CN108205290A - Workpiece leveling device based on laser displacement sensor - Google Patents
Workpiece leveling device based on laser displacement sensor Download PDFInfo
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- CN108205290A CN108205290A CN201810116771.5A CN201810116771A CN108205290A CN 108205290 A CN108205290 A CN 108205290A CN 201810116771 A CN201810116771 A CN 201810116771A CN 108205290 A CN108205290 A CN 108205290A
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- laser displacement
- sample
- displacement sensor
- feed mechanism
- rotary disk
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/402—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for positioning, e.g. centring a tool relative to a hole in the workpiece, additional detection means to correct position
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/401—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for measuring, e.g. calibration and initialisation, measuring workpiece for machining purposes
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/37—Measurements
- G05B2219/37404—Orientation of workpiece or tool, surface sensor
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/37—Measurements
- G05B2219/37457—On machine, on workpiece
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/45—Nc applications
- G05B2219/45136—Turning, lathe
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
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- Engineering & Computer Science (AREA)
- Human Computer Interaction (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Machine Tool Sensing Apparatuses (AREA)
Abstract
The invention discloses the Workpiece leveling device based on laser displacement sensor, including lathe bed, X to, Z-direction feed mechanism, pinboard, angle fine-adjustment mechanism, fixture, sample, tool, laser displacement sensor, rotary disk and motor；The X is installed in feed mechanism between lathe bed and Z-direction feed mechanism so that Z-direction feed mechanism can be along X to feeding, the Z-direction feed mechanism is installed in X between feed mechanism and pinboard so that pinboard can be fed along Z-direction, the angle fine-adjustment mechanism be installed between pinboard and fixture so that fixture can opposite Y-direction rotation, the fixture clamping connection sample；Rotary disk rotation is installed on lathe bed and motor drive connection rotary disk, the tool are installed on the rotary disk peripheral wall, which is installed in the revolution side surface.It has the following advantages that：Can guarantee entire test plane to knife precision, can guarantee the Workpiece leveling precision of entire test plane.
Description
Technical field
The present invention relates to a kind of Workpiece leveling device more particularly to a kind of Workpiece leveling dresses based on laser displacement sensor
It puts.
Background technology
In single abrasive grain scratching plane, single-point plane machining when being tested or being processed in the plane with point, Workpiece leveling
Precision tends to determine the accuracy of test and the precision of processing.The presetting cutter method being commonly used is mostly on tool and sample
A point to knife, and pass through other benchmark and ensure other points and the relative position of tool on sample plane indirectly.It is this
Presetting cutter method can not ensure the leveling precision of workpiece, in high precision measurement with that can only ensure that workpiece is attached to knife point in Ultra-precision Turning
The test of near field or cutting depth meet required precision, and the region of knife point farther out can not then be ensured from workpiece.
Invention content
The present invention provides the Workpiece leveling devices based on laser displacement sensor, and which overcome workpiece tune in background technology
Equal existing deficiency.
The present invention solves one of used technical solution of its technical problem：
Workpiece leveling device based on laser displacement sensor feeds machine including lathe bed (1), X to feed mechanism (2), Z-direction
Structure (3), angle fine-adjustment mechanism (6), fixture (7), sample (8), tool (9), laser displacement sensor (10), returns at pinboard (5)
Turntable (11) and motor (12)；The X be installed between lathe bed (1) and Z-direction feed mechanism (3) to feed mechanism (2) so that Z-direction into
To mechanism (3) can along X to feeding, the Z-direction feed mechanism (3) be installed in X between feed mechanism (2) and pinboard (5) so that
Pinboard (5) can be fed along Z-direction, which is installed between pinboard (5) and fixture (7) so that fixture (7)
Can opposite Y-direction rotation, fixture (7) clamping connection sample (8)；The rotary disk (11) rotation is installed on lathe bed (1) and motor
(12) drive connection rotary disk (11), the tool (9) are installed on rotary disk (11) peripheral wall, the laser displacement sensor (10)
It is installed on rotary disk (11) end face.
Dynamometer (4) is further included, which is installed between Z-direction feed mechanism (3) and pinboard (5).
Main shaft is further included, which connects rotary disk (11) by spindle drive, and rotary disk (11) axis is along Z-direction
It arranges and on motor (12).
Control system is further included, which connects X to feed mechanism (2), Z-direction feed mechanism (3), angle adjustment machine
Structure (6), laser displacement sensor (10) and motor (12).
The present invention solve its technical problem used technical solution second is that：
The Workpiece leveling method of the above-mentioned Workpiece leveling device based on laser displacement sensor, including：
Step (1) by sample (8) clamping on fixture (7), makes sample (8) tested by adjusting angle vernier device (6)
Surface is parallel with Z-direction；
Laser displacement sensor (10) is fixed on rotary disk (11) by step (2), and rotary disk is driven by motor (12)
(11) rotation makes laser displacement sensor (10) measurement direction relock rotary disk (11) towards sample (8) measured surface；
Step (3), Z-direction feed mechanism (3) drive sample (8) move to the measurement point position of laser displacement sensor (10)
It puts, measurement point is enable to beat in sample (8) measured surface top half；
Step (4) measures measured point to laser displacement sensor (10) on sample (8) by laser displacement sensor (10)
Distance L1, and record L1；Sample (8) is made to move up L3 distances by Z-direction feed mechanism (3)；It is sensed by laser displacement
Device (10) measures measured point on sample (8) to the distance L2 of laser displacement sensor (10), and records L2；
Step (5) calculates L1-L2, if result is more than 0, table is tested using angle vernier device (6) adjustment sample (8)
Face rotates clockwise；If result is less than 0, rotated counterclockwise using angle vernier device (6) adjustment sample (8) measured surface；
The value of ︱ L1-L2 ︱/L3 is calculated, repeats this step (5) until ︱ L1-L2 ︱/L3<0.5μm；Wherein：L1-L2 values are closer to 0, angle
Micromatic setting (6) adjusts the angle smaller；
Step (6) removes laser displacement sensor (10), and rotary disk (11) is driven to rotate by motor (12) makes tool
(9) vertical sample (8) measured surface, relocks rotary disk (11)；
Step (7), X are close to tool (9) to feed mechanism (2) driving sample (8).
The step (7) includes：
Fast feed, feed speed are (1-3) mm/s, until scratching of the top limit of tool (9) close to sample (8)
Surface；
Inching feed feeds (0.1-1.3) μm, until tool (9) is contacted with the scratching surface of sample (8) every time.
By dynamometer (4), whether powerful signal is judged whether the contact in the step (7), when powerful signal occurs
When be judged as to knife complete.
Compared with background technology, it has the following advantages that the technical program：
Laser displacement sensor measures in real time, while Z-direction feed mechanism drives sample movement, according on sample at a distance of L3
The magnitude relationship of distance L1, L2 of two sampled points and laser displacement sensor, adjusting the angle micromatic setting reduces L1-L2,
Aforesaid operations are repeated until L1-L2 is small to prescribed limit, then carry out workpiece and sample to knife, so as to ensure entirely to test plane
To knife precision, so as to ensure entirely to test the Workpiece leveling precision of plane.
Description of the drawings
The invention will be further described with reference to the accompanying drawings and detailed description.
Fig. 1 is the stereoscopic schematic diagram of the Workpiece leveling device of present embodiment；
Fig. 2 is the laser displacement sensor Workpiece leveling schematic diagram of present embodiment.
Specific embodiment
Workpiece leveling device based on laser displacement sensor, please refers to Fig. 1 and Fig. 2, including lathe bed 1, X to feed mechanism
2nd, Z-direction feed mechanism 3, dynamometer 4, pinboard 5, angle fine-adjustment mechanism 6, fixture 7, sample 8, tool 9, laser displacement sensor
10th, rotary disk 11, main shaft, motor 12 and control system.
The X be installed between lathe bed 1 and Z-direction feed mechanism 3 to feed mechanism 2 so that Z-direction feed mechanism 3 can along X into
It gives, which is installed in X between feed mechanism 2 and pinboard 5 so that pinboard 5 can be fed along Z-direction, the angle
Micro-adjusting mechanism 6 be installed between pinboard 5 and fixture 7 so that fixture 7 can opposite Y-direction rotation, 7 clamping connection of the fixture sample 8；It should
The rotation of rotary disk 11 is installed on lathe bed 1 and 12 drive connection rotary disk 11 of motor, the tool 9 are installed in 11 peripheral wall of rotary disk
On, which is installed on 11 end face of rotary disk.Wherein：The X is to feed mechanism and Z-direction feed mechanism
Feed accuracy is preferable over 0.1 μm, and repetitive positioning accuracy is preferable over 1 μm, preferred high accuracy linear motor；The X to feeding machine
The straightness error of structure and Z-direction feed mechanism is preferable over 1 μm/m, preferred high accuracy linear motor；The X is to feed mechanism and Z
Rigidity after feed mechanism assembling preferably meets the sample yielding amount under 200N stress and is less than 1 μm；The angle vernier device is most
Has higher resolution ratio well, resolution ratio is preferable over 0.1 °；The laser displacement sensor measurement accuracy is preferable over 0.01 μ
m；Angle vernier device preferably has lock function, locks the angle adjusted.
Sample 8 can be made to pass through angle in xyz move in plane to feed mechanism 2 and 3 co- controlling of Z-direction feed mechanism by X
Degree micromatic setting 6 can adjust 8 measured surface of sample and be rotated around y-axis, and the angle of 8 measured surface of sample is made to adapt to test needs.
The dynamometer 4 is installed between Z-direction feed mechanism 3 and pinboard 5；The motor 12 is connected by spindle drive and turned round
Disk 11,11 axis of rotary disk are arranged along Z-direction and on motors 12；The control system connect X to feed mechanism 2, Z-direction into
To mechanism 3, angle fine-adjustment mechanism 6, laser displacement sensor 10 and motor 12.The tool is fixed on rotary disk circumference by motor
Drive rotation；The laser displacement sensor is fixed in revolution side surface, so that the measured surface that measurement point beats in sample is formed
Measured point.
The Workpiece leveling method of the above-mentioned Workpiece leveling device based on laser displacement sensor, including：
Step 1, by 8 clamping of sample on fixture 7, make 8 measured surface of sample and Z-direction by adjusting angle vernier device 6
It is parallel；
Step 2, laser displacement sensor 10 is fixed on rotary disk 11, the rotation of rotary disk 11 is driven to make by motor 12
10 measurement direction of laser displacement sensor relocks rotary disk 11, which for example passes through electromechanical locks towards 8 measured surface of sample
Dead rotary disk；
Step 3, Z-direction feed mechanism 3 drives sample 8 to move to the measurement point position of laser displacement sensor 10, makes measurement
Point is beaten in 8 measured surface top half of sample；
Step 4, pass through the distance of measured point on the measurement sample 8 of laser displacement sensor 10 to laser displacement sensor 10
L1, and record L1；Sample 8 is made to move up L3 distances by Z-direction feed mechanism 3；It is measured and tried by laser displacement sensor 10
Measured point and records L2 to the distance L2 of laser displacement sensor 10 on sample 8；
Step 5, L1-L2 is calculated, if result is more than 0,8 measured surface up time of sample is adjusted using angle vernier device 6
Needle rotates；If result is less than 0,8 measured surface of sample is adjusted using angle vernier device 6 and is rotated counterclockwise；Calculate ︱ L1-
The value of L2 ︱/L3 repeats this step 5 until ︱ L1-L2 ︱/L3<0.5μm；Wherein：L1-L2 values are closer to 0, angle vernier device 6
It adjusts the angle smaller；
Step 6, laser displacement sensor 10 is removed, the rotation of rotary disk 11 is driven to make 9 vertical sample 8 of tool by motor 12
Measured surface relocks rotary disk 11；
Step 7, X drives sample 8 close to tool 9 to feed mechanism 2.
The step 7 includes：
Fast feed, feed speed 1-3mm/s, until the top limit of tool 9 is close to the scratching surface of sample 8；
Inching feed, 0.1-1.3 μm of feeding every time, until tool 9 is contacted with the scratching surface of sample 8, the contact
Whether by dynamometer 4, whether powerful signal is judged, be judged as when powerful signal occurs to knife complete.
The above, only present pre-ferred embodiments, therefore the range implemented of the present invention cannot be limited according to this, i.e., according to
The equivalent changes and modifications that the scope of the claims of the present invention and description are made all should still belong in the range of the present invention covers.
Claims (7)
1. the Workpiece leveling device based on laser displacement sensor, it is characterised in that：Including lathe bed (1), X to feed mechanism (2),
Z-direction feed mechanism (3), pinboard (5), angle fine-adjustment mechanism (6), fixture (7), sample (8), tool (9), laser displacement sensing
Device (10), rotary disk (11) and motor (12)；The X is installed in feed mechanism (2) between lathe bed (1) and Z-direction feed mechanism (3)
So that Z-direction feed mechanism (3) can be along X to feeding, which is installed in X to feed mechanism (2) and pinboard (5)
Between so that pinboard (5) can be fed along Z-direction, the angle fine-adjustment mechanism (6) be installed between pinboard (5) and fixture (7) with
Make fixture (7) can opposite Y-direction rotation, fixture (7) clamping connection sample (8)；The rotary disk (11) rotation is installed on lathe bed (1)
And motor (12) drive connection rotary disk (11), the tool (9) are installed on rotary disk (11) peripheral wall, laser displacement sensing
Device (10) is installed on rotary disk (11) end face.
2. the Workpiece leveling device according to claim 1 based on laser displacement sensor, it is characterised in that：Further include survey
Power instrument (4), the dynamometer (4) are installed between Z-direction feed mechanism (3) and pinboard (5).
3. the Workpiece leveling device according to claim 1 based on laser displacement sensor, it is characterised in that：Further include master
Axis, the motor (12) connect rotary disk (11) by spindle drive, which arranges along Z-direction and positioned at motor
(12) on.
4. the Workpiece leveling device according to claim 1 based on laser displacement sensor, it is characterised in that：Further include control
System processed, the control system connect X and are passed to feed mechanism (2), Z-direction feed mechanism (3), angle fine-adjustment mechanism (6), laser displacement
Sensor (10) and motor (12).
5. the Workpiece leveling method of the Workpiece leveling device according to claim 1 based on laser displacement sensor, special
Sign is：Including：
Step (1) by sample (8) clamping on fixture (7), makes sample (8) measured surface by adjusting angle vernier device (6)
It is parallel with Z-direction；
Laser displacement sensor (10) is fixed on rotary disk (11) by step (2), and rotary disk (11) is driven by motor (12)
Rotation makes laser displacement sensor (10) measurement direction relock rotary disk (11) towards sample (8) measured surface；
Step (3), Z-direction feed mechanism (3) drive sample (8) to move to the measurement point position of laser displacement sensor (10), make
Measurement point can be beaten in sample (8) measured surface top half；
Step (4), by laser displacement sensor (10) measure on sample (8) measured point to laser displacement sensor (10) away from
From L1, and record L1；Sample (8) is made to move up L3 distances by Z-direction feed mechanism (3)；Pass through laser displacement sensor
(10) measured point on sample (8) is measured to the distance L2 of laser displacement sensor (10), and records L2；
Step (5) calculates L1-L2, suitable using angle vernier device (6) adjustment sample (8) measured surface if result is more than 0
Hour hands rotate；If result is less than 0, rotated counterclockwise using angle vernier device (6) adjustment sample (8) measured surface；Calculate ︱
The value of L1-L2 ︱/L3 repeats this step (5) until ︱ L1-L2 ︱/L3<0.5μm；Wherein：L1-L2 values are closer to 0, angle adjustment
Device (6) adjusts the angle smaller；
Step (6) removes laser displacement sensor (10), and rotary disk (11) is driven to rotate by motor (12) makes tool (9) hang down
Straight sample (8) measured surface, relocks rotary disk (11)；
Step (7), X are close to tool (9) to feed mechanism (2) driving sample (8).
6. the Workpiece leveling method according to claim 5 based on laser displacement sensor, it is characterised in that：The step
(7) include：
Fast feed, feed speed are (1-3) mm/s, until scratching table of the top limit of tool (9) close to sample (8)
Face；
Inching feed feeds (0.1-1.3) μm, until tool (9) is contacted with the scratching surface of sample (8) every time.
7. the Workpiece leveling method according to claim 6 based on laser displacement sensor, it is characterised in that：The workpiece tune
Leveling device further includes dynamometer (4), which is installed between Z-direction feed mechanism (3) and pinboard (5)；The step
(7) by dynamometer (4), whether powerful signal is judged whether the contact in, is judged as when powerful signal occurs complete to knife
Into.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810116771.5A CN108205290B (en) | 2018-02-06 | 2018-02-06 | Workpiece leveling device based on laser displacement sensor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810116771.5A CN108205290B (en) | 2018-02-06 | 2018-02-06 | Workpiece leveling device based on laser displacement sensor |
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| CN108205290A true CN108205290A (en) | 2018-06-26 |
| CN108205290B CN108205290B (en) | 2023-05-26 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111257231A (en) * | 2020-02-28 | 2020-06-09 | 浙江大学 | Automatic leveling method for large-caliber planar optical element |
| CN111922765A (en) * | 2020-08-14 | 2020-11-13 | 上海交通大学 | Automatic tool setting system and method based on spectrum confocal displacement sensor |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111257231A (en) * | 2020-02-28 | 2020-06-09 | 浙江大学 | Automatic leveling method for large-caliber planar optical element |
| CN111922765A (en) * | 2020-08-14 | 2020-11-13 | 上海交通大学 | Automatic tool setting system and method based on spectrum confocal displacement sensor |
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| Publication number | Publication date |
|---|---|
| CN108205290B (en) | 2023-05-26 |
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