
Optionally, vacuum chuck is installed on the machine tool chief axis, absorption of workpieces described in step 120 is inhaled in the vacuum
On disk.
Optionally, the vehicle/milling cutter includes lathe tool and milling cutter, and the lathe tool is arc lathe tool, and the milling cutter is planar ends
Milling cutter/rose cutter.
Ultra-precise cutting or milling provided by the invention based on film thickness measuring in place takes the skill in using a kitchen knife in cookery compared with the existing technology
Obtained following technical effect:
Ultra-precise cutting or milling provided by the invention based on film thickness measuring in place to the skill in using a kitchen knife in cookery in principle to knife-band come
Error in nanoscale, error is small, can ignore completely, therefore be able to satisfy realize high-precision size micro-cutting processing want
It asks；The time cost consumed when avoiding vehicle/milling datum level, improves processing efficiency, reduces processing cost；When processed
When material is superhard material, abrasion when this method also avoids vehicle/milling datum level to cutter, increase cutter uses the longevity
Life.
Detailed description of the invention
It in order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, below will be to institute in embodiment
Attached drawing to be used is needed to be briefly described, it should be apparent that, the accompanying drawings in the following description is only some implementations of the invention
Example, for those of ordinary skill in the art, without any creative labor, can also be according to these attached drawings
Obtain other attached drawings.
Fig. 1 is the work flow diagram the present invention is based on the ultra-precise cutting of film thickness measuring in place or milling to the skill in using a kitchen knife in cookery；
Description of symbols: 1 be workpiece, 2 be vacuum chuck, 3 be lathe tool, 4 be transparent membrane, 5 be milling cutter, 6 be it is ellipse partially
Instrument, 7 be light source, 8 be the polarizer, 9 be wave plate, 10 be analyzer, 11 be photodetector.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
The object of the present invention is to provide a kind of ultra-precise cuttings based on film thickness measuring in place or milling to the skill in using a kitchen knife in cookery, to solve
The above-mentioned problems of the prior art, makes that the true timing accuracy of cutter zero reference point is high, high-efficient, at low cost and Cutter wear
It is few.
In order to make the foregoing objectives, features and advantages of the present invention clearer and more comprehensible, with reference to the accompanying drawing and specific real
Applying mode, the present invention is described in further detail.
Referring to FIG. 1, wherein, 2 be vacuum chuck in Fig. 1, which can rotate around rotation axis, and 5 be milling cutter,
The cutter can be fed according to instruction and rotation, and 6 be ellipsometer, including the light source 7, the polarizer 8 and wave being located along the same line
Piece 9, and be at an angle of with the line of light source 7, the polarizer 8 and wave plate 9 on another straight line of setting analyzer 10, photodetection
Device 11.The thickness of transparent membrane 4 can be accurately measured using the ellipsometer 6.
Embodiment one
As shown in Figure 1, the present embodiment provides a kind of ultra-precise cuttings based on film thickness measuring in place or milling to the skill in using a kitchen knife in cookery, head
It first carries out preparation: workpiece 1 is adsorbed on the vacuum chuck 2 of machine tool chief axis, then 1 surface of workpiece is carried out with lathe tool 3
Smooth turning；(the easy film-forming material of such as PMMA, PP, PVC, PS, the PC, PET room temperature) colloid of transparent membrane 4 is coated later
In the work surface of workpiece 1, coating has certain thickness, has certain boundary intensity after reaction solidification, coating will not
It falls off from surface；
So far, preparation is completed, and starts to process, and 4 surface of transparent membrane need to carry out smooth processing after coating solidification, is utilized
Diamond cutter carries out smooth processing to 4 surface of transparent membrane, is then got on the bus/milling one with surface of the milling cutter 5 after smooth again
Planar annular, and the Z coordinate of 5 point of a knife of milling cutter at this time is set as datum mark Z1；Utilize 4 planar annular of ellipsometer measurement transparent membrane
Coating layer thickness, and record thickness T；
According to the planar annular coating layer thickness T for the transparent membrane 4 that measurement obtains, the datum mark of milling cutter 5 is set as Z0, and Z0
=Z1- T, the at this time zero reference point of the milling cutter 5 just plane tangent with workpiece 1.When working depth is the minutiae of D, only
Milling cutter 5 need to be fed D, high-precision geometric dimension micro-nano technology can be completed.Since the measurement accuracy of transparent membrane 4 can reach
0.1nm, therefore milling cutter 5 can be controlled in nanometer scale the datum error of knife, so can be neglected to the datum error of knife
Slightly.
Finally the workpiece 1 processed is placed in organic solvent and is dissolved, clean, dry after obtain surface with micro-structure battle array
The workpieces processing of column.
Specific examples are applied in the present invention, and principle and implementation of the present invention are described, above embodiments
Illustrate to be merely used to help understand method and its core concept of the invention；At the same time, for those skilled in the art, according to
According to thought of the invention, there will be changes in the specific implementation manner and application range.In conclusion the content of the present specification
It should not be construed as limiting the invention.
Claims (5)
1. a kind of ultra-precise cutting or milling based on film thickness measuring in place is to the skill in using a kitchen knife in cookery, it is characterised in that: include the following steps；
Step 110: vacuum chuck is autotomyed: the vacuum chuck on machine tool chief axis is smooth by vehicle/Milling Process；
Step 120: the smooth processing of workpiece；By absorption of workpieces on machine tool chief axis, smooth processing is carried out to workpiece surface；
Step 130: transparent membrane coating；Transparent membrane is coated on to the work surface of workpiece；
Step 140: the smooth processing of film；Smooth processing is carried out to film surface using vehicle/milling cutter, is then existed again with vehicle/milling cutter
Surface after smooth is got on the bus/one planar annular of milling, and will be set as datum mark Z1 by vehicle/milling cutter point of a knife Z coordinate at this time；
Step 150: film thickness detection；Using the planar annular coating layer thickness of film in-situ measurement equipment measurement film, and record thickness
Spend T；
Step 160: micro-nano technology；According to thickness T, vehicle/milling cutter datum mark is set as Z0, and Z0=Z1-T, works as working depth
For D minutiae when, only vehicle/milling cutter need to be fed D, geometric dimension micro-nano technology can be completed；
Step 170: film removal: the workpiece processed is placed in organic solvent and is dissolved, clean, dry after obtain surface tool
There is the workpieces processing of micro structure array.
2. the ultra-precise cutting or milling according to claim 1 based on film thickness measuring in place is to the skill in using a kitchen knife in cookery, it is characterised in that:
In-situ measurement equipment described in step 150 be ellipsometer, the ellipsometer include the light source being located along the same line, the polarizer and
Wave plate, and the analyzer of setting, photodetector are at an angle of with the line of the light source, the polarizer and wave plate.
3. the ultra-precise cutting or milling according to claim 2 based on film thickness measuring in place is to the skill in using a kitchen knife in cookery, it is characterised in that:
The measurement accuracy of the ellipsometer is 0.1nm.
4. the ultra-precise cutting or milling according to claim 3 based on film thickness measuring in place is to the skill in using a kitchen knife in cookery, it is characterised in that:
The film is that the easy film-forming material of PMMA, PP, PVC, PS, PC or PET room temperature is made.
5. the ultra-precise cutting or milling according to claim 4 based on film thickness measuring in place is to the skill in using a kitchen knife in cookery, it is characterised in that:
Vacuum chuck is installed, absorption of workpieces described in step 120 is on the vacuum chuck on the machine tool chief axis.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810163879.XA CN108381295B (en) | 2018-02-27 | 2018-02-27 | A kind of ultra-precise cutting or milling based on film thickness measuring in place is to the skill in using a kitchen knife in cookery |
Applications Claiming Priority (1)
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| CN201810163879.XA CN108381295B (en) | 2018-02-27 | 2018-02-27 | A kind of ultra-precise cutting or milling based on film thickness measuring in place is to the skill in using a kitchen knife in cookery |
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| CN108381295A CN108381295A (en) | 2018-08-10 |
| CN108381295B true CN108381295B (en) | 2019-05-21 |
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| CN110118544A (en) * | 2019-05-31 | 2019-08-13 | 北京理工大学 | A kind of form accuracy detection method based on film thickness detection |
| CN114770224B (en) * | 2022-05-25 | 2024-03-08 | 北京理工大学 | Ultra-precise machining tool mark in-situ detection method |
Citations (5)
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| DE20309760U1 (en) * | 2003-06-25 | 2004-11-11 | Koukal, Anton | Optoelectronic alignment controller for scanning geometrical lines and guiding a processing or machining tool or unit has an LED light source whose wavelength its optimized to match that of a detector |
| EP1566240A1 (en) * | 2004-02-18 | 2005-08-24 | Airbus UK Limited | Alignment Device |
| CN102091969A (en) * | 2010-12-17 | 2011-06-15 | 北京理工大学 | Method for setting machine tool |
| CN107081455A (en) * | 2017-06-23 | 2017-08-22 | 湖州师范学院 | Numerical control borer bore hole tool setting device and presetting cutter method |
| CN206780059U (en) * | 2017-05-05 | 2017-12-22 | 庆铃汽车（集团）有限公司 | A kind of boring head tool setting gauge |
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2018
- 2018-02-27 CN CN201810163879.XA patent/CN108381295B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE20309760U1 (en) * | 2003-06-25 | 2004-11-11 | Koukal, Anton | Optoelectronic alignment controller for scanning geometrical lines and guiding a processing or machining tool or unit has an LED light source whose wavelength its optimized to match that of a detector |
| EP1566240A1 (en) * | 2004-02-18 | 2005-08-24 | Airbus UK Limited | Alignment Device |
| CN102091969A (en) * | 2010-12-17 | 2011-06-15 | 北京理工大学 | Method for setting machine tool |
| CN206780059U (en) * | 2017-05-05 | 2017-12-22 | 庆铃汽车（集团）有限公司 | A kind of boring head tool setting gauge |
| CN107081455A (en) * | 2017-06-23 | 2017-08-22 | 湖州师范学院 | Numerical control borer bore hole tool setting device and presetting cutter method |
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Inventor after: Zhou Tianfeng Inventor after: Wang Xibin Inventor after: Ruan Benshuai Inventor after: Zhou Jia Inventor after: Tang Longlong Inventor after: Liang Zhiqiang Inventor after: Jiao Li Inventor after: Liu Zhibing Inventor after: Jie Lijing Inventor after: Yan Pei Inventor before: Zhou Tianfeng Inventor before: Wang Xibin Inventor before: Ruan Benshuai Inventor before: Zhou Jia Inventor before: Tang Longlong Inventor before: Liang Zhiqiang Inventor before: Jiao Li Inventor before: Liu Zhibing Inventor before: Xie Lijing Inventor before: Yan Pei |